公开(公告)号：US09269546B2

公开(公告)日：2016-02-23

申请号：US13945200

申请日：2013-07-18

Applicant: APPLIED MATERIALS, INC.

Inventor： Ming-Feng Wu ,  Ajit Balakrishna ,  Leonid Dorf ,  Shahid Rauf ,  Kenneth S. Collins ,  Nipun Misra

IPC: H01J37/32

CPC classification number: H01J37/32669 ,  H01J37/3233

Abstract: Electron beam-confining electromagnets of an electron beam generator are aligned with an electron beam axis, each of the electromagnets being folded to define a main section and a pair of angled wing sections disposed at respective angles relative to said main section, and a conductor wound around the edge.

Abstract translation: 电子束发生器的电子束约束电磁体与电子束轴线对准，每个电磁体被折叠以限定相对于所述主要部分以相应角度设置的主部分和一对成角度的翼部分，并且导体缠绕 围绕边缘。