Multiplexed optical communication between chips on a multi-chip module
    41.
    发明申请
    Multiplexed optical communication between chips on a multi-chip module 审中-公开
    多芯片模块之间的芯片之间的复用光通信

    公开(公告)号:US20070258675A1

    公开(公告)日:2007-11-08

    申请号:US11418126

    申请日:2006-05-05

    CPC classification number: G02B6/43 B82Y20/00 H01J25/00

    Abstract: When using micro-resonant structures, it is possible to use the same source of charged particles to cause multiple resonant structures to emit electromagnetic radiation. This reduces the number of sources that are required for multi-element configurations, such as displays with plural rows (or columns) of pixels. In one such embodiment, at least one deflector is placed in between first and second resonant structures. After the beam passes by at least a portion of the first resonant structure, it is directed to a path such that it can be directed towards the second resonant structure. The amount of deflection needed to direct the beam toward the second resonant structure is based on the amount of deflection, if any, that the beam underwent as it passed by the first resonant structure. This process can be repeated in series as necessary to produce a set of resonant structures in series.

    Abstract translation: 当使用微谐振结构时,可以使用相同的带电粒子源来引起多个谐振结构发射电磁辐射。 这减少了多元素配置所需的源数,例如具有多行(或多列)像素的显示。 在一个这样的实施例中,至少一个偏转器被放置在第一和第二谐振结构之间。 在光束通过第一谐振结构的至少一部分之后,它被引向路径,使得其可以被引向第二共振结构。 将光束引向第二谐振结构所需的偏转量基于当光束经过第一谐振结构时经过的偏转量(如果有的话)。 该过程可以根据需要串联重复以产生一组串联的共振结构。

    Heterodyne receiver using resonant structures
    42.
    发明申请
    Heterodyne receiver using resonant structures 有权
    使用谐振结构的异步接收机

    公开(公告)号:US20070257199A1

    公开(公告)日:2007-11-08

    申请号:US11418088

    申请日:2006-05-05

    CPC classification number: H03D9/02 H01J25/00

    Abstract: An electronic receiver for decoding data encoded into electromagnetic radiation (e.g., light) is described. The light is received at an ultra-small resonant structure. The resonant structure generates an electric field in response to the incident light and light received from a local oscillator. An electron beam passing near the resonant structure is altered on at least one characteristic as a result of the electric field. Data is encoded into the light by a characteristic that is seen in the electric field during resonance and therefore in the electron beam as it passes the electric field. Alterations in the electron beam are thus correlated to data values encoded into the light.

    Abstract translation: 描述了用于对编码成电磁辐射(例如,光)的数据进行解码的电子接收机。 光以超小的谐振结构被接收。 谐振结构响应于从本地振荡器接收的入射光和光产生电场。 通过谐振结构附近的电子束由于电场而在至少一个特性上改变。 数据通过在谐振期间在电场中看到的特性并因此在电子束通过电场时在电子束中被编码成光。 因此,电子束中的变化与编码为光的数据值相关。

    Source of x-rays
    43.
    发明申请
    Source of x-rays 有权
    X光源

    公开(公告)号:US20070253535A1

    公开(公告)日:2007-11-01

    申请号:US11411131

    申请日:2006-04-26

    CPC classification number: H05G2/00 H01J25/00

    Abstract: A charged particle beam including charged particles (e.g., electrons) is generated from a charged particle source (e.g., a cathode or scanning electron beam). As the beam is projected, it passes between plural alternating electric fields. The attraction of the charged particles to their oppositely charged fields accelerates the charged particles, thereby increasing their velocities in the corresponding (positive or negative) direction. The charged particles therefore follow an oscillating trajectory. When the electric fields are selected to produce oscillating trajectories having the same (or nearly the same) as a multiple of the frequency of the emitted x-rays, the resulting photons can be made to constructively interfere with each other to produce a coherent x-ray source.

    Abstract translation: 从带电粒子源(例如阴极或扫描电子束)产生包括带电粒子(例如电子)的带电粒子束。 当光束投射时,它通过多个交变电场。 带电粒子对其带电荷的场的吸引力加速了带电粒子,从而在相应的(正或负)方向上增加了它们的速度。 带电粒子因此遵循振荡轨迹。 当选择电场以产生具有与发射的x射线的频率的倍数相同(或几乎相同)的振荡轨迹时,可以使得到的光子相互干涉以产生相干的x射线, 射线源。

    Resonant structure-based display
    44.
    发明申请
    Resonant structure-based display 失效
    基于结构的共振显示

    公开(公告)号:US20070152938A1

    公开(公告)日:2007-07-05

    申请号:US11325432

    申请日:2006-01-05

    Abstract: A display of wavelength elements can be produced from resonant structures that emit light (and other electromagnetic radiation having a dominant frequency higher than that of microwave) when exposed to a beam of charged particles, such as electrons from an electron beam. An exemplary display with three wavelengths per pixel utilizes three resonant structures per pixel. The spacings and lengths of the fingers of the resonant structures control the light emitted from the wavelength elements. Alternatively, multiple resonant structures per wavelength can be used as well.

