公开(公告)号：US20040149937A1

公开(公告)日：2004-08-05

申请号：US10762355

申请日：2004-01-23

Applicant: Ushiodenki Kabushiki Kaisha

Inventor： Tatumi Hiramoto

IPC: G01J001/00

CPC classification number: H05G2/003 ,  H05G2/006

Abstract: A UV light source in which Xenon (Xe) gas is mixed with a substance which, in the temperature range in which 10-valent Xe ions (Xe10null) occur, emits a number of free electrons from a molecule or an atom that at least half the number of electrons which are released from a Xe atom, and which at room temperature is molecular or atomic (for example Ar, Kr, Ne, N2 and NH3). A high voltage is applied in a pulse-like manner to the electrode on the ground side and the electrode on the high voltage side to produce a plasma with a high temperature and from which extreme UV light with a wavelength of 13.5 nm is formed and emitted. The invention can also be used an extreme UV light source of the capillary, plasma focus, and Z pinch types for example.

Abstract translation: 将氙（Xe）气体与其中发生10价Xe离子（Xe <10+>）的温度范围内的物质混合的紫外光源从分子或原子发射出许多自由电子 从Xe原子释放并且在室温下分子或原子（例如Ar，Kr，Ne，N 2和NH 3）的电子的数量的至少一半。 以类似脉冲的方式向接地侧的电极和高电压侧的电极施加高电压，以产生具有高温的等离子体，从而形成并发射波长为13.5nm的极紫外光 。 本发明也可以使用例如毛细管的极紫外光源，等离子体聚焦和Z夹点类型。

公开(公告)号：US20040149918A1

公开(公告)日：2004-08-05

申请号：US10632169

申请日：2003-07-30

Applicant: The Regents of the University of California

Inventor： William W. Craig ,  Simon E. Labov

IPC: G01T001/24 ,  G01J001/00

CPC classification number: G01J1/00 ,  G01T1/026 ,  G01T7/00

Abstract: A network of radiation detection instruments, each having a small solid state radiation sensor module integrated into a cellular phone for providing radiation detection data and analysis directly to a user. The sensor module includes a solid-state crystal bonded to an ASIC readout providing a low cost, low power, light weight compact instrument to detect and measure radiation energies in the local ambient radiation field. In particular, the photon energy, time of event, and location of the detection instrument at the time of detection is recorded for real time transmission to a central data collection/analysis system. The collected data from the entire network of radiation detection instruments are combined by intelligent correlation/analysis algorithms which map the background radiation and detect, identify and track radiation anomalies in the region.

Abstract translation: 辐射检测仪器网络，每个都具有集成到蜂窝电话中的小型固体辐射传感器模块，用于直接向用户提供辐射检测数据和分析。 传感器模块包括结合到ASIC读数的固态晶体，其提供低成本，低功率，重量轻的紧凑型仪器，以检测和测量局部环境辐射场中的辐射能量。 特别地，记录光电子能量，事件时间和检测仪器在检测时的位置，以实时传输到中央数据采集/分析系统。 来自整个辐射检测仪器网络的数据通过智能相关/分析算法相结合，绘制了背景辐射，检测，识别和跟踪该地区的辐射异常。

公开(公告)号：US20040124377A1

公开(公告)日：2004-07-01

申请号：US10656437

申请日：2003-09-05

Inventor： Shen-Kwan Chiang

IPC: H03K003/00 ,  G01J001/00

CPC classification number: G01J5/34

Abstract: A digitally-controlled pyroelectric signal sampling circuit is proposed, which is designed to process the alternating current (AC) signal from a pyroelectric device, such as a pyroelectric infrared sensor, such that the AC signal is converted into direct current (DC) signal. The proposed digitally-controlled pyroelectric signal sampling circuit is characterized by the use of a microprocessor in conjunction with a crystal oscillator whose operating characteristics would be substantially unaffected by temperature changes in the ambient environment. This feature allows the generated trigger signal and sampling signals to be substantially fixed in frequencies and timings, without drifting due to temperature changes in the ambient environment, and therefore allows the digitally-controlled pyroelectric signal sampling circuit of the invention to provide a more accurate DC output than prior art. Moreover, the utilization of a microprocessor in place of analog-type delay circuitry can help simplify the hardware architecture and thus save manufacturing cost.

