公开(公告)号：US20070121205A1

公开(公告)日：2007-05-31

申请号：US11668973

申请日：2007-01-30

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G02B23/00 ,  H01L21/00

CPC classification number: G02B26/085 ,  B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0858 ,  G02B27/01 ,  G02B27/017 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/19 ,  G02F1/216 ,  G02F2203/03 ,  G06F3/1431 ,  G06F3/1446 ,  G06F3/147 ,  G09G3/001 ,  G09G3/2014 ,  G09G3/2074 ,  G09G3/2077 ,  G09G3/3466 ,  G09G5/02 ,  G09G2300/0408 ,  G09G2300/0452 ,  H01Q9/26

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

公开(公告)号：US20060256420A1

公开(公告)日：2006-11-16

申请号：US11396245

申请日：2006-03-31

Applicant: Mark Miles ,  Brian Gally ,  Clarence Chui

Inventor： Mark Miles ,  Brian Gally ,  Clarence Chui

IPC: G02B26/00

CPC classification number: B81C1/00182 ,  B81B2201/047 ,  B81C1/0038

Abstract: This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a third layer of a sacrificial material formed on the second layer.

公开(公告)号：US20060077533A1

公开(公告)日：2006-04-13

申请号：US11045800

申请日：2005-01-28

Applicant: Mark Miles ,  Jeffrey Sampsell ,  Lauren Palmateer ,  Brian Arbuckle ,  Philip Floyd

Inventor： Mark Miles ,  Jeffrey Sampsell ,  Lauren Palmateer ,  Brian Arbuckle ,  Philip Floyd

IPC: G02F1/00

CPC classification number: B81C1/0023 ,  G02B26/001 ,  Y10T29/49002

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

公开(公告)号：US20060033975A1

公开(公告)日：2006-02-16

申请号：US11255347

申请日：2005-10-21

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B82Y20/00 ,  G01J3/0256 ,  G01J3/26 ,  G01L5/0047 ,  G02B5/02 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/1225 ,  G02B6/13 ,  G02B6/266 ,  G02B6/3516 ,  G02B6/3522 ,  G02B6/353 ,  G02B6/3536 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/43 ,  G02B26/001 ,  G02B26/02 ,  G02B26/08 ,  G02B26/0833 ,  G02B2006/12104 ,  G02B2006/12109 ,  G02B2006/12126 ,  G02B2006/12159 ,  G02B2006/12164 ,  G09G3/3466 ,  G09G2310/02 ,  G09G2310/0254 ,  G09G2310/06

Abstract: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

公开(公告)号：US20050286113A1

公开(公告)日：2005-12-29

申请号：US11150682

申请日：2005-06-10

Applicant: Mark Miles

Inventor： Mark Miles

IPC: B81B3/00 ,  G01J3/26 ,  G01L5/00 ,  G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  G02B6/26 ,  G02B6/35 ,  G02B6/43 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G09G3/34

CPC classification number: G02B26/0841 ,  B82Y20/00 ,  G01J3/0256 ,  G01J3/26 ,  G01L5/0047 ,  G02B5/02 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/1225 ,  G02B6/13 ,  G02B6/266 ,  G02B6/3516 ,  G02B6/3522 ,  G02B6/353 ,  G02B6/3536 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/43 ,  G02B26/001 ,  G02B26/02 ,  G02B26/08 ,  G02B26/0833 ,  G02B2006/12104 ,  G02B2006/12109 ,  G02B2006/12126 ,  G02B2006/12159 ,  G02B2006/12164 ,  G09G3/3466 ,  G09G2310/02 ,  G09G2310/0254 ,  G09G2310/06

Abstract: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Abstract translation: 干涉调制器（Imod）包含抗反射涂层和/或微制造补充光源。 为IMod或其他微机械设备的矩阵寻址阵列提供了有效的驱动方案。 改进的配色方案提供更大的灵活性。 电子硬件可以进行现场重新配置，以适应不同的显示格式和/或应用功能。 IMod的机电行为可以与其光学行为分离。 提供了一种改进的致动装置，其中一些可以隐藏在视野之内。 制造IMod或IMod阵列并与MEMS开关或开关阵列结合使用。 IMod可用于光开关和调制。 一些IMods包含2-D和3-D光子结构。 讨论了调制光的各种应用。 基于连续的网络馈送过程提供MEMS制造和封装方法。 可以将IMODs用作评估沉积材料残余应力的测试结构。

公开(公告)号：US20050250235A1

公开(公告)日：2005-11-10

申请号：US11090911

申请日：2005-03-25

Applicant: Mark Miles ,  John Batey ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

Inventor： Mark Miles ,  John Batey ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

IPC: B81B3/00 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81C2201/0109 ,  B81C2201/014 ,  B81C2201/053 ,  G02B26/001

