公开(公告)号：US5879467A

公开(公告)日：1999-03-09

申请号：US921811

申请日：1997-09-02

Applicant: Jiaxiang Zhou ,  Stephen D. Dasso

Inventor： Jiaxiang Zhou ,  Stephen D. Dasso

IPC: B01J3/02 ,  B08B9/08 ,  C23C14/00 ,  C23C14/56 ,  C23C16/44 ,  B08B5/02 ,  B08B5/04 ,  B08B9/00

CPC classification number: B08B9/08 ,  C23C14/564 ,  C23C16/4401 ,  C23C16/4412

Abstract: A vacuum system bakeout process is performed by cycling the system between two pressures, pumping the system down to a lower pressure, and holding the system at that lower pressure for a period of time. A gas, such as argon gas, is introduced into the system. This gas introduction is done while cycling between the two pressures. The pump is used to lower the pressure during cycling, and the gas flow is used to raise the pressure. A rough pump performs the cycling between pressures, and then a high vacuum pump evacuates the system to the lower pressure.

Abstract translation: 通过在两个压力之间循环系统来执行真空系统烘烤过程，将系统泵送到较低的压力，并将系统保持在较低压力一段时间。 将诸如氩气的气体引入系统中。 这种气体导入在两个压力之间循环时完成。 泵用于降低循环过程中的压力，气流用于提高压力。 粗泵在压力之间执行循环，然后高真空泵将系统排出到更低的压力。

公开(公告)号：US5857840A

公开(公告)日：1999-01-12

申请号：US706492

申请日：1996-09-04

Applicant: Ayumi Suda ,  Yoshinobu Hiraishi

Inventor： Ayumi Suda ,  Yoshinobu Hiraishi

IPC: B01D45/12 ,  B01D46/10 ,  B01D50/00 ,  B01J3/02 ,  B04C9/00 ,  C30B15/00 ,  C30B35/00 ,  F04B39/16 ,  F04B49/00

CPC classification number: B01D45/12 ,  B01D46/10 ,  B01D50/002 ,  C30B15/00 ,  C30B35/00 ,  F04B39/16

Abstract: The objects of the present invention are to remove the dust in a closed container, to keep the pressure in the closed container within a predetermined range, and to shorten the maintenance time of a vacuum pump system.The present invention provides a centrifugal dust collector 2 on main pipes which connects a furnace body 1, a mechanical press 9 and a dry pump 10, and a metal mesh dust collector 15 on a bifurcated pipe in a single-crystal semiconductor pulling apparatus. When the vacuum pump process begins, the metal mesh dust collector 15 collects amorphous silicon generated in the furnace 1. As the pressure in the furnace is reduced, the centrifugal dust collector 2 collects the dust particles instead. Since the gas flow rate increases as the vacuum state become higher, the critical diameter of collectable particles decreases, thereby improving the dust collection efficiency. The collected amorphous silicon accumulates on the bottom of the centrifugal dust collector and can be easily removed so as to facilitate maintenance. Moreover, there will be very little pressure variance in the furnace since no dust filter is blocked.

Abstract translation: 本发明的目的是去除密闭容器中的灰尘，以将密封容器中的压力保持在预定范围内，并缩短真空泵系统的维护时间。 本发明在单体半导体拉制装置中，在分支管上连接炉体1，机械压力机9和干式泵10以及金属网状集尘器15的主管上设置有离心除尘器2。 当真空泵工艺开始时，金属网集尘器15收集在炉子1中产生的非晶硅。随着炉中的压力降低，离心式集尘器2代替收集灰尘颗粒。 由于气体流量随着真空状态变高而增加，所以可收集颗粒的临界直径减小，从而提高集尘效率。 收集的非晶硅积聚在离心式集尘器的底部，可以方便地取出，以方便维护。 此外，由于没有防尘过滤器被堵塞，所以炉子的压力变化很小。

