公开(公告)号：US20120281189A1

公开(公告)日：2012-11-08

申请号：US13136784

申请日：2011-08-10

Applicant: Boris Grek ,  Daniel Stearns ,  Natale M. Ceglio

Inventor： Boris Grek ,  Daniel Stearns ,  Natale M. Ceglio

IPC: G03B27/52 ,  F28D15/04

CPC classification number: G03F7/70891 ,  F28D15/0208 ,  F28D15/04 ,  F28D15/046 ,  G02B7/1815 ,  G03F7/70166 ,  G21K1/067 ,  H05G2/001

Abstract: Evaporate thermal management systems for and methods of grazing incidence collectors (GICs) for extreme ultraviolet (EUV) lithography include a GIC shell interfaced with a jacket to form a structure having a leading end and that defines a chamber. The chamber operably supports at least one wicking layer. A conduit connects the wicking layer to a condenser system that support cooling fluid in a reservoir. When heat is applied to the leading end, the cooling fluid is drawn into the chamber from the condenser unit via capillary action in the wicking layer and an optional gravity assist, while vapor is drawn in the opposite direction from the chamber to the condenser unit. Heat is removed from the condensed vapor at the condenser unit, thereby cooling the GIC mirror shell.

Abstract translation: 蒸发热管理系统和用于极紫外（EUV）光刻的掠入射收集器（GIC）的方法包括与外壳相接合的GIC壳，以形成具有前端并且限定腔室的结构。 腔室可操作地支撑至少一个芯吸层。 导管将芯吸层连接到支撑储存器中的冷却流体的冷凝器系统。 当向前端施加热量时，冷却流体通过芯吸层中的毛细管作用和可选的重力辅助从冷凝器单元吸入室中，同时蒸气沿着从室到冷凝器单元的相反方向被抽吸。 在冷凝器单元处从冷凝的蒸汽中除去热量，从而冷却GIC镜壳。

公开(公告)号：US08276866B2

公开(公告)日：2012-10-02

申请号：US12660955

申请日：2010-03-08

Applicant: Giorgio Pirovano ,  Riccardo Ghislanzoni ,  Jacques Kools

Inventor： Giorgio Pirovano ,  Riccardo Ghislanzoni ,  Jacques Kools

IPC: B23P11/00 ,  G03B27/54

CPC classification number: G02B7/182 ,  G03F7/70166 ,  G03F7/70825 ,  Y10T24/44017 ,  Y10T29/49895

Abstract: An adjustable clip for securing a grazing-incident collector (GIC) shell to a spider having spokes is disclosed. The clip includes a base adapted to be secured to a spider spoke and having an upper surface. The clip includes a fork member having two prongs each with end pads at respective prong ends, and having a first hinge portion at an end opposite the prong ends. A hinge leaf is secured to the base upper surface and has a second hinge portion that operably engages the first hinge portion, thereby forming a hinge that allows for rotatable adjustment of the fork member relative to the base. Movement of the GIC shell when performing optical alignment is accommodated by the clip self-adjusting by its end pads moving over the GIC shell outer surface. When GIC shell alignment is achieved, the end pads are secured to the GIC shell outer surface, thereby turning the clip into a rigid support member that secures the GIC shell in place relative to the spider.

Abstract translation: 公开了一种用于将掠入射收集器（GIC）壳固定到具有辐条的蜘蛛的可调夹。 夹具包括适于固定到蜘蛛轮辐并具有上表面的底座。 该夹子包括具有两个插脚的叉构件，每个插脚在相应的插脚端部具有端部衬垫，并且在与插脚端部相对的端部具有第一铰链部分。 铰链叶片固定到基部上表面并且具有可操作地接合第一铰链部分的第二铰链部分，从而形成允许叉构件相对于基座的可旋转调节的铰链。 执行光学对准时，GIC外壳的移动通过夹子自动调整而被其通过GIC外壳外表面移动的端垫来适应。 当实现GIC外壳对准时，端垫固定到GIC外壳外表面，从而将夹子转动成刚性支撑构件，其将GIC壳相对于蜘蛛固定在适当位置。

