公开(公告)号：US06384415B1

公开(公告)日：2002-05-07

申请号：US09597577

申请日：2000-06-20

Applicant: Tetsuo Suzuki ,  Kunio Otsuka

Inventor： Tetsuo Suzuki ,  Kunio Otsuka

IPC: G01J502

CPC classification number: G01N21/9505 ,  G01N21/3563 ,  G01N2021/3568

Abstract: A method of evaluating the quality of a silicon wafer is characterized by analyzing a silicon wafer by an infrared absorption spectrum, and then evaluating the quality of the silicon crystal based on an absorbance ratio represented by the following formula (1): {(Absorbance &agr;1 at an arbitrary wavenumber between 1055 and 1080 cm−1)−(Absorbance &agr;BL of base line)}/{(Absorbance &agr;2 at an arbitrary wavenumber between 1100 and 1120 cm−1)−(Absorbance &agr;BL of base line)}  (1) wherein absorbances &agr;1 and &agr;2 represent absorbances of the measured silicon wafer, and base line absorbance &agr;BL represents the absorbance of a base line of the measured silicon wafer, which is drawn from 1030 to 1170 cm−1. By using the quality evaluating method of the present invention, internal crystal defects of silicon can be precisely detected in a non-destructive manner. The method of the present invention thus has the advantages of improving productivity, decreasing reclaiming cost, etc.

Abstract translation: 评估硅晶片质量的方法的特征在于通过红外吸收光谱分析硅晶片，然后基于由下式（1）表示的吸光度比来评估硅晶体的质量：其中吸光度α1和 α2表示测量的硅晶片的吸光度，基线吸光度αBL表示从1030至1170cm -1绘制的测量的硅晶片的基线的吸光度。 通过使用本发明的质量评价方法，能够以非破坏性的方式精确地检测硅的内部晶体缺陷。 因此，本发明的方法具有提高生产率，降低回收成本等优点。

公开(公告)号：US06355930B1

公开(公告)日：2002-03-12

申请号：US09237014

申请日：1999-01-25

Applicant: Yudaya R. Sivathanu ,  Rony K. Joseph

Inventor： Yudaya R. Sivathanu ,  Rony K. Joseph

IPC: G01J502

CPC classification number: G01J3/14 ,  G01J5/601 ,  G01J5/62

Abstract: An infrared spectrometer is adapted to capture spectral data at high frequency and includes an aperture defining slit and tuning fork chopper for periodically admitting infrared radiation. A lens and a plurality of mirrors direct the infrared radiation through pair of calcium fluoride prisms that split the infrared radiation into spectral components. The spectral components are directed by an additional mirror and lens to an array of lead selenide pixels that generate a set of data indicative of the spectral component intensities. Data collection circuitry coupled to the pixel array and coupled to the tuning fork chopper collects the set of data at a selectable rate at least once during each opening of the aperture. A serial output on the data collection circuitry provides a list of data values representative of the spectral intensity at each pixel which can be then stored in a mass storage device as well as immediately analyzed based on selected criteria.

Abstract translation: 红外光谱仪适于以高频率捕获光谱数据，并且包括用于周期性地接收红外辐射的限定狭缝和音叉切割器的孔。 透镜和多个反射镜通过将红外辐射分成光谱分量的一对氟化钙棱镜来引导红外辐射。 光谱分量由附加镜和透镜引导到产生一组表示光谱分量强度的数据的硒化铅像素阵列。 耦合到像素阵列并耦合到音叉斩波器的数据采集电路在每个开口期间至少一次以可选择的速率收集数据集。 数据采集​​电路上的串行输出提供表示每个像素处的光谱强度的数​​据值列表，然后可以将其存储在大容量存储设备中，并且基于所选择的标准立即分析。

