公开(公告)号：US20080296529A1

公开(公告)日：2008-12-04

申请号：US12155015

申请日：2008-05-29

Applicant: Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

Inventor： Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

IPC: H01L41/187 ,  B05D5/12

CPC classification number: B81B3/0021 ,  B81B2201/0271 ,  B81B2201/032 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/1136 ,  H01L41/187 ,  H01L41/316 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/173

Abstract: A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.

Abstract translation: 本发明的压电薄膜包括含有钪的氮化铝薄膜。 假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。 根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。

公开(公告)号：US07449818B2

公开(公告)日：2008-11-11

申请号：US11710531

申请日：2007-02-26

Applicant: Midori Kato ,  Masayoshi Ishibashi

Inventor： Midori Kato ,  Masayoshi Ishibashi

IPC: H01L41/08

CPC classification number: F03G7/06 ,  B81B3/0021 ,  B81B2201/032 ,  Y10S310/80 ,  Y10T29/42

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same.An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract translation: 本发明的目的是提供一种薄且轻质的致动器模块结构，其包括多层结构，例如可以形成任意形状并在任意方向上变形的双压电晶片或单压电晶片结构，其高度 安全性和耐久性，并且可以容易地制造，以及其制造方法。 致动器具有这样的结构，使得在层压结构的弯曲型致动器的平面内引起条纹的内应力分布，从而允许致动器弯曲，以便构成中心轴线平行于其的圆柱形的一部分 条纹方向。

公开(公告)号：US20080074006A1

公开(公告)日：2008-03-27

申请号：US11686731

申请日：2007-03-15

Applicant: Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

Inventor： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

IPC: H01L41/047

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/16 ,  H01G5/18 ,  H01L41/0946 ,  H01L41/0953

Abstract: A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.

Abstract translation: 微机电装置包括第一压电致动器和第二压电致动器。 第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。 第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。 第二工作端在与基板的表面垂直的方向上面向第一工作端。

公开(公告)号：US20070241641A1

公开(公告)日：2007-10-18

申请号：US11710531

申请日：2007-02-26

Applicant: Midori Kato ,  Masayoshi Ishibashi

Inventