公开(公告)号：US20140197328A1

公开(公告)日：2014-07-17

申请号：US14218563

申请日：2014-03-18

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Josef Biberger ,  Ralph Pulwey ,  Andreas Adolf

IPC: H01J3/26 ,  H01J3/14

CPC classification number: H01J3/26 ,  H01J3/14 ,  H01J37/1477 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/303 ,  H01J2237/31749

Abstract: An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having at least one first deflection electrode 51a, 51b, 51c and plural second deflection electrodes 52a, 52b, 52c, wherein the voltage supply system is configured to supply different adjustable deflection voltages to the plural second deflection electrodes such that electric deflection fields between the plural second deflection electrodes and the opposite at least one first deflection electrode have a common orientation.The system has a high kinetic energy mode in which a distribution of the electric deflection field has a greater width, a low kinetic energy mode in which a distribution of the electric deflection field has a smaller width.

Abstract translation: 离子束系统包括电压供应系统7和至少一个具有至少一个第一偏转电极51a，51b，51c和多个第二偏转电极52a，52b，52c的光束偏转器39，其中电压供应系统被配置为提供不同的 可变偏转电压到多个第二偏转电极，使得多个第二偏转电极和相对的至少一个第一偏转电极之间的电偏转场具有共同的取向。 该系统具有高动能模式，其中电偏转场的分布具有较大的宽度，其中电偏转场的分布具有较小宽度的低动能模式。

公开(公告)号：US08688197B2

公开(公告)日：2014-04-01

申请号：US12994125

申请日：2009-05-21

Applicant: Vladimir Yegorovich Balakin

Inventor： Vladimir Yegorovich Balakin

IPC: A61B5/05

CPC classification number: A61N5/10 ,  A61N2005/1087 ,  G03B42/02 ,  G21K1/087 ,  G21K1/093 ,  G21K1/14 ,  H01J3/14 ,  H01J3/34 ,  H05H7/04 ,  H05H7/08 ,  H05H7/10 ,  H05H13/04

Abstract: The invention comprises a patient positioning and/or repositioning system, such as a laying, semi-vertical, or seated patient positioning, alignment, and/or control method and apparatus used in conjunction with multi-axis charged particle radiation therapy. Patient positioning constraints optionally include one or more of: a seat support, a back support, a head support, an arm support, a knee support, and a foot support. One or more of the positioning constraints are preferably movable and/or under computer control for rapid positioning, repositioning, and/or immobilization of the patient. The system optionally uses an X-ray beam that lies in substantially the same path as a proton beam path of a particle beam cancer therapy system. The generated image is usable for: fine tuning body alignment relative to the proton beam path, to control the charged particle beam path to accurately and precisely target the tumor, and/or in system verification and validation.

Abstract translation: 本发明包括与多轴带电粒子放射治疗结合使用的患者定位和/或重新定位系统，例如铺设，半垂直或就座的患者定位，对准和/或控制方法和装置。 患者定位限制可选地包括以下中的一个或多个：座椅支撑件，后支撑件，头部支撑件，臂支撑件，膝盖支撑件和脚支撑件。 一个或多个定位限制优选地可移动和/或在计算机控制下进行，用于快速定位，重新定位和/或固定患者。 系统可选地使用位于与粒子束癌治疗系统的质子束路径基本相同的路径中的X射线束。 生成的图像可用于：相对于质子束路径精细调整身体对准，以控制带电粒子束路径以准确且精确地靶向肿瘤，和/或在系统验证和验证中。

公开(公告)号：US08642949B2

公开(公告)日：2014-02-04

申请号：US13413568

申请日：2012-03-06

Applicant: Alexander A. Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

Inventor： Alexander A. Makarov ,  Reinhold Pesch ,  Robert Malek ,  Viacheslav Kozlovskiy

IPC: H01J37/301 ,  H01J49/04 ,  H01J49/24 ,  H01J3/18

CPC classification number: H01J49/062 ,  H01J3/14

Abstract: An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening towards a relatively high pressure chamber 40 and an outlet 70 opening towards a relatively low pressure chamber. The conduit 60 also has at least one side wall surrounding an ion transfer channel 115. The side wall includes a plurality of apertures 140 formed in the longitudinal direction of the side wall so as to permit a flow of gas from within the ion transfer channel 115 to a lower pressure region outside of the side wall of the conduit 60.

