公开(公告)号：US10338362B1

公开(公告)日：2019-07-02

申请号：US15998118

申请日：2018-07-03

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer ,  Duane E. Meyer

IPC: G01J4/00 ,  G02B17/00 ,  G01N21/21 ,  G02B27/14 ,  G02B27/10 ,  G02B27/12

Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.

公开(公告)号：US10073120B1

公开(公告)日：2018-09-11

申请号：US15732252

申请日：2017-10-13

Applicant: J.A. WOOLLAM CO., INC. ,  BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA

Inventor： Tino Hofmann ,  Mathias M. Schubert ,  Stefan Schoeche ,  Philipp Kuehne ,  Craig M. Herzinger ,  John A. Woollam ,  Gregory K. Pribil ,  Thomas E. Tiwald ,  Sean R. Knight

IPC: G01R19/08 ,  G06F17/12 ,  G01N7/00 ,  G01N21/17 ,  G01N21/21

CPC classification number: G01R19/08 ,  G01N7/00 ,  G01N21/17 ,  G01N21/211 ,  G01N2021/212 ,  G06F17/12

Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

公开(公告)号：US09933357B1

公开(公告)日：2018-04-03

申请号：US15530584

申请日：2017-02-03

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Ping He ,  Gregory K. Pribil ,  Martin M. Liphardt

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01J3/0286 ,  G01J4/04 ,  G01N2201/0227 ,  G01N2201/023 ,  G01N2201/084

Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.

公开(公告)号：US09546943B1

公开(公告)日：2017-01-17

申请号：US14999015

申请日：2016-03-18

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Jeremy A. Vanderslice ,  Christopher A. Goeden ,  Martin M. Liphardt

IPC: G01N15/00 ,  G01N15/08 ,  G01N21/21

CPC classification number: G01N15/0826 ,  G01N15/088 ,  G01N21/211 ,  G01N2015/0846

Abstract: A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.

Abstract translation: 涉及多孔有效衬底表面的光学性能变化的系统和方法，其与例如有效表面深度和折射率，孔径，孔体积和在大气压下的孔径分布有关。

公开(公告)号：US20160274032A1

公开(公告)日：2016-09-22

申请号：US14999365

申请日：2016-04-28

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Thomas E. Tiwald ,  Jeremy A. Van Derslice

IPC: G01N21/84 ,  G01M11/00 ,  G02B5/04 ,  G02B5/06 ,  G02B5/30 ,  G02B1/11

CPC classification number: G01N21/8422 ,  G01M11/00 ,  G01N21/552 ,  G02B1/11 ,  G02B5/04 ,  G02B5/06 ,  G02B5/3083

Abstract: Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.

Abstract translation: 用于确定具有增强的对吸收膜的两个界面反射的“p”极化电磁辐射的灵敏度的薄膜的光学功能的方法。

公开(公告)号：US20140284484A1

公开(公告)日：2014-09-25

申请号：US14120194

申请日：2014-05-05

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Craig M. Herzinger

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/211 ,  G01N21/3581 ,  G01N2021/3595

Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

公开(公告)号：US08749785B2

公开(公告)日：2014-06-10

申请号：US13694658

申请日：2012-12-26

Applicant: J.A. Woollam Co, Inc.

Inventor： Martin M. Liphardt

IPC: G01J4/00 ,  G01J3/02 ,  G02B27/58

CPC classification number: G01J4/00 ,  G01J3/0208 ,  G01J3/0229 ,  G02B3/00 ,  G02B5/005 ,  G02B27/46 ,  G02B27/58

Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.

Abstract translation: 聚焦元件和滤光元件的组合，其自然地调节作为波长的函数的通过聚焦元件的电磁辐射束的横截面积，可选地作为椭偏仪或偏振计系统的元件。