公开(公告)号：US07564568B2

公开(公告)日：2009-07-21

申请号：US11680968

申请日：2007-03-01

Applicant: Peter De Groot ,  Leslie L. Deck

Inventor： Peter De Groot ,  Leslie L. Deck

IPC: G01B11/02

CPC classification number: G01B9/02011 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02012 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0234 ,  G01J2009/0265

Abstract: An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.

Abstract translation: 公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。

公开(公告)号：US20080043224A1

公开(公告)日：2008-02-21

申请号：US11770582

申请日：2007-06-28

Applicant: Raymond Castonguay ,  Piotr Szwaykowski

Inventor： Raymond Castonguay ,  Piotr Szwaykowski

IPC: G01N21/00

CPC classification number: G01B9/02081 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Abstract translation: 一种光学测量装置，其组合包括偏振型干涉仪，该偏振型干涉仪包括偏振光束分离器，其中偏振光束被分成正交偏振的参考和测试光束，检测器阵列布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。

公开(公告)号：US20060007447A1

公开(公告)日：2006-01-12

申请号：US11216548

申请日：2005-08-30

Applicant: James Snyder ,  Stephen Kwiatkowski

Inventor： James Snyder ,  Stephen Kwiatkowski

IPC: G01B9/02

CPC classification number: H01S3/13 ,  G01J9/0246 ,  G01J2009/0234

Abstract: A method and system for controlling the wavelength of light emitted by a tunable laser. The system includes a wavelength tuner that provides information of a desired wavelength; a coupler for tapping a portion of the light from the tunable laser; and an apparatus for measuring the actual wavelength of the light. The apparatus takes the portion of the light as an input signal and splits the input signal into two beams that are directed through two paths of different optical lengths. Then, the two beams are interfered with each other in order to form a fringe pattern at an observation plane, where the fringe pattern is detected and analyzed to determine the wavelength of the light. A processor compares the difference between the desired and determined wavelengths, and sends a tuning signal to the tunable laser forming a feedback control of the tunable laser.

Abstract translation: 一种用于控制由可调激光器发射的光的波长的方法和系统。 该系统包括提供期望波长的信息的波长调谐器; 用于对来自可调激光器的一部分光进行点击的耦合器; 以及用于测量光的实际波长的装置。 该装置将光的一部分作为输入信号，并将输入信号分成两束通过不同光学长度的两条路径的光束。 然后，两个光束彼此干涉，以在观察平面上形成条纹图案，其中检测和分析条纹图案以确定光的波长。 处理器比较期望波长和确定波长之间的差异，并将调谐信号发送到可调激光器，形成可调激光器的反馈控制。

公开(公告)号：US4836681A

公开(公告)日：1989-06-06

申请号：US867026

申请日：1986-05-27

Applicant: John G. Van Saders ,  Andrew Tarasevich ,  Michael C. Reichenbach

Inventor： John G. Van Saders ,  Andrew Tarasevich ,  Michael C. Reichenbach

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0234

Abstract: Electro-optical apparatus measures the average relative phase of an incident wave fringe pattern. The subject fringe, e.g., an interferometric pattern, passes through three sections of an optical mask, one characterized by fixed transmissivity and the other two by quadrature-displaced spatial fringe patterns. The light passing through each section is separately collected and detected to average the respective incident wave/mask section interactions. The phase of the incident fringe pattern relative to the mask is then determined by arithmetically processing the detected signals.In accordance with one aspect of the present invention, the subject fringe pattern is time modulated and the quadrature-shifted mask signals A-C coupled to obviate the requirement for the third, fixed transmissivity mask section.

