公开(公告)号：US08847143B2

公开(公告)日：2014-09-30

申请号：US13307432

申请日：2011-11-30

Applicant: Eugen Cabuz ,  Robert D. Horning ,  Ryan Supino ,  Burgess R. Johnson

Inventor： Eugen Cabuz ,  Robert D. Horning ,  Ryan Supino ,  Burgess R. Johnson

IPC: G01D5/34

CPC classification number: B81C1/00134 ,  B81B2201/03 ,  B81C2203/03 ,  G01D5/34 ,  G01P21/00 ,  Y10T29/49002

Abstract: Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.

Abstract translation: 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。

公开(公告)号：US08631702B2

公开(公告)日：2014-01-21

申请号：US13112551

申请日：2011-05-20

Applicant: Robert D. Horning ,  Burgess R. Johnson ,  Robert Compton ,  Eugen Cabuz

Inventor： Robert D. Horning ,  Burgess R. Johnson ,  Robert Compton ,  Eugen Cabuz

IPC: G01C19/56

CPC classification number: G01C25/00 ,  G01C19/5691 ,  H03H9/2405 ,  Y10T29/49002 ,  Y10T29/49117

Abstract: One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.

Abstract translation: 一个示例性实施例涉及具有具有顶表面的基板的振动结构陀螺仪。 振动结构陀螺仪还可以包括具有椭圆形形状的谐振器，谐振器包括杆和围绕杆的外唇缘，杆附接到基底的顶表面和与顶表面分开的外唇以允许 谐振器振动。

公开(公告)号：US08398239B2

公开(公告)日：2013-03-19

申请号：US12710941

申请日：2010-02-23

Applicant: Robert D. Horning ,  Thomas Ohnstein ,  Bernard Fritz

Inventor： Robert D. Horning ,  Thomas Ohnstein ,  Bernard Fritz

IPC: A61B3/14 ,  A61B3/10

CPC classification number: G06F3/013 ,  A61B3/113 ,  G02B27/017 ,  G02B2027/0138 ,  G02B2027/0187 ,  G06K9/00604

Abstract: An eye tracking system includes a transparent lens, at least one light source, and a plurality of light detectors. The transparent lens is adapted for disposal adjacent an eye. The at least one light source is disposed within the transparent lens and is configured to emit light toward the eye. The at least one light source is transparent to visible light. The plurality of light detectors is disposed within the transparent lens and is configured to receive light that is emitted from the at least one light source and is reflected off of the eye. Each of the light detectors is transparent to visible light and is configured, upon receipt of light that is reflected off of the eye, to supply an output signal.

Abstract translation: 眼睛跟踪系统包括透明透镜，至少一个光源和多个光检测器。 该透明透镜适于邻近眼睛处理。 所述至少一个光源设置在所述透明透镜内并且被配置为朝向所述眼睛发光。 至少一个光源对可见光是透明的。 多个光检测器设置在透明透镜内并且被配置为接收从至少一个光源发射并从眼睛反射的光。 每个光检测器对可见光是透明的，并且在接收到从眼睛反射的光时被配置以提供输出信号。

公开(公告)号：US20120272730A1

公开(公告)日：2012-11-01

申请号：US13307432

申请日：2011-11-30

Applicant: Eugen Cabuz ,  Robert D. Horning ,  Ryan Supino ,  Burgess R. Johnson

Inventor： Eugen Cabuz ,  Robert D. Horning ,  Ryan Supino ,  Burgess R. Johnson

IPC: G01M1/14 ,  G01D5/36

CPC classification number: B81C1/00134 ,  B81B2201/03 ,  B81C2203/03 ,  G01D5/34 ,  G01P21/00 ,  Y10T29/49002

Abstract: Systems and methods for an encoder and control scheme are provided. In one embodiment, a micro-electromechanical system (MEMS) device comprises: a stator having a first marker and a second marker arranged on a surface of the stator to form a sensing pattern; a sweeping element that dithers in a plane parallel to the surface of the stator along a sweep path that crosses the first marker and a second marker; an overlap sense circuit operable to measure an area overlap between the sweeping element and the sensing pattern, wherein the overlap sense circuit generates a pulse train signal output that varies as a function of the area overlap.