Abstract translation: 提出了一种数字控制的热电信号采样电路，其被设计用于处理来自热电装置（例如热释电红外传感器）的交流（AC）信号，使得AC信号被转换为直流（DC）信号。 所提出的数字控制热电信号采样电路的特征在于使用与晶体振荡器结合的微处理器，其工作特性将基本上不受周围环境温度变化的影响。 该特征允许生成的触发信号和采样信号基本上固定在频率和定时中，而不会由于周围环境中的温度变化而漂移，因此允许本发明的数字控制热电信号采样电路提供更精确的DC 输出比现有技术。 此外，利用微处理器代替模拟延迟电路可有助于简化硬件体系结构，从而节省制造成本。

公开(公告)号：US20040104357A1

公开(公告)日：2004-06-03

申请号：US10712594

申请日：2003-11-12

Inventor： Kouji Fujiyoshi ,  Masami Takigawa

IPC: G21G005/00 ,  A61N005/00 ,  G01J001/00 ,  G01N021/00 ,  H01J037/08 ,  G21K005/10 ,  G01N023/00

CPC classification number: H01J37/3023 ,  H01J2237/31762

Abstract: An electron beam exposure apparatus for exposing a wafer with an electron beam includes a section for generally controlling a wafer exposing system, a first buffer memory for temporarily storing exposure data, a second buffer memory for temporarily storing the exposure data, a first exposing section for irradiating the wafer with an electron beam based on exposure data output from the first buffer memory, and a first comparing section for comparing exposure data output from the first buffer memory with exposure data output from the second buffer memory and notifying the comparison results to the general control section. Further, an exposure apparatus and a pattern error detection method for accurately detecting an error of an exposure pattern formed to a wafer is disclosed.

Abstract translation: 用电子束曝光晶片的电子束曝光装置包括用于大体控制晶片曝光系统的部分，用于临时存储曝光数据的第一缓冲存储器，用于临时存储曝光数据的第二缓冲存储器，用于 基于从第一缓冲存储器输出的曝光数据，用电子束照射晶片;以及第一比较部分，用于将从第一缓冲存储器输出的曝光数据与从第二缓冲存储器输出的曝光数据进行比较，并将比较结果通知给一般 控制部分。 此外，公开了一种用于精确检测形成于晶片的曝光图案的误差的曝光装置和图案错误检测方法。

公开(公告)号：US20040058256A1

公开(公告)日：2004-03-25

申请号：US10611247

申请日：2003-07-02

Inventor： Tadahito Fujisawa ,  Soichi Inoue ,  Takashi Sato ,  Masafumi Asano

IPC: G03F007/20 ,  G03F007/207 ,  G03F007/30 ,  G03B027/32 ,  G03B027/52 ,  G03B027/54 ,  G01J001/00 ,  G01N021/00

CPC classification number: G03F7/70558

Abstract: There is disclosed a dose monitor method comprising illuminating a mask with illumination light, which is disposed in a projection exposure apparatus and in which a dose monitor pattern is formed, passing only a 0th-order diffracted light through a pupil surface of the projection exposure apparatus in diffracted lights of the dose monitor pattern, and transferring a 0th-order diffracted light image of the dose monitor pattern onto a substrate to measure dose, wherein during the illuminating, a center of gravity of the 0th-order diffracted light image passed through the dose monitor pattern on the pupil surface of the projection exposure apparatus is shifted from an optical axis of the projection exposure apparatus.

Abstract translation: 公开了一种剂量监测方法，其包括用照射光照射掩模，所述照明光设置在投影曝光装置中，并且其中形成剂量监测器图案，仅使0级衍射光通过投影曝光装置的光瞳表面 在剂量监视器图案的衍射光中，并将剂量监视器图案的0级衍射光图像转印到衬底上以测量剂量，其中在照明期间，0级衍射光图像的重心通过 投影曝光装置的光瞳表面上的剂量监视器图案从投影曝光装置的光轴移位。

公开(公告)号：US20040056196A1

公开(公告)日：2004-03-25

申请号：US10416236

申请日：2003-09-29

Inventor： Haruo Yoshida ,  Michio Niwano

IPC: G01J001/00 ,  G01T001/00 ,  G01J005/02

CPC classification number: G01N21/552 ,  G01N21/3504

Abstract: An environmental monitoring apparatus comprises: an infrared transmitting substrate 12 disposed in a prescribed ambient atmosphere 10; an infrared radiation source 20 for irradiating an infrared radiation to the infrared transmitting substrate 12; a contaminant analyzing means 30 for computing a concentration of a contaminant in the ambient atmosphere 10, based on the infrared radiation exited from the infrared transmitting substrate 12 after the infrared radiation has undergone multiple reflections inside the infrared transmitting substrate 12; and a contaminant removing means 50 for removing the contaminant in the ambient atmosphere 10 complied with the concentration of the contaminant in the ambient atmosphere 10, which have been computed by the contaminant analyzing means 30. Thus, the contaminant in the ambient atmosphere can be monitored with high sensitivity and real time, and can be immediately removed when the concentration in the ambient atmosphere exceed a prescribed value.

