公开(公告)号：US20170184455A1

公开(公告)日：2017-06-29

申请号：US14986560

申请日：2015-12-31

Applicant: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Inventor： Xiangzhao Wang ,  Feng Tang ,  Guoxian Zhang ,  Shifu Xu

IPC: G01J9/02

CPC classification number: G01M11/0271 ,  G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0226 ,  G01J2009/0265 ,  G03F7/706

Abstract: A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

公开(公告)号：US20150204728A1

公开(公告)日：2015-07-23

申请号：US14562092

申请日：2014-12-05

Applicant: Yang Liu ,  Randall E. Brand ,  Hoa V. Pham ,  Shikhar Fnu

Inventor： Yang Liu ,  Randall E. Brand ,  Hoa V. Pham ,  Shikhar Fnu

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0253 ,  G01J2009/0269 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/1475 ,  G01N2015/1402 ,  G01N2015/1479 ,  G02B21/14 ,  G02B21/365

Abstract: Systems, methods and other embodiments associated with spatial-domain Low-coherence Quantitative Phase Microscopy (SL-QPM) are described herein. SL-QPM can detect structural alterations within cell nuclei with nanoscale sensitivity (0.9 nm) (or nuclear nano-morphology) for “nano-pathological diagnosis” of cancer. SL-QPM uses original, unmodified cytology and histology specimens prepared with standard clinical protocols and stains. SL-QPM can easily integrate in existing clinical pathology laboratories. Results quantified the spatial distribution of optical path length or refractive index in individual nuclei with nanoscale sensitivity, which could be applied to studying nuclear nano-morphology as cancer progresses. The nuclear nano-morphology derived from SL-QPM offers significant diagnostic value in clinical care and subcellular mechanistic insights for basic and translational research. Techniques that provide for depth selective investigation of nuclear and other cellular features are disclosed.

Abstract translation: 本文描述了与空间域低相干定量相位显微镜（SL-QPM）相关联的系统，方法和其它实施例。 SL-QPM可以检测细胞核内的结构变化，具有纳米级灵敏度（0.9 nm）（或核纳米形态），用于癌症的“纳米病理诊断”。 SL-QPM使用原始，未修改的细胞学和组织学标本，用标准临床方案和污渍制备。 SL-QPM可以轻松整合到现有的临床病理实验室。 结果量化了具有纳米尺度敏感性的单个核中光程长度或折射率的空间分布，可用于研究核纳米形态作为癌症进展。 来自SL-QPM的核纳米形态为临床护理和亚细胞机械学基础和翻译研究提供了显着的诊断价值。 公开了提供对核和其他蜂窝特征的深度选择性研究的技术。

公开(公告)号：US20060285124A1

公开(公告)日：2006-12-21

申请号：US11383328

申请日：2006-05-15

Applicant: Henry Hill

Inventor： Henry Hill

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G03F7/706 ,  G01J2009/0223 ,  G03F7/70591 ,  G03F7/7085 ,  G03F7/70941

Abstract: Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.

Abstract translation: 用于原位和非原位测量由光学系统产生的光斑的复振幅和强度的模量的空间分布的装置和方法。 原位和非原位测量包括使用同时位于光学系统的物平面中的衍射位置阵列的干涉测量和非干涉测量，以增加与共轭图像平面中的测光特性相关的信号。 衍射点产生具有随机相对相位的衍射光束。 通常，干涉测量轮廓测量采用相移点衍射干涉测量法来产生地形干涉信号，并且非干涉测量基于与地形干扰信号不同的闪光相关信号。 地形干扰信号和火炬相关信号由检测器产生，作为电干扰信号或电眩光相关信号，或作为记录介质中相应的曝光引起的变化。

