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公开(公告)号：US20120104519A1
公开(公告)日：2012-05-03
申请号：US13344964
申请日：2012-01-06
Applicant: Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
Inventor： Toru WATANABE , Akira SATO , Shogo INABA , Takeshi MORI
IPC: H01L29/84
CPC classification number: B81B3/0086 , B81B2201/0271
Abstract: A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
Abstract translation: 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。
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公开(公告)号：US20120012950A1
公开(公告)日：2012-01-19
申请号：US13243916
申请日：2011-09-23
Applicant: Shogo Inaba
Inventor： Shogo Inaba
CPC classification number: B81B3/007 , B81C2203/0163 , H01L2924/0002 , H01L2924/00
Abstract: A functional device includes: a substrate; a functional structure formed on the substrate; a cavity in which the functional structure is disposed; and a cover which covers the cavity, wherein the cover includes a bumpy structure including rib shaped portions, or groove shaped portions, which cross a covering range covering at least the cavity.
Abstract translation: 功能元件包括：基板; 形成在基板上的功能结构; 其中设置有所述功能结构的空腔; 以及覆盖所述空腔的盖，其中所述盖包括包括肋形部分或凹槽形部分的颠簸结构，所述凹形结构部分交叉覆盖至少所述腔的覆盖范围。
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公开(公告)号：US20110221536A1
公开(公告)日：2011-09-15
申请号：US13045960
申请日：2011-03-11
Applicant: Shogo INABA
Inventor： Shogo INABA
CPC classification number: H03H9/1057 , H01L29/84 , H03H3/0072 , H03H9/2452 , H03H2240/00
Abstract: A MEMS device includes a substrate, a cavity formed above the substrate, a first vibrator contained in the cavity, and a second vibrator contained in the cavity and having a natural frequency different from that of the first vibrator. The first vibrator and the second vibrator are preferably arranged along a long side of the cavity having a rectangular shape in plan view.
Abstract translation: MEMS器件包括衬底，在衬底上形成的空腔，容纳在空腔中的第一振动器和容纳在腔中并具有与第一振动器的固有频率不同的固有频率的第二振动器。 第一振动器和第二振动器优选地在平面图中沿着具有矩形形状的空腔的长边布置。
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公开(公告)号：US20110089521A1
公开(公告)日：2011-04-21
申请号：US12975065
申请日：2010-12-21
Applicant: Akira SATO , Toru Watanabe , Shogo Inaba , Takeshi Mori
Inventor： Akira SATO , Toru Watanabe , Shogo Inaba , Takeshi Mori
IPC: H01L29/06
CPC classification number: B81C1/00246 , B81B2207/015 , B81B2207/07 , B81C2203/0136 , B81C2203/0714 , B81C2203/0735 , H01L21/7682 , H01L24/05 , H01L2924/14 , H01L2924/00
Abstract: An electronic device, including a substrate, a functional structure constituting a functional element formed on the substrate, and a cover structure forming a cavity portion in which the functional structure is disposed, is disclosed. In the electronic device, the cover structure includes a laminated structure of an interlayer insulating film and a wiring layer, the laminated structure being formed on the substrate in such a way that it surrounds the cavity portion, and the cover structure has an upside cover portion covering the cavity portion from above, the upside cover portion being formed with part of the wiring layer that is disposed above the functional structure.
