公开(公告)号：US20050272590A1

公开(公告)日：2005-12-08

申请号：US11172950

申请日：2005-07-05

Applicant: Yasutomi Iwahashi ,  Akio Koike

Inventor： Yasutomi Iwahashi ,  Akio Koike

IPC: C03B8/04 ,  C03B19/14 ,  C03B20/00 ,  C03B37/014 ,  C03C3/06 ,  C03C3/112 ,  C03C4/00 ,  G03F1/22 ,  G03F1/24 ,  H01L21/027 ,  C03C3/076 ,  C03B19/06 ,  C03B37/018

CPC classification number: C03B19/1415 ,  C03B19/1461 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54

Abstract: A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., a F concentration of at least 100 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C. A process for producing a silica glass containing TiO2, which comprises a step of forming a porous glass body on a target quartz glass particles obtained by flame hydrolysis of glass-forming materials, a step of obtaining a fluorine-containing porous glass body, a step of obtaining a fluorine-containing vitrified glass body, a step of obtaining a fluorine-containing formed glass body and a step of carrying out annealing treatment.

Abstract translation: 含有TiO 2的二氧化硅玻璃，其具有至多1200℃的假想温度，至少100ppm的F浓度和0±200ppb /℃的热膨胀系数。 0至100℃。一种制备含有TiO 2的石英玻璃的方法，其包括在通过玻璃形成材料的火焰水解获得的目标石英玻璃颗粒上形成多孔玻璃体的步骤 ，获得含氟多​​孔玻璃体的步骤，获得含氟玻璃化玻璃体的步骤，获得含氟成形玻璃体的步骤和进行退火处理的步骤。

公开(公告)号：US20050245383A1

公开(公告)日：2005-11-03

申请号：US11174533

申请日：2005-07-06

Applicant: Yasutomi Iwahashi ,  Akio Koike

Inventor： Yasutomi Iwahashi ,  Akio Koike

IPC: C03B20/00 ,  C03B19/14 ,  C03C3/06 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1484 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/42

Abstract: A silica glass containing TiO2, characterized in that the fluctuation of the refractive index (Δn) is at most 2×10−4 within an area of 30 mm×30 mm in at least one plane. A silica glass containing TiO2, characterized in that the TiO2 concentration is at least 1 mass %, and the striae pitch is at most 10 μm. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO2, and the fluctuation of the refractive index (Δn) is at most 2×10−4 in a plane perpendicular to the incident light direction. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO2, wherein the TiO2 concentration is at least 1 mass %, and the difference between the maximum value and the minimum value of the TiO2 concentration is at most 0.06 mass % in a plane perpendicular to the incident light direction.

Abstract translation: 含有TiO 2的二氧化硅玻璃，其特征在于，在30mm×30mm的区域内，折射率（Deltan）的波动至多为2×10 -4〜 飞机 含有TiO 2的二氧化硅玻璃，其特征在于TiO 2浓度为1质量％以上，条纹间距为10μm以下。 一种用于EUV光刻的光学材料，其特征在于其由含有TiO 2的二氧化硅玻璃制成，并且折射率（Deltan）的波动为至多2×10 -4 >垂直于入射光方向的平面。 一种用于EUV光刻的光学材料，其特征在于其由含有TiO 2的二氧化硅玻璃制成，其中TiO 2浓度为至少1质量％，并且差异 在垂直于入射光方向的平面中，TiO 2 2 浓度的最大值和最小值之间的浓度至多为0.06质量％。

公开(公告)号：US20050092029A1

公开(公告)日：2005-05-05

申请号：US10701175

申请日：2003-11-04

Applicant: Won-Taek Han ,  Yune-Hyoun Kim ,  Tae-Jung Ahn

Inventor： Won-Taek Han ,  Yune-Hyoun Kim ,  Tae-Jung Ahn

IPC: C03B37/014 ,  C03B37/018 ,  C03C13/04 ,  C03C25/60

CPC classification number: C03B37/01838 ,  C03B37/01433 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/42 ,  C03C13/046 ,  C03C25/601

Abstract: Disclosed is a method of fabricating an optical fiber or an optical device doped with reduced metal ion and/or rare earth ion, comprising steps of: forming a partially-sintered fine structure in a base material for fabricating the optical fiber or the optical device; soaking the fine structure into a doping solution containing a reducing agent together with metal ion and rare earth ion during a selected time; drying the fine structure in which the metal ion and/or rare ion are/is soaked; and heating the fine structure such that the fine structure is sintered.