公开(公告)号：US07088458B1

公开(公告)日：2006-08-08

申请号：US10743107

申请日：2003-12-23

Applicant: Ulrich Wegmann

Inventor： Ulrich Wegmann

IPC: G01B9/02 ,  G01B9/00

CPC classification number: G02B27/60 ,  G01J9/02 ,  G01J9/0215 ,  G01J2009/0223

Abstract: Apparatus and method for measuring an optical imaging system, and detector unit. The measuring apparatus contains an arrangement for combining wavefront and distortion measurements. For this purpose, respectively associated interferometry and Moiré structures can be introduced on the object side and image side. The detector unit contains a fiber plate and/or a flexible image conductor with a curved entry surface or with at least two different entry surfaces, which are offset axially or inclined spatially with respect to each other, or with an axially movable entry surface. By way of suitable wavefront acquisition in various lateral positions of object and/or image structure, a topographic calibration of the object or image structure can be carried out. Furthermore, by way of a Moiré technique, the lateral displacement travel in phase-shifting steps for the wavefront acquisition and, by way of point diffraction interferometry, the axial relative position of object and image structure can be determined highly accurately. The apparatus and method are used, in particular, for measuring lenses in microlithography installations.

Abstract translation: 用于测量光学成像系统的装置和方法以及检测器单元。 测量装置包含用于组合波前和失真测量的装置。 为此，可以在物体侧和像侧引入相应的相关干涉测量和莫尔结构。 检测器单元包含具有弯曲入口表面或具有至少两个不同入口表面的纤维板和/或柔性图像导体，其相对于彼此轴向偏移或在空间上倾斜或具有可轴向移动的入口表面。 通过在物体和/或图像结构的各种横向位置中的合适的波前采集的方式，可以执行对象或图像结构的地形校准。 此外，通过莫尔技术，可以高精度地确定用于波前采集的相移步骤中的横向位移行程，并且通过点衍射干涉测量可以高精度地确定物体和图像结构的轴向相对位置。 该装置和方法特别用于微光刻设备中的测量透镜。

公开(公告)号：US07633630B2

公开(公告)日：2009-12-15

申请号：US11501644

申请日：2006-08-09

Applicant: Peter Y. M. Livingston

Inventor： Peter Y. M. Livingston

IPC: G01B9/02 ,  G01D5/36

CPC classification number: G01B9/02061 ,  G01B9/02038 ,  G01B9/02057 ,  G01J9/0215 ,  G01J2009/0223

Abstract: An apparatus in one example has: first and second Fourier transform lenses, the first Fourier transform lens receiving an incident plane wavefront and focusing the plane wavefront down to a focal point in a focal plane, and the second Fourier transform lens reimaging the focused down plane wavefront to an output plane wavefront; a bead located substantially at the focal point and that is illuminated by radiation that comes in from the first lens, the bead reradiating a spherical wave, which interferes with light that passes around the bead to produce a diffraction pattern; an array of controllable light transmissive elements that support the bead in the focal plane; and a null seeking servomechanism for assigning an electrical value of phase departure of the incident plane wavefront from a reference thereof, the null seeking servomechanism controlling the light transmissive elements to produce phase shifts in light that passes around the bead to thereby remove aberrations in the incident plane wavefront.

Abstract translation: 一个示例中的装置具有：第一和第二傅里叶变换透镜，第一傅里叶变换透镜接收入射平面波前，并将平面波前向下聚焦到焦平面中的焦点，并且第二傅里叶变换透镜重新成像聚焦的下平面 波前到输出平面波前; 基本上位于焦点处并且由来自第一透镜的辐射照射的珠粒，珠粒再辐射球面波，其干扰通过珠粒周围的光以产生衍射图案; 支持焦平面中的珠粒的可控光透射元件的阵列; 以及用于从其参考中分配入射平面波前相位偏移的电值的零寻找伺服机构，该无效寻找伺服机构控制光透射元件以产生通过珠的光的相移，从而去除事件中的像差 平面波前。

公开(公告)号：US07405830B2

公开(公告)日：2008-07-29

申请号：US11207327

申请日：2005-08-19

Applicant: Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

Inventor： Seung Woo Kim ,  Hagyong Kihm ,  Jung Jae Park

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02039 ,  G01B9/02076 ,  G01B9/02081 ,  G01B2290/70 ,  G01J2009/0203 ,  G01J2009/0223 ,  G01J2009/0226

Abstract: The present invention relates to vibration-insensitive point-diffraction interferometry. For the purpose of obtaining high immunity to vibration, a single-mode optical fiber is used to generate the reference wave, by means of point diffraction, directly from a measurement wave reflected from test objects. The capability of vibration desensitization is further strengthened by adding a spatial phase-shift device that enables four interferograms of different amounts of phase shift to be obtained simultaneously with no time delay between interferograms. The present invention may be effectively used in the design of measuring systems for in-line applications where measurements need to be performed in the presence of significant levels of vibration.