Abstract translation: 公开了一种电子设备，包括基板，构成在基板上形成的功能元件的功能结构，以及形成其中设置有功能结构的空腔部分的盖结构。 在电子设备中，盖结构包括层间绝缘膜和布线层的叠层结构，层叠结构以包围空腔部分的方式形成在基板上，并且盖结构具有上侧盖部分 从上方覆盖空腔部分，上侧盖部分形成有设置在功能结构上方的布线层的一部分。
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45.发明申请Micro-Electro-Mechanical-System (MEMS) Resonator and Manufacturing Method Thereof 有权微机电系统（MEMS）谐振器及其制造方法公开(公告)号：US20100090786A1
公开(公告)日：2010-04-15
申请号：US12639102
申请日：2009-12-16
Applicant: SHOGO INABA , AKIRA SATO
Inventor： SHOGO INABA , AKIRA SATO
CPC classification number: H03H9/2457 , H03H3/0072 , H03H9/02433 , H03H2009/02511
Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
Abstract translation: 一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。 面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。
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Patent Agency Ranking
公开(公告)号：US07696587B2
公开(公告)日：2010-04-13
申请号：US11876107
申请日：2007-10-22
Applicant: Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
Inventor： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
CPC classification number: B81B3/0086 , B81B2201/0271
Abstract: A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
Abstract translation: 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。
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47.发明授权Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof 有权微机电系统（MEMS）谐振器及其制造方法公开(公告)号：US07656252B2
公开(公告)日：2010-02-02
申请号：US11561146
申请日：2006-11-17
Applicant: Shogo Inaba , Akira Sato
Inventor： Shogo Inaba , Akira Sato
CPC classification number: H03H9/2457 , H03H3/0072 , H03H9/02433 , H03H2009/02511
Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
Abstract translation: 一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。 面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。
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公开(公告)号：US20090179287A1
公开(公告)日：2009-07-16
申请号：US12351758
申请日：2009-01-09
Applicant: Shogo Inaba
Inventor： Shogo Inaba
CPC classification number: B81B3/007 , B81C2203/0163 , H01L2924/0002 , H01L2924/00
Abstract: A functional device includes: a substrate; a functional structure formed on the substrate; a cavity in which the functional structure is disposed; and a cover which covers the cavity, wherein the cover includes a bumpy structure including rib shaped portions, or groove shaped portions, which cross a covering range covering at least the cavity.
Abstract translation: 功能元件包括：基板; 形成在基板上的功能结构; 其中设置有所述功能结构的空腔; 以及覆盖所述空腔的盖，其中所述盖包括包括肋形部分或凹槽形部分的颠簸结构，所述凹形结构部分交叉覆盖至少所述腔的覆盖范围。
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公开(公告)号：US20080142912A1
公开(公告)日：2008-06-19
申请号：US11928519
申请日：2007-10-30
Applicant: Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
Inventor： Shogo INABA , Akira SATO , Toru WATANABE , Takeshi MORI
IPC: H03H9/02 , H01L21/8228
CPC classification number: H03H3/0073 , H03H9/1057 , Y10S977/721
Abstract: A method is for manufacturing a microeletromechanical system resonator having a semiconductor device and a microelectromechanical system structure unit formed on a substrate. The method includes: forming a lower electrode of an oxide-nitride-oxide capacitor unit included in the semiconductor device using a first silicon layer; forming, using a second silicon layer, a substructure of the microelectromechanical system structure unit and an upper electrode of the oxide-nitride-oxide capacitor unit included in the semiconductor device; and forming, using a third silicon layer, a superstructure of the microelectromechanical system structure unit and a gate electrode of a complementary metal oxide semiconductor circuit unit included in the semiconductor device.
Abstract translation: 一种用于制造具有半导体器件和形成在衬底上的微机电系统结构单元的微机械系统谐振器的方法。 该方法包括：使用第一硅层形成包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的下电极; 使用第二硅层形成微机电系统结构单元的子结构和包括在半导体器件中的氧化物 - 氮化物 - 氧化物电容器单元的上电极; 以及使用第三硅层形成所述微机电系统结构单元的上部结构和包括在所述半导体器件中的互补金属氧化物半导体电路单元的栅电极。
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50.发明申请MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) RESONATOR AND MANUFACTURING METHOD THEREOF 有权微电子机械系统（MEMS）谐振器及其制造方法公开(公告)号：US20070109074A1
公开(公告)日：2007-05-17
申请号：US11561146
申请日：2006-11-17
Applicant: Shogo Inaba , Akira Sato
Inventor： Shogo Inaba , Akira Sato
IPC: H03H9/00
CPC classification number: H03H9/2457 , H03H3/0072 , H03H9/02433 , H03H2009/02511
Abstract: A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
Abstract translation: 一种微电子机械系统谐振器，包括：基板; 形成在基板上的固定电极; 以及可动电极，其布置成面对固定电极并且通过作用在固定电极和可动电极之间的间隙的静电吸引力或静电排斥力驱动。 面对固定电极的可动电极的支撑梁的内表面具有倾斜表面。
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