Abstract translation: 环境监测装置包括：设置在规定环境气氛10中的红外线透射基板12; 用于将红外辐射照射到红外线透射基板12的红外辐射源20; 污染物分析装置30，用于在红外线辐射在红外线透射基板12内进行多次反射之后，基于从红外线透射基板12离开的红外线辐射来计算环境气氛10中的污染物的浓度; 和用于除去环境大气中的污染物的污染物去除装置50，其符合由污染物分析装置30计算出的环境气氛10中的污染物的浓度。因此，可以监测环境大气中的污染物 具有高灵敏度和实时性，并且当环境大气中的浓度超过规定值时可以立即除去。

公开(公告)号：US20040021056A1

公开(公告)日：2004-02-05

申请号：US10363997

申请日：2003-06-24

Inventor： Ronald Holzwarth ,  Thomas Udem ,  Theodor Hansch

IPC: G01J001/00

CPC classification number: H01S3/13 ,  H01S3/1305

Abstract: The invention relates to a method for producing radio frequency waves, whereby a pulse laser for producing light pulses having a predetermined spectrum of frequency modes and a predetermined recurrence frequency is operated. The light pulses of the pulse laser are detected by means of a detector device, and corresponding electrical output signals forming the radio frequency signals are produced. Said pulse laser is actuated in a stabilized manner by means of an optical reference signal in such a way that the recurrence frequency of the light pulse is fixed. The invention also relates to a radio frequency generator for implementing said method.

Abstract translation: 本发明涉及一种用于产生射频波的方法，由此产生用于产生具有预定频谱模式和预定重复频率的光脉冲的脉冲激光器。 通过检测装置检测脉冲激光的光脉冲，产生形成射频信号的对应的电输出信号。 所述脉冲激光器通过光学参考信号以稳定的方式被致动，使得光脉冲的复现频率是固定的。 本发明还涉及用于实现所述方法的射频发生器。

公开(公告)号：US20030213923A1

公开(公告)日：2003-11-20

申请号：US09756660

申请日：2001-01-10

Inventor： Albert W. Kongable ,  Mark T. Myers

IPC: G01J001/00

CPC classification number: G01J5/522 ,  G01J1/58

Abstract: A compact infrared (IR) scene generator capable of generating multiple-color mid-IR scenes through the use of readily available commercial near-IR lasers and a fluorescent conversion material (FCM). Such a scene generator would be useful to test IR imaging sensors in a controlled laboratory environment. In operation, each laser emits energy at an initial wavelength outside the operating band of an IR imaging sensor. This energy of a first set of wavelengths is written onto the FCM in patterns, which collectively form an IR scene. The FCM absorbs the energy and radiates it at wavelengths longer than the initial wavelengths, i.e., a second set of wavelengths. As these longer wavelengths are within the operating waveband of the IR imaging sensor, the patterns written onto the FCM are detectable by it.

Abstract translation: 通过使用易于获得的商用近红外激光器和荧光转换材料（FCM），能够产生多色中红外场景的小型红外（IR）场景发生器。 这样的场景发生器将有助于在受控的实验室环境中测试IR成像传感器。 在操作中，每个激光器以IR成像传感器的工作频带外的初始波长发射能量。 将第一组波长的能量以共同形成IR场景的图案写入FCM。 FCM吸收能量并以比初始波长长的波长辐射它，即第二组波长。 由于这些较长的波长在IR成像传感器的工作波段内，写入FCM的图案可以被它检测到。

公开(公告)号：US20030210388A1

公开(公告)日：2003-11-13

申请号：US10453810

申请日：2003-06-04

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ryo Sasaki

IPC: G01J001/00

CPC classification number: G03F7/706 ,  G01J9/00

Abstract: Disclosed is a method of measuring a wavefront aberration of a predetermined optical system being serviceable for imaging a pattern, wherein the method includes storing information related to a light intensity distribution on a pupil plane of the predetermined optical system in a reference state, and detecting a wavefront of the predetermined optical system in an arbitrary state, on the basis of the stored information.

Abstract translation: 公开了一种测量可用于对图案进行成像的预定光学系统的波前像差的方法，其中所述方法包括在参考状态下将预定光学系统的光瞳平面上的与光强度分布相关的信息存储在参考状态中， 基于所存储的信息，任意状态下的预定光学系统的波前。

公开(公告)号：US20030178584A1

公开(公告)日：2003-09-25

申请号：US10220479

申请日：2003-03-24

Inventor： Donald Dominic Arnone ,  Craig Michael Ciesla ,  Bryan Edward Cole

IPC: G01R031/00 ,  G01J001/00

CPC classification number: G01N21/4795 ,  G01N21/3581

Abstract: An apparatus and method for imaging a sample, the apparatus comprising: a source for irradiating a sample with a beam of substantially continuous electromagnetic radiation having a frequency in the range 25 GHz to 100 THz; means for subdividing an area of the sample which is to be imaged into a two dimensional array of pixels; means for detecting radiation from each pixel wherein the detector is configured to detect a phase dependent quantity of the detected radiation which is measured relative to the radiation which irradiates the sample.

Abstract translation: 一种用于对样品成像的装置和方法，所述装置包括：用于用具有25GHz至100Hz的频率的基本上连续的电磁辐射束照射样品的源; 用于将待成像的样品的区域细分成二维像素阵列的装置; 用于检测来自每个像素的辐射的装置，其中所述检测器被配置为检测相对于照射所述样品的辐射测量的所述检测到的辐射的相位相关量。