公开(公告)号：US5843386A

公开(公告)日：1998-12-01

申请号：US631812

申请日：1996-04-10

Applicant: Hisaaki Makino ,  Takehiko Moriya ,  Yoshihisa Saito ,  Masazumi Kanazawa

Inventor： Hisaaki Makino ,  Takehiko Moriya ,  Yoshihisa Saito ,  Masazumi Kanazawa

IPC: B01J3/00 ,  B01J3/02 ,  B01J3/04 ,  B01J19/00 ,  B01J19/24 ,  C10B53/00 ,  C10G1/10

CPC classification number: B01J3/04 ,  B01J19/243 ,  C10B53/00 ,  C10G1/10 ,  B01J2219/0002 ,  B01J2219/00083 ,  B01J2219/00094

Abstract: A safe and efficient hydrothermal reaction apparatus is described herein. Decomposition or synthesis of object material is performed by the continuous passing of the material through a flow passage of multi-staged reactor units under turbulent flow conditions. The flow passage is formed by a curved or spiral piping. In each reactor unit, a hot plate block is included as a heating unit. The hot plate block and the curved piping are placed in an appropriate thermal contact relationship. A portion of the curved piping is freely supported, so as to accommodate stress caused in the piping under high-temperature/high-pressure conditions. A tank is provided for regulating or controlling the pressure fluctuation within the flow passage which may be caused by solids or powder present or occurring in the flow passage during high-pressure treatment. A portion of object material which has not been decomposed during the high-pressure treatment is again introduced or returned to the reactor for complete decomposition thereof after the addition of more solvent.

Abstract translation: 这里描述了一种安全有效的水热反应装置。 目标材料的分解或合成是通过在湍流条件下连续通过多级反应器单元的流动通道进行的。 流动通道由弯曲或螺旋管道形成。 在每个反应器单元中，包括热板块作为加热单元。 热板块和弯曲管道放置在适当的热接触关系中。 弯曲管道的一部分自由地支撑，以适应在高温/高压条件下在管道中产生的应力。 提供一个罐，用于调节或控制流道内的压力波动，这可能是由在高压处理期间存在或发生在流路中的固体或粉末造成的。 在加入更多的溶剂之后，将高压处理中尚未分解的物料的一部分再次引入或返回到反应器中以使其完全分解。

公开(公告)号：US5803107A

公开(公告)日：1998-09-08

申请号：US627711

申请日：1996-03-29

Applicant: Farro Frank Kaveh ,  Michael S. Barnes ,  Brett C. Richardson ,  Christopher H. Olson

Inventor： Farro Frank Kaveh ,  Michael S. Barnes ,  Brett C. Richardson ,  Christopher H. Olson

IPC: H01L21/302 ,  B01J3/02 ,  F16K31/12 ,  F16K31/36 ,  G05D16/20 ,  H01L21/3065 ,  F17D1/16 ,  F16K17/34 ,  F17D1/18

CPC classification number: G05D16/202 ,  Y10S438/909 ,  Y10T137/0396 ,  Y10T137/2572 ,  Y10T137/7761

Abstract: A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in the reaction chamber. The disclosed apparatus and method further uses estimation curves to estimate the desired position of a controlled gate valve which is located between the reaction chamber and turbo pump. The disclosed apparatus and method further introduces process gases at higher rate than set point levels to reduce the transition time or stabilization time required when raising the pressure in the reaction chamber.

