Optical unit, exposure unit and optical devices

    公开(公告)号:US07050247B2

    公开(公告)日:2006-05-23

    申请号:US10281182

    申请日:2002-10-28

    Applicant: Setsuo Yoshida

    Inventor: Setsuo Yoshida

    CPC classification number: G02B7/022 G02B7/026 G03F7/70825

    Abstract: In an optical unit having a holding structure which brings a junk ring or the like into contact with an optical surface of a lens, the optical surface suffers from a serious elastic deformation leading to deterioration of optical performance. Upon holding the lens, therefore, a face other than the optical surface is provided on the lens so that the lens is held by applying a force to the face from element holding members.

    Wavelength dispersion compensation system for compensating even for higher-order dispersion
    32.
    发明授权
    Wavelength dispersion compensation system for compensating even for higher-order dispersion 失效
    用于补偿高阶色散的波长色散补偿系统

    公开(公告)号:US06836580B2

    公开(公告)日:2004-12-28

    申请号:US09971645

    申请日:2001-10-09

    CPC classification number: G02B6/29358 G02B6/29395

    Abstract: By connecting a plurality of VIPA type wavelength dispersion compensators, each compensating for wavelength dispersion of a different order by a plurality of optical circulators and sequentially inputting input light to each VIPA type wavelength dispersion compensator, light, even the higher-order wavelength dispersion of which is compensated for, is outputted as output light.

    Abstract translation: 通过连接多个VIPA型波长色散补偿器,每个通过多个光循环器补偿不同顺序的波长色散,并且顺序地将输入光输入到每个VIPA型波长色散补偿器,光,甚至其中的高阶波长色散 被补偿,被输出为输出光。

    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
    33.
    发明申请
    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME 有权
    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD WITH SAME

    公开(公告)号:US20130056904A1

    公开(公告)日:2013-03-07

    申请号:US13603523

    申请日:2012-09-05

    Abstract: An imprint apparatus includes a deforming unit configured to deform the mold held by the mold holding unit into a convex shape toward the substrate; a driving unit configured to change an attitude of the mold or the substrate during a pressing in which the mold deformed is pressed against the uncured resin to thereby make a position of a contact region at which the mold is brought into contact with the uncured resin movable; a control unit configured to calculate a plane coordinates of a centroid of the contact region based on an image information of the contact region acquired by a measuring unit and to control an operation of the driving unit such that the plane coordinates position of the centroid is directed toward the plane coordinates position of the centroid of a pattern-forming region on the substrate, which has been calculated or has been acquired in advance.

    Abstract translation: 压印装置包括变形单元,其被构造成将由模具保持单元保持的模具变形成朝向基板的凸形状; 驱动单元,其构造成在压模中改变模具或基板的姿态,其中模具变形压在未固化树脂上,从而形成与未固化树脂可移动接触的接触区域的位置 ; 控制单元,被配置为基于由测量单元获取的接触区域的图像信息来计算接触区域的质心的平面坐标,并且控制驱动单元的操作,使得质心的平面坐标位置被定向 朝向已经计算或已经被预先获取的基板上的图案形成区域的质心的平面坐标位置。

    Optical-switch drive circuit and method thereof
    34.
    发明授权
    Optical-switch drive circuit and method thereof 有权
    光开关驱动电路及其方法

    公开(公告)号:US08179593B2

    公开(公告)日:2012-05-15

    申请号:US12406624

    申请日:2009-03-18

    CPC classification number: H03K19/018507

    Abstract: An optical-switch drive circuit including a driver unit that generates, in response to a control signal, an on/off signal for driving a semiconductor optical amplifier gate switch, and a buffer unit having a high input impedance and connected between an output terminal outputting the on/off signal and the semiconductor optical amplifier gate switch. In the optical-switch drive circuit the buffer unit may include a high-resistance voltage divider that is connected with the output terminal, and an operational amplifier that buffers, and provides to the semiconductor optical amplifier gate switch, a divided voltage of the voltage divider.