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract translation: 在一个实施例中，本发明提供一种用于制造微机电系统装置的方法。 该方法包括制造包括具有特征机电响应的膜的第一层和特征光学响应，其中特征光学响应是期望的，并且特征机电响应是不期望的; 以及通过在所述微机电系统装置的启动期间至少减少其上的电荷积累来修改所述第一层的特征机电响应。

公开(公告)号：US20050231790A1

公开(公告)日：2005-10-20

申请号：US11070497

申请日：2005-03-01

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G01J3/26 ,  G02B6/12 ,  G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02F1/137 ,  G02F1/21 ,  G09G3/20 ,  G09G3/34

CPC classification number: G02B26/085 ,  B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0858 ,  G02B27/01 ,  G02B27/017 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/19 ,  G02F1/216 ,  G02F2203/03 ,  G06F3/1431 ,  G06F3/1446 ,  G06F3/147 ,  G09G3/001 ,  G09G3/2014 ,  G09G3/2074 ,  G09G3/2077 ,  G09G3/3466 ,  G09G5/02 ,  G09G2300/0408 ,  G09G2300/0452 ,  H01Q9/26

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

Abstract translation: 在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面 的光。 每个调制元件传送的光的幅度由脉冲编码调制独立地控制。 每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。 每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。 可变形调制元件可以是非金属的。 这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

公开(公告)号：US20080084601A1

公开(公告)日：2008-04-10

申请号：US11841847

申请日：2007-08-20

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G02F1/21 ,  G02B26/00

CPC classification number: G02B26/085 ,  B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B26/02 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0858 ,  G02B27/01 ,  G02B27/017 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/19 ,  G02F1/216 ,  G02F2203/03 ,  G06F3/1431 ,  G06F3/1446 ,  G06F3/147 ,  G09G3/001 ,  G09G3/2014 ,  G09G3/2074 ,  G09G3/2077 ,  G09G3/3466 ,  G09G5/02 ,  G09G2300/0408 ,  G09G2300/0452 ,  H01Q9/26

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

公开(公告)号：US20080068699A1

公开(公告)日：2008-03-20

申请号：US11939746

申请日：2007-11-14

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G02F1/03

CPC classification number: G02B26/001

Abstract: In one embodiment, the invention provides a method for manufacturing an array of interferometric modulators. Each interferometric modulator comprises first and second optical layers which when the interferometric modulator is in an undriven state are spaced by a gap of one size, and when the interferometric modulator is in a driven state are spaced by a gap of another size, the size of the gap determining an optical response of the interferometric modulator. The method comprises fabricating interferometric modulators of a first type characterized by the size of the gap between its first and second optical layers when in the undriven state; fabricating interferometric modulators of a second type characterized by the size of the gap between its first and second optical layers when in the undriven state; and fabricating modulators of a third type characterized by the size of the gap between its first and second optical layers when in the undriven state, wherein fabricating the interferometric modulators of the first, second, and third types comprises using a sequence of deposition and patterning steps of not more than 9 masking steps to deposit and pattern layers of material on a substrate.

Abstract translation: 在一个实施例中，本发明提供一种用于制造干涉式调制器阵列的方法。 每个干涉式调制器包括第一和第二光学层，当干涉式调制器处于未驱动状态时间隔一个尺寸的间隙，并且当干涉式调制器处于驱动状态时间隔另一个尺寸的间隙时， 确定干涉式调制器的光学响应的​​间隙。 该方法包括制造第一类型的干涉式调制器，其特征在于处于未驱动状态时其第一和第二光学层之间的间隙的大小; 制造第二类型的干涉式调制器，其特征在于当处于未驱动状态时其第一和第二光学层之间的间隙的大小; 并且制造第三类型的调制器，其特征在于处于未驱动状态时其第一和第二光学层之间的间隙的大小，其中制造第一，第二和第三类型的干涉式调制器包括使用一系列沉积和图案化步骤 不超过9个掩模步骤以在衬底上沉积和图案化材料层。

公开(公告)号：US20070239558A1

公开(公告)日：2007-10-11

申请号：US11394534

申请日：2006-03-30

Applicant: Mark Miles

Inventor： Mark Miles

IPC: G06Q30/00

CPC classification number: G06Q30/02 ,  G06Q30/0273 ,  G06Q30/0601

Abstract: In one embodiment, the invention provides a method for a viewspace provider. The method comprises providing a viewspace at a location; and engaging in a transaction with an entity for a monetary amount associated with the provision of the viewspace.

Abstract translation: 在一个实施例中，本发明提供了一种用于视区提供者的方法。 该方法包括在一个位置提供一个视角; 并与实体进行与提供查看空间相关的金额的交易。