Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit
    46.
    发明申请
    Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit 有权
    使用金属针阵列进行样品提取和电路编辑的方法和设备

    公开(公告)号:US20130199034A1

    公开(公告)日:2013-08-08

    申请号:US13366316

    申请日:2012-02-04

    Abstract: Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.

    Abstract translation: 本发明的实施例提供了在控制环境(例如聚焦离子束的真空室)中恢复附接到操纵器的探针的方法和装置,而不需要打开真空室。 本发明的另一个实施方案教导了在FIB真空室内的纳米针阵列中构造和应用各种形状的纳摩耳。 在另一个实施例中,本发明通过使用包含在相同受控空间中的纳米针阵列(作为纳米线供应)的纳米针通过再纳米布线来教导完成的和氧化物涂覆的电路板的编辑和校正。 在该实施例中,纳米针阵列中的单个纳米针由操纵器操纵并且以这样的方式放置以在期望的点之间进行电接触。

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