公开(公告)号：US08061032B2

公开(公告)日：2011-11-22

申请号：US10580397

申请日：2004-11-23

Applicant: Robert David Banham ,  Arnoldo Valenzuela

Inventor： Robert David Banham ,  Arnoldo Valenzuela

IPC: B21D51/16 ,  B23P17/00

CPC classification number: C25D1/08 ,  C25D1/003 ,  C25D1/02 ,  F23M5/08 ,  F23M2900/05003 ,  F23M2900/05004 ,  F23R3/005 ,  F28F3/12 ,  F28F7/02 ,  F28F13/06 ,  F28F13/08 ,  F28F2260/00 ,  G02B7/1815 ,  Y02T50/675 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/494 ,  Y10T29/4998

Abstract: A process for fabricating a metallic component is disclosed. The process includes performing multiple electroforming steps on an object to form metallic layers. The process includes performing between the electroforming steps masking and patterning steps using a non-conductive material. The resulting metallic component has either a single layer or multiple layers of cooling or heat transfer channels, which may be at right angles in adjacent layers. The non-conductive material can be removed during the process by a solvent or by melting. The object on which the metallic component is formed may be a flat or shaped mandrel from which the metallic component can be removed. The metallic component is particularly useful in forming optical components for use in extreme ultraviolet (EUV) systems and in cooling and heat transfer systems.

Abstract translation: 公开了一种用于制造金属部件的工艺。 该方法包括在物体上进行多个电铸步骤以形成金属层。 该方法包括在电铸步骤之间执行掩模和使用非导电材料的图案化步骤。 所得到的金属组分具有单层或多层冷却或传热通道，其可以在相邻层中成直角。 非导电材料可以在该过程中通过溶剂或通过熔化来除去。 形成有金属部件的物体可以是可以从中去除金属部件的平坦或形状的心轴。 金属组分在形成用于极紫外（EUV）系统和冷却和传热系统的光学部件中特别有用。

公开(公告)号：US20110216395A1

公开(公告)日：2011-09-08

申请号：US12660955

申请日：2010-03-08

Applicant: Giorgio Pirovano ,  Riccardo Ghislanzoni ,  Jacques Kools

Inventor： Giorgio Pirovano ,  Riccardo Ghislanzoni ,  Jacques Kools

IPC: G02B7/182 ,  B23P11/00 ,  A44B99/00

CPC classification number: G02B7/182 ,  G03F7/70166 ,  G03F7/70825 ,  Y10T24/44017 ,  Y10T29/49895

Abstract: An adjustable clip for securing a grazing-incident collector (GIC) shell to a spider having spokes is disclosed. The clip includes a base adapted to be secured to a spider spoke and having an upper surface. The clip includes a fork member having two prongs each with end pads at respective prong ends, and having a first hinge portion at an end opposite the prong ends. A hinge leaf is secured to the base upper surface and has a second hinge portion that operably engages the first hinge portion, thereby forming a hinge that allows for rotatable adjustment of the fork member relative to the base. Movement of the GIC shell when performing optical alignment is accommodated by the clip self-adjusting by its end pads moving over the GIC shell outer surface. When GIC shell alignment is achieved, the end pads are secured to the GIC shell outer surface, thereby turning the clip into a rigid support member that secures the GIC shell in place relative to the spider.

Abstract translation: 公开了一种用于将掠入射收集器（GIC）壳固定到具有辐条的蜘蛛的可调夹。 夹具包括适于固定到蜘蛛轮辐并具有上表面的基座。 该夹子包括具有两个插脚的叉构件，每个插脚在相应的插脚端部具有端部衬垫，并且在与插脚端部相对的端部具有第一铰链部分。 铰链叶片固定到基部上表面并且具有可操作地接合第一铰链部分的第二铰链部分，从而形成允许叉构件相对于基座的可旋转调节的铰链。 执行光学对准时，GIC外壳的移动通过夹子自动调整而被其通过GIC外壳外表面移动的端垫来适应。 当实现GIC外壳对准时，端垫固定到GIC外壳外表面，从而将夹子转动成刚性支撑构件，其将GIC壳相对于蜘蛛固定在适当位置。

公开(公告)号：US20110181860A1

公开(公告)日：2011-07-28

申请号：US12657650

申请日：2010-01-25

Applicant: John E. Hill ,  Robert J. Munns

Inventor： John E. Hill ,  Robert J. Munns

IPC: G03B27/72 ,  G02B5/08

CPC classification number: G21K1/067 ,  G02B7/1815 ,  G02B7/182 ,  G02B19/0019 ,  G02B19/0095 ,  G03F7/70166 ,  G03F7/70891 ,  G21K2201/064 ,  G21K2201/065 ,  G21K2201/067

Abstract: A cooled spider for grazing-incidence collectors includes an outer ring, an inner ring and spokes that mechanically and fluidly connect the inner and outer rings. Cooling channels in the outer and inner rings and in the spokes define a general cooling-fluid flow path through the spider. The general cooling-fluid flow path has input and output points located substantially 180° apart so that the flow path diverges at the input point into two branch flow paths that flow in opposite directions through the spider, and then converge at the output point. Input and output cooling fluid manifolds are fluidly connected to the outer ring at the input and output points and serve to flow cooling fluid over the cooling-fluid flow path.

Abstract translation: 用于放牧收集器的冷却的蜘蛛包括机械地和流体地连接内圈和外圈的外圈，内圈和轮辐。 外环和内环和轮辐中的冷却通道限定通过该蜘蛛的通用冷却液流动路径。 一般的冷却流体流动路径具有大致相距180°的输入和输出点，使得流动路径在输入点处分叉成两个分支流动路径，该分支流动路径沿相反方向流过蜘蛛，然后在输出点处会聚。 输入和输出冷却流体歧管在输入和输出点处流体地连接到外环，并用于使冷却流体流过冷却流体流动路径。

公开(公告)号：US10737964B2

公开(公告)日：2020-08-11

申请号：US15519122

申请日：2015-10-12

Applicant: MEDIA LARIO S.R.L.

Inventor： Robert David Banham ,  Giuseppe Valsecchi ,  Oberto Citterio

IPC: C03B23/035 ,  C03C27/04 ,  G02B5/10 ,  B29L11/00 ,  B29D11/00 ,  B29C53/04

Abstract: A process for forming an article having at least one precision surface is disclosed. The process includes providing a thin sheet in contact with a surface of a mandrel. The process then includes establishing a pressure differential between opposite sides of the thin sheet using a collapsible enclosure so that the thin sheet is drawn onto the mandrel surface, thereby causing the thin sheet to substantially conform to the shape of the mandrel surface. The shaped thin sheet is then secured to a support member to define the article. The article is then removed from the mandrel. The front surface of the thin sheet defines the precision surface of the article. A process for forming a dual-sided precision article is also disclosed, along with an adaptive optical system and method that employs the precision article.

公开(公告)号：US09007497B2

公开(公告)日：2015-04-14

申请号：US12806350

申请日：2010-08-11

Applicant: Iain A. Neil

Inventor： Iain A. Neil

IPC: H04N9/097 ,  G02B17/06 ,  H04N5/222 ,  H04N5/225

CPC classification number: G02B17/0636 ,  G02B17/0642 ,  H04N5/2259 ,  H04N9/097

Abstract: A three-mirror anastigmatic with at least one non-rotationally symmetric mirror is disclosed. The at least one non-rotationally symmetric mirror may be an electroformed mirror shell having a non-rotationally symmetric reflective surface formed by a correspondingly shaped mandrel.

Abstract translation: 公开了具有至少一个非旋转对称镜的三镜反射镜。 至少一个非旋转对称镜可以是具有由对应形状的心轴形成的非旋转对称反射表面的电铸镜壳。

公开(公告)号：US20140326904A1

公开(公告)日：2014-11-06

申请号：US14260306

申请日：2014-04-24

Applicant: Media Lario S.R.L.