Abstract translation: 公开了一种制造光纤或掺杂有还原金属离子和/或稀土离子的光学器件的方法，包括以下步骤：在用于制造光纤或光学器件的基底材料中形成部分烧结的精细结构; 在选定的时间内将精细结构与金属离子和稀土离子一起浸入含有还原剂的掺杂溶液中; 干燥其中金属离子和/或稀有离子被浸泡的精细结构; 并加热精细结构，使得精细结构烧结。

公开(公告)号：US06574991B1

公开(公告)日：2003-06-10

申请号：US09658200

申请日：2000-09-08

Applicant: Robert S. Pavlik, Jr. ,  Lawrence H. Kotacska

Inventor： Robert S. Pavlik, Jr. ,  Lawrence H. Kotacska

IPC: C03B514

CPC classification number: C03B19/1407 ,  C03B2201/02 ,  C03B2201/03 ,  C03B2201/07 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/50 ,  C04B35/10 ,  F27B9/26 ,  F27B17/00 ,  F27D1/0006 ,  F27D1/0043 ,  F27D3/0033

Abstract: An article of relatively pure silica, and a furnace and method of producing the article. The article is produced by collecting molten silica particles in a refractory furnace in which at least a portion of the refractory has been exposed to a halogen-containing gas to react with contaminating metal ions in the refractory.

Abstract translation: 相对纯二氧化硅的制品，以及制造该制品的炉子和方法。 该制品通过在难熔炉中收集熔融二氧化硅颗粒而制备，其中耐火材料的至少一部分暴露于含卤素的气体中以与耐火材料中的污染金属离子反应。

公开(公告)号：US20030027054A1

公开(公告)日：2003-02-06

申请号：US09920227

申请日：2001-08-01

Inventor： Laura J. Ball ,  Sylvain Rakotoarison

IPC: G03F009/00 ,  G21H001/00 ,  G21H005/00 ,  B01J019/08 ,  H01F041/00

CPC classification number: C03B19/1423 ,  C03B19/01 ,  C03B19/1415 ,  C03B2201/07 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C23C16/401 ,  C23C16/513

Abstract: A method of making fused silica includes generating a plasma, delivering reactants comprising a silica precursor into the plasma to produce silica particles, and depositing the silica particles on a deposition surface to form glass.

Abstract translation: 制造熔融二氧化硅的方法包括产生等离子体，将包含二氧化硅前体的反应物输送到等离子体中以产生二氧化硅颗粒，并将二氧化硅颗粒沉积在沉积表面上以形成玻璃。

公开(公告)号：US20020076559A1

公开(公告)日：2002-06-20

申请号：US09935334

申请日：2001-08-22

Inventor： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Akira Fujinoki ,  Kyoichi Inaki ,  Tomoyuki Shirai

IPC: C03B008/02 ,  B32B017/06

CPC classification number: C30B31/14 ,  C03B19/01 ,  C03B19/066 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/30 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/32 ,  C30B25/12 ,  C30B35/00 ,  Y10T428/24496 ,  Y10T428/26 ,  Y10T428/315

Abstract: An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.

Abstract translation: 本发明的目的是提供一种石英玻璃体，特别是用于等离子体反应的石英玻璃夹具，用于制造具有优异的耐等离子体腐蚀性的半导体，特别是对F系气态等离子体的优异的耐腐蚀性; 及其制造方法。 提供由含有金属元素并具有改善的等离子体腐蚀性的石英玻璃制成的体，其含有以每100cm 3小于100mm 2的投影面积表示的量的气泡和结晶相。

公开(公告)号：US5241615A

公开(公告)日：1993-08-31

申请号：US900477

申请日：1992-06-18

Applicant: Lynn G. Amos ,  Peter C. Jones

Inventor： Lynn G. Amos ,  Peter C. Jones

IPC: C03B37/018 ,  C03B37/014 ,  G02B6/00 ,  G02B6/036

CPC classification number: G02B6/03622 ,  C03B37/01413 ,  C03B2201/42 ,  Y02P40/57

Abstract: An optical waveguide fiber with a core region 1 and a cladding region 2, wherein the cladding region 2 includes an outer cladding region 3 is disclosed wherein the outer cladding region 3 is a very thin (less than 1 .mu.m in thickness) layer of TiO.sub.2 -SiO.sub.2 glass which results in a substantial reduction in the number of fiber breaks resulting from the fiber drawing process and having a predetermined TiO.sub.2 concentration less than or equal to about 10 wt. %. A method for making the fiber is also disclosed.