Abstract translation: 用于在质谱仪的较高和较低压力区域之间输送离子的离子传递装置包括离子传递管道60.导管60具有朝向较高压力室40的入口开口和朝向较低压力室开口的出口70。 导管60还具有围绕离子传递通道115的至少一个侧壁。侧壁包括在侧壁的纵向方向上形成的多个孔140，以允许来自离子传递通道115内的气体流 到导管60的侧壁外侧的较低压力区域。

公开(公告)号：US20130075623A1

公开(公告)日：2013-03-28

申请号：US13240951

申请日：2011-09-22

Applicant: Nai-Han CHENG ,  Chin-Hsiang LIN ,  Chi-Ming YANG ,  Chun-Lin CHANG ,  Chih-Hong HWANG

Inventor： Nai-Han CHENG ,  Chin-Hsiang LIN ,  Chi-Ming YANG ,  Chun-Lin CHANG ,  Chih-Hong HWANG

IPC: H01J3/14 ,  G21K5/10

CPC classification number: H01J37/3171 ,  G21K5/00 ,  H01J3/14 ,  H01J37/05 ,  H01J37/147

Abstract: An multi-ion beam implantation apparatus and method are disclosed. An exemplary apparatus includes an ion beam source that emits at least two ion beams; an ion beam analyzer; and a multi-ion beam angle incidence control system. The ion beam analyzer and the multi-ion beam angle incidence control system are configured to direct the emitted at least two ion beams to a wafer.

Abstract translation: 公开了一种多离子束注入装置和方法。 示例性装置包括发射至少两个离子束的离子束源; 离子束分析仪; 和多离子束角度入射控制系统。 离子束分析仪和多离子束角入射控制系统被配置为将发射的至少两个离子束引导到晶片。

公开(公告)号：US20120312971A1

公开(公告)日：2012-12-13

申请号：US13590739

申请日：2012-08-21

Applicant: James R. Kesler ,  Douglas M. Trout ,  Gary W. Scheer

Inventor： James R. Kesler ,  Douglas M. Trout ,  Gary W. Scheer

IPC: H01J3/14

CPC classification number: H02H1/0023 ,  H01J3/14

Abstract: An electro-optical (EO) radiation collector for collecting and/or transmitting EO radiation (which may include EO radiation in the visible wavelengths) for transmission to an EO sensor. The EO radiation collector may be used with an arc flash detection device or other protective system, such as an intelligent electronic device (IED). The arc flash detection device may detect an arc flash event based upon EO radiation collected by and/or transmitted from the EO radiation collector. The EO radiation collector may receive an EO conductor cable, an end of which may be configured to receive EO radiation. A portion of the EO radiation received by the EO radiation collector may be transmitted into the EO conductor cable and transmitted to the arc flash detection device. The EO radiation collector may be adapted to receive a second EO conductor cable, which may be used to provide redundant EO transmission and/or self-test capabilities.

Abstract translation: 用于收集和/或传输EO辐射（其可以包括可见波长中的EO辐射）的电光（EO）辐射收集器，用于传输到EO传感器。 EO辐射收集器可以与电弧闪光检测装置或诸如智能电子装置（IED）的其它保护系统一起使用。 电弧闪光检测装置可以基于由EO辐射收集器收集的和/或从其发射的EO辐射来检测电弧闪光事件。 EO辐射收集器可以接收EO导体电缆，其端部可被配置为接收EO辐射。 由EO辐射收集器接收的EO辐射的一部分可以传输到EO导体电缆中并传输到电弧闪光检测装置。 EO辐射收集器可以适于接收可用于提供冗余EO传输和/或自检能力的第二EO导体电缆。

公开(公告)号：US20120256098A1

公开(公告)日：2012-10-11

申请号：US13251174

申请日：2011-09-30

Applicant: Josef Biberger ,  Ralph Pulwey ,  Andreas Adolf

Inventor： Josef Biberger ,  Ralph Pulwey ,  Andreas Adolf

IPC: H01J3/14

CPC classification number: H01J3/26 ,  H01J3/14 ,  H01J37/1477 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/303 ,  H01J2237/31749

Abstract: An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having at least one first deflection electrode 51a, 51b, 51c and plural second deflection electrodes 52a, 52b, 52c, wherein the voltage supply system is configured to supply different adjustable deflection voltages to the plural second deflection electrodes such that electric deflection fields between the plural second deflection electrodes and the opposite at least one first deflection electrode have a common orientation.The system has a high kinetic energy mode in which a distribution of the electric deflection field has a greater width, a low kinetic energy mode in which a distribution of the electric deflection field has a smaller width.