公开(公告)号：US06350988B1

公开(公告)日：2002-02-26

申请号：US09561885

申请日：2000-05-01

Applicant: Dale Marius Brown

Inventor： Dale Marius Brown

IPC: G01J502

CPC classification number: G01J5/602 ,  G01J5/0014 ,  G01J5/60

Abstract: An optical spectrometer for combustion flame temperature determination includes at least two photodetectors positioned for receiving light from a combustion flame and having different overlapping optical bandwidths for producing respective output signals; and a computer for obtaining a difference between a first respective output signal of a first one of the at least two photodetectors with and a second respective output signal of a second one of the at least two photodetectors, dividing the difference by one of the first and second respective output signals to obtain a normalized output signal, and using the normalized output signal to determine the combustion flame temperature.

Abstract translation: 用于燃烧火焰温度测定的光谱仪包括至少两个光电检测器，定位成用于接收来自燃烧火焰的光并具有不同的重叠光学带宽以产生相应的输出信号; 以及计算机，用于获得所述至少两个光电检测器中的第一个的第一相应输出信号与所述至少两个光电检测器中的第二个的第二相应输出信号之间的差，将所述差除以所述第一和 第二各自的输出信号以获得归一化的输出信号，并且使用归一化的输出信号来确定燃烧火焰温度。

公开(公告)号：US06333501B1

公开(公告)日：2001-12-25

申请号：US09493056

申请日：2000-01-27

Applicant: James N. Labrenz

Inventor： James N. Labrenz

IPC: G01J502

CPC classification number: G01N21/274 ,  G01J2003/2866 ,  G01N21/6428 ,  G01N2021/6417

Abstract: A system performs two types of spectral calibration. For the first type, the system collects data from monitoring an analytical separation of several spectrally-distinguishable molecular species and creates a data matrix from the collected data. Each element in the data matrix represents a signal intensity at a particular time and over a particular range of light wavelengths. The system then identifies regions in the data matrix that have spectral response characteristics of at least one of the molecular species, determines a set of pure component spectral responses from the identified regions, groups similar pure component spectral responses into clusters, determines a representative spectral response for each cluster, and correlates the representative spectral response for each cluster with one of the molecular species. For the second type of calibration, the system collects data from monitoring an analytical separation of multiple spectrally-distinguishable molecular species and creates a data matrix from the collected data. Each element in the data matrix represents a signal intensity at a particular time and over a particular range of light wavelengths. The system then identifies binary mixture regions within the data matrix, determines pairs of the binary mixture regions that contain one common spectral response, identifies a component that represents the one common spectral response using data in the determined pairs, groups the one common spectral response from each of the determined pairs into clusters, determines a representative spectral response for each cluster, and correlates the representative spectral response for each cluster with one of the molecular species.

Abstract translation: 系统执行两种类型的光谱校准。 对于第一种类型，系统收集数据，监测几个光谱可区分分子种类的分析分离，并从收集的数据中创建数据矩阵。 数据矩阵中的每个元素表示在特定时间和特定光波长范围上的信号强度。 该系统然后识别数据矩阵中具有至少一个分子种类的光谱响应特性的区域，从所识别的区域确定一组纯分量光谱响应，将相似的纯分量光谱响应组合成簇，确定代表性光谱响应 并且将每个簇的代表性光谱响应与分子种类之一相关联。 对于第二种类型的校准，系统从监测多个光谱可区分分子物质的分析分离中收集数据，并从收集的数据中创建数据矩阵。 数据矩阵中的每个元素表示在特定时间和特定光波长范围上的信号强度。 然后，系统识别数据矩阵内的二进制混合区域，确定包含一个共同光谱响应的二进制混合区域的对，使用确定的对中的数据识别表示一个共同光谱响应的分量，将一个共同光谱响应从 每个确定的对成簇，确定每个簇的代表性光谱响应，并且将每个簇的代表性光谱响应与分子种类之一相关联。