Abstract translation: 公开了一种用于控制晶片加工设备中的反应室的压力的方法和装置。 所公开的装置和方法使用用于将气体插入抽空系统中的压载端口，从而控制反应室中的压力。 所公开的装置和方法还使用估计曲线来估计位于反应室和涡轮泵之间的受控闸阀的期望位置。 所公开的装置和方法进一步介绍了比设定点水平更高的处理气体，以减少在提高反应室中的压力时所需的过渡时间或稳定时间。

公开(公告)号：US5707198A

公开(公告)日：1998-01-13

申请号：US411658

申请日：1995-04-06

Applicant: Tyge Vind

Inventor： Tyge Vind

IPC: F23J1/00 ,  B01J3/02 ,  B01J8/00 ,  F23C10/24 ,  B65G53/66

CPC classification number: F23C10/24 ,  B01J3/02 ,  B01J8/003

Abstract: A method of discharging particulate material from a first container to a lower positioned storage area being under a lower pressure than the first container. Particulate material is discharged via an upper tube section of a discharge tube communicating with the first container and permanently containing a column of the particulate material. The discharged material is directed into a pressurized stabilizer. The discharged material is directed via a lower tube section to a material feeder for forming columns of the particulate material in the upper and lower tube sections thereby reducing the pressure of the material to a predetermined normal pressure level at the input of the feeder. The material is fed to the storage area. The quantity of discharged material is controlled by the feeder. Gas flowing from the first container is extracted through the particulate material column to an environment via a throttle at an upper portion of the pressure stabilizer, thus stabilizing the discharge by making it independent of pressure variations in the particulate material column upstream of the pressure stabilizer. The feeder is stopped when a pressure increases in the particle column in the upper tube section resulting in a pressure increase in the pressure stabilizer until the pressure of the pressure stabilizer has returned to the normal level due to the extraction of gas.

Abstract translation: PCT No.PCT / SE93 / 00767 Sec。 371日期：1995年4月6日 102（e）日期1995年4月6日PCT 1993年9月23日PCT公布。 公开号WO94 / 07596 日期1994年04月14日将颗粒材料从第一容器排放到低于第一容器的较低压力下的下部储存区域的方法。 颗粒材料通过与第一容器连通的排放管的上管部排出，并且永久地包含颗粒材料柱。 排出的材料被引导到加压稳定剂中。 排出的材料通过下管部分被引导到用于在上管部和下管部分中形成颗粒材料列的材料供给器，从而在进料器的输入端将材料的压力降低到预定的常压水平。 将材料送入储存区域。 出料量由进料器控制。 从第一容器流出的气体通过颗粒材料柱通过压力稳定器上部的节流阀被提取到环境中，从而通过使压力稳定器上游的颗粒材料柱中的压力变化不依赖于稳定排放。 当上管部分的颗粒柱压力增加时，进料器停止，导致压力稳定器的压力增加，直到压力稳定器的压力由于气体的提取而恢复到正常水平。

公开(公告)号：US5681615A

公开(公告)日：1997-10-28

申请号：US508278

申请日：1995-07-27

Applicant: John D. Affinito ,  Mark E. Gross

Inventor： John D. Affinito ,  Mark E. Gross

IPC: B05D1/02 ,  B01J3/02 ,  B05D7/24 ,  C23C14/24 ,  H05K3/00

CPC classification number: B05D1/60 ,  H05K3/0091

Abstract: A method for fabrication of polymer composite layers in a vacuum is disclosed. More specifically, the method of dissolving salts in a monomer solution, vacuum flash evaporating the solution, condensing the flash evaporated solution as a liquid film, and forming the condensed liquid film into a polymer composite layer on a substrate is disclosed.

Abstract translation: 公开了一种在真空中制造聚合物复合层的方法。 更具体地，公开了将盐溶解在单体溶液中的方法，真空闪蒸蒸发溶液，将闪蒸溶液作为液膜冷凝，并将冷凝的液膜形成在基材上的聚合物复合层中。

公开(公告)号：US5486080A

公开(公告)日：1996-01-23

申请号：US269159

申请日：1994-06-30

Applicant: Manny Sieradzki

Inventor： Manny Sieradzki

IPC: B65G49/07 ,  B01J3/02 ,  H01L21/00 ,  H01L21/02 ,  H01L21/677 ,  H01L21/687 ,  B65G1/04

CPC classification number: H01L21/67161 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67745 ,  H01L21/68707 ,  Y10S414/137