Abstract translation: 提供了编码器和控制方案的系统和方法。 在一个实施例中，微机电系统（MEMS）装置包括：定子，其具有布置在定子的表面上的第一标记和第二标记，以形成感测图案; 扫掠元件，其沿着与穿过所述第一标记和第二标记的扫掠路径平行于所述定子的表面的平面中抖动; 重叠检测电路，其可操作以测量扫描元件和感测图案之间的区域重叠，其中重叠检测电路产生根据区域重叠而变化的脉冲串信号输出。

公开(公告)号：US20120130672A1

公开(公告)日：2012-05-24

申请号：US13301172

申请日：2011-11-21

Applicant: Robert D. Horning ,  Ryan Supino

Inventor： Robert D. Horning ,  Ryan Supino

IPC: G06F15/00 ,  H01R43/00 ,  G01C19/56

CPC classification number: B81B3/0086 ,  B81B2201/025 ,  B81B2203/0136 ,  Y10T29/49117

Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.

Abstract translation: MEMS传感器包括基板和至少一个具有第一多个梳子的检测质量块。 检测质量通过一个或多个悬架梁耦合到基板，使得检验质量块和第一组多个梳子可移动。 MEMS传感器还包括具有第二多个梳子的至少一个锚固件。 锚固件联接到基板，使得锚固件和第二多个梳子相对于基板固定在适当位置。 第一组多个梳子与第二组梳子交错。 每个梳子包括通过一个或多个非导电层彼此电隔离的多个导电层。 每个导电层单独地耦合到相应的电位，使得梳子之间的电容随着可移动梳状体在平面外方向上的位移而近似线性地变化。

公开(公告)号：US20120126348A1

公开(公告)日：2012-05-24

申请号：US13295273

申请日：2011-11-14

Applicant: Robert D. Horning

Inventor： Robert D. Horning

IPC: H01L29/84 ,  H01L27/04 ,  H01L21/02

CPC classification number: B81B7/02 ,  B81B7/0041 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2207/095 ,  B81B2207/096 ,  B81C2201/019 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: Systems and methods for a micro-electromechanical system (MEMS) apparatus are provided. In one embodiment, a system comprises a first double chip that includes a first base layer; a first device layer bonded to the first base layer, the first device layer comprising a first set of MEMS devices; and a first top layer bonded to the first device layer, wherein the first set of MEMS devices is hermetically isolated. The system also comprises a second double chip that includes a second base layer; a second device layer bonded to the second base layer, the second device layer comprising a second set of MEMS devices; and a second top layer bonded to the second device layer, wherein the second set of MEMS devices is hermetically isolated, wherein a first top surface of the first top layer is bonded to a second top surface of the second top layer.

Abstract translation: 提供了一种用于微机电系统（MEMS）装置的系统和方法。 在一个实施例中，系统包括第一双芯片，其包括第一基层; 结合到第一基底层的第一器件层，第一器件层包括第一组MEMS器件; 以及结合到第一器件层的第一顶层，其中第一组MEMS器件被气密隔离。 该系统还包括第二双芯片，其包括第二基层; 结合到第二基层的第二器件层，第二器件层包括第二组MEMS器件; 以及结合到所述第二器件层的第二顶层，其中所述第二组MEMS器件是气密隔离的，其中所述第一顶层的第一顶表面接合到所述第二顶层的第二顶表面。

公开(公告)号：US07724610B2

公开(公告)日：2010-05-25

申请号：US12019380

申请日：2008-01-24

Applicant: Ryan Supino ,  Robert D. Horning

Inventor： Ryan Supino ,  Robert D. Horning

IPC: G01S3/80

CPC classification number: G01C21/00 ,  G01S1/72 ,  G01S5/186 ,  G01S5/26

Abstract: A lateration system comprising at least one transmitter attached to a first object and configured to emit pulses, three or more receivers attached to at least one second object and configured to receive the pulses emitted by the transmitter, and a processor configured to process information received from the three or more receivers, and to generate a vector based on lateration. Lateration is one of multilateration and trilateration. The vector is used by the processor to constrain error growth in a navigation solution.

