METHOD FOR PRODUCING A SENSOR ELEMENT BY MEANS OF LASER STRUCTURING

    公开(公告)号:US20170370796A1

    公开(公告)日:2017-12-28

    申请号:US15591656

    申请日:2017-05-10

    Applicant: Trafag AG

    CPC classification number: G01L23/18 G01L1/18 G01L9/0002 G01L9/0052 G01P15/123

    Abstract: In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor, comprising the steps:a) providing a component (13) to be deformed,c) applying to the component (13) a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10,d) planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing,wherein, for ablating the material, laser pulses from the group of laser pulses comprising:laser pulses in the sub-ps range,laser pulses from a broadband laser source (28) with a wavelength bandwidth of 10 nm to 70 nmlaser pulses from a broadband laser source (28) with a fundamental wavelength and a wavelength bandwidth of at least 1%, preferably at least 2%, most preferably at least 3% of the fundamental wavelength,laser pulses compressed by a pulse compression process, andlaser pulses conducted through a hollow-core fiber.are used.

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