公开(公告)号：US5123940A

公开(公告)日：1992-06-23

申请号：US684624

申请日：1991-04-12

Applicant: David J. DiGiovanni ,  John B. MacChesney

Inventor： David J. DiGiovanni ,  John B. MacChesney

IPC: C03B37/014 ,  C03B37/016 ,  C03B37/018 ,  C03C1/00 ,  C03C13/04 ,  G02B6/00

CPC classification number: C03B37/01838 ,  C03C1/008 ,  C03B2201/06 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/42 ,  Y02P40/57 ,  Y10S65/901

Abstract: The method includes collapsing a silica-based glass tube to make a preform and drawing fiber from the preform. Prior to collapsing the tube, one or more glass layers are formed on the inner surface of the tube by dip-coating the surface with a sol comprising a metal alkoxide dissolved in an alcoholic or aqueous solvent, polymerizing the sol to form a gel, and drying and sintering the gel. A substantial portion the dopant, present within the sintered gel, diffuses into at least one adjoining glass region. A wide selection of dopant materials, in the form of salts or alkoxides, are readily incorporated by dissolving them in the solvent.

公开(公告)号：US4975102A

公开(公告)日：1990-12-04

申请号：US262095

申请日：1988-10-19

Applicant: Takeo Edahiro ,  Shiro Kurosaki ,  Minoru Watanabe

Inventor： Takeo Edahiro ,  Shiro Kurosaki ,  Minoru Watanabe

IPC: C03B37/014 ,  C03B37/018 ,  C03C13/04 ,  G02B6/44

CPC classification number: C03C13/045 ,  C03B37/014 ,  C03B37/018 ,  G02B6/4492 ,  C03B2201/02 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2203/22 ,  C03B2203/225

Abstract: An optical transmission fiber comprising (1) a core of high refractive index composed of SiO.sub.2 -based glass containing at least one of GeO.sub.2, As.sub.2 O.sub.3, Sb.sub.2 O.sub.5, SnO.sub.2, TiO.sub.2, PbO and Bi.sub.2 O.sub.3, (2) a clad of low refractive index composed of SiO.sub.2 -based glass containing at least one of B.sub.2 O.sub.3, F, F/B.sub.2 O.sub.3 and F/P.sub.2 O.sub.5, and (3) an outermost jacket layer composed of SiO.sub.2 and/or SiO.sub.2 -based glass containing at least one of Al.sub.2 O.sub.3, TiO.sub.2, ZrO.sub.2 and HfO.sub.2.

Abstract translation: 一种光传输光纤，包括（1）由包含GeO 2，As 2 O 3，Sb 2 O 5，SnO 2，TiO 2，PbO和Bi 2 O 3中的至少一种的SiO 2基玻璃构成的高折射率芯，（2）低折射率的包层，由 含有B 2 O 3，F，F / B 2 O 3和F / P 2 O 5中的至少一种的SiO 2系玻璃，以及（3）由SiO 2和/或SiO 2系玻璃构成的最外层，所述玻璃含有Al 2 O 3，TiO 2，ZrO 2和 HfO2。

公开(公告)号：US4620861A

公开(公告)日：1986-11-04

申请号：US794833

申请日：1985-11-04

Applicant: George E. Berkey

Inventor： George E. Berkey

IPC: C03B8/04 ,  C03B37/014 ,  G02B6/00 ,  C03C25/02 ,  C03B37/023

CPC classification number: C03B37/01446 ,  C03B37/01453 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/42 ,  C03B2201/54 ,  C03B2203/22 ,  Y10S65/16

Abstract: Glass preforms for optical fibers or the like having refractive index profiles which vary in stepped or graded fashion across the preform, are made from porous glass preforms by introducing a first dopant into the porous preform during manufacture, partially sintering the preform to selectively modify the internal surface area thereof, introducing a second vapor-infusible dopant into the selectively sintered preform to cause selective doping of the porous glass, and then consolidating the resulting doped preform to clear glass.

Abstract translation: 用于具有折射率分布的折射率分布的玻璃预成型件在预制件中以阶梯或梯度方式变化，由多孔玻璃预制件制成，通过在制造期间将第一掺杂剂引入多孔预制件中，部分地烧结预成型件以选择性地修饰内部 将第二蒸气不可渗透的掺杂剂引入选择性烧结的预制件中以引起多孔玻璃的选择性掺杂，然后将所得到的掺杂预成型件固结成透明玻璃。