    Abstract translation: 一种光开关驱动电路,包括驱动单元,该驱动单元响应于控制信号产生用于驱动半导体光放大器门极开关的导通/截止信号,以及具有高输入阻抗的缓冲单元,并连接在输出端 开关信号和半导体光放大器门极开关。 在光开关驱动电路中,缓冲单元可以包括与输出端连接的高电阻分压器和缓冲并向半导体光放大器门极开关提供分压电压的运算放大器 。

    Driving circuit of optical gate switch
    35.
    发明申请
    Driving circuit of optical gate switch 有权
    光栅开关驱动电路

    公开(公告)号:US20110050293A1

    公开(公告)日:2011-03-03

    申请号:US12926199

    申请日:2010-11-01

    Abstract: A driving circuit of a semiconductor optical amplifier type gate switch constituting a matrix optical switch is provided with an operation amplifier into which a driving signal is input and from which a current corresponding to the driving signal is output, an inductance element provided at an output terminal of the operation amplifier, and a circuit composed of a diode element and a resistor element connected in parallel and provided between the inductance element and the semiconductor optical amplifier.

    Abstract translation: 构成矩阵光开关的半导体光放大型门极开关的驱动电路设置有输入驱动信号的运算放大器,输出与驱动信号对应的电流,设置在输出端子的电感元件 以及由并联连接并设置在电感元件和半导体光放大器之间的二极管元件和电阻元件构成的电路。

    Driving circuit of optical gate switch
    36.
    发明授权
    Driving circuit of optical gate switch 有权
    光栅开关驱动电路

    公开(公告)号:US07848600B2

    公开(公告)日:2010-12-07

    申请号:US11727632

    申请日:2007-03-27

    Abstract: A driving circuit of a semiconductor optical amplifier type gate switch constituting a matrix optical switch is provided with an operation amplifier into which a driving signal is input and from which a current corresponding to the driving signal is output, an inductance element provided at an output terminal of the operation amplifier, and a circuit composed of a diode element and a resistor element connected in parallel and provided between the inductance element and the semiconductor optical amplifier.

    Abstract translation: 构成矩阵光开关的半导体光放大型门极开关的驱动电路设置有输入驱动信号的运算放大器,输出与驱动信号对应的电流,设置在输出端子的电感元件 以及由并联连接并设置在电感元件和半导体光放大器之间的二极管元件和电阻元件构成的电路。

    Arbitrary and endless polarization controller and polarization-mode dispersion compensator using the same and arbitrary and endless polarization controlling method
    37.
    发明授权
    Arbitrary and endless polarization controller and polarization-mode dispersion compensator using the same and arbitrary and endless polarization controlling method 失效
    任意和无限极化控制器和偏振模色散补偿器采用相同和任意且无限的偏振控制方法

    公开(公告)号:US07443504B2

    公开(公告)日:2008-10-28

    申请号:US11079224

    申请日:2005-03-15

    CPC classification number: G01J4/04 G02F1/0136 H04B10/2569

    Abstract: A polarization controller is configured to comprise polarization state monitoring section for monitoring polarization states of input light and output light of a variable polarization light element; and a control section, when the positions on a Poincare sphere expressing each of the polarization states monitored by the polarization state monitoring section are at the positions being symmetric or approximately symmetric for the equator of the Poincare sphere, for rotating the Poincare sphere by π by using the earth axis of the Poincare sphere as a rotation axis by changing the azimuth of the optical axis of the variable polarization light element, and also for inverting the changing direction of the phase shift amount. By this, arbitrary and endless control of polarization light can be realized by a phase shift amount being less than the wavelength λ of the input light.

