公开(公告)号：US08629382B2

公开(公告)日：2014-01-14

申请号：US12676095

申请日：2008-08-29

Applicant: Ichiro Sase

Inventor： Ichiro Sase

IPC: G02B27/40 ,  H01J3/14 ,  G01J1/00

CPC classification number: G02B21/245

Abstract: An reference light emitted from an LED for auto focus enters a glass cover, on which a sample is adhered to, via a half mirror to an objective lens. The reference light that entered the glass cover is reflected by the boundary surface to be reflected light, and this reflected light enters a dichroic mirror via an objective lens. A part transmits the reflected light and allows the light to enter the camera via the dichroic mirror to the lens. A user rotates a motor-operated mirror while viewing the image of the reference light captured by a camera, so as to shift the reference light image position on the boundary surface.

Abstract translation: 从LED发出的用于自动对焦的参考光通过半透明反射镜进入物镜的玻璃盖，样品被粘附在其上。 进入玻璃盖的参考光被边界面反射成反射光，该反射光经由物镜进入分色镜。 部分透射反射光，并允许光通过分色镜进入相机进入镜头。 用户在观看由照相机拍摄的参考光的图像的同时旋转电动反射镜，以便移动边界表面上的参考光图像位置。

公开(公告)号：US08627822B2

公开(公告)日：2014-01-14

申请号：US12493205

申请日：2009-06-28

Applicant: Vladimir Balakin

Inventor： Vladimir Balakin

IPC: A47B13/00 ,  A47C20/00 ,  A61G15/00 ,  A61F5/37 ,  A61F13/00 ,  G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  G21K5/00 ,  A61N5/10 ,  G21K5/08 ,  G21K5/10

CPC classification number: A61N5/10 ,  A61N2005/1061 ,  A61N2005/1087

Abstract: The invention comprises a semi-vertical patient positioning, alignment, and/or control method and apparatus used in conjunction with charged particle or proton beam radiation therapy of cancerous tumors. Patient positioning constraints are used to maintain the patient in a treatment position, including one or more of: a seat support, a back support, a head support, an arm support, a knee support, and a foot support. One or more of the positioning constraints are movable and/or under computer control for rapid positioning and/or immobilization of the patient. The system optionally uses an X-ray beam that lies in substantially the same path as a proton beam path of a particle beam cancer therapy system. The generated image is usable for: fine tuning body alignment relative to the proton beam path, to control the proton beam path to accurately and precisely target the tumor, and/or in system verification and validation.

Abstract translation: 本发明包括与癌性肿瘤的带电粒子或质子束放射治疗结合使用的半垂直患者定位，对准和/或控制方法和装置。 患者定位限制用于将患者维持在治疗位置，包括以下中的一个或多个：座椅支撑件，背部支撑件，头部支撑件，手臂支撑件，膝盖支撑件和脚部支撑件。 一个或多个定位限制是可移动的和/或在计算机控制下，用于病人的快速定位和/或固定。 系统可选地使用位于与粒子束癌治疗系统的质子束路径基本相同的路径中的X射线束。 生成的图像可用于：相对于质子束路径精细调整身体对准，以控制质子束路径以准确且精确地靶向肿瘤，和/或在系统验证和验证中。

公开(公告)号：US08618496B2

公开(公告)日：2013-12-31

申请号：US13458861

申请日：2012-04-27

Applicant: Marco Jan-Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink ,  Alexander Hendrik Vincent van Veen ,  Alrik van den Brom

Inventor： Marco Jan-Jaco Wieland ,  Stijn Willem Herman Karel Steenbrink ,  Alexander Hendrik Vincent van Veen ,  Alrik van den Brom

IPC: G03B27/54 ,  H01J3/14

CPC classification number: G03F7/70 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/09 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/1205

Abstract: A charged particle system such as a multi beam lithography system. A manipulator device manipulates one or more charged particle beams. The manipulator device includes at least one through opening in the plane of the planar substrate for passing at least one charged particle. Each through opening is provided with electrodes arranged in a first set of multiple first electrodes along a first part of a perimeter of the through opening and in a second set of multiple second electrodes along a second part of the perimeter. An electronic control circuit is arranged for providing voltage differences the electrodes in dependence of a position of the first and second electrode along the perimeter of the through opening.