Abstract: A high speed wafer processing apparatus employs two wafer transport robots to move wafers from two load locks past a processing station with gentle vacuum cycling and without pumpdown delays. Both robots alternately transport each wafer from the cassette at a single one of the load locks along a path from the cassette to a transfer position through the process station and back to the cassette, while pumpdown or venting of the other (second) load lock is carried out. They then transport the wafers from the second load lock through the process station. A wafer is "parked" at a transfer or orienting station, rather than handed over from robot to robot, so that the robots are not both tied up with a single wafer, and two or more wafers can move simultaneously along the path. Even for a fast ten second process time, work flow proceeds without interruption, periodic delay or dead time, and three to five minutes are available for venting, loading a new cassette and pumpdown. The robots enjoy partial path overlap, and operate in bucket brigade fashion without stop.

Abstract translation: 高速晶片处理装置使用两个晶片传送机器人来从两个加载锁移动晶片通过处理站，具有温和的真空循环并且没有抽空延迟。 两个机器人在一个装载锁上的一个装载锁上将每个晶片从盒中交替传送，沿着从盒的路径传递到通过处理站的转移位置并返回到盒，而另一个（第二）装载锁的抽吸或排气是 执行。 然后，他们将晶片从第二个加载锁传送到处理站。 晶片在转移或定位站“停放”，而不是从机器人移交到机器人，使得机器人不会被单个晶片捆绑，并且两个或更多个晶片可以沿着路径同时移动。 即使快速十秒的处理时间，工作流程不间断地进行，定期延迟或死区时间，三到五分钟可用于排放，装入新的盒式磁带和抽空。 机器人享受部分路径重叠，无需停车就可以进行斗旅。

公开(公告)号：US5466108A

公开(公告)日：1995-11-14

申请号：US244585

申请日：1994-06-03

Applicant: Jozsef Piroska

Inventor： Jozsef Piroska

IPC: B01J3/02 ,  B27N3/28 ,  B30B11/24 ,  C10J3/30 ,  F27D3/18

CPC classification number: F27D3/18 ,  B01J3/02 ,  B27N3/28 ,  B30B11/24 ,  C10J3/30 ,  C10J2200/154 ,  C10J2200/158 ,  C10J2300/092 ,  Y02P20/145

Abstract: Disintegrated material is supplied to a pressure chamber by a rotatable and axially translatable screw piston. The piston is rotated while in a first axial position to transport and compact the material in a receiving chamber against a closed output valve in front of the piston. The output valve is opened and the compacted material is moved into the pressure chamber by axial non-rotative motion of the piston. The output valve then is closed, and the piston is axially returned to its first axial position while rotating in the same direction as before. The operation cycle is repeated as above. An apparatus for carrying out a process comprises an axially movable guide piston rotationally carrying and guiding the screw piston for rotation and axial movement by action of a hydraulic cylinder and a mechanism for rotationally positioning the screw piston.

Abstract translation: PCT No.PCT / SE92 / 00818 Sec。 371日期：1994年6月3日 102（e）日期1994年6月3日PCT提交1992年11月26日PCT公布。 公开号WO93 / 10893 日期：1994年6月10日。通过可旋转且可轴向平移的螺杆活塞将整体材料供应到压力室。 活塞在第一轴向位置旋转，以将接收室中的材料运送并压紧在活塞前方的封闭输出阀上。 输出阀打开，压实材料通过活塞的轴向非旋转运动进入压力室。 然后，输出阀关闭，并且活塞在与之前沿相同的方向旋转的同时轴向地返回到其第一轴向位置。 如上所述重复操作循环。 用于执行处理的装置包括轴向移动的引导活塞，其旋转地承载和引导螺杆活塞，用于通过液压缸的作用和用于旋转地定位螺杆活塞的机构的旋转和轴向运动。