    Abstract translation: 偏振控制器被配置为包括用于监视输入光的偏振状态和可变偏振光元件的输出光的偏振状态监视部分; 以及控制部分,当表示由极化状态监视部分监视的每个极化状态的庞加莱球上的位置处于对于庞加莱球体的赤道对称或近似对称的位置时,用于通过pi将庞加莱球旋转pi 通过改变可变偏振光元件的光轴的方位角,并且还使相移量的变化方向反转,通过庞加莱球的接地轴作为旋转轴。 由此,可以通过小于输入光的波长λ的相移量来实现偏振光的任意和无限的控制。

    Semiconductor optical amplifier type gate switch drive circuit, semiconductor optical amplifier type gate switching drive, and optical cross connect
    38.
    发明申请
    Semiconductor optical amplifier type gate switch drive circuit, semiconductor optical amplifier type gate switching drive, and optical cross connect 有权
    半导体光放大器型栅极开关驱动电路,半导体光放大器型栅极开关驱动器和光交叉连接

    公开(公告)号:US20080205888A1

    公开(公告)日:2008-08-28

    申请号:US12002763

    申请日:2007-12-19

    Abstract: A drive circuit is provided for a semiconductor optical amplifier type gate switch includes a first transmission path and a second transmission path. The first transmission path includes a common first sub-path between a signal source and a first node; and an individual second sub-path for each of a plurality of operational amplifiers between the first node and a corresponding one of the operational amplifiers. The second transmission path includes an individual third sub-path between each of the operational amplifiers and a second node; and a common fourth sub-path between the second node and the semiconductor optical amplifier type gate switches. Transmission delay times of all the individual second sub-paths are equal, and transmission delay times of all the individual third sub-paths are equal.

    Abstract translation: 提供了一种用于半导体光放大器型栅极开关的驱动电路,其包括第一传输路径和第二传输路径。 第一传输路径包括信号源和第一节点之间的公共第一子路径; 以及用于第一节点和运算放大器中的相应一个之间的多个运算放大器中的每一个的单独的第二子路径。 第二传输路径包括每个运算放大器和第二节点之间的单独的第三子路径; 以及第二节点和半导体光放大器型栅极开关之间的公共第四子路径。 所有各个第二子路径的传输延迟时间相等,并且所有各个第三子路径的传输延迟时间相等。

    Variable optical filter and optical transmission system using same, and method of controlling variable optical filter
    39.
    发明授权
    Variable optical filter and optical transmission system using same, and method of controlling variable optical filter 有权
    可变光滤波器和使用其的光传输系统,以及控制可变滤光器的方法

    公开(公告)号:US06978064B2

    公开(公告)日:2005-12-20

    申请号:US10705220

    申请日:2003-11-12

    CPC classification number: G02B6/12007 G02B6/29355 H04B10/2941

    Abstract: The present invention has an object of providing a variable optical filter that can move its periodic filter characteristic over a wide range in parallel to an optical frequency axis direction. To this end, the variable optical filter of the present invention comprises: first and second filter sections connected in series via an optical path, and a control section for controlling the periodic filter characteristic of each of the first and second filter sections. The control section, when the filter characteristic of one of the first and second filter sections is required to move in parallel to the optical frequency axis direction to exceed a variable range, relatively controls the filter characteristic of each of the first and second filter sections such that the switching is performed from one filter section to the other filter section, provided that the filter characteristic of the overall variable optical filters becomes constant.

    Abstract translation: 本发明的目的是提供一种可变光滤波器,其可以在与光频轴方向平行的宽范围内移动其周期性滤波器特性。 为此,本发明的可变光滤波器包括:通过光路串联连接的第一滤波器部分和第二滤波器部分,以及用于控制第一和第二滤波器部分中的每一个的周期性滤波器特性的控制部分。 控制部当第一滤波器部分和第二滤波器部分之一的滤波器特性需要平行于光频轴方向移动超过可变​​范围时,相对地控制第一和第二滤波器部件中的每一个的滤波器特性, 如果整个可变光学滤波器的滤波器特性变得恒定,则从一个滤波器部分到另一滤波器部分执行切换。

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