Carbon nanotube fiber cathode
    48.
    发明授权
    Carbon nanotube fiber cathode 有权
    碳纳米管纤维阴极

    公开(公告)号:US08766522B1

    公开(公告)日:2014-07-01

    申请号:US13105249

    申请日:2011-05-11

    Abstract: Improved field emission cathodes comprise a fiber of highly aligned and densely packed single-wall carbon nanotubes, double-wall carbon nanotubes, multi-wall carbon nanotubes, grapheme nanoribbons, carbon nanofibers, and/or carbon planar nanostructures. The fiber cathodes provide superior current carrying capacity without degradation or adverse effects under high field strength testing. The fibers also can be configured as multi-fiber field emission cathodes, and the use of low work function coatings and different tip configurations further improves their performance.

    Abstract translation: 改进的场发射阴极包括高度排列和密集堆叠的单壁碳纳米管,双壁碳纳米管,多壁碳纳米管,图形纳米带,碳纳米纤维和/或碳平面纳米结构的纤维。 纤维阴极在高场强测试下提供卓越的载流能力而不降解或不利影响。 纤维也可以配置为多纤维场发射阴极,并且使用低功函数涂层和不同尖端配置进一步提高其性能。

    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
    49.
    发明授权
    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission 有权
    用于多光束光刻的系统,方法和装置,包括用于均匀电子发射的分配器阴极

    公开(公告)号:US07710009B2

    公开(公告)日:2010-05-04

    申请号:US11650310

    申请日:2007-01-05

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
    50.
    发明授权
    System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission 失效
    用于多光束光刻的系统,方法和装置,包括用于均匀电子发射的分配器阴极

    公开(公告)号:US07215070B2

    公开(公告)日:2007-05-08

    申请号:US10778787

    申请日:2004-02-13

    Abstract: A dispenser cathode which comprises an emission surface, a reservoir for material releasing, when heated, work-function-lowering particles, and at least one passage for allowing diffusion of work-function-lowering particles from said reservoir to said emission surface, said emission surface comprising at least one emission area and at least one non-emission area covered with emission-suppressing material and surrounding each emission area, said non-emission area comprising at least one passage connecting said reservoir with said non-emission area and debouching within a diffusion length distance from an emission area for allowing diffusion of work-function-lowering particles from said reservoir to said emission area.

    Abstract translation: 分配器阴极,其包括排放表面,用于材料释放的储存器,当被加热时,功能降低颗粒和至少一个通道,用于允许功能降低颗粒从所述储存器扩散到所述发射表面,所述发射 表面包括至少一个发射区域和至少一个覆盖有发射抑制材料并且围绕每个发射区域的非发射区域,所述非发射区域包括将所述储层与所述非发射区域连接的至少一个通道,并在 从放射区域的扩散长度距离,用于允许功能降低颗粒从所述储存器扩散到所述发射区域。

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