Abstract translation: 一种后置系统，包括附接到第一对象并被配置为发射脉冲的至少一个发射器，连接到至少一个第二对象并被配置为接收由发射器发射的脉冲的三个或更多个接收器，以及被配置为处理从 三个或更多个接收器，并且基于后一个生成向量。 背景是多边和三边形之一。 处理器使用该向量来限制导航解决方案中的错误增长。

公开(公告)号：US07154362B2

公开(公告)日：2006-12-26

申请号：US10712840

申请日：2003-11-12

Applicant: Thomas R. Ohnstein ,  Daniel W. Youngner ,  Robert D. Horning

Inventor： Thomas R. Ohnstein ,  Daniel W. Youngner ,  Robert D. Horning

IPC: H01F7/00

CPC classification number: B08B9/045 ,  B25J9/06 ,  B25J9/065 ,  B25J18/06 ,  H02N1/006

Abstract: An elongated robotic member that is simple in design and structure, relatively inexpensive and consumes little power. In one illustrative embodiment, one or more linear actuators are used in conjunction with two or more plates that are fixed at spaced locations along a spine member. Fixed between each pair of plates is one or more actuators, which when activated, pull or push corresponding portions of the plates towards or away from each other. This changes the relative orientation of the plate pairs, thus providing a bending movement. The spine preferably is flexible at least in the lateral direction, and bends in response to the relative movement of the plates. A number of plate pairs may be provided to create an arbitrarily long robotic member.

Abstract translation: 一种细长的机器人构件，其设计和结构简单，相对便宜并且消耗很少的动力。 在一个说明性实施例中，一个或多个线性致动器与两个或更多个板一起使用，两个或更多个板沿着脊柱构件固定在间隔开的位置。 在每对板之间固定有一个或多个致动器，当致动器被致动时，拉动或推动板的相应部分朝向或远离彼此。 这样会改变板对的相对方位，从而提供弯曲运动。 脊柱优选至少在横向上是柔性的，并且响应于板的相对运动而弯曲。 可以提供多个板对以产生任意长的机器人构件。

公开(公告)号：US07005732B2

公开(公告)日：2006-02-28

申请号：US10689801

申请日：2003-10-21

Applicant: Robert D. Horning ,  Jeffrey A. Ridley

Inventor： Robert D. Horning ,  Jeffrey A. Ridley

IPC: H01L23/02

CPC classification number: B81B7/007 ,  B81B2201/0242 ,  B81C2203/0118

Abstract: A method for fabricating a MEMS device having a top cap and an upper sense plate is described. The method includes producing a device wafer including an etched substrate, etched MEMS device components, and interconnect metal, a portion of the interconnect metal being bond pads and adding a metal wraparound layer to a back side, edges, and a portion of a front side of the device wafer. The method also includes producing an upper wafer including an etched substrate and interconnect metal, bonding the device wafer and the upper wafer, and dicing the bonded upper wafer and device wafer into individual MEMS devices.

Abstract translation: 描述了一种用于制造具有顶盖和上感测板的MEMS器件的方法。 该方法包括制造包括蚀刻的衬底，蚀刻的MEMS器件部件和互连金属的器件晶片，互连金属的一部分是接合焊盘，并将金属环绕层添加到前侧的边缘和一部分 的器件晶片。 该方法还包括制造包括蚀刻衬底和互连金属的上晶片，结合器件晶片和上晶片，以及将结合的上晶片和器件晶片切割成单个MEMS器件。

公开(公告)号：US06969425B2

公开(公告)日：2005-11-29

申请号：US10346887

申请日：2003-01-17

Applicant: Cleopatra Cabuz ,  Max C. Glenn ,  Francis M. Erdmann ,  Robert D. Horning

Inventor： Cleopatra Cabuz ,  Max C. Glenn ,  Francis M. Erdmann ,  Robert D. Horning

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/308 ,  H01L29/84 ,  C30B1/10

CPC classification number: B81C1/00365 ,  B81C2201/0164 ,  Y10T428/21 ,  Y10T428/2495

Abstract: Layers of boron-doped silicon having reduced out-of-plane curvature are disclosed. The layers have substantially equal concentrations of boron near the top and bottom surfaces. Since the opposing concentrations are substantially equal, the compressive stresses on the layers are substantially balanced, thereby resulting in layers with reduced out-of-plane curvature.