MEMS MICROPHONE DEVICE AND ELECTRONICS APPARATUS

    公开(公告)号:US20200039816A1

    公开(公告)日:2020-02-06

    申请号:US16339455

    申请日:2016-10-08

    Applicant: GOERTEK.INC

    Inventor: QUANBO ZOU

    Abstract: An MEMS microphone device and an electronics apparatus are provided. The MEMS microphone device comprises: a substrate; a MEMS microphone element placed on the substrate; a cover encapsulating the MEMS microphone element together with the substrate; and an acoustic port for the MEMS microphone element, wherein a compliant membrane is provided to seal the acoustic port, and the membrane has a mechanical stiffness lower than that of the diaphragm of the MEMS microphone element.

    Inertia measurement module and triaxial accelerometer

    公开(公告)号:US10473686B2

    公开(公告)日:2019-11-12

    申请号:US15538230

    申请日:2015-07-23

    Applicant: Goertek.Inc

    Inventor: Tingkai Zhang

    Abstract: An inertia measurement module and three-axis accelerometer, comprising a first pole piece (4) located on a substrate and a mass block (1) suspendingly connected above the substrate via elastic beams (11, 12); the elastic beams (11, 12) includes a first elastic beam (12) and a second elastic beam (11), two ends of the second elastic beams (11) being connected to an anchor point (6) of the substrate, two ends of the first elastic beam (11) being connected to the mass block (1); a center of the first elastic beam (12) and/or the second elastic beam (11) deviates from a center of gravity of the mass block (1); the mass block (1) is further provided with a first movable electrode (9) and a second movable electrode (10) in a Y-axis and an X-axis direction; the movement of one axis in a plane of the inertia measurement module cannot be affected by an eccentric structure feature, such that both X-axis movement and Y-axis movement are linear movements, thus not intensifying an inter-axis coupling, and also not reducing displacement of a mass block on the X-axis and the Y-axis, thus improving capacitance detection precision.

    Speaker module
    55.
    发明授权

    公开(公告)号:US10397676B2

    公开(公告)日:2019-08-27

    申请号:US15542866

    申请日:2015-11-18

    Applicant: Goertek.Inc

    Abstract: The present invention discloses a speaker module, comprising: a speaker assembly, a module shell and a front cover. The module shell is configured to bear the speaker assembly, and comprises a first shell and a second shell, wherein the first shell is doped with a thermally conductive filler. The front cover is configured to cooperate with the module shell to encapsulate the speaker assembly. The speaker module provided by the present invention can quickly discharge heat generated by the speaker assembly during operation through the module shell to prevent overheat of the speaker assembly, thereby avoiding performance loss of a speaker due to high temperature.

    Integrated structure of MEMS microphone and pressure sensor and manufacturing method for the integrated structure

    公开(公告)号:US10273150B2

    公开(公告)日:2019-04-30

    申请号:US15554653

    申请日:2015-12-14

    Applicant: Goertek.Inc

    Inventor: Yanmei Sun

    Abstract: The present invention discloses a manufacturing method of an integrated structure of a MEMS microphone and a pressure sensor, which comprises the following steps: depositing an insulating layer, a first polycrystalline silicon layer, a sacrificial layer and a second polycrystalline silicon layer in sequence on a shared substrate; etching the second polycrystalline silicon layer to form a vibrating diaphragm and an upper electrode; eroding the sacrificial layer to form a containing cavity of a microphone and a pressure sensor, and etching the sacrificial layer between the microphone and the pressure sensor; etching the first polycrystalline silicon layer to form a back electrode of the microphone and a lower electrode of the pressure sensor; etching a position of the shared substrate below a back electrode of the microphone to form a back cavity; and etching away the region of the insulating layer below the back electrode. A capacitance structure of a MEMS microphone and that of a pressure sensor are integrated on a shared substrate, improving integration of a MEMS microphone and a pressure sensor, and greatly reducing a size of a whole packaging structure; in addition, a microphone and a pressure sensor can be simultaneously manufactured on a shared substrate to improve the efficiency of production.