Abstract translation: 带电粒子系统，如多光束光刻系统。 操纵器装置操纵一个或多个带电粒子束。 所述操纵器装置包括在所述平面基板的平面中的至少一个通孔，用于使至少一个带电粒子通过。 每个通孔具有沿着通孔的周边的第一部分和沿着周边的第二部分的第二组多个第二电极中布置在第一组多个第一电极中的电极。 电子控制电路被布置用于根据第一和第二电极沿着通孔的周边的位置来提供电极的电压差。

公开(公告)号：US08569677B2

公开(公告)日：2013-10-29

申请号：US12843773

申请日：2010-07-26

Applicant: Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

Inventor： Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

IPC: H01J3/14 ,  H01J5/02

CPC classification number: G01J1/4257 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/429 ,  G01J1/58 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0245 ,  G01J3/2803

Abstract: The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Abstract translation: 本发明提供了一种包括一种装置的装置，该装置包括：（a）能够将光子束衍射成衍射光子输出的透射光栅，以及（b）能够检测衍射光子输出的图像检测器。 该装置可用于测量诸如真空紫外（VUV）光束的光子束的空间分布和衍射图案。

公开(公告)号：US08558161B2

公开(公告)日：2013-10-15

申请号：US12853566

申请日：2010-08-10

Applicant: Chi Boon Ong ,  Yufeng Yao ,  Sze Ping Ong

Inventor： Chi Boon Ong ,  Yufeng Yao ,  Sze Ping Ong

IPC: H01J3/14

CPC classification number: H01L33/58 ,  G02B3/02 ,  G02B19/0028 ,  G02B19/0061 ,  G02B19/0071 ,  G02B19/008 ,  H01L25/167 ,  H01L33/54 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A lens element comprising a base, a plurality of lens sections and a top lens section is disclosed. The plurality of lens sections are formed above a planar parallel to the base with each of the lens sections being positioned rotationally symmetric about an optical axis. The lens sections define a dome shape with every adjoining lens sections being conjugated with each other. A top lens section is formed at the center above the other lens sections and conjugated therewith. All of the lens sections are conjugated with each of its neighboring lens sections. Each of the lens sections has a optical property to direct light towards a target point. The target point may be positioned along the optical axis.

Abstract translation: 公开了一种包括基座，多个透镜部分和顶部透镜部分的透镜元件。 多个透镜部分形成在平行于基部的平面上方，每个透镜部分围绕光轴旋转对称。 透镜部分限定圆顶形状，每个相邻的透镜部分彼此共轭。 顶透镜部分形成在其它透镜部分上方的中心并与之共轭。 所有透镜部分与其相邻透镜部分中的每一个共轭。 每个透镜部分具有将光引向目标点的光学性质。 目标点可以沿着光轴定位。

公开(公告)号：US08546739B2

公开(公告)日：2013-10-01

申请号：US12541153

申请日：2009-08-13

Applicant: Min-Chih Hsuan ,  Tsung-Hsi Ko ,  Li-Che Chen

Inventor： Min-Chih Hsuan ,  Tsung-Hsi Ko ,  Li-Che Chen

IPC: H01J3/14 ,  H01J5/16

CPC classification number: H01L27/14618 ,  H01L27/14625 ,  H01L27/14627 ,  H01L27/14685 ,  H01L2224/05001 ,  H01L2224/05023 ,  H01L2224/13 ,  H01L2224/13025 ,  H01L2924/00014 ,  H04N5/2254 ,  H04N5/2257 ,  H01L2224/05599 ,  H01L2224/05099

Abstract: A manufacturing method of a wafer level chip scale package of an image-sensing module is provided. The method includes providing a wafer having a plurality of die regions, and a plurality of sensing units is formed on a surface of the wafer in each die region. A plurality of lens units is formed on the sensing units, wherein each lens unit includes a lens and an edge wall that are integrally formed. A light-shielding film is also formed on a surface of at least one edge wall of at least one lens units. A dicing process is then performed on the wafer to form a plurality of image sensor chips.

Abstract translation: 提供了一种图像感测模块的晶片级芯片级封装的制造方法。 该方法包括提供具有多个管芯区域的晶片，并且在每个管芯区域中在晶片的表面上形成多个感测单元。 在感测单元上形成多个透镜单元，其中每个透镜单元包括一体形成的透镜和边缘壁。 遮光膜也形成在至少一个透镜单元的至少一个边缘壁的表面上。 然后在晶片上进行切割处理以形成多个图像传感器芯片。

公开(公告)号：US08530822B2

公开(公告)日：2013-09-10

申请号：US12897108

申请日：2010-10-04

Applicant: Hiroyasu Kaseya

Inventor： Hiroyasu Kaseya

IPC: H01J3/14

CPC classification number: G02B19/0066 ,  G02B19/0014 ,  G02B19/0057 ,  G02B27/0961 ,  G02B27/1046 ,  G02B27/123 ,  G02B27/149 ,  G03B21/2053

Abstract: An illumination device includes: a light source which has an emission surface forming area where a plurality of emission surfaces are disposed; a plurality of converging lenses disposed in correspondence with the plural emission surfaces to converge emission lights emitted from the emission surfaces; a first fly-eye lens which divides lights converged by the plural converging lenses into a plurality of partial lights; a second fly-eye lens which converges the plural partial lights; and a condenser lens which stacks the plural partial lights converged by the second fly-eye lens on an illumination receiving area, wherein the plural converging lenses stack the emission lights on the first fly-eye lens.

