Systems for and methods of illumination at a high optical solid angle
    42.
    发明申请
    Systems for and methods of illumination at a high optical solid angle 审中-公开
    高光学立体角的照明系统和照明方法

    公开(公告)号:US20110280038A1

    公开(公告)日:2011-11-17

    申请号:US13068179

    申请日:2011-05-04

    Applicant: Hwan J. Jeong

    Inventor: Hwan J. Jeong

    CPC classification number: G01N21/6458 G01N21/65 G01N2201/06 G01N2201/0826

    Abstract: Illumination systems and methods that utilize the higher or outer portions of the optical solid-angle space to increase the illumination intensity are disclosed. The illumination systems and methods include introducing illumination light through at least one side surface of a transparent slide that operably supports a sample on its top surface. The light fills at least a portion of the optical solid-angle space between 1 and n, and extends out to n. Light from the filled portion of the optical solid-angle space illuminates the sample through the top surface of the transparent slide. The disclosed illumination systems and methods are suitable for use in applications, such as dark-field imaging, fluorescence imaging, Raman spectroscopy, DNA analysis and like applications requiring high-intensity illumination.

    Abstract translation: 公开了利用光学立体角空间的较高或外部增加照明强度的照明系统和方法。 照明系统和方法包括通过在其顶表面上可操作地支撑样品的透明滑块的至少一个侧表面引入照明光。 光填充1和n之间的光学立体角空间的至少一部分,并延伸到n。 来自光学立体角空间的填充部分的光通过透明滑块的顶表面照射样品。 所公开的照明系统和方法适用于诸如暗场成像,荧光成像,拉曼光谱,DNA分析等需要高强度照明的应用。

    METHOD AND APPARATUS FOR ANALYSIS OF NITROGEN

    公开(公告)号:US20180059009A1

    公开(公告)日:2018-03-01

    申请号:US15506401

    申请日:2015-09-01

    Abstract: There is provided a nitrogen analyzing method for quantitative analysis of nitrogen in a specimen by a chemiluminescence method using ozone which is capable of measuring a concentration of nitrogen contained in the specimen with still higher accuracy, as well as a nitrogen analyzer used for practicing the analyzing method. Also, according to the present invention, there is provided a nitrogen analyzing method and a nitrogen analyzer which have a less adverse influence on human body and are also capable of further reducing environmental burden even when analyzing nitrogen in fuel-related specimens. The nitrogen analyzing method according to the present invention comprises the steps of burning a specimen comprising a nitrogen compound to generate a specimen gas, allowing the resulting specimen gas to react with ozone to measure a chemiluminescence intensity thereof, and quantitatively determining a concentration of nitrogen in the specimen based on a previously prepared calibration curve expressing a relationship between the chemiluminescence intensity and a weight of nitrogen, wherein the calibration curve is previously prepared from a standard specimen having a nitrogen concentration of 5 to 100 ppm, and the specimen is used in the form of a diluted specimen prepared by diluting the specimen with a solvent into a nitrogen concentration of 5 to 100 ppm.

    Defect inspection method and device for same

    公开(公告)号:US09488596B2

    公开(公告)日:2016-11-08

    申请号:US14978372

    申请日:2015-12-22

    CPC classification number: G01N21/9501 G01N21/8851 G01N21/956 G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Defect inspection method and device for same
    50.
    发明授权
    Defect inspection method and device for same 有权
    缺陷检查方法和装置相同

    公开(公告)号:US09255888B2

    公开(公告)日:2016-02-09

    申请号:US14359221

    申请日:2012-10-22

    CPC classification number: G01N21/9501 G01N21/8851 G01N21/956 G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Abstract translation: 在制造半导体等的过程中进行的缺陷扫描中,使用包含多个光电传感器的光检测光学系统来检测从样品反射的散射光。 用于检测弱背景散射光量的光传感器包括具有少量像素的光子计数型光电传感器,而用于检测强背景散射光量的光电传感器包括具有许多像素的光子计数型光电传感器或模拟光电传感器。 此外,为了校正缺陷散射光的检测信号,对使用光子计数型光电传感器作为非线性的缺陷散射光的检测强度引起的非线性进行了修正。

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