Abstract translation: 离子束系统包括电压供应系统7和至少一个具有至少一个第一偏转电极51a，51b，51c和多个第二偏转电极52a，52b，52c的光束偏转器39，其中电压供应系统被配置为提供不同的 可变偏转电压到多个第二偏转电极，使得多个第二偏转电极和相对的至少一个第一偏转电极之间的电偏转场具有共同的取向。 该系统具有高动能模式，其中电偏转场的分布具有较大的宽度，其中电偏转场的分布具有较小宽度的低动能模式。

公开(公告)号：US20120248325A1

公开(公告)日：2012-10-04

申请号：US13481923

申请日：2012-05-28

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: G21K5/08 ,  A61B6/04 ,  A61N5/00

CPC classification number: H05H7/10 ,  A61N5/1048 ,  A61N5/1067 ,  A61N2005/1087 ,  H01J3/04 ,  H01J3/14 ,  H05H13/04

Abstract: The invention comprises a patient positioning method and apparatus used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The patient positioning system is used to translate the patient and/or rotate the patient into a zone where the proton beam can scan the tumor using a targeting system. The patient positioning system is optionally used in conjunction with systems used to constrain movement of the patient, such as semi-vertical, sitting, or laying positioning systems.

Abstract translation: 本发明包括与多轴带电粒子或癌肿瘤的质子束放射治疗结合使用的患者定位方法和装置。 患者定位系统用于翻译患者和/或将患者旋转到质子束可以使用靶向系统扫描肿瘤的区域。 患者定位系统可选地与用于限制患者的运动的系统结合使用，例如半垂直，坐着或铺设定位系统。

公开(公告)号：US06987361B1

公开(公告)日：2006-01-17

申请号：US10887142

申请日：2004-07-08

Applicant: John W. Lewellen ,  John Noonan

Inventor： John W. Lewellen ,  John Noonan

IPC: H01J25/00

CPC classification number: H01J3/14 ,  H01J3/021 ,  H01J23/06

Abstract: A novel method of gating electron emission from field-emitter cathodes for radio frequency (RF) electrode guns and a novel cathode that provides a focused electron beam without the need for magnetic fields or a curved cathode surface are provided. The phase and strength of a predefined harmonic field, such as the 3rd harmonic field, are adjusted relative to a fundamental field to cause a field emission cathode to emit electrons at predefined times for the generation of high-brightness electron beams. The emission time is gated responsive to the combined harmonic and fundamental fields and the response of the FE cathode to the combined fields. A planar focusing cathode includes a selected dielectric material, such as a ceramic material, to provide an electron beam emission surface. Metal surfaces are provided both radially around and behind the dielectric material to shape the electric fields that accelerate and guide the beam from the cathode surface.

公开(公告)号：US20050017193A1

公开(公告)日：2005-01-27

申请号：US10623754

申请日：2003-07-21

Applicant: Gerald Jackson

Inventor： Gerald Jackson

IPC: G01Q60/00 ,  G21K1/093 ,  H01J3/14 ,  H05H7/12 ,  H01J3/12

CPC classification number: H05H7/12 ,  G21K1/093 ,  H01J3/14

Abstract: A method for slowing and controlling a beam of charged particles includes the steps of superimposing at least one magnetic field on a mass and passing the beam through the mass and at least one magnetic field such that the beam and the mass slows but does not stop the particles. An apparatus for slowing and controlling a beam of charged particles includes a bending magnetic field superimposed on a focusing magnetic field within a mass.

Abstract translation: 一种用于减慢和控制带电粒子束的方法包括以下步骤：在质量上叠加至少一个磁场并使光束通过物质和至少一个磁场，使得光束和质量减慢但不会停止 粒子。 用于减慢和控制带电粒子束的装置包括叠加在质量块内的聚焦磁场上的弯曲磁场。

公开(公告)号：US20170076906A1

公开(公告)日：2017-03-16

申请号：US15122620

申请日：2014-12-19

Applicant: Intel Corporation

Inventor： Yan A. BORODOVSKY ,  Donald W. NELSON ,  Mark C. PHILLIPS

IPC: H01J37/04 ,  H01J37/317 ,  H01J37/20 ,  H01L21/027

CPC classification number: H01J37/3177 ,  H01J3/14 ,  H01J37/045 ,  H01J37/3026 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/303 ,  H01J2237/30422 ,  H01J2237/30438 ,  H01J2237/31762 ,  H01J2237/31764 ,  H01L21/0277 ,  H01L21/31144

Abstract: Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a blanker aperture array (BAA) for an e-beam tool includes a first column of openings along a first direction and having a pitch. The BAA also includes a second column of openings along the first direction and staggered from the first column of openings. The second column of openings has the pitch. A scan direction of the BAA is along a second direction, orthogonal to the first direction.

Abstract translation: 描述适用于涉及补充电子束光刻（CEBL）的光刻设备和方法。 在一个示例中，用于电子束工具的消隐器孔径阵列（BAA）包括沿着第一方向的第一列开口并具有间距。 BAA还包括沿着第一方向的第二列开口并与第一列开口交错。 第二列开口具有间距。 BAA的扫描方向沿与第一方向垂直的第二方向。