Abstract translation: 电光装置测量入射波纹图案的平均相对相位。 被摄体边缘（例如干涉图案）通过光学掩模的三个部分，其中一个特征在于固定的透射率，另外两个部分通过正交位移的空间条纹图案。 通过每个部分的光被单独收集和检测以平均相应的入射波/掩模部分相互作用。 然后通过对检测到的信号进行算术处理来确定入射条纹图案相对于掩模的相位。 根据本发明的一个方面，本发明的条纹图案是时间调制的，并且正交移位的掩模信号A-C耦合以消除对第三固定透射率掩模部分的要求。

公开(公告)号：US4624569A

公开(公告)日：1986-11-25

申请号：US514875

申请日：1983-07-18

Applicant: Osuk Y. Kwon

Inventor： Osuk Y. Kwon

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0234

Abstract: A real-time diffraction interferometer for analyzing an optical beam comprises converging means (13) for bringing the beam to a focus at focal point (14), and an apertured grating structure (20) positionable adjacent the focal point (14). The apertured grating structure (20) comprises a transparent substrate (10'), an obverse surface of which is coated with a translucent coating (11) except for a pinhole-sized spot (12) that is left uncoated so as to function as an aperture in the coating (11). A reverse surface of the substrate (10') has a lenticulate surface configuration, which functions as a diffraction grating. The beam incident upon the apertured grating structure (20) is separated into a major portion, which is transmitted with attenuated intensity through the translucent coating (11), and a minor portion, which is transmitted with undiminished intensity through the pinhole aperture (12). The major portion of the beam is diffracted into spatially separated diffraction components, and the minor portion of the beam is diffracted by the pinhole aperture (12) so as to acquire a spherical wavefront. Interference patterns produced by interference of the spherical wavefront with each of the wavefronts of the zeroth order and the positive and negative first-order diffraction components of the intensity-attenuated beam transmitted by the coating (11) are separately imaged on conventional solid-state photodetectors (21, 22 and 23).

Abstract translation: 用于分析光束的实时衍射干涉仪包括用于使光束在焦点（14）处聚焦的会聚装置（13）和可邻近焦点（14）定位的有孔光栅结构（20）。 有孔光栅结构（20）包括透明基板（10'），其正面具有半透明涂层（11），除了未被涂覆的针孔尺寸的光斑（12）以便发挥作用 涂层（11）中的孔径。 衬底（10'）的反面具有微透镜表面构造，其用作衍射光栅。 入射到有孔光栅结构（20）上的光束被分离成主要部分，其通过半透明涂层（11）以衰减的强度透射，并且小部分以未衰减的强度通过针孔（12）传播， 。 光束的主要部分衍射成空间分离的衍射分量，并且光束的次要部分被针孔（12）衍射，以获得球面波前。 通过球面波前与由涂层（11）传播的强度衰减光束的零阶的波前和正和负的一阶衍射分量产生的干涉图案分别成像在常规固态光电检测器 （21,22,23）。

公开(公告)号：US11971307B2

公开(公告)日：2024-04-30

申请号：US17915434

申请日：2020-12-11

Applicant: Beijing RSLaser Opto-Electronics Technology Co., Ltd.

Inventor： Guangyi Liu ,  Rui Jiang ,  Xiaoquan Han ,  Jiangshan Zhao ,  Pengfei Sha ,  Qingqing Yin ,  Hua Zhang

IPC: G01J9/02

CPC classification number: G01J9/0246 ,  G01J2009/0234 ,  G01J2009/0257

Abstract: According to the present disclosure, there is provided a device (2) and a method for measuring a wavelength for a laser device. The device (2) for measuring a wavelength for a laser device includes: a first optical path assembly and a second optical path assembly. The first optical path assembly and the second optical path assembly constitute a laser wavelength measurement optical path. The second optical path assembly includes: an FP etalon assembly (11) and an optical classifier (13). The homogenized laser beam passes through the FP etalon assembly (11) to generate an interference fringe. The optical classifier (13) is arranged after the FP etalon assembly (11) in the laser wavelength measurement optical path, and configured to deflect the laser beam passing through the FP etalon assembly (11).

