公开(公告)号：US07273289B2

公开(公告)日：2007-09-25

申请号：US11132783

申请日：2005-05-19

Applicant: Paul E. Denham

Inventor： Paul E. Denham

IPC: G02B7/182

CPC classification number: G02B7/1821 ,  G02B5/0891 ,  G02B26/101 ,  G03F7/70058 ,  G03F7/701 ,  G03F7/702 ,  G03F7/70825 ,  G03F7/70841 ,  G21K2201/06

Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Abstract translation: 具有高效率反射涂层的紧凑且真空兼容的电磁线圈驱动可倾斜平台可用作EUV应用中的扫描仪。 扫描仪的驱动电子设备完全可原地编程并可快速切换。

公开(公告)号：US07196342B2

公开(公告)日：2007-03-27

申请号：US11174442

申请日：2005-06-29

Applicant: Alexander I. Ershov ,  William F. Marx

Inventor： Alexander I. Ershov ,  William F. Marx

IPC: C25F1/00

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  G03F7/70175 ,  G03F7/7085 ,  G03F7/70916 ,  G21K1/06 ,  G21K2201/06 ,  H05G2/001

Abstract: Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.

Abstract translation: 公开了用于减少等离子体产生的碎片对EUV光源的内部部件的影响的系统和方法。 一方面，提供了一种EUV气象监测器，其可以具有加热器以将内部多层过滤镜加热到足以从反射镜去除沉积的碎屑的温度。 在另一方面，公开了一种用于从收集器反射镜上的不同区域处具有不同碎屑沉积速率的EUV光源收集镜去除等离子体产生的碎屑的装置。 在特定方面，EUV收集器镜系统可以包括氢源以与Li碎片结合以在收集器表面上产生LiH; 以及从收集器表面溅射LiH的溅射系统。 在另一方面，公开了一种用于从具有受控等离子体蚀刻速率的EUV光源收集镜的表面蚀刻碎片的装置。

公开(公告)号：US20060292457A1

公开(公告)日：2006-12-28

申请号：US11167560

申请日：2005-06-28

Applicant: Hendricus Johannes Meijer ,  Uwe Mickan ,  Marco Kluse

Inventor： Hendricus Johannes Meijer ,  Uwe Mickan ,  Marco Kluse

IPC: A47G1/12 ,  G03B27/62 ,  B05B5/053 ,  G03F1/14 ,  G21K5/00 ,  G03F1/00

CPC classification number: G03F7/70941 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/38 ,  G03F1/40 ,  G03F7/707 ,  G03F7/70708 ,  G21K2201/06

Abstract: A reticle includes an area provided with a conductive metal-based compound coating for electrically grounding the reticle. The reticle is suitable for use with a lithography apparatus whereby the reticle pattern is imaged using extreme ultra violet radiation. One or more conducting pins, held at zero potential, may be pressed against the conductive coating for electrically grounding the reticle either during patterning the reticle by electron beam writing or during use in the lithographic apparatus. The areas coated with the metal-based compounds are wear resistant which reduces the occurrence of particles due to damage caused by mechanical contact between the conducting pins and the conductive coating.

公开(公告)号：US07130370B2

公开(公告)日：2006-10-31

申请号：US10872777

申请日：2004-06-22

Applicant: Muradin Abubekirovich Kumakhov

Inventor： Muradin Abubekirovich Kumakhov

IPC: G01N23/22

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G21K2201/06

Abstract: Inventions related to the intra-vision means, designed for production of visually sensed images of the internal structure of an object, in particular, of a biological object, are aimed at higher accuracy of determining the relative density indices of the object's substance in the obtained image together with avoiding complex and expensive engineering; when used for diagnostic purposes in medicine, the dosage of tissues surrounding those that are examined is decreased. X-rays from source 1 is concentrated (for example, using X-ray lens 2) in the zone that includes the current point 4, to which the measurement results are attributed and which is located within the target area 7 of the object 5. Excited in this zone secondary scattered radiation (Compton, fluorescent) is transported (for example, using X-ray lens 3) to one or more detectors 6. By moving the said zone, the target area 7 of object 5 is scanned, and based upon population of the intensity values of the secondary radiation, which are obtained with the help of one or more detectors 6 and which are determined concurrently with coordinates of the current point 6, judgment on the density of the object's substance in this point is made. Density values together with respective coordinate values obtained using sensors 11 are used in the means 12 for data processing and imaging to build up a picture of substance density distribution in the target area of the object.

Abstract translation: 旨在用于生产对象的内部结构，特别是生物体的视觉感测图像的视觉内装置的发明旨在提高确定所获得物体物质的相对密度指数的精度 形象与避免复杂和昂贵的工程; 当在医学中用于诊断目的时，减少了被检查的组织周围的组织的剂量。 来自源1的X射线在包括当前点4的区域中被集中（例如，使用X射线透镜2），测量结果被归因于并且位于对象5的目标区域7内的区域。 在该区域激发二次散射辐射（康普顿荧光）被传送（例如，使用X射线透镜3）到一个或多个检测器6。 通过移动所述区域，对象5的目标区域7被扫描，并且基于通过一个或多个检测器6的帮助获得并且与第二辐射的坐标同时确定的二次辐射的强度值的总体 现在点6，就此对物体物质的密度进行判断。 在用于数据处理和成像的装置12中使用密度值以及使用传感器11获得的各个坐标值，以建立物体的目标区域中物质密度分布的图像。

公开(公告)号：US20060176547A1

公开(公告)日：2006-08-10

申请号：US11054040

申请日：2005-02-08

Applicant: Jose Sasian

Inventor： Jose Sasian

IPC: G02B5/08

CPC classification number: G03F7/702 ,  G02B17/0605 ,  G02B17/0615 ,  G02B27/0043 ,  G03F7/70175 ,  G21K2201/06

Abstract: A collector is described that comprises a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and traveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source is also described.

Abstract translation: 描述了一种收集器，其包括激光产生的等离子体（LPP）极紫外（EUV）光源和从源到反射镜的第一光路。 镜子是从光源发射并沿着第一光路行进的光照射的第一个反射镜。 收集器还包括从源到另一个反射镜的第二光路。 另一个镜子是从源头发出并沿着第二条路径行进的光线的第一个反射镜。 反射镜和另一个反射镜相对于光源定向，使得沿着第一光路行进的光的光沿与第二光路从光源行进的光相反的方向行进。 还描述了具有放电极紫外（EUV）光源的集电极。

公开(公告)号：US20060137614A1

公开(公告)日：2006-06-29

申请号：US11357827

申请日：2006-02-16

Applicant: Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

Inventor： Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

IPC: C23C16/00

CPC classification number: C23C14/081 ,  C23C14/0021 ,  C23C14/0694 ,  C23C14/08 ,  C23C14/083 ,  C23C14/10 ,  C23C14/14 ,  C23C14/32 ,  C30B23/02 ,  C30B29/02 ,  G02B5/0858 ,  G21K1/06 ,  G21K2201/06 ,  Y10T428/12174 ,  Y10T428/12736 ,  Y10T428/12896 ,  Y10T428/12993 ,  Y10T428/31678

Abstract: The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not less than 20 times the sum of all other peaks. Also the metal oxide film of the present invention is a dense film that includes less oxygen defects and almost no voids therein because a content of a non-oxidized metal is not higher than 1 mole % of a metal component that constitutes the metal oxide and a packing density is 0.98 or higher.

Abstract translation: 本发明的金属膜是具有非常低的表面粗糙度和非常好的晶体取向的单晶的致密膜，因为表面的算术平均粗糙度不大于2nm，并且（111）的X-射线衍射峰强度， X射线衍射不小于所有其他峰的总和的20倍。 另外，本发明的金属氧化物膜是由于非氧化金属的含量不高于构成金属氧化物的金属成分的1摩尔％而含有氧缺陷少，几乎无空隙的致密膜， 填充密度为0.98以上。

公开(公告)号：US5592338A

公开(公告)日：1997-01-07

申请号：US397768

申请日：1995-03-02

Applicant: Oberto Citterio

Inventor： Oberto Citterio

IPC: G02B5/10 ,  G21K1/06 ,  G02B5/08

CPC classification number: G02B5/10 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: Grazing incidence co-axial and confocal mirrors, used in particular for X-ray telescopes for astronomic observations, having a parabola/hyperbola double-cone truncated-cone structure, with polynomial sections or other geometric configurations, and consisting of an internal reflecting surface (15), in the form of a gold layer, an epoxy resin layer (14) and a supporting mechanical structural element (carrier) (11), formed of a ceramic material having physical-chemical properties improved compared to nickel and obtained according to the process of chemical vapor deposition (CVD) or other fabrication processes.

Abstract translation: 用于特别用于用于天文观测的X射线望远镜的掠射入射同轴和共焦反射镜，具有抛物线/双曲线双锥截锥锥结构，具有多项式截面或其他几何构造，并且由内部反射表面 15），金层形式的环氧树脂层（14）和支撑机械结构元件（载体）（11），由具有与镍相比提高的物理化学性质的陶瓷材料形成，并且根据 化学气相沉积（CVD）或其他制造工艺。

公开(公告)号：US5461657A

公开(公告)日：1995-10-24

申请号：US266749

申请日：1994-06-28

Applicant: Masami Hayashida ,  Yutaka Watanabe

Inventor： Masami Hayashida ,  Yutaka Watanabe

IPC: G03F7/20 ,  G21K1/06 ,  G21K1/00

CPC classification number: G03F7/70058 ,  G03F7/708 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An X-ray mirror has a silicon carbide substrate having a convex cylindrical surface, and a carbon layer coated on a surface of said substrate to a thickness ranging from 10 nm to 1 .mu.m by evaporation, such as CVD. In the X-ray mirror in which the carbon layer is coated thereon beforehand, changes in the intensity of reflected light, caused by a contaminating carbon layer attached to the surface of the mirror, can be restricted. When such a mirror is used in an X-ray lithographic apparatus, the number of times the intensity of X-rays is measured or corrected or the mirror is cleaned can be greatly reduced.

Abstract translation: X射线镜具有具有凸圆柱形表面的碳化硅衬底和通过诸如CVD的蒸发在所述衬底的表面上涂覆至10nm至1μm的厚度的碳层。 在预先涂覆有碳层的X射线反射镜中，可以限制由附着在反射镜表面上的污染碳层引起的反射光强度的变化。 当在X射线光刻设备中使用这样的镜子时，可以大大减少测量或校正X射线强度或镜子被清洁的次数。

公开(公告)号：US09435999B2

公开(公告)日：2016-09-06

申请号：US14008570

申请日：2012-02-22

Applicant: Kye Hwan Gil

Inventor： Kye Hwan Gil

IPC: G02B26/08 ,  G02B7/185 ,  G02B7/188

CPC classification number: G02B26/0825 ,  G02B7/185 ,  G02B7/188 ,  G21K2201/06 ,  G21K2201/067

Abstract: Disclosed is a device for adjusting the curvature of a mirror comprising: a base block; a pair of rotating blocks which are connected to the base block by one or more elastic bodies, respectively, and rotate around the connection portions between the base block and the elastic bodies or elastically return to through the application or release of external forces; a pair of support blocks which are disposed at the pair of rotating blocks, respectively, to support both ends of the mirror and apply bending moments to the both ends of the mirror by the rotation of the pair of rotating blocks; and a driving part for rotating the pair of rotating blocks.

Abstract translation: 公开了一种用于调节反射镜的曲率的装置，包括：基座; 一对旋转块，分别通过一个或多个弹性体连接到基座，并且围绕基座和弹性体之间的连接部分旋转，或者通过外力的施加或释放弹性地返回; 一对支撑块，分别设置在一对旋转块上，以支撑反射镜的两端，并通过一对旋转块的转动将弯矩施加到反射镜的两端; 以及用于旋转所述一对旋转块的驱动部。

公开(公告)号：US09324469B1

公开(公告)日：2016-04-26

申请号：US14530426

申请日：2014-10-31

Applicant: Geraldine M. Hamilton

Inventor： Geraldine M. Hamilton

IPC: G21K4/00

CPC classification number: G21K4/00 ,  G21K2004/06 ,  G21K2004/12 ,  G21K2201/06

Abstract: An intensifying screen for exposing X-ray film includes a screen support backing, a luminescent layer having a luminescent material that emits light in the presence of X-rays, and a reflective layer disposed between the luminescent layer and the screen support backing, the reflective layer including a plurality of micro-prisms that reflect light emitted by the luminescent material. An X-ray film cassette includes at least one intensifying screen and a housing surrounding the at least one intensifying screen.

Abstract translation: 用于曝光X射线胶片的增强屏幕包括屏幕支撑背衬，具有在存在X射线的情况下发光的发光材料的发光层和设置在发光层和屏幕支撑背衬之间的反射层，反射 层包括反射由发光材料发射的光的多个微棱镜。 X射线胶片盒包括至少一个增强屏幕和围绕至少一个增强屏幕的壳体。