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41.发明授权公开(公告)号：US11131929B2
公开(公告)日：2021-09-28
申请号：US16183728
申请日：2018-11-07
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.
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公开(公告)号：US20210191276A1
公开(公告)日：2021-06-24
申请号：US17166743
申请日：2021-02-03
Applicant: Waymo LLC
Inventor： Hongqin Shi , Yeh-Jiun Tung , James Dunphy , Cesar Gensoli
IPC: G03F7/20
Abstract: The present application relates to contact immersion lithography exposure units and methods of their use. An example contact exposure unit includes a container configured to contain a fluid material and a substrate disposed within the container. The substrate has a first surface and a second surface, and the substrate includes a photoresist material on at least the first surface. The contact exposure unit includes a photomask disposed within the container. The photomask is optically coupled to the photoresist material by way of a gap comprising the fluid material. The contact exposure unit also includes an inflatable balloon configured to be controllably inflated so as to apply a desired force to the second surface of the substrate to controllably adjust the gap between the photomask and the photoresist material.
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公开(公告)号：US20210124020A1
公开(公告)日：2021-04-29
申请号：US16667833
申请日：2019-10-29
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison , Pierre-Yves Droz , Yeh-Jiun Tung
Abstract: One example LIDAR device comprises a substrate and a waveguide disposed on the substrate. A first section of the waveguide extends lengthwise on the substrate in a first direction. A second section of the waveguide extends lengthwise on the substrate in a second direction different than the first direction. A third section of the waveguide extends lengthwise on the substrate in a third direction different than the second direction. The second section extends lengthwise between the first section and the second section. The LIDAR device also comprises a light emitter configured to emit light. The waveguide is configured to guide the light inside the first section toward the second section, inside the second section toward the third section, and inside the third section away from the second section.
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Patent Agency Ranking
公开(公告)号：US20200096634A1
公开(公告)日：2020-03-26
申请号：US16140535
申请日：2018-09-25
Applicant: Waymo LLC
Inventor： Pierre-Yves Droz , David Neil Hutchison , James Dunphy , Nathaniel Golshan , Ralph Hamilton Shepard
Abstract: One example system comprises a light source configured to emit light. The system also comprises a waveguide configured to guide the emitted light from a first end of the waveguide toward a second end of the waveguide. The waveguide has an output surface between the first end and the second end. The system also comprises a plurality of mirrors including a first mirror and a second mirror. The first mirror reflects a first portion of the light toward the output surface. The second mirror reflects a second portion of the light toward the output surface. The first portion propagates out of the output surface toward a scene as a first transmitted light beam. The second portion propagates out of the output surface toward the scene as a second transmitted light beam.
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公开(公告)号：US20240159885A1
公开(公告)日：2024-05-16
申请号：US18417904
申请日：2024-01-19
Applicant: Waymo LLC
Inventor： James Dunphy , David Schleuning , Ralph Shepard
CPC classification number: G01S7/497 , G02B26/0833
Abstract: The present disclosure relates to multi-channel optical transmitter modules, lidar systems, and methods that involve micromirror devices. An example optical transmitter module includes at least one light-emitter device and a plurality of micromirror devices optically-coupled to the at least one light-emitter device. The at least one light-emitter device is configured to emit respective light beams toward an environment via the micromirror devices. The micromirror devices are configured to deflect the light beams. The optical transmitter module also includes a controller having at least one processor and a memory. The controller is configured to carry out operations. The operations include receiving information indicative of a retroreflector object in the environment. The operations include, based on the received information, causing at least one micromirror device of the plurality of micromirror devices to deflect at least one light beam so the at least one light beam does not interact with the retroreflector object.
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公开(公告)号：US20230099679A1
公开(公告)日：2023-03-30
申请号：US18053255
申请日：2022-11-07
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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公开(公告)号：US20210405536A1
公开(公告)日：2021-12-30
申请号：US17474779
申请日：2021-09-14
Applicant: Waymo LLC
Inventor： James Dunphy , David Hutchison
Abstract: The present disclosure relates to systems and methods relating to the fabrication of light guide elements. An example system includes an optical component configured to direct light emitted by a light source to illuminate a photoresist material at one or more desired angles so as to expose an angled structure in the photoresist material. The photoresist material overlays at least a portion of a first surface of a substrate. The optical component includes a container containing a light-coupling material that is selected based in part on the one or more desired angles. The system also includes a reflective surface arranged to reflect at least a first portion of the emitted light to illuminate the photoresist material at the one or more desired angles.
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48.发明申请公开(公告)号：US20210349185A1
公开(公告)日：2021-11-11
申请号：US17061003
申请日：2020-10-01
Applicant: Waymo LLC
Inventor： David Schleuning , Pierre-Yves Droz , Jason Watson , James Dunphy
IPC: G01S7/487 , G01S7/481 , G01S7/4863
Abstract: Example embodiments relate to crosstalk reduction for light detection and ranging (lidar) devices using wavelength locking. An example embodiment includes a lidar device. The lidar device includes a first light emitter configured to emit a first light signal and a second light emitter configured to emit a second light signal. The lidar device also includes a first light guide and a second light guide. In addition, the lidar device includes a first light detector and a second light detector. Further, the lidar device includes a first wavelength-locking mechanism configured to use a portion of the first light signal to maintain a wavelength of the first light signal and a second wavelength-locking mechanism configured to use a portion of the second light signal to maintain a wavelength of the second light signal. The wavelengths of the first light signal and the second light signal are different.
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