Abstract translation: 本发明涉及振动不敏感点衍射干涉测量。 为了获得高的抗振动性，使用单模光纤通过点衍射直接从测试对象反射的测量波产生参考波。 通过添加空间相移装置进一步加强了振动脱敏的能力，该空间相移装置能够在干涉图之间没有时间延迟的同时获得不同量的相移的四个干涉图。 本发明可以有效地用于设计用于需要在显着水平的振动的情况下进行测量的在线应用的测量系统。

公开(公告)号：US07304746B2

公开(公告)日：2007-12-04

申请号：US11501413

申请日：2006-08-09

Applicant: William J. Cottrell

Inventor： William J. Cottrell

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0261 ,  G01M11/005 ,  G01M11/331 ,  G01M11/333

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

Abstract translation: 公共路径，点衍射，相移干涉仪使用具有诸如针孔的衍射元件的半波片。 相干偏振光源同时从衍射元件产生参考光束，并且从通过半波片的光的剩余部分产生物体光束。 参考光束具有近似球面的波前。 两个光束中的每一个具有不同的偏振状态。 物体和参考光束然后通过偏振敏感相位调制器独立相位调制，偏振相位调制器根据施加的电压和取决于入射光的偏振状态移相量。 然后使用偏振器以相同的强度在相同的极化状态下提供物体和参考光束，因此它们可以干扰以产生具有近乎一致的对比度的干涉图。

公开(公告)号：US20060250620A1

公开(公告)日：2006-11-09

申请号：US11402218

申请日：2006-04-10

Applicant: Henry Hill

Inventor： Henry Hill

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01B9/02022 ,  G01B9/02024 ,  G01B9/02056 ,  G01B9/02057 ,  G01J2009/0223 ,  G03F7/706

Abstract: A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.

公开(公告)号：US5495334A

公开(公告)日：1996-02-27

申请号：US735740

申请日：1991-07-25

Applicant: Toshiyuki Nagoshi ,  Tsutomu Ichimura ,  Fumio Inaba

Inventor： Toshiyuki Nagoshi ,  Tsutomu Ichimura ,  Fumio Inaba

IPC: G01J3/453 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J3/4532 ,  G01J2009/0223

Abstract: An apparatus for effecting spatial Fourier transform spectroscopic detection of light from a surface luminescent object with high sensitivity by use of a quadrangular common path interferometer. The apparatus includes an improvement which consists of an additional imaging optical system which converges a light beam from the specimen so as to enter the beam splitter. The additional imaging optical system is disposed so that an image position is substantially coincident with the position of the second of three mirrors in the apparatus.

Abstract translation: 一种通过使用四边形公共路径干涉仪来实现来自具有高灵敏度的表面发光物体的光的空间傅里叶变换光谱检测的装置。 该装置包括一种改进，该附加成像光学系统会聚来自试样的光束以进入分束器。 附加成像光学系统被设置成使得图像位置与装置中的三个反射镜中的第二个反射镜的位置基本一致。

公开(公告)号：US20180143079A1

公开(公告)日：2018-05-24

申请号：US15821918

申请日：2017-11-24

Applicant: IMEC VZW

Inventor： Abdulkadir YURT ,  Ziduo Lin ,  Richard Stahl ,  Geert Vanmeerbeeck

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/0447 ,  G03H2223/12 ,  G03H2223/19

Abstract: According to a first aspect, there is provided a method of holographic wavefront sensing, the method including: receiving a light beam, which has a wavefront to be analyzed, on a transparent, flat substrate, which is provided with a lattice of opaque dots, wherein the substrate is arranged above an image sensor; detecting by the image sensor an interference pattern formed by diffracted light, being scattered by the opaque dots, and undiffracted light of the light beam received by the image sensor; processing the detected interference pattern to digitally reconstruct a representation of a displaced lattice of opaque dots, which would form the interference pattern on the image sensor upon receiving the light with a known wavefront; and comparing the representation of the displaced lattice to a known representation of the lattice of opaque dots on the substrate to determine a representation of the wavefront form of the received light beam.