    Vibrating diaphragm assembly
    57.
    发明授权

    公开(公告)号:US10178477B2

    公开(公告)日:2019-01-08

    申请号:US15540202

    申请日:2015-11-13

    Applicant: Goertek.Inc

    Abstract: A vibrating diaphragm assembly related to the technical field of electroacoustic products is provided. The vibrating diaphragm assembly comprises a vibrating diaphragm, wherein the vibrating diaphragm comprises a middle part and a folding ring part surrounding the periphery of the middle part. The vibrating diaphragm also comprises a vibrating diaphragm substrate layer and a silica gel layer; the silica gel layer being at least partially combined with the vibrating diaphragm substrate layer. The vibrating diaphragm substrate layer is also a high molecular material layer; the silica gel layer is combined on the surface of the folding ring part; and the silica gel layer and the high molecular material layer are formed through injection molding.

    MEMS pressure sensing element
    58.
    发明授权

    公开(公告)号:US10145750B2

    公开(公告)日:2018-12-04

    申请号:US15572072

    申请日:2015-12-10

    Applicant: GOERTEK.INC

    Inventor: Guoguang Zheng

    Abstract: An MEMS pressure sensing element is disclosed, comprising a substrate with a groove; a pressure-sensitive film on the substrate for sealing an opening of the groove to form a sealed cavity body; and a pressure-sensitive beam suspended in the sealed cavity body and parallel with the pressure-sensitive film provided with varistors, wherein a center of the pressure-sensitive beam is fixedly connected to that of the pressure-sensitive film, and a periphery is fixedly connected to a bottom wall of the groove of the substrate, such that the pressure-sensitive film drives the pressure-sensitive beam to bending deformation under an external pressure.

    MEMS PRESSURE SENSING ELEMENT
    59.
    发明申请

    公开(公告)号:US20180335358A1

    公开(公告)日:2018-11-22

    申请号:US15559647

    申请日:2015-12-10

    Applicant: GOERTEK.INC

    Inventor: Guoguang ZHENG

    Abstract: The present invention discloses an MEMS pressure sensing element, including a substrate provided with a groove; a pressure-sensitive film disposed above the substrate, the pressure-sensitive film sealing an opening of the groove to form a sealed cavity; and a movable electrode plate and a fixed electrode plate which are located in the sealed cavity and form a capacitor structure, wherein the fixed electrode plate is fixed on a bottom wall of the groove of the substrate, and the movable electrode plate is suspended above the fixed electrode plate and opposite to the fixed electrode plate; and the pressure-sensitive film is connected to the movable electrode plate so as to drive the movable electrode plate to move under the action of an external pressure. According to the MEMS pressure sensing element, pressure sensitivity and electrical detection are separated, the pressure-sensitive film is exposed in air, the capacitor structures are disposed in the sealed cavity defined by the pressure-sensitive film and the substrate, and the movable electrode plates of the capacitor structures can be driven by the pressure-sensitive film. In this way, not only is a pressure-sensitive function finished, but also external electromagnetic interferences on the capacitor structures are shielded.

    SPEAKER VIBRATION ASSSEMBLY AND ASSEMBLING METHOD THEREOF

    公开(公告)号:US20180288551A1

    公开(公告)日:2018-10-04

    申请号:US15570616

    申请日:2015-12-16

    Applicant: Goertek.Inc

    Inventor: Qingbin DONG

    CPC classification number: H04R31/006 B29C65/54 B29L2031/38 H04R7/16 H04R31/00

    Abstract: The present invention discloses a speaker vibration assembly, comprising: a voice coil, a reinforcement part and a diaphragm, wherein the diaphragm is provided with a central part. The voice coil and the reinforcement part are respectively pasted on two surfaces of the central part, and the central part is provided with an through hole for adhering configured to accommodate an adhesive applied to the surfaces of the diaphragm. In addition, the present invention further provides an assembling method of a speaker vibration assembly. The vibration assembly provided by the present invention avoids an overflow problem of the adhesive, and more reliable structural stability is provided to the reinforcement part and the voice coil. The assembling method provided by the present invention is simple in process, and the application of the adhesive and the solidification operation are required to be performed only once.

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