公开(公告)号：US06087659A

公开(公告)日：2000-07-11

申请号：US354948

申请日：1999-07-16

Applicant: David L. Adler ,  David J. Walker ,  Fred Babian ,  Travis Wolfe

Inventor： David L. Adler ,  David J. Walker ,  Fred Babian ,  Travis Wolfe

IPC: G01N23/225 ,  G01Q30/02 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01L21/66

CPC classification number: H01J37/285

Abstract: An apparatus and method for inspecting a surface of a sample, particularly but not limited to a semiconductor device, using an electron beam is presented. The technique is called Secondary Electron Emission Microscopy (SEEM), and has significant advantages over both Scanning Electron Microscopy (SEM) and Low Energy Electron Microscopy (LEEM) techniques. In particular, the SEEM technique utilizes a beam of relatively high-energy primary electrons having a beam width appropriate for parallel, multi-pixel imaging. The electron energy is near a charge-stable condition to achieve faster imaging than was previously attainable with SEM, and charge neutrality unattainable with LEEM. The emitted electrons may be detected using a time delay integration detector.

公开(公告)号：US5563411A

公开(公告)日：1996-10-08

申请号：US451052

申请日：1995-05-25

Applicant: Shintaro Kawata ,  Keitaro Hara

Inventor： Shintaro Kawata ,  Keitaro Hara

IPC: G01N23/227 ,  G01Q30/02 ,  G01Q30/12 ,  H01J37/285 ,  H01J47/02 ,  G01N23/22

CPC classification number: H01J47/02 ,  G01N23/2273 ,  H01J37/285

Abstract: A scanning photoelectron microscope comprises a stage on which a sample is placed in a state in which gas around the sample is present, a light source emitting light of a wavelength capable of causing photoelectrons to be emitted from the sample, an optical system for condensing the light from the light source on the sample, scanning means for scanning the sample and the light relative to each other, and detecting means capable of applying positive potential to the sample, and detecting the photoelectrons created from the sample by the condensing, through the gas.

公开(公告)号：US5286974A

公开(公告)日：1994-02-15

申请号：US962250

申请日：1992-10-16

Applicant: Andrew R. Walker ,  Simon C. Page

Inventor： Andrew R. Walker ,  Simon C. Page

IPC: G01N23/225 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/02 ,  H01J37/20 ,  H01J37/252 ,  H01J37/285 ,  H01J49/08 ,  H01J49/44

CPC classification number: H01J37/026 ,  H01J37/285

Abstract: A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.

Abstract translation: 带电粒子能量分析仪具有诸如浮潜型透镜的磁性透镜和用于将电离辐射引导到试样上的源，从而使带电粒子从其表面发射。 将样品浸入磁性透镜的磁性成像领域，使具有预定能量范围内的能量的粒子聚焦，由能量分析仪分析聚焦粒子的能量。 提供了一种电极装置，用于使得磁性透镜的磁性成像领域能够利用未被聚焦的颗粒来引起样品的电荷中和。 或者，来自源极的带电粒子经受横向于磁性透镜的光轴的电场，并通过磁性透镜的磁性成像场被引导到样品上。

公开(公告)号：US5278406A

公开(公告)日：1994-01-11

申请号：US974514

申请日：1992-11-12

Applicant: Katsuyuki Kinoshita

Inventor： Katsuyuki Kinoshita

IPC: G01Q20/02 ,  G01Q30/02 ,  H01J37/244 ,  H01J37/285 ,  H01J37/252

CPC classification number: H01J37/285 ,  B82Y35/00

Abstract: An electron detection apparatus detects information contained in electrons emitted from a sample. For the detection of electron, the apparatus uses a probe disposed in close proximity to the sample. The probe has a first side and a second side between which penetrates an aperture, wherein the first side of the probe confronts the sample. A voltage is applied between the probe and the sample. The voltage applied therebetween is set to a such a level that an electric field effect yields on the surface of the sample. Under the electric field effect yielding on the surface of the sample, light or heat is applied to the surface of the sample to emit the electrons from the sample. The electrons thus emitted is detected by entering electrons into the aperture at the first side, passing through the aperture and exiting from the aperture at the second side.

