公开(公告)号：US20220252453A1

公开(公告)日：2022-08-11

申请号：US17672114

申请日：2022-02-15

Applicant: THE UNIVERSITY OF TOKYO

Inventor： Daisuke HIRANO ,  Makoto GONOKAMI ,  Kosuke YOSHIOKA

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45

Abstract: A coherent light source outputs coherent light including high-order harmonics obtained by irradiating short-pulse laser light to a nonlinear medium. A spectrometer includes a grating that diffracts the coherent light and an image sensor that measures an image of the diffracted light. In a first state, a first double slit having a pair of apertures spaced apart in a first direction is arranged at a predetermined position between coherent light source and an incident slit of spectrometer. In a second state, a second double slit that is a replica of first double slit is arranged at the predetermined position as a replacement of first double slit with a sample held in one aperture. A calculation processing device calculates optical constants of the sample based on interference images measured in the first and second states.

公开(公告)号：US20220229213A1

公开(公告)日：2022-07-21

申请号：US17595611

申请日：2020-05-18

Applicant: SONY GROUP CORPORATION

Inventor： TUO ZHUANG ,  GUENTER TROLL ,  ALEXANDER GATTO

IPC: G02B5/18 ,  G01J3/18

Abstract: An imaging region of an image sensor is used more efficiently. A diffraction element (100) according to the embodiment includes a grating pattern, in which according to a position of light input to the diffraction element, the position being from a center of the diffraction element, an image forming position of diffracted light corresponding to the position of each wavelength is adjusted by adjusting a shape of the grating pattern at the position

公开(公告)号：US20220221340A1

公开(公告)日：2022-07-14

申请号：US17501695

申请日：2021-10-14

Applicant: PerkinElmer Health Sciences, Inc.

Inventor： David M. Aikens

IPC: G01J3/18 ,  G01J3/02 ,  G01J3/26

Abstract: Spectrometers include an optical assembly with optical elements arranged to receive light from a light source and direct the light along a light path to a multi-element detector, dispersing light of different wavelengths to different spatial locations on the multi-element detector. The optical assembly includes: (i) a collimator arranged in the light path to receive the light from the light source, the collimator including a mirror having a freeform surface; (2) a dispersive sub-assembly including an echelle grating, the dispersive sub-assembly being arranged in the light path to receive light from the collimator; and (3) a Schmidt telescope arranged in the light path to receive light from the dispersive sub-assembly and focus the light to a field, the multi-element detector being arranged at the field.

公开(公告)号：US11378451B2

公开(公告)日：2022-07-05

申请号：US15672120

申请日：2017-08-08

Applicant: KLA-Tencor Corporation

Inventor： Tianhan Wang ,  Aaron Rosenberg ,  Dawei Hu ,  Alexander Kuznetsov ,  Manh Dang Nguyen ,  Stilian Pandev ,  John Lesoine ,  Qiang Zhao ,  Liequan Lee ,  Houssam Chouaib ,  Ming Di ,  Torsten R. Kaack ,  Andrei V. Shchegrov ,  Zhengquan Tan

IPC: G01J3/18 ,  G01J3/28 ,  G01N21/55 ,  G01N21/956 ,  G01N21/21 ,  G01N21/25 ,  G01N21/88 ,  G01N21/84

Abstract: A spectroscopic metrology system includes a spectroscopic metrology tool and a controller. The controller generates a model of a multilayer grating including two or more layers, the model including geometric parameters indicative of a geometry of a test layer of the multilayer grating and dispersion parameters indicative of a dispersion of the test layer. The controller further receives a spectroscopic signal of a fabricated multilayer grating corresponding to the modeled multilayer grating from the spectroscopic metrology tool. The controller further determines values of the one or more parameters of the modeled multilayer grating providing a simulated spectroscopic signal corresponding to the measured spectroscopic signal within a selected tolerance. The controller further predicts a bandgap of the test layer of the fabricated multilayer grating based on the determined values of the one or more parameters of the test layer of the fabricated structure.

公开(公告)号：US20220187129A1

公开(公告)日：2022-06-16

申请号：US17561679

申请日：2021-12-23

Applicant: Shanghai Jiao Tong University

Inventor： Liangjun LU ,  Junjie DU ,  Linjie ZHOU ,  Jianping CHEN ,  Jiao LIU

IPC: G01J3/45 ,  G01J3/18

Abstract: A silicon Fourier transform spectrometer and an optical spectrum reconstruction method are disclosed. The spectrometer includes a waveguide input coupler, cascaded optical switches, unbalanced subwavelength grating (SWG) waveguide pairs, and a germanium silicon detector, where the cascaded optical switches are connected through unbalanced SWG waveguide pairs. The state of the optical switches are adjusted to digitally configure the optical path, so as to constitute a series of unbalanced Mach-Zehnder interferometer (MZI) arrays with different optical path differences, to realize a Fourier transform spectrometer based on spatial heterodyne. The optical spectrum is reconstructed by using a compressed sensing algorithm.

公开(公告)号：US11340113B1

公开(公告)日：2022-05-24

申请号：US17235090

申请日：2021-04-20

Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

Inventor： Jun Zhu ,  Ben-Qi Zhang ,  Yi-Lin Tan ,  Guo-Fan Jin ,  Shou-Shan Fan

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/04

Abstract: A freeform concave grating imaging spectrometer includes a slit, a freeform concave grating, and an image surface. The lights incident from the slit is irradiated on the freeform concave grating to be dispersed and reflected, to form a reflected light beam. The reflected light beam is irradiated on the image surface, so that the lights of different wavelengths incident from the slit are separated and imaged on the image surface.

公开(公告)号：US20220155237A1

公开(公告)日：2022-05-19

申请号：US17440896

申请日：2020-03-25

Applicant: OSAKA UNIVERSITY

Inventor： Tsuyoshi KONISHI

IPC: G01N21/88 ,  G01J3/18 ,  G01J3/42 ,  G01N21/31

Abstract: An optical detection device is an optical detection device that detects a desired wavelength component included in input light, and includes: a spectrometer including, for instance, a diffraction grating that receives the input light as an input and outputs an alignment of spectra each of which is a duplication of a spectrum of the input light; a second slit array including an array of three or more slits that pass light beams of wavelengths at three or more locations in the alignment of the spectra that are output from the spectrometer; and an imaging element composed of an array of pixels that receive the light beams, having passed through the second slit array, each of the light beams having three or more wavelength components. At least two pitches between slits are different in the array of the three or more slits included in the second slit array.

公开(公告)号：US20220146430A1

公开(公告)日：2022-05-12

申请号：US17527844

申请日：2021-11-16

Applicant: OndaVia, Inc.

Inventor： Mark C. Peterman ,  Merwan Benhabib ,  Samuel Kleinman

IPC: G01N21/65 ,  G01N21/47 ,  G01J3/18 ,  G01J3/44 ,  B01L3/00 ,  G01N27/447 ,  G01N30/60 ,  G01J3/02 ,  G01N21/66 ,  G01N21/63 ,  G01N21/49 ,  G01N21/68 ,  G01N33/18

Abstract: A hand-held microfluidic testing device is provided that includes a housing having a cartridge receiving port, a cartridge for input to the cartridge receiving port having a sample input and a channel, where the channel includes a mixture of Raman-scattering nanoparticles and a calibration solution, where the calibration solution includes chemical compounds capable of interacting with a sample under test input to the cartridge and the Raman-scattering nanoparticles, and an optical detection system in the housing, where the optical detection system is capable of providing an illuminated electric field, where the illuminating electric field is capable of being used for Raman spectroscopy with the Raman-scattering nanoparticles and the calibration solution to analyze the sample under test input to the cartridge.

公开(公告)号：US20220128407A1

公开(公告)日：2022-04-28

申请号：US17506293

申请日：2021-10-20

Applicant: SAMSUNG ELECTRONICS CO, LTD.

Inventor： Jaesoong LEE ,  Hyochul KIM ,  Yeonsang PARK

IPC: G01J3/26 ,  G01J3/18 ,  G01J3/28

Abstract: Provided is a spectral filter including a first Bragg reflective layer, a second Bragg reflective layer that is spaced apart from the first Bragg reflective layer and includes a cavity, the first resonance layer being provided between the first Bragg reflective layer and the second Bragg reflective layer, a second resonance layer including at least a portion of the first Bragg reflective layer, the second Bragg reflective layer, and the cavity, a third Bragg reflective layer, a fourth Bragg reflective layer spaced apart from the third Bragg reflective layer, wherein the second resonance layer is provided between the third Bragg reflective layer and the fourth Bragg reflective layer.

公开(公告)号：US11307096B2

公开(公告)日：2022-04-19

申请号：US17351164

申请日：2021-06-17

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Chen Liu

IPC: G01J3/28 ,  G01J3/02 ,  G02B5/18 ,  G01J3/18

Abstract: A spectral resolution enhancement device including a preliminary dispersion unit, a two-grating angular dispersion amplification unit, and a detection unit is provided. The preliminary dispersion unit is configured to receive collimated incident light and emits light of different wavelengths in the incident light at different angles. The two-grating angular dispersion amplification unit is configured to diffract the light of different wavelengths and emitted from the preliminary dispersion unit multiple times, such that angular dispersion the light of different wavelengths is enhanced, and emergent angle deviations between the light of different wavelengths are increased. The detection unit is configured to detect light of different wavelengths and emitted from the two-grating angular dispersion amplification unit. Since the emergent angle deviations of light of different wavelengths are increased, resolution of the detection unit for the light of different wavelengths is increased.