公开(公告)号：US08746903B2

公开(公告)日：2014-06-10

申请号：US13392453

申请日：2010-08-27

Applicant: Marcos Bavdaz

Inventor： Marcos Bavdaz

IPC: G02B5/08 ,  G02B7/18

CPC classification number: G21K1/06 ,  G21K2201/064 ,  G21K2201/067 ,  Y10T156/1002

Abstract: The invention relates to a method for assembling two or more mirror plate stacks into a rigid unit in turn comprising a plurality of mirror plates and a base plate onto which the plurality of mirror plates are stacked. To improve assembly accuracy of the mirror plates, a base plate is provided with a first mirror plate mounted thereto, a handling tool is provided with a second mirror plate and a spacer is provided to a first surface of the second mirror plate and positioned to align the second mirror plate with the first mirror plate. This alignment is based on a measured position and shape of the first mirror plate to compensate for a deviation from a pre-defined position and shape. The plates are then attached to each other with the spacer; the handling tool is removed and the position and shape of the second mirror plate is measured.

Abstract translation: 本发明涉及一种用于将两个或更多个反射镜板组合成刚性单元的方法，该刚性单元依次包括多个反射镜板和多个反射镜板堆叠在其上的基板。 为了提高镜板的装配精度，底板设置有安装在其上的第一镜板，处理工具设置有第二镜板，并且间隔件设置在第二镜板的第一表面上并且被定位成对齐 第二个镜面板与第一个镜面板。 该对准基于第一镜板的测量位置和形状，以补偿与预定义位置和形状的偏差。 然后将板用间隔件彼此连接; 拆卸搬运工具，测定第二镜板的位置和形状。

公开(公告)号：US08681934B2

公开(公告)日：2014-03-25

申请号：US13943932

申请日：2013-07-17

Applicant: Canon Kabushiki Kaisha

Inventor： Kentaro Nagai ,  Toru Den

IPC: G03H5/00

CPC classification number: G06T7/0002 ,  A61B6/4291 ,  A61B6/484 ,  G01J9/02 ,  G01N23/04 ,  G01N23/20075 ,  G01N2223/401 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067

Abstract: An analysis method for use in a radiation imaging apparatus employing intensity information of interference fringes of radiation rays that have passed through a detected object includes the steps of generating first phase information of the detected object wrapped into a range of 2π from the intensity information of the interference fringes; generating information on an absorption intensity gradient of the detected object from the intensity information of the interference fringes; generating a weighting function on the basis of an absolute value of a gradient in the information on the absorption intensity gradient; and generating second phase information by unwrapping the first phase information by using the weighting function.

Abstract translation: 一种在使用已经通过检测对象的辐射线的干涉条纹的强度信息的放射线成像装置中的分析方法包括以下步骤：产生被检测物体的第一相位信息，包含在2＆amp; 从干涉条纹的强度信息; 根据干涉条纹的强度信息生成关于被检测物体的吸收强度梯度的信息; 基于关于吸收强度梯度的信息中的梯度的绝对值生成加权函数; 以及通过使用所述加权函数展开所述第一相位信息来产生第二相位信息。

公开(公告)号：US08637840B2

公开(公告)日：2014-01-28

申请号：US12805003

申请日：2010-07-07

Applicant: Dong-Gun Lee ,  Seong-Sue Kim ,  Hwan-Seok Seo

Inventor： Dong-Gun Lee ,  Seong-Sue Kim ,  Hwan-Seok Seo

IPC: G02B5/18

CPC classification number: G21K1/06 ,  G02B5/1838 ,  G02B5/1842 ,  G02B5/1871 ,  G02B27/4222 ,  G21K2201/067

Abstract: An EUV projection lens includes a substrate and concentric diffraction patterns on the substrate. The concentric diffraction patterns have an out-of phase height with respect to EUV light and include a material through which the EUV light has a transmittance higher than about 50% at the out-of phase height. The EUV projection lens has a high first order diffraction light efficiency and an optic system having the EUV projection lens has a high resolution.