Abstract translation: 电子检测装置检测从样品发射的电子中包含的信息。 为了检测电子，该装置使用靠近样品设置的探针。 探针具有穿过孔的第一侧和第二侧，其中探针的第一侧面对样品。 在探头和样品之间施加电压。 施加在它们之间的电压被设定为使得电场效应在样品的表面上产生的水平。 在样品表面产生的电场效应下，将光或热施加到样品的表面以从样品发射电子。 通过将电子输入到第一侧的孔中，通过孔并从第二侧的孔离开来检测发射的电子。

公开(公告)号：US5061850A

公开(公告)日：1991-10-29

申请号：US560616

申请日：1990-07-30

Applicant: Thomas F. Kelly ,  Jon J. McCarthy ,  Derrick C. Mancini

Inventor： Thomas F. Kelly ,  Jon J. McCarthy ,  Derrick C. Mancini

IPC: G01Q10/00 ,  G01Q70/08 ,  H01J37/04 ,  H01J37/244 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/045 ,  H01J37/285 ,  H01J49/0004 ,  H01J2237/24435 ,  H01J2237/2446 ,  H01J2237/24495 ,  H01J2237/24507 ,  H01J2237/24592

Abstract: Atom probe apparatus includes an emission tip from which atoms can be evaporated in atomic emission events, a position sensitive detector for detecting the position and timing of the charge cloud resulting from atomic emission events, and a pulse heating beam for heating the emission tip in short pulses to evaporate atoms essentially one at a time from the emission tip. The heating beam may be formed as an electron beam from an electron gun which is directed to the tip and scanned rapidly back and forth across the tip to be incident upon the tip for short periods of time as the beam is scanned back and forth. The beam may further be produced as a chopped beam of electrons by scanning the beam back and forth across a slit in an aperture plate so that only pulses of electrons pass through the plate as the beam passes across the slit. The electrons passing through the slit are then focused and directed to the tip. The tip may also be heated by light from a pulsed source such as a laser which is passed through a reflecting Schwarzschild objective and focused onto the tip in pulses to provide excitation by light photons. The position sensitive detector, which may include a microchannel plate backed by a position sensitive wedge and strip detector, determines both the time of arrival of a charge pulse from an atomic emission event and the relative position of the charge cloud at the point where it impacts upon the detector. The detector may also be formed as a three-level, trigonal array of pads which allows both one and two atomic events per heating pulse to be resolved.

Abstract translation: 原子探针装置包括在原子发射事件中原子可以从其中蒸发的发射尖端，用于检测由原子发射事件引起的电荷云的位置和定时的位置敏感检测器，以及用于加热发射尖端的脉冲加热束 脉冲从发射尖端一次一个地蒸发原子。 加热束可以形成为来自电子枪的电子束，该电子枪被引导到尖端，并且当光束来回扫描时，短时间内快速地来回扫描尖端以入射到尖端上。 通过在光阑板的狭缝中来回扫描光束，可以进一步将光束形成为短切的电子束，使得只有脉冲的电子在光束穿过狭缝时通过该板。 然后通过狭缝的电子被聚焦并被引导到尖端。 尖端也可以由来自脉冲源（例如穿过反射Schwarzschild物体的激光器）的光加热，并以脉冲聚焦到尖端上以提供光子激发。 位置敏感检测器，其可以包括由位置敏感楔形物和条形检测器支撑的微通道板，确定来自原子发射事件的电荷脉冲的到达时间和电荷云在其影响的点处的相对位置 在检测器上。 检测器也可以形成为三级的三角阵列阵列，其允许解决每个加热脉冲的一个和两个原子事件。