Inventor： Natale M. Ceglio ,  Daniel Stearns ,  Richard Levesque

IPC: H05G2/00

CPC classification number: H05G2/005 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/006 ,  H05G2/008

Abstract: A Sn vapor EUV LLP source system for EUV lithography is disclosed. The system generates a Sn vapor column from a supply of Sn liquid. The Sn column has a Sn-atom density of

Abstract translation: 公开了一种用于EUV光刻的Sn蒸气EUV LLP源系统。 该系统从Sn液体供应产生Sn蒸气柱。 Sn柱的Sn原子密度<1019 atoms / cm3，以声速或接近声速行进。 该系统还具有一个Sn蒸汽冷凝器，其布置成接收Sn蒸气柱并冷凝Sn蒸气以形成再循环的Sn液体。 脉冲激光照射Sn蒸气柱的一部分。 每个脉冲产生电子密度<1019电子/ cm 3的低密度Sn等离子体，从而允许低密度Sn等离子体基本上各向同性地发射EUV辐射。

公开(公告)号：US08731139B2

公开(公告)日：2014-05-20

申请号：US13136784

申请日：2011-08-10

Applicant: Boris Grek ,  Daniel Stearns ,  Natale M. Ceglio

Inventor： Boris Grek ,  Daniel Stearns ,  Natale M. Ceglio

IPC: G02B7/195 ,  G21K1/06 ,  H01J35/16 ,  H05G1/02 ,  G02B5/08

CPC classification number: G03F7/70891 ,  F28D15/0208 ,  F28D15/04 ,  F28D15/046 ,  G02B7/1815 ,  G03F7/70166 ,  G21K1/067 ,  H05G2/001

Abstract: Evaporate thermal management systems for and methods of grazing incidence collectors (GICs) for extreme ultraviolet (EUV) lithography include a GIC shell interfaced with a jacket to form a structure having a leading end and that defines a chamber. The chamber operably supports at least one wicking layer. A conduit connects the wicking layer to a condenser system that support cooling fluid in a reservoir. When heat is applied to the leading end, the cooling fluid is drawn into the chamber from the condenser unit via capillary action in the wicking layer and an optional gravity assist, while vapor is drawn in the opposite direction from the chamber to the condenser unit. Heat is removed from the condensed vapor at the condenser unit, thereby cooling the GIC mirror shell.

Abstract translation: 蒸发热管理系统和用于极紫外（EUV）光刻的掠入射收集器（GIC）的方法包括与外壳相接合的GIC壳，以形成具有前端并且限定腔室的结构。 腔室可操作地支撑至少一个芯吸层。 导管将芯吸层连接到支撑储存器中的冷却流体的冷凝器系统。 当向前端施加热量时，冷却流体通过芯吸层中的毛细管作用和可选的重力辅助从冷凝器单元吸入室中，同时蒸气沿着从室到冷凝器单元的相反方向被抽吸。 在冷凝器单元处从冷凝的蒸汽中除去热量，从而冷却GIC镜壳。

公开(公告)号：US08344339B2

公开(公告)日：2013-01-01

申请号：US12807166

申请日：2010-08-30

Applicant: Richard A. Levesque ,  Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

Inventor： Richard A. Levesque ,  Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

IPC: H01J37/20

CPC classification number: G02B19/0095 ,  B82Y10/00 ,  G02B19/0028 ,  G02B19/0047 ,  G03F7/70033 ,  G03F7/70166 ,  G21K1/06 ,  G21K1/062 ,  G21K1/067 ,  H05G2/005 ,  H05G2/008

Abstract: A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an input end and an output end. The LPP is formed using an LPP target system having a light source portion and a target portion, wherein a pulsed laser beam from the light source portion irradiates a rotating Sn rod in the target portion to generate the EUV radiation. The GIC mirror is arranged relative to the LPP to receive the EUV radiation at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. A radiation collection enhancement device having at least one funnel element may be used to increase the amount of EUV radiation provided to the intermediate focus and/or directed to a downstream illuminator. An EUV lithography system that utilizes the SOCOMO is also disclosed.

Abstract translation: 用于产生发射EUV辐射的激光产生等离子体（LPP）的源极集电极模块（SOCOMO）以及相对于LPP布置并具有输入端和输出端的掠入射收集器（GIC）反射镜。 使用具有光源部分和目标部分的LPP靶系统形成LPP，其中来自光源部分的脉冲激光束照射目标部分中的旋转Sn棒以产生EUV辐射。 GIC反射镜相对于LPP布置以在其输入端接收EUV辐射，并将接收的EUV辐射聚焦在邻近输出端的中间焦点。 具有至少一个漏斗元件的辐射收集增强装置可以用于增加提供给中间焦点和/或被引导到下游照明器的EUV辐射的量。 还公开了利用SOCOMO的EUV光刻系统。