公开(公告)号：US07728609B2

公开(公告)日：2010-06-01

申请号：US12126677

申请日：2008-05-23

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02 ,  G01R31/26

CPC classification number: G01R1/0491 ,  G01R1/07364

Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.

Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。

公开(公告)号：US07626404B2

公开(公告)日：2009-12-01

申请号：US11216757

申请日：2005-08-31

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R31/2889 ,  G01R1/07364 ,  G01R31/2886

Abstract: A probe apparatus for probing a device on a semiconductor wafer to be tested by a testing equipment is provided. The probe apparatus includes a replaceable probe tile removably mounted in a probing location on a base plate. The probe tile is configured into a self-contained assembly which includes a chassis body containing a plurality of probes for probing devices on a wafer, a dielectric block for supporting the probes, and a wireguide for guiding a plurality of cables from the testing equipment into the chassis body. A wafer station having replaceable base plates and replaceable probe tiles are also provided.

Abstract translation: 提供一种用于探测要由测试设备测试的半导体晶片上的器件的探针装置。 探针装置包括可拆卸地安装在基板上的探测位置的可更换的探针瓦。 探针瓦被配置成一个独立的组件，该组件包括一个底盘主体，该主体包含用于探测晶片上的装置的多个探针，用于支撑探针的介质块，以及用于将多条电缆从测试设备引导到 底盘主体。 还提供了具有可替换的基板和可更换的探针瓦的晶圆台。

公开(公告)号：US20090153166A1

公开(公告)日：2009-06-18

申请号：US12372049

申请日：2009-02-17

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02 ,  G01R31/26

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US20090096472A1

公开(公告)日：2009-04-16

申请号：US12126677

申请日：2008-05-23

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R1/073

CPC classification number: G01R1/0491 ,  G01R1/07364

Abstract: A probe apparatus is provided with a plurality of probe tiles, an interchangeable plate for receiving the probe tiles, a floating plate being disposed between the respective probe tile and a receiving hole on the interchangeable plate, and a control mechanism providing multi-dimensional freedom of motions to control a position of the probe tile relative to the respective receiving hole of the interchangeable plate. A method of controlling the floating plate is also provided by inserting a pair of joysticks into two respective adjustment holes disposed on the floating plate and moving the pair of joysticks to provide translational motions (X-Y) and rotational (theta) motion of the floating plate, and turning the pair of jack screws clockwise and counter-clockwise to provide a translational motion (Z) and two rotational (pitch and roll) motions of the floating plate.

Abstract translation: 探针装置设置有多个探针瓦片，用于接收探针瓦片的可互换板，设置在相应探针瓦片和可互换板材上的接收孔之间的浮动板，以及提供多维自由度的控制机构 用于控制探针瓦片相对于可互换板的相应容纳孔的位置的运动。 通过将一对操纵杆插入设置在浮动板上的两个相应的调节孔并移动该对操纵杆以提供浮动板的平移运动（XY）和旋转（theta）运动，也提供了一种控制浮动板的方法， 并顺时针和逆时针转动一对千斤顶螺丝，以提供浮动板的平移运动（Z）和两个旋转（俯仰和滚动）运动。

公开(公告)号：US07259577B2

公开(公告)日：2007-08-21

申请号：US11270044

申请日：2005-11-09

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/067 ,  G01R1/06711 ,  G01R1/18

Abstract: A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.

Abstract translation: 屏蔽探针装置设置有屏蔽探针和三线电缆，其在屏蔽的机壳内电连接。 屏蔽探针装置能够以低于100fA的工作电流和高达300℃的工作温度对半导体器件进行电测试。