公开(公告)号：US07796268B2

公开(公告)日：2010-09-14

申请号：US11972586

申请日：2008-01-10

Applicant: John Cabaniss ,  Tom Chaffee

Inventor： John Cabaniss ,  Tom Chaffee

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

Abstract: Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

Abstract translation: 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US07643157B2

公开(公告)日：2010-01-05

申请号：US12005882

申请日：2007-12-28

Applicant: Hideo Takizawa ,  Koji Miyazaki ,  Haruhiko Kusunose

Inventor： Hideo Takizawa ,  Koji Miyazaki ,  Haruhiko Kusunose

IPC: G01B9/02

CPC classification number: G03F1/84 ,  G01J9/0215 ,  G01J2009/0234 ,  G01N21/45 ,  G03F1/32

Abstract: A phase shift amount measurement apparatus able to further correctly measure a phase shift amount of a phase shifter, wherein a laterally offset interference image of a phase shift mask is formed by a shearing interferometer, the interference image is captured by a two-dimensional imaging device, an output signal output from each light receiving element of the two-dimensional imaging device is supplied to a signal processing device, the phase shift amount is calculated for each light receiving element, the light receiving area of the light receiving element is very small, therefore the phase shift amount of any light receiving element outputting a peculiar phase amount due to incidence of diffraction light or multi-reflection light is excluded and the phase shift amount is determined based on the phase shift amount found from output signals of the remaining light receiving elements.

Abstract translation: 一种相移量测量装置，其能够进一步正确地测量移相器的相移量，其中通过剪切干涉仪形成相移掩模的横向偏移干涉图像，所述干涉图像由二维成像装置 从二维成像装置的每个光接收元件输出的输出信号被提供给信号处理装置，针对每个光接收元件计算相移量，光接收元件的光接收面积非常小， 因此排除由于衍射光或多反射光的入射而输出特殊相位量的任何光接收元件的相移量，并且基于从剩余的光接收的输出信号中发现的相移量来确定相移量 元素。

公开(公告)号：US07580433B2

公开(公告)日：2009-08-25

申请号：US11742800

申请日：2007-05-01

Applicant: Tomiji Tanaka ,  Kageyasu Sako ,  Ryo Kasegawa ,  Shinji Yamada ,  Katsuhiro Agatsuma

Inventor： Tomiji Tanaka ,  Kageyasu Sako ,  Ryo Kasegawa ,  Shinji Yamada ,  Katsuhiro Agatsuma

IPC: H01S3/04

CPC classification number: G01J9/00 ,  G01J9/0246 ,  G01J2009/0234 ,  H01S5/0014 ,  H01S5/0071 ,  H01S5/0612 ,  H01S5/0654 ,  H01S5/141 ,  H01S5/143

Abstract: A laser system includes a laser diode that oscillates in a multi-mode and has characteristics in which its oscillation wavelength varies with temperature, a grating that receives a light beam emitted from the laser diode and returns a diffracted beam to the laser diode, a mechanism that changes the wavelength of the diffracted beam returned to the laser diode, a wavelength detector that detects the wavelength of an output beam which is the same as that of the diffracted beam returned to the laser diode, a temperature regulator that maintains the laser diode at a predetermined temperature, and a control unit that controls the mechanism so that the output beam having a predetermined wavelength is output and controls the temperature regulator so that the laser diode oscillates at the predetermined wavelength.

Abstract translation: 激光系统包括以多模振荡并具有其振荡波长随温度变化的特性的激光二极管，接收从激光二极管发射的光束并将衍射光束返回到激光二极管的光栅，机构 其改变了返回到激光二极管的衍射光束的波长，检测与返回到激光二极管的衍射光束相同的输出光束的波长的波长检测器，将激光二极管保持在 以及控制单元，其控制机构，使得具有预定波长的输出光束被输出并控制温度调节器，使得激光二极管以预定波长振荡。

公开(公告)号：US20070206201A1

公开(公告)日：2007-09-06

申请号：US11680968

申请日：2007-03-01

Applicant: Peter de Groot ,  Leslie Deck

Inventor： Peter de Groot ,  Leslie Deck

IPC: G01B11/02

CPC classification number: G01B9/02011 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/02012 ,  G01B9/02057 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0234 ,  G01J2009/0265

Abstract: An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.

Abstract translation: 公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。