公开(公告)号：US06323487B1

公开(公告)日：2001-11-27

申请号：US09237309

申请日：1999-01-26

Applicant: Cunkai Wu

Inventor： Cunkai Wu

IPC: G01J502

CPC classification number: B60R21/01538 ,  B60R21/01534 ,  B60R21/01556 ,  G01J5/0025 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0893 ,  G01S7/4816 ,  G01S17/026

Abstract: In a preferred embodiment, an infrared optical position detection system, including: an infrared emitter to emit infrared radiation toward an object; a receiver to receive the infrared radiation scattered by the object and to determine position of the object; the receiver including a detector; and the receiver including an optical system having two and no more than two lenses.

Abstract translation: 在优选实施例中，一种红外光学位置检测系统，包括：红外发射器，朝向物体发射红外辐射; 接收器，用于接收由物体散射的红外辐射并确定物体的位置; 所述接收器包括检测器; 并且接收机包括具有两个且不超过两个透镜的光学系统。

公开(公告)号：US06313463B1

公开(公告)日：2001-11-06

申请号：US09222655

申请日：1998-12-30

Applicant: Barrett E. Cole ,  Christopher J. Zins

Inventor： Barrett E. Cole ,  Christopher J. Zins

IPC: G01J502

CPC classification number: C23C14/083 ,  C23C14/46 ,  G01J5/20

Abstract: A high performance microbolometer in which a pixel contains the material VOx wherein x of VOx is set at a value to adjust a thermal coefficient of resistance to a selected value between 0.005 and 0.05.

Abstract translation: 高性能微量热计，其中像素包含材料VOx，其中VOx的x被设置为将电阻热系数调整到0.005和0.05之间的选定值。

公开(公告)号：US06828558B1

公开(公告)日：2004-12-07

申请号：US10009249

申请日：2002-06-24

Applicant: Donald Dominic Arnone ,  Craig Michael Ciesla

Inventor： Donald Dominic Arnone ,  Craig Michael Ciesla

IPC: G01J502

CPC classification number: G01N21/3581 ,  G01N21/49

Abstract: A method and apparatus for imaging a sample, the method comprising the steps of: a) irradiating a sample to be imaged with a beam of pulsed electromagnetic radiation with a plurality of frequencies in the range from 25 GHz to 100 THz; b) detecting radiation which is both transmitted through and reflected from the sample; and c) generating an image of the sample from radiation detected in step (b). The method and apparatus can be used to generate a three-dimensional image of the sample and/or a compositional image of the sample.

Abstract translation: 一种用于对样品进行成像的方法和装置，所述方法包括以下步骤：a）用25GHz至100THz范围内的多个频率的脉冲电磁辐射束照射待成像样品; b）检测通过样品透射和反射的辐射; 以及c）从步骤（b）中检测到的辐射产生样品的图像。 该方法和装置可用于产生样品的三维图像和/或样品的组成图像。

公开(公告)号：US06812466B2

公开(公告)日：2004-11-02

申请号：US10255143

申请日：2002-09-25

Applicant: Christopher J. O'Connor ,  James D. Davis, Jr. ,  Todd R. Vernaz ,  Stephen A. Hawley

Inventor： Christopher J. O'Connor ,  James D. Davis, Jr. ,  Todd R. Vernaz ,  Stephen A. Hawley

IPC: G01J502

CPC classification number: G01S17/026 ,  E05F15/40 ,  E05F15/43 ,  E05F2015/434 ,  E05Y2900/531 ,  E05Y2900/542 ,  E05Y2900/55 ,  G01J5/06 ,  G01S7/4868 ,  G01S7/487 ,  G01V8/12

Abstract: In an infrared obstruction detection system, an apparatus is used to detect the presence of ambient light and initiate compensation to minimize the effects of the ambient light on the performance of the system. In one embodiment, the magnitude of the ambient light is measured and an offset proportional to that magnitude is fed to the obstruction detection system such that the data indicative of an obstacle are not obscured. In another embodiment, the apparatus continually monitors the effect of ambient light and adjusts the obstacle detection information during the changing states of the ambient light detected.