公开(公告)号：US5432265A

公开(公告)日：1995-07-11

申请号：US97182

申请日：1993-07-27

Applicant: Peggy M. Tomasula

Inventor： Peggy M. Tomasula

IPC: A23C19/045 ,  A23G3/04 ,  A23J1/20 ,  A23L5/10 ,  B01J3/02 ,  B01J19/00 ,  C07K14/47 ,  F17D1/14 ,  C07K1/30 ,  F04B19/12 ,  F04B37/12

CPC classification number: F17D1/14 ,  A23C19/045 ,  A23G3/04 ,  A23J1/20 ,  A23L5/17 ,  B01J19/0053 ,  B01J19/006 ,  B01J3/02 ,  C07K14/4732 ,  B01J2219/00058 ,  B01J2219/00094 ,  B01J2219/00108 ,  B01J2219/0011 ,  B01J2219/00162 ,  B01J2219/00774 ,  Y10T137/85978

Abstract: The continuous removal of solid products from a high-pressure system is achieved by operating a high-pressure pump in reverse to gradually reduce pressure at the exit line to atmospheric pressure. This process allows solid products to exit the system while at the same time maintaining high pressure in the reactor.

Abstract translation: 通过相反地操作高压泵来实现固体产物从高压系统的连续除去，以逐渐降低出口处的压力至大气压力。 该方法允许固体产物离开系统，同时在反应器中保持高压。

公开(公告)号：US5374148A

公开(公告)日：1994-12-20

申请号：US40025

申请日：1993-03-30

Applicant: Reijo Kilpelainen ,  Risto Laukkanen ,  Matti Virolainen

Inventor： Reijo Kilpelainen ,  Risto Laukkanen ,  Matti Virolainen

IPC: B01J3/02 ,  B01J8/00 ,  C10J3/30 ,  F23K3/00

CPC classification number: C10J3/30 ,  B01J3/02 ,  B01J8/0035 ,  C10J2200/154 ,  C10J2200/158

Abstract: The invention relates to a procedure and an apparatus for feeding solid material into a pressurized space. According to the invention, the apparatus comprises a feed chamber (12) communicating with the pressurized space (1) via a gate (13), a piston cylinder (8) adjoining the feed chamber (12) and provided with an aperture (28) in its wall for the intake of solid material, and a piston (9) which consists of an inner and an outer piston (11,10), moves within the piston cylinder (8) and closes the feed chamber (12) tightly when in its front position. The inner piston (11) moves inside the outer piston (10) and in the feed chamber (12) to insert the solid material into the pressurized space (1). In the procedure of the invention, the solid material is supplied into the feed chamber (12) through the piston cylinder (8) and the aperture (28) in its wall while the piston (9) is in its rear position, the piston (9) is thrust into its front position so that the feed chamber (12) is tightly closed, a pressure corresponding to that in the pressurized space (1) is formed in the feed chamber (12), the gate (13) between the pressurized space (1) and the feed chamber (12) is opened and the inner piston (11) is thrust into its front position.

Abstract translation: 本发明涉及一种用于将固体材料进料到加压空间中的方法和装置。 根据本发明，该装置包括通过门（13）与加压空间（1）连通的进料室（12），与进料室（12）相邻并设有孔（28）的活塞缸（8） 在其壁上用于吸收固体材料，并且由内活塞和外活塞（11,10）组成的活塞（9）在活塞缸（8）内移动，并且当进入 其前置位置 内活塞（11）在外活塞（10）内和进料室（12）内移动，将固体材料插入加压空间（1）。 在本发明的方法中，当活塞（9）处于其后部位置时，固体材料通过活塞缸（8）和其壁中的孔（28）供应到进料室（12）中，活塞 9）被推入其前部位置，使得进料室（12）被紧密地关闭，在进料室（12）中形成与加压空间（1）中的压力相对应的压力，加压 空间（1）和进料腔（12）打开，内活塞（11）推入其前位置。