    Abstract translation: 当暴露于带电粒子束(例如来自电子束的电子)时,可以从发出光的谐振结构(和具有高于微波的主频的其他电磁辐射)产生波长元件的显示。 每像素具有三个波长的示例性显示器每像素使用三个谐振结构。 谐振结构的指状物的间距和长度控制从波长元件发射的光。 或者,也可以使用每个波长的多个谐振结构。

    Method of patterning ultra-small structures
    45.
    发明申请
    Method of patterning ultra-small structures 审中-公开
    图案超小结构的方法

    公开(公告)号:US20070034518A1

    公开(公告)日:2007-02-15

    申请号:US11203407

    申请日:2005-08-15

    CPC classification number: C25D5/18 C25D5/022

    Abstract: We describe a process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.

    Abstract translation: 我们描述了一种制造尺寸为纳米至数百微米之间的超小结构的方法,其中结构是紧凑的,无孔的并且呈现平滑的垂直表面。 使用脉冲电镀技术以受控和可预测的方式使用超短脉冲来实现这种处理。

    Patterning thin metal films by dry reactive ion etching
    46.
    发明申请
    Patterning thin metal films by dry reactive ion etching 审中-公开
    通过干式反应离子蚀刻来形成薄金属薄膜

    公开(公告)号:US20060035173A1

    公开(公告)日:2006-02-16

    申请号:US10917511

    申请日:2004-08-13

    CPC classification number: H01L21/32136 H01L21/32139

    Abstract: We describe a new method for etching patterns in silver, copper, or gold, or other plate metal thin films. A pattern of a hard mask is placed onto the surface of the thin film, followed by a step of reactive ion etching using a plasma formed using a gas feed of some combination of some amounts of methane (CH4) and hydrogen (H2), and some or no amount of Argon (Ar). The areas of silver, copper or gold not covered by the hard mask are etched while the hard mask protects those areas that will form the raised portions of thin film in the final structure.

    Abstract translation: 我们描述了一种蚀刻银,铜或金或其他板金属薄膜图案的新方法。 将硬掩模的图案放置在薄膜的表面上,然后使用使用一些组合的一些量的甲烷(CH 3 SO 4)的气体进料形成的等离子体进行反应离子蚀刻的步骤 )和氢(H 2 H 2),以及一些或不含氩量(Ar)。 蚀刻没有被硬掩模覆盖的银,铜或金的区域,而硬掩模保护在最终结构中将形成薄膜的凸起部分的那些区域。

    Mireau interference objective lens v3
    47.
    发明申请
    Mireau interference objective lens v3 失效
    Mireau干涉物镜v3

    公开(公告)号:US20060007557A1

    公开(公告)日:2006-01-12

    申请号:US10886817

    申请日:2004-07-08

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G02B21/02 G02B27/0068

    Abstract: A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.

    Abstract translation: 通过并入玻璃校正物镜,对分光镜和反射镜支撑窗所引起的球面和其它像差校正Mireau干涉显微镜。 用于分束器和反射镜的支撑窗口具有在玻璃校正物镜的调节范围内的组合厚度。

    Interference scatterometer
    49.
    发明申请
    Interference scatterometer 有权
    干涉散射仪

    公开(公告)号:US20050046855A1

    公开(公告)日:2005-03-03

    申请号:US10647742

    申请日:2003-08-25

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G03F7/70633 G01J3/453 G01N21/95684

    Abstract: An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

    Abstract translation: 干涉光谱仪可以同时测量多个波长和角度上的镜面散射。 光谱仪器包括由科勒照明器照明的干涉显微镜和摄像机,其用于对显微镜物镜的后焦面进行成像,同时路径长度差在参考路径和对象路径之间变化。 多通道傅里叶分析将合成的强度信息转换为镜面反射率数据作为波长的函数。 这种大量的测量数据提供了一种更敏感的散射测量工具,在测量半导体器件上的小图案以及测量这些器件上的覆盖层方面具有卓越的性能。

    Aplanatic microlens and method for making same
    50.
    发明授权
    Aplanatic microlens and method for making same 失效
    微波微透镜及其制作方法

    公开(公告)号:US5282088A

    公开(公告)日:1994-01-25

    申请号:US963064

    申请日:1992-10-19

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G02B6/3834 G02B3/00 G02B6/2552 G02B6/4206

    Abstract: An aplanatic microlens consisting of a sphere which is less than one millimeters in diameter. The sphere is made of a transparent material and has a plane surface ground into it so that the radial distance from the center of the sphere to the nearest point on the plane surface is equal to the radius of the sphere divided by the ratio of the index of refraction of the transparent material and the index of refraction of the medium which will surround the lens in use.

    Abstract translation: 由直径小于1毫米的球体组成的微细微透镜。 球体由透明材料制成,并具有一个平面表面磨合成平面,使得从球体中心到平面上最近点的径向距离等于球体的半径除以指数的比值 透明材料的折射率和在使用中将围绕透镜的介质的折射率。

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