Abstract translation: 在红外障碍物检测系统中，使用装置来检测环境光的存在并启动补偿以最小化环境光对系统性能的影响。 在一个实施例中，测量环境光的大小，并且与该幅度成比例的偏移被馈送到障碍物检测系统，使得指示障碍物的数据不被遮蔽。 在另一个实施例中，设备连续地监视环境光的影响，并且在检测到的环境光的改变状态期间调整障碍物检测信息。

公开(公告)号：US06800855B1

公开(公告)日：2004-10-05

申请号：US09472585

申请日：1999-12-27

Applicant: Jie Dong ,  Katsumasa Suzuki ,  Hiroshi Masusaki ,  Koh Matsumoto

Inventor： Jie Dong ,  Katsumasa Suzuki ,  Hiroshi Masusaki ,  Koh Matsumoto

IPC: G01J502

CPC classification number: G01N21/39 ,  G01N21/3504

Abstract: The present invention provides a spectroscopic method for analyzing isotopes which makes it possible to simplify a system for measurement and to identify isotopes with high accuracy and sensitivity and to carry out quantitative analysis. The spectroscopic method for analyzing isotopes uses a semiconductor laser beam having as a wavelength zone a 2000 nm-wavelength band as a beam source of wavelengths of the absorption spectra of the isotopes. A reference gas is used for identification of the isotopes where the gas contains collating components having two wavelengths (W1, W2) of well-known absorption spectra in wavelength bands close to the wavelengths (w1, w2) of the absorption spectra of the isotopes.

Abstract translation: 本发明提供了一种用于分析同位素的光谱方法，其使得可以简化测量系统并且以高精度和灵敏度鉴定同位素并进行定量分析。 用于分析同位素的分光方法使用具有2000nm波长带的波长区域的半导体激光束作为同位素吸收光谱的波长的光源。 参考气体用于鉴定同位素，其中气体包含具有接近于同位素吸收光谱的波长（w1，w2）的波长带的众所周知的吸收光谱的两个波长（W1，W2）的对照组分。

公开(公告)号：US06781128B2

公开(公告)日：2004-08-24

申请号：US10315072

申请日：2002-12-10

Applicant: Masaki Hirota ,  Yasushi Nakajima

Inventor： Masaki Hirota ,  Yasushi Nakajima

IPC: G01J502

CPC classification number: G01J5/08 ,  G01J5/0853 ,  G01J5/10 ,  G01J5/12

Abstract: An infrared radiation detecting device is constructed using a manufacturing method to increase the infrared radiation absorptance of the infrared radiation absorbing film. The infrared radiation detecting device has an infrared radiation absorbing film. In one embodiment, the infrared radiation absorbing film has a varying film thickness. The film thickness difference between the thickest points and the thinnest points and the spacing between the thickest points within the same plane are set to decrease the effective surface reflectance cause by the interference or scattering effects of the infrared radiation. Preferably, the film thickness differences between the thickest points and the thinnest points are equal to or greater than ¼ of the wavelength of the infrared radiation being measured, and the spacing between the thickest points within the same plane is shorter than the wavelength of the infrared radiation being measured.

Abstract translation: 使用增加红外线吸收膜的红外线辐射吸收率的制造方法构造红外线检测装置。 红外线辐射检测装置具有红外线吸收膜。 在一个实施例中，红外辐射吸收膜具有变化的膜厚度。 设定最厚点与最薄点之间的薄膜厚度差以及同一平面内最厚点之间的间距，以减小由于红外辐射的干涉或散射效应引起的有效表面反射率。 优选地，最厚点和最薄点之间的膜厚度差等于或大于被测红外辐射的波长的1/4，并且同一平面内的最厚点之间的间隔比红外线的波长短 辐射被测量。