公开(公告)号：US20080269614A1

公开(公告)日：2008-10-30

申请号：US12062240

申请日：2008-04-03

Applicant: Hideo ADACHI ,  Katsuhiro WAKABAYASHI ,  Kosei TAMIYA ,  Masaaki AMIKURA ,  Kazuya MATSUMOTO ,  Ryo OHTA ,  Mamoru HASEGAWA ,  Hiroshi ITO

Inventor： Hideo ADACHI ,  Katsuhiro WAKABAYASHI ,  Kosei TAMIYA ,  Masaaki AMIKURA ,  Kazuya MATSUMOTO ,  Ryo OHTA ,  Mamoru HASEGAWA ,  Hiroshi ITO

IPC: A61B8/00 ,  B06B1/02 ,  H01L41/09

CPC classification number: A61B8/00 ,  A61B8/12 ,  B06B1/0207 ,  B06B1/0292 ,  B06B2201/51 ,  G01N29/2406

Abstract: A capacitive micromachined ultrasonic transducer (cMUT) device, comprising: a cMUT formed on a semiconductor substrate; a DC high-voltage generation unit that is provided on the semiconductor substrate and that is for generating a DC high-voltage signal to be superposed on a driving signal for the cMUT; a driving signal generation unit that is provided on the semiconductor substrate and that is for generating the driving signal; and a superposition unit that is provided on the semiconductor substrate and that is for branching the DC high-voltage signal output from the DC high-voltage generation unit and for superposing one of the branched DC high-voltage signals on the other of the branched DC high-voltage signals via the driving signal generation unit.

Abstract translation: 一种电容微加工超声波换能器（cMUT）装置，包括：形成在半导体衬底上的cMUT; DC高电压产生单元，设置在半导体基板上，用于产生叠加在cMUT的驱动信号上的DC高电压信号; 驱动信号生成单元，其设置在所述半导体基板上，用于产生所述驱动信号; 以及叠加单元，其设置在所述半导体基板上，并且用于分支从所述直流高压发生单元输出的所述直流高电压信号，并且用于将所述分支直流高电压信号中的一个叠加在所述分支DC 通过驱动信号发生单元的高电压信号。

公开(公告)号：US06795374B2

公开(公告)日：2004-09-21

申请号：US09949420

申请日：2001-09-07

Applicant: Stephen R. Barnes ,  Robert N. Phelps ,  Mirsaid Seyed Bolorforosh

Inventor： Stephen R. Barnes ,  Robert N. Phelps ,  Mirsaid Seyed Bolorforosh

IPC: H04B138

CPC classification number: H04R23/00 ,  B06B1/0215 ,  B06B1/0292 ,  B06B2201/51 ,  B06B2201/76 ,  G01S7/52033 ,  G01S7/52038 ,  G01S7/52039 ,  G01S15/8915 ,  G01S15/895 ,  H04R2201/021

Abstract: A method and system for controlling bias voltage for use with an electrostatic transducer are provided. The bias voltage is dynamically varied or set as a function of imaging mode, depth gain compensation, elevational apodization, azimuthal apodization, timing with respect to the transmit waveform, center frequency of transmit and receive waves and desired modulation. Opposite polarity on sub-elements is also provided for removing signals from electromagnetic interference and crosstalk between elements.

Abstract translation: 提供了一种用于控制与静电换能器一起使用的偏置电压的方法和系统。 偏置电压根据成像模式，深度增益补偿，高程变迹，方位角变迹，发射波形的定时，发射和接收波的中心频率以及期望的调制而动态变化或设置。 还提供了子元件上的相反极性，用于从电磁干扰和元件之间的串扰中去除信号。

公开(公告)号：US20040064280A1

公开(公告)日：2004-04-01

申请号：US10261641

申请日：2002-09-30

Applicant: Robert Bosch Corporation

Inventor： Ralf Seip ,  Russell C. Watts

IPC: G10K011/00

CPC classification number: B60H1/00742 ,  B06B1/0215 ,  B06B2201/40 ,  B06B2201/51 ,  B06B2201/70 ,  B60H1/00735 ,  B60H1/00771 ,  B60H1/00814 ,  B60R21/01536 ,  B60W30/18054 ,  B60W40/09 ,  B60W2040/0818 ,  G01S7/52006 ,  G01S7/5205 ,  G01S7/521