Abstract translation: EUV投影透镜包括基板和基板上的同心衍射图案。 同心衍射图案相对于EUV光具有异相高度，并且包括在异相高度下EUV光透过率高于约50％的材料。 EUV投影透镜具有高的一阶衍射光效率，并且具有EUV投影透镜的光学系统具有高分辨率。

公开(公告)号：US20140013573A1

公开(公告)日：2014-01-16

申请号：US14027201

申请日：2013-09-14

Applicant: Zhejiang University of Technology

Inventor： Zichun LE ,  Wen DONG

IPC: B23P17/04

CPC classification number: B23P17/04 ,  G02B27/62 ,  G21K1/065 ,  G21K2201/067 ,  Y10T29/49885

Abstract: A method for manufacturing a compound refractive lens for focusing X-rays in two dimensions. The method includes the following steps: 1) manufacturing a mother lens; 2) manufacturing a daughter lens; and 3) assembling the mother lens and the daughter lens. The assembly of the mother lens and the daughter lens includes: aligning square embedded lens bodies of the daughter lens with square holes of the mother lens, respectively, for allowing the first parabola-shaped holes on the mother lens and the second parabola-shaped holes on the daughter lens to form an orthogonal structure; and inserting and pressing the square embedded lens bodies into the corresponding square holes, respectively. The method of the invention has advantages of high-precision for manufacturing and calibration of optical axis, and meanwhile the compound refractive lens manufactured based the method has high X-rays focusing efficiency.

Abstract translation: 一种用于制造用于在二维上聚焦X射线的复合折射透镜的方法。 该方法包括以下步骤：1）制造母镜; 2）制造女儿镜片; 和3）组装母体镜片和子镜片。 母体透镜和子透镜的组合包括：分别将子透镜的方形嵌入透镜体与母体透镜的方孔对准，以允许母体透镜上的第一抛物线形孔和第二抛物线形孔 在女儿镜头上形成正交结构; 并将方形嵌入式透镜体分别插入并按压到相应的方孔中。 本发明的方法具有制造和校准光轴高精度的优点，同时基于该方法制造的复合折射透镜具有高X射线聚焦效率。

公开(公告)号：US20130301795A1

公开(公告)日：2013-11-14

申请号：US13943932

申请日：2013-07-17

Applicant: CANON KABUSHIKI KAISHA

Inventor： Kentaro Nagai ,  Toru Den

IPC: G06T7/00 ,  G01N23/20

CPC classification number: G06T7/0002 ,  A61B6/4291 ,  A61B6/484 ,  G01J9/02 ,  G01N23/04 ,  G01N23/20075 ,  G01N2223/401 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067

Abstract: An analysis method for use in a radiation imaging apparatus employing intensity information of interference fringes of radiation rays that have passed through a detected object includes the steps of generating first phase information of the detected object wrapped into a range of 2π from the intensity information of the interference fringes; generating information on an absorption intensity gradient of the detected object from the intensity information of the interference fringes; generating a weighting function on the basis of an absolute value of a gradient in the information on the absorption intensity gradient; and generating second phase information by unwrapping the first phase information by using the weighting function.

Abstract translation: 一种用于使用已经通过检测对象的辐射线的干涉条纹的强度信息的放射线成像设备的分析方法包括以下步骤：从被检测到的物体的强度信息生成包含在2pi范围内的检测对象的第一相位信息 干涉条纹; 根据干涉条纹的强度信息生成关于被检测物体的吸收强度梯度的信息; 基于关于吸收强度梯度的信息中的梯度的绝对值生成加权函数; 以及通过使用所述加权函数展开所述第一相位信息来产生第二相位信息。

