COOLING DEVICE FOR AN INTEGRATED CIRCUIT
    35.
    发明申请
    COOLING DEVICE FOR AN INTEGRATED CIRCUIT 有权
    用于集成电路的冷却装置

    公开(公告)号:US20120187519A1

    公开(公告)日:2012-07-26

    申请号:US13436583

    申请日:2012-03-30

    Inventor: Guillaume Bouche

    Abstract: A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

    Abstract translation: 一种泵,具有:形成在绝缘基板内部的空腔,所述基板的上部位于具有边缘的所述空腔附近; 导电层,覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜,放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层,由此使导电层和膜彼此靠近的部分绝缘; 形成在所述绝缘基板中的至少一个通气线,所述曝气线经由所述导电层中的开口而进入所述空腔, 用于在导电层和膜之间施加电压的端子。

    MEMS Integrated Circuit Comprising Peristaltic Microfluidic Pump
    36.
    发明申请
    MEMS Integrated Circuit Comprising Peristaltic Microfluidic Pump 失效
    包含蠕动微流控泵的MEMS集成电路

    公开(公告)号:US20090317272A1

    公开(公告)日:2009-12-24

    申请号:US12142780

    申请日:2008-06-20

    Abstract: A MEMS integrated circuit comprising a peristaltic microfluidic pump and control circuitry for the pump. The pump comprises a pumping chamber positioned between an inlet and an outlet; a plurality of moveable fingers positioned in a wall of the pumping chamber, the fingers being arranged in a row along the wall; and a plurality of thermal bend actuators. Each actuator is associated with a respective finger such that actuation of the thermal bend actuator causes movement of the respective finger into the pumping chamber. The control circuitry controls actuation of the plurality of actuators. The control circuitry is configured to provide a peristaltic pumping action in each pumping chamber via peristaltic movement of the fingers.

    Abstract translation: 包括蠕动微流体泵和泵的控制电路的MEMS集成电路。 泵包括位于入口和出口之间的泵送室; 位于所述泵送室的壁中的多个可移动的指状物,所述指状物沿着所述壁布置成一排; 和多个热弯曲致动器。 每个致动器与相应的手指相关联,使得热弯曲致动器的致动导致相应手指进入泵送室的运动。 控制电路控制多个致动器的致动。 控制电路被配置为通过手指的蠕动运动在每个泵送室中提供蠕动泵送作用。

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