Abstract: Method, apparatus and computer programs are described for compensating for the effect of temperature on the sensitivity of electrostatic ultrasound (US) transducers, particularly as used in an automotive occupancy sensing (AOS) systems for sensing the nature or type of occupant and the location of the occupant with respect to the vehicle interior. The invention permits the AOS to classify the occupancy state of the vehicle from a US echo signal substantially free of the effects of temperature on signal amplitude. A capacitive divider or voltage monitor is employed to measure the capacitance of the transducer. The voltage monitor output is used by the scaling algorithm of a compensator to determine the scaling factor to be applied to the US transducer signal to compensate for the effect of temperature on the transducer sensitivity. Calibration procedures and software are disclosed for determining the coefficients of the scaling algorithm to compensate for temperature effects and also to compensate for installation factors, transducer manufacturing variations, and circuit board effects. The system disclosed is useful for other types of signal processing in addition to temperature compensation of AOS ultrasonic signals, and may be used in other ranging devices such as cameras, golf or binocular range finders, and measuring devices and instruments.

Abstract translation: 描述了用于补偿温度对静电超声波（US）传感器的灵敏度的影响的方法，装置和计算机程序，特别是在用于感测乘员的性质或类型的汽车占用感测（AOS）系统中使用的位置以及 乘客相对于车辆内部。 本发明允许AOS从基本上不受温度对信号幅度的影响的美国回波信号分类车辆的占用状态。 采用电容分压器或电压监视器来测量传感器的电容。 电压监视器输出由补偿器的缩放算法使用，以确定应用于美国换能器信号的比例因子，以补偿温度对传感器灵敏度的影响。 公开了用于确定缩放算法的系数以补偿温度影响并且还补偿安装因素，换能器制造变化和电路板效应的校准程序和软件。 除了AOS超声波信号的温度补偿之外，所公开的系统对于其它类型的信号处理也是有用的，并且可以用于其他测距装置，例如相机，高尔夫或双目测距仪，以及测量装置和仪器。

公开(公告)号：US20020147558A1

公开(公告)日：2002-10-10

申请号：US10002453

申请日：2001-11-01

Applicant: Robert Bosch Corporation

Inventor： Ralf Seip ,  Russell C. Watts

IPC: G06F019/00

CPC classification number: B60H1/00742 ,  B06B1/0215 ,  B06B2201/40 ,  B06B2201/51 ,  B06B2201/70 ,  B60H1/00735 ,  B60H1/00771 ,  B60H1/00814 ,  B60R21/01536 ,  B60W30/18054 ,  B60W40/09 ,  B60W2040/0818 ,  G01S7/52006 ,  G01S7/5205 ,  G01S7/521

Abstract: Method, apparatus and computer programs are described for compensating for the effect of temperature on the sensitivity of electrostatic ultrasound (US) transducers, particularly as used in an automotive occupancy sensing (AOS) systems for sensing the nature or type of occupant and the location of the occupant with respect to the vehicle interior. The invention permits the AOS to classify the occupancy state of the vehicle from a US echo signal substantially free of the effects of temperature on signal amplitude. A capacitive divider or voltage monitor is employed to measure the capacitance of the transducer. The voltage monitor output is used by the scaling algorithm of a compensator to determine the scaling factor to be applied to the US transducer signal to compensate for the effect of temperature on the transducer sensitivity. Calibration procedures and software are disclosed for determining the coefficients of the scaling algorithm to compensate for temperature effects and also to compensate for installation factors, transducer manufacturing variations, and circuit board effects. The system disclosed is useful for other types of signal processing in addition to temperature compensation of AOS ultrasonic signals, and may be used in other ranging devices such as cameras, golf or binocular range finders, and measuring devices and instruments.

Abstract translation: 描述了用于补偿温度对静电超声波（US）传感器的灵敏度的影响的方法，装置和计算机程序，特别是在用于感测乘员的性质或类型的汽车占用感测（AOS）系统中使用的位置以及 乘客相对于车辆内部。 本发明允许AOS从基本上不受温度对信号幅度的影响的美国回波信号分类车辆的占用状态。 采用电容分压器或电压监视器来测量传感器的电容。 电压监视器输出由补偿器的缩放算法使用，以确定应用于美国换能器信号的比例因子，以补偿温度对传感器灵敏度的影响。 公开了用于确定缩放算法的系数以补偿温度影响并且还补偿安装因素，换能器制造变化和电路板效应的校准程序和软件。 除了AOS超声波信号的温度补偿之外，所公开的系统对于其它类型的信号处理也是有用的，并且可以用于其他测距装置，例如相机，高尔夫或双目测距仪，以及测量装置和仪器。