公开(公告)号：US08576983B2

公开(公告)日：2013-11-05

申请号：US12866744

申请日：2009-02-09

Applicant: Christian Baeumer ,  Klaus Juergen Engel ,  Christoph Herrmann

Inventor： Christian Baeumer ,  Klaus Juergen Engel ,  Christoph Herrmann

IPC: G01N23/04

CPC classification number: G21K1/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: The invention relates to an X-ray detector (30) that comprises an array of sensitive elements (Pi−1,b, Pia, Pib, Pi+1,a, Pi+1,b) and at least two analyzer gratings (G2a, G2b) disposed with different phase and/or periodicity in front of two different sensitive elements. Preferably, the sensitive elements are organized in macro-pixels (IIi) of e.g. four adjacent sensitive elements, where analyzer gratings with mutually different phases are disposed in front said sensitive elements. The detector (30) can particularly be applied in an X-ray device (100) for generating phase contrast images because it allows to sample an intensity pattern (I) generated by such a device simultaneously at different positions.

Abstract translation: 本发明涉及一种X射线检测器（30），它包括一组敏感元件（Pi-1，b，Pia，Pib，Pi + 1，a，Pi + 1，b）和至少两个分析器光栅 ，G2b），其在两个不同的敏感元件前面具有不同的相位和/或周期性。 优选地，敏感元件被组织在例如微处理器的宏像素（IIi）中。 四个相邻的敏感元件，其中具有相互不同相位的分析器光栅设置在所述敏感元件的前面。 检测器（30）可以特别地应用于用于生成相位对比图像的X射线装置（100）中，因为它允许在不同位置同时采样由这种装置产生的强度图案（I）。

公开(公告)号：US08537970B2

公开(公告)日：2013-09-17

申请号：US13154746

申请日：2011-06-07

Applicant: Philipp Bernhardt

Inventor： Philipp Bernhardt

IPC: G21K1/06

CPC classification number: G21K1/06 ,  A61B6/4035 ,  A61B6/4441 ,  A61B6/544 ,  B82Y10/00 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/067

Abstract: For a quasi-monochromatic x-ray radiation with high radiation intensity, an x-ray radiator generates quasi-monochromatic x-ray radiation to expose a subject from a point-shaped radiation source that emits a polychromatic x-ray radiation, and having a diffraction device to diffract the polychromatic x-ray radiation. The diffraction device has a super-mirror made of crystalline material with a flat surface. In the super-mirror, the crystalline material has at least one (in particular continuous) variation of the lattice plane spacing of the crystal lattice. The radiation source and the diffraction device are arranged such that quasi-monochromatic x-ray radiation is generated from the polychromatic x-ray radiation by partial reflection at the super-mirror.

Abstract translation: 对于具有高辐射强度的准单色X射线辐射，x射线辐射器产生准单色X射线辐射，以从发射多色X射线辐射的点状辐射源暴露受试者，并具有 衍射装置衍射多色X射线辐射。 衍射装置具有由具有平坦表面的结晶材料制成的超级反射镜。 在超镜中，晶体材料具有晶格的晶格面间距的至少一个（特别是连续的）变化。 辐射源和衍射装置被布置成使得通过在超镜下的部分反射从多色X射线辐射产生准单色x射线辐射。

公开(公告)号：US08537966B2

公开(公告)日：2013-09-17

申请号：US13682445

申请日：2012-11-20

Applicant: Canon Kabushiki Kaisha

Inventor： Chidane Ouchi ,  Kentaro Nagai ,  Toru Den ,  Hidenosuke Itoh

IPC: G03H5/00

CPC classification number: G06T7/0002 ,  A61B6/4291 ,  A61B6/484 ,  G01J9/02 ,  G01N23/04 ,  G01N23/20075 ,  G01N2223/401 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067

Abstract: An X-ray imaging apparatus includes a phase grating, an absorption grating, a detector, and an arithmetic unit. The arithmetic unit executes a Fourier transform step of performing Fourier transform for an intensity distribution of a Moiré acquired by the detector, and acquiring a spatial frequency spectrum. Also, the arithmetic unit executes a phase retrieval step of separating a spectrum corresponding to a carrier frequency from a spatial frequency spectrum acquired in the Fourier transform step, performing inverse Fourier transform for the separated spectrum, and acquiring a differential phase image.