Abstract translation: 照明装置包括：光源，其具有设置有多个发射面的发射面形成区域; 多个会聚透镜，与所述多个发射表面对应设置，以会聚从所述发射表面发射的发射光; 第一蝇眼透镜，其将由所述多个会聚透镜会聚的光分成多个部分光; 会聚多个局部光的第二个飞眼镜头; 以及聚光透镜，其将由所述第二复眼透镜会聚的所述多个部分光束叠加在照明接收区域上，其中，所述多个会聚透镜将所述发射光叠加在所述第一复眼透镜上。

公开(公告)号：US20130215425A9

公开(公告)日：2013-08-22

申请号：US12769364

申请日：2010-04-28

Applicant: Reuven Duer

Inventor： Reuven Duer

IPC: G01N21/00 ,  G02B6/00 ,  H01J3/14 ,  G02B6/26

CPC classification number: G02B6/4226

Abstract: The invention provides methods and devices for generating optical pulses in one or more waveguides using a spatially scanning light source. A detection system, methods of use thereof and kits for detecting a biologically active analyte molecule are also provided. The system includes a scanning light source, a substrate comprising a plurality of waveguides and a plurality of optical sensing sites in optical communication with one or more waveguide of the substrate, a detector that is coupled to and in optical communication with the substrate, and means for spatially translating a light beam emitted from said scanning light source such that the light beam is coupled to and in optical communication with the waveguides of the substrate at some point along its scanning path. The use of a scanning light sources allows the coupling of light into the waveguides of the substrate in a simple and cost-effective manner.

Abstract translation: 本发明提供了使用空间扫描光源在一个或多个波导中产生光脉冲的方法和装置。 还提供了检测系统，其使用方法和用于检测生物活性分析物分子的试剂盒。 该系统包括扫描光源，包括多个波导的基板和与基板的一个或多个波导光学通信的多个光学感测位置，耦合到基板并与光学连接的检测器，以及装置 用于空间地平移从所述扫描光源发射的光束，使得所述光束在沿其扫描路径的某点处耦合到所述衬底的波导并与所述衬底的波导光通信。 使用扫描光源允许以简单且成本有效的方式将光耦合到衬底的波导中。

公开(公告)号：US08507873B2

公开(公告)日：2013-08-13

申请号：US12767999

申请日：2010-04-27

Applicant: Shunji Shinkawa ,  Kouji Fukushima

Inventor： Shunji Shinkawa ,  Kouji Fukushima

IPC: H01J3/14

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00

Abstract: A detector 32 measures the value of the current formed by reflected electrons generated as a result of irradiation of a reference mark on a substrate with an electron beam 54, where the reference mark is made of a material having a different reflectance than the substrate. The signal from the detector 32 is amplified by a detecting unit 33 and converted to a digital signal by an A/D conversion unit 34. A control computer 19 then performs averaging processing on the digital signal which is then used for drift compensation by a writing data correcting unit 31.

Abstract translation: 检测器32测量由电子束54在衬底上照射参考标记而产生的反射电子形成的电流的值，其中参考标记由具有与衬底不同的反射率的材料制成。 来自检测器32的信号被检测单元33放大，并由A / D转换单元34转换成数字信号。然后，控制计算机19对数字信号执行平均处理，然后通过写入用于漂移补偿 数据校正单元31。

公开(公告)号：US20130175440A1

公开(公告)日：2013-07-11

申请号：US13345392

申请日：2012-01-06

Applicant: Gershon PERELMAN ,  Trygve RISTROPH

Inventor： Gershon PERELMAN ,  Trygve RISTROPH

IPC: H01J49/26 ,  H01J3/14

CPC classification number: H01J49/066 ,  H01J3/14 ,  H01J49/062 ,  H01J49/067

Abstract: Ion guides for use in mass spectrometry (MS) systems are described. The ion guides are configured to provide a reflective electrodynamic field and a direct current (DC or static) electric field to provide ion beams that are more spatially confined with a comparatively large mass range.

Abstract translation: 描述了用于质谱（MS）系统的离子导向器。 离子导向器被配置为提供反射电动力场和直流（DC或静态）电场，以提供在空间上被限制在较大质量范围内的离子束。