Optical Measurement Instrument, Server Device, and Optical Measurement Method

    公开(公告)号:US20220317023A1

    公开(公告)日:2022-10-06

    申请号:US17596051

    申请日:2020-03-19

    Applicant: Hitachi, Ltd.

    Abstract: An arithmetic expression used for estimating a target item of a specimen is more easily incorporated into an optical measurement system. An optical measurement instrument includes an optical analysis unit configured to perform an optical analysis on a specimen and measure an intensity of light as a result of the optical analysis, and an arithmetic processing unit configured to download an arithmetic expression from a server device via a network, and perform a quantitative analysis on a target substance contained in the specimen by substituting the result of the optical analysis by the optical analysis unit into the arithmetic expression.

    Optical transducer system having light emitting elements and light detecting elements both regulable in output characteristics
    23.
    发明授权
    Optical transducer system having light emitting elements and light detecting elements both regulable in output characteristics 有权
    具有发光元件和光检测元件的光学换能器系统均可调节输出特性

    公开(公告)号:US07161137B2

    公开(公告)日:2007-01-09

    申请号:US11027944

    申请日:2005-01-04

    CPC classification number: G10H1/344

    Abstract: Keys, which are incorporated in an automatic player piano, are monitored with an optical transducer system. The optical transducer system includes sensor heads provided on both sides of the key trajectories, LEDs connected to predetermined sensor heads through optical fibers, LDDs connected to the other sensor heads through optical fibers and a controlling unit. A luminescence controller is connected to the LEDs for optimizing the luminescence, and bias controllers are respectively connected to the LDDs. The luminescence controller and bias controllers optimize the luminescence of emitted light and the bias level of electric signals so that the optical transducer system is free from the individuality of component parts and the deterioration.

    Abstract translation: 使用光学换能器系统监视并入自动演奏器钢琴的琴键。 光学传感器系统包括设置在键轨迹两侧的传感器头,通过光纤连接到预定传感器头的LED,通过光纤连接到其它传感器头的LDD和控制单元。 发光控制器连接到LED以优化发光,并且偏置控制器分别连接到LDD。 发光控制器和偏置控制器优化发射光的发光和电信号的偏置电平,使得光学传感器系统不受组件的个性化和劣化。

    Method and system for spatial filtering of an extended radiation source
with chromatic aberration of imaging optics in single-element detector
measurement for monitoring of the extended radiation source
    24.
    发明授权
    Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source 失效
    用于监测扩展辐射源的单元件检测器测量中的成像光学器件的色差的扩展辐射源的空间滤波方法和系统

    公开(公告)号:US5875026A

    公开(公告)日:1999-02-23

    申请号:US763752

    申请日:1996-12-11

    CPC classification number: G01J1/42 G01J1/06

    Abstract: A method and system is disclosed in which the local variation of an extended radiation source is monitored with single-element detector. The chromatic aberration of the imaging optics induces the different transmittance curves for different wavelengths, and the different shape in the transmittance curve is used as a spatial filter which is multiplied to the chromatic intensity profile of the extended radiation source to detect the local variation in the intensity profile of the extended radiation source. The signal processing of the chromatic signals is implemented to detect the size variation and the environmental effects on the extended radiation source. A fiber is also used for remote operation.

    Abstract translation: 公开了一种方法和系统,其中利用单元件检测器监测扩展辐射源的局部变化。 成像光学器件的色差引起不同波长的不同透射率曲线,并且将透射率曲线中的不同形状用作空间滤波器,该空间滤波器与扩展辐射源的色度分布相乘以检测扩展辐射源中的局部变化 扩展辐射源的强度分布。 实施彩色信号的信号处理以检测尺寸变化和对扩展辐射源的环境影响。 光纤也用于远程操作。

    Semiconductor device manufacturing apparatus
    25.
    发明授权
    Semiconductor device manufacturing apparatus 失效
    半导体装置制造装置

    公开(公告)号:US5275629A

    公开(公告)日:1994-01-04

    申请号:US762355

    申请日:1991-09-19

    CPC classification number: H01L21/67115 C23C16/481 Y10T29/41

    Abstract: A semiconductor device manufacturing apparatus has a first space and a second space in a process chamber in which a semiconductor wafer is accommodated, the first and second spaces being separated by the semiconductor wafer. A process gas port opens into the first space adjacent to the obverse surface of the semiconductor wafer, and an infrared light transmission window is formed in a wall of the chamber at the second space facing the reverse surface of the semiconductor wafer. No layers are deposited on the reverse surface of the semiconductor wafer and the infrared light transmission window so that the emissivity at the reverse surface of the semiconductor wafer is not changed during layer deposition. The temperature during processing can therefore be monitored accurately with a pyrometer, and a reduction in the transmissivity of the window is prevented.

    Abstract translation: 半导体器件制造装置在其中容纳有半导体晶片的处理室中具有第一空间和第二空间,第一和第二空间被半导体晶片隔开。 处理气体通道向与半导体晶片的正面相邻的第一空间开口,并且在面向半导体晶片的背面的第二空间处,在室的壁上形成红外光透射窗。 在半导体晶片和红外光透射窗的反面上没有层沉积,使得在层沉积期间半导体晶片的反面的发射率不变。 因此,可以用高温计精确地监测加工过程中的温度,并且防止窗口的透射率的降低。

    Thermal energy proximity detector
    26.
    发明授权
    Thermal energy proximity detector 失效
    热能接近检测器

    公开(公告)号:US4691105A

    公开(公告)日:1987-09-01

    申请号:US740798

    申请日:1985-06-03

    CPC classification number: F42C13/02 Y10S250/01

    Abstract: A proximity sensor comprising a thermal detector responding to the rate of change of a thermal input and connected to circuitry for performing a control function when the detector output becomes zero, which occurs when a target being approached by the detector fills the field of view of the detector.

    Abstract translation: 一种接近传感器,其包括响应于热输入的变化率并且连接到电路的热检测器,所述热检测器在检测器输出变为零时执行控制功能,当检测器接近目标时,该检测器填充了视场 探测器。

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