Abstract translation: X射线成像装置包括相位光栅，吸收光栅，检测器和运算单元。 算术单元执行对由检测器获取的莫尔的强度分布执行傅里叶变换并获取空间频谱的傅里叶变换步骤。 此外，运算单元执行相位检索步骤，从傅里叶变换步骤中获取的空间频谱中分离出与载波频率对应的频谱，对分离的频谱进行傅里叶逆变换，获取差分相位图像。

公开(公告)号：US20130221247A1

公开(公告)日：2013-08-29

申请号：US13846894

申请日：2013-03-18

Applicant: GIGAPHOTON INC.

Inventor： Hiroshi Someya ,  Tamotsu Abe ,  Takashi Suganuma ,  Hideo Hoshino ,  Akira Sumitani

IPC: G02B7/183 ,  H05G2/00

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G02B7/18 ,  G02B7/183 ,  G02B13/14 ,  G02B15/14 ,  G02B15/173 ,  G03F1/146 ,  G03F1/22 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70975 ,  G21K1/10 ,  G21K2201/067 ,  H05G2/001 ,  Y10T29/49895 ,  Y10T29/53087 ,  Y10T29/53539

Abstract: A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.

Abstract translation: 一种集电镜交换装置，能够安全且容易地交换用于收集从极紫外光源装置的室内产生的等离子体发出的极紫外光的集光镜。 集电镜更换装置包括：支撑集电镜或收集镜结构的支撑基座; 以及导轨，其设置在所述支撑基座上并且调节所述集光镜或所述集光镜结构的移动方向; 其特征在于，通过使所述集光镜或所述集光镜结构沿着所述支撑基座上的导轨移动，至少将所述集光镜从所述室取出。

公开(公告)号：US20130177133A1

公开(公告)日：2013-07-11

申请号：US13781840

申请日：2013-03-01

Applicant: Hiromu OHARA

Inventor： Hiromu OHARA

IPC: A61B6/00

CPC classification number: A61B6/4291 ,  A61B6/04 ,  A61B6/4007 ,  A61B6/4488 ,  A61B6/48 ,  A61B6/484 ,  A61B6/505 ,  A61B6/5258 ,  A61B6/5282 ,  A61B6/586 ,  G01N23/20075 ,  G21K1/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: There is described a radiological image capturing apparatus, which makes it possible to obtain a good X ray image in which contrast of the peripheral portions are emphasized by employing the Talbot interferometer method and the Talbot-Lau interferometer method. The apparatus is provided with an X-ray tube, a multi-slit member, a first diffraction grating, a second diffraction grating and an X-ray detector. The second diffraction grating contacts the X-ray detector. A distance L between the multi-slit element and the first diffraction grating is set to be not less than 0.5 m, a distance Z1 between the first diffraction grating and the second diffraction grating is set to be not less than 0.05 m, and a slit interval distance d0 of the multi-slit element is set to be not less than 2 μm. With the settings, the above-mentioned good X-ray image can be obtained by using the Talbot-Lau interferometer system.

Abstract translation: 描述了一种放射图像捕获装置，其可以通过采用Talbot干涉仪方法和Talbot-Lau干涉仪方法来获得强调周边部分的对比度的良好X射线图像。 该装置设置有X射线管，多狭缝部件，第一衍射光栅，第二衍射光栅和X射线检测器。 第二衍射光栅接触X射线检测器。 多狭缝元件与第一衍射光栅之间的距离L设定为不小于0.5μm，第一衍射光栅与第二衍射光栅之间的距离Z1设定为不小于0.05μm，狭缝 多缝隙元件的间隔距离d0设定为2μm以上。 通过设置，可以使用Talbot-Lau干涉仪系统获得上述良好的X射线图像。