Semiconductor Device for Detecting Fluorescent Particles

    公开(公告)号:US20170082544A1

    公开(公告)日:2017-03-23

    申请号:US15312116

    申请日:2015-05-22

    Applicant: IMEC VZW

    Abstract: The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.

    Particle detector and method for producing such a detector
    23.
    发明授权
    Particle detector and method for producing such a detector 有权
    粒子检测器及其生产方法

    公开(公告)号:US08867035B2

    公开(公告)日:2014-10-21

    申请号:US13811499

    申请日:2011-07-19

    Inventor: Sergio Nicoletti

    Abstract: The invention relates to a particle detector including a substrate (10, 30, 40) made of a semiconductor material, in which at least one through-cavity (11, 31, 41) is formed, defined by an input section (110) and an output section (111), wherein the input section thereof is to be connected to an airflow source, said substrate supporting: an optical means including at least one laser source (12, 32, 42), and at least one waveguide (13, 33, 43) connected to said at least one laser source and leading into the vicinity of the output section of said cavity; and photodetector means (14, 34, 44) located near the output section of said cavity and offset relative to the optical axis of the optical means.

    Abstract translation: 本发明涉及一种粒子检测器,其包括由半导体材料制成的衬底(10,30,40),其中形成有由输入部分(110)限定的至少一个通孔(11,31,41)和 输出部分(111),其中输入部分将连接到气流源,所述基板支撑:包括至少一个激光源(12,32,42)的光学装置和至少一个波导(13, 33,33),连接到所述至少一个激光源并通向所述空腔的输出部分附近; 以及位于所述空腔的输出部分附近并相对于光学装置的光轴偏移的光电检测器装置(14,34,44)。

    Sensor using ultra thin waveguides and optical fibers
    26.
    发明申请
    Sensor using ultra thin waveguides and optical fibers 失效
    传感器采用超薄波导和光纤

    公开(公告)号:US20070147732A1

    公开(公告)日:2007-06-28

    申请号:US11321158

    申请日:2005-12-28

    Applicant: Glen Sanders

    Inventor: Glen Sanders

    Abstract: Methods and apparatus are provided for detecting one or more contaminant particles in an environment with an optical sensor. The sensor includes at least one optical waveguide in a resonant arrangement and a light source positioned in an environment in which the presence of a contaminant particle is sought to be determined. The at least one optical waveguide is of a diameter that an evanescent tail of the lightwave extending there through extends into the environment and is reactive to at least one contaminant particle in the surrounding environment. A detector is positioned to receive light indicative of the sharpness of the optical resonance lineshape of the optical resonator at a pre-selected optical wavelength. The detected information determines the specific contaminant particle in the environment and the concentration of the contaminant particle in the environment.

    Abstract translation: 提供了用于利用光学传感器检测环境中的一种或多种污染物颗粒的方法和装置。 传感器包括至少一个谐振装置中的光波导和位于其中寻求确定污染物颗粒的存在的环境中的光源。 至少一个光波导具有直径延伸到其中的光波的渐逝尾部延伸到环境中并且对周围环境中的至少一种污染物质具有反应性的直径。 检测器被定位成以预选的光波长接收指示光学谐振器的光学谐振线形状的清晰度的光。 检测到的信息确定环境中的特定污染物颗粒和环境中污染物颗粒的浓度。

    Integrated optical device for measuring the refractive index of a fluid
    27.
    发明授权
    Integrated optical device for measuring the refractive index of a fluid 失效
    用于测量流体的折射率的集成光学装置

    公开(公告)号:US5073024A

    公开(公告)日:1991-12-17

    申请号:US426425

    申请日:1989-10-24

    CPC classification number: G02B6/12004 G01N21/45 G01J2009/023 G01N2201/0873

    Abstract: An integrated optical device for measuring the refractive index of a fluid comprises a light guide formed on a substrate and having a guiding layer for carrying light beams, inserted between a lower layer and an upper layer having refractive indices below that of the guiding layer. The device includes an interaction measurement zone of the light guide for coming into contact with the fluid, the upper layer at the measurement zone having a thickness less than the penetration distance of the evanescent wave of the guided light beam. Outside the interaction zone, that upper layer has a thinckness greater than the penetration distance of the same evanescent beam. The device also has an interferometric optical system at least partly formed in the light guide and having a reference optical circuit and a measurement optical circuit including the measurement zone, for measuring the phase shift introduced by an effective index change of the guided mode due to the fluid.

    Abstract translation: 用于测量流体的折射率的集成光学装置包括形成在基板上并具有用于承载光束的引导层的导光体,该引导层插入在折射率低于引导层的下层和上层之间。 该装置包括用于与流体接触的光导的相互作用测量区域,测量区域的上层具有小于引导光束的ev逝波的穿透距离的厚度。 在相互作用区域之外,该上层的厚度大于同一瞬逝光束的穿透距离。 该装置还具有至少部分地形成在光导中的干涉光学系统,并且具有参考光学电路和测量光学电路,该测量光学电路包括测量区域,用于测量由于引导模式的有效指数变化导致的相移 流体。

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