公开(公告)号：US5034903A

公开(公告)日：1991-07-23

申请号：US303195

申请日：1989-01-30

Applicant: Robert R. Alfano ,  Ping-Pei Ho

Inventor： Robert R. Alfano ,  Ping-Pei Ho

IPC: G01N23/225 ,  G01R31/308 ,  H01J37/285

CPC classification number: H01J37/285 ,  G01N23/2254 ,  G01R31/308

Abstract: An apparatus for determining and displaying the time evolution profile of electron carriers present within a submicron or micron device comprises a laser for generating a beam of ultrafast pulses of ultraviolet light. A first beam splitter splits each pulse into a transmitted beam and a reflected beam. The transmitted beam travels through a time delay circuit, and is then converted into a train of ultrafast electrical pulses which are transmitted to the device. The reflected beam is focused on the device. An electron detector, also focused on the device, collects the ejected electrons resulting from the interaction of the light pulse and electrical pulse to produce an electrical signal. The signal is then magnified in intensity by an amplifier and directed at a cathode ray tube to cause an image to appear thereon. A SIT vidicon camera converts the image into an electrical signal and transmits the signal to a computer. The computer generates a time evolution profile from the signal received which is sent to a monitor for display.

Abstract translation: 用于确定和显示存在于亚微米或微米器件内的电子载体的时间演化曲线的装置包括用于产生紫外光的超快脉冲束的激光器。 第一分束器将每个脉冲分裂成透射光束和反射光束。 发射光束通过时间延迟电路传播，然后被转换成传输到该装置的超快电脉冲串。 反射光束聚焦在设备上。 也集中在器件上的电子检测器收集由光脉冲和电脉冲的相互作用产生的喷射电子以产生电信号。 然后通过放大器将信号强度放大并且指向阴极射线管，以使图像出现在其上。 SIT摄像机摄像机将图像转换为电信号并将信号传输到计算机。 计算机从接收的信号产生时间演化曲线，发送到监视器进行显示。

公开(公告)号：US3505521A

公开(公告)日：1970-04-07

申请号：US3505521D

申请日：1967-01-03

Applicant: BALZERS PATENT BETEILIG AG

Inventor： WEGMANN LIENHARD ,  GRABER ROLF

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/285 ,  H01J37/26

CPC classification number: H01J37/285 ,  H01J37/18 ,  H01J37/20

公开(公告)号：US3219817A

公开(公告)日：1965-11-23

申请号：US21938262

申请日：1962-08-27

Applicant: TRUB TAUBER & CO A G

Inventor： GOTTFRIED MOLLENSTEDT

IPC: B44F11/04 ,  H01J37/285

CPC classification number: H01J37/285 ,  B44F11/04

公开(公告)号：US2243362A

公开(公告)日：1941-05-27

申请号：US22595838

申请日：1938-08-20

Applicant: SUKUMLYN THOMAS W

Inventor： SUKUMLYN THOMAS W

IPC: H01J29/66 ,  H01J37/285

CPC classification number: H01J29/66 ,  H01J37/285

公开(公告)号：US12094684B1

公开(公告)日：2024-09-17

申请号：US16532459

申请日：2019-08-05

Applicant: Mochii, Inc.

Inventor： Christopher Su-Yan Own ,  Matthew Francis Murfitt

IPC: H01J37/28 ,  G01N23/2252 ,  H01J37/153 ,  H01J37/285

CPC classification number: H01J37/28 ,  G01N23/2252 ,  H01J37/153 ,  H01J37/285 ,  H01J2237/221 ,  H01J2237/2482 ,  H01J2237/2807

Abstract: A compact charged-particle-beam microscope, weighing less than about 50 kg and having a size of less than about 1 m×1 m×1 m, is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment, a stage to hold a sample in the vacuum chamber, a charged-particle beam source to generate a charged-particle beam, charged-particle beam optics to converge the charged-particle beam onto the sample, and one or more beam scanners to scan the charged-particle beam across the sample. A charged-particle detector is provided to detect charged-particle radiation emanating from the sample and generate a corresponding charged-particle-detection signal. At least one energy dispersive x-ray spectrometer (EDS) is provided to detect x-rays emanating from the sample and generate a corresponding x-ray-detection signal. A controller analyzes the charged-particle-detection signal and the x-ray-detection signal to generate an image of the sample and a histogram of x-ray energies for at least a portion of the sample.