公开(公告)号：US06314380B1

公开(公告)日：2001-11-06

申请号：US09325242

申请日：1999-06-03

Applicant: Ralf Seip ,  Russell C. Watts

Inventor： Ralf Seip ,  Russell C. Watts

IPC: G01K1500

CPC classification number: B60H1/00742 ,  B06B1/0215 ,  B06B2201/40 ,  B06B2201/51 ,  B06B2201/70 ,  B60H1/00735 ,  B60H1/00771 ,  B60H1/00814 ,  B60R21/01536 ,  B60W30/18054 ,  B60W40/09 ,  B60W2040/0818 ,  G01S7/52006 ,  G01S7/5205 ,  G01S7/521

Abstract: Method, apparatus and computer programs are described for compensating for the effect of temperature on the sensitivity of electrostatic ultrasound (US) transducers, particularly as used in an automotive occupancy sensing (AOS) systems for sensing the nature or type of occupant and the location of the occupant with respect to the vehicle interior. The invention permits the AOS to classify the occupancy state of the vehicle from a US echo signal substantially free of the effects of temperature on signal amplitude. A capacitive divider or voltage monitor is employed to measure the capacitance of the transducer. The voltage monitor output is used by the scaling algorithm of a compensator to determine the scaling factor to be applied to the US transducer signal to compensate for the effect of temperature on the transducer sensitivity. Calibration procedures and software are disclosed for determining the coefficients of the scaling algorithm to compensate for temperature effects and also to compensate for installation factors, transducer manufacturing variations, and circuit board effects. The system disclosed is useful for other types of signal processing in addition to temperature compensation of AOS ultrasonic signals, and may be used in other ranging devices such as cameras, golf or binocular range finders, and measuring devices and instruments.

Abstract translation: 描述了用于补偿温度对静电超声波（US）传感器的灵敏度的影响的方法，装置和计算机程序，特别是在用于感测乘员的性质或类型的汽车占用感测（AOS）系统中使用的位置以及 乘客相对于车辆内部。 本发明允许AOS从基本上不受温度对信号幅度的影响的美国回波信号分类车辆的占用状态。 采用电容分压器或电压监视器来测量传感器的电容。 电压监视器输出由补偿器的缩放算法使用，以确定应用于美国换能器信号的比例因子，以补偿温度对传感器灵敏度的影响。 公开了用于确定缩放算法的系数以补偿温度影响并且还补偿安装因素，换能器制造变化和电路板效应的校准程序和软件。 除了AOS超声波信号的温度补偿之外，所公开的系统对于其它类型的信号处理也是有用的，并且可以用于其他测距装置，例如相机，高尔夫或双目测距仪，以及测量装置和仪器。

公开(公告)号：US20230347381A1

公开(公告)日：2023-11-02

申请号：US17796467

申请日：2021-02-02

Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO

Inventor： Paul Louis Maria Joseph VAN NEER ,  Arno Willem Frederik VOLKER ,  Gerwin Hermanus GELINCK ,  Hylke Broer AKKERMAN ,  Antonius Maria Bernardus VAN MOL

IPC: B06B1/06 ,  B06B1/02

CPC classification number: B06B1/0611 ,  B06B1/0215 ,  B06B1/0292 ,  B06B2201/20 ,  B06B2201/51 ,  B06B2201/55

Abstract: An ultrasonic transducer is described that includes a stack of at least two membranes attached to a substrate. An electric circuit is coupled to the electrodes with a controller configured to apply a first electric signal to a first electrode on the first membrane, and a different, second electric signal to a second electrode on the second membrane. The first and second electric signals are configured to apply a varying voltage between the first electrode and the second electrode during a respective vibration cycle of the membranes. The first electrode on the first membrane is configured to interact with the second electrode on the second membrane by a varying electrostatic force during the respective vibration cycle depending on the varying voltage.

公开(公告)号：US20180229269A1

公开(公告)日：2018-08-16

申请号：US15751252

申请日：2016-08-02

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： BERNARD JOSEPH SAVORD ,  RICHARD EDWARD DAVIDSEN

IPC: B06B1/02 ,  A61B8/00 ,  A61B8/08 ,  G01S7/52 ,  G01S15/89 ,  G01N29/24

CPC classification number: B06B1/0292 ,  A61B8/14 ,  A61B8/4483 ,  A61B8/488 ,  B06B2201/51 ,  B06B2201/76 ,  G01N29/2406 ,  G01S7/52026 ,  G01S7/5208 ,  G01S15/8925 ,  G01S15/895

Abstract: An array of CMUT cells has a DC bias voltage coupled to the top electrodes of the cells to bias the electrode to a desired collapsed or partially collapsed state. In the event of a short-circuit failure of a CMUT cell a protection circuit for the cell senses an over-current condition and responds by opening the DC current path through the failed cell. The protection circuit further disables the transmit and receive circuitry of the cell. In another implementation a sense circuit senses an over-current condition of theDC bias supply and responds by disabling all of the CMUT cells of the array, then sequentially re-enabling them, except that an attempt to re-enable a failed cell results in that cell remaining in a disabled state.

公开(公告)号：US20180221917A1

公开(公告)日：2018-08-09

申请号：US15890033

申请日：2018-02-06

Applicant: CANON KABUSHIKI KAISHA

Inventor： Ayako Maruyama ,  Yutaka Setomoto

IPC: B06B1/02 ,  G01N29/24 ,  B81B3/00 ,  G01H11/06

CPC classification number: B06B1/0292 ,  B06B1/0207 ,  B06B2201/51 ,  B81B3/0021 ,  G01H11/06 ,  G01N29/221 ,  G01N29/2406 ,  G01N29/2456

Abstract: A capacitive micromachined ultrasonic transducer includes an element. The element includes a plurality of cells. First electrodes in the plurality of cells are electrically connected together to form a first common electrode, and second electrodes in the plurality of cells are electrically connected together to form a second common electrode. The first common electrode and the second common electrode are opposed to each other only in an area with the gap therebetween. An area of the element with the first common electrode is wider than an area of the element without the first common electrode.

公开(公告)号：US09899371B2

公开(公告)日：2018-02-20

申请号：US15259243

申请日：2016-09-08

Applicant: Butterfly Network, Inc.

Inventor： Jonathan M. Rothberg ,  Keith G. Fife ,  Nevada J. Sanchez ,  Susan A. Alie

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/768 ,  H01L27/06 ,  B06B1/02 ,  B81B7/00 ,  H01L21/3213 ,  H01L21/56 ,  H01L21/8238 ,  H01L23/522 ,  H01L23/528 ,  A61B8/00 ,  H01L27/092

CPC classification number: H01L27/0617 ,  A61B8/00 ,  A61B8/4494 ,  B06B1/02 ,  B06B1/0292 ,  B06B2201/51 ,  B81B3/0021 ,  B81B7/0006 ,  B81B2201/0271 ,  B81C1/00158 ,  B81C1/00246 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01L21/32134 ,  H01L21/56 ,  H01L21/768 ,  H01L21/76838 ,  H01L21/823871 ,  H01L23/5226 ,  H01L23/528 ,  H01L27/0688 ,  H01L27/092 ,  H01L2224/16225

Abstract: Micromachined ultrasonic transducers formed in complementary metal oxide semiconductor (CMOS) wafers are described, as are methods of fabricating such devices. A metallization layer of a CMOS wafer may be removed by sacrificial release to create a cavity of an ultrasonic transducer. Remaining layers may form a membrane of the ultrasonic transducer.

公开(公告)号：US20170363581A1

公开(公告)日：2017-12-21

申请号：US15679876

申请日：2017-08-17

Applicant: UltraPower LLC

Inventor： Inder Raj S. Makin ,  Harry Jabs ,  Leon J. Radziemski

IPC: G01N29/04 ,  H02J7/02 ,  G01N29/24 ,  H02J50/15 ,  B06B1/02 ,  H02J7/00

CPC classification number: G01N29/04 ,  B06B1/0207 ,  B06B2201/51 ,  B06B2201/55 ,  B60C23/0469 ,  G01N29/24 ,  H02J7/0042 ,  H02J7/0047 ,  H02J7/025 ,  H02J50/15 ,  H02J50/40 ,  H02J50/80 ,  H04B11/00

Abstract: Ultrasonic transmitting elements in an electroacoustical transceiver transmit acoustic energy to an electroacoustical transponder, which includes ultrasonic receiving elements to convert the acoustic energy into electrical power for the purposes of powering one or more sensors that are electrically coupled to the electroacoustical transponder. The electroacoustical transponder transmits data collected by the sensor(s) back to the electroacoustical transceiver wirelessly, such as through impedance modulation or electromagnetic waves. A feedback control loop can be used to adjust system parameters so that the electroacoustical transponder operates at an impedance minimum. An implementation of the system can be used to collect data in a vehicle, such as the tire air pressure. Another implementation of the system can be used to collect data in remote locations, such as in pipes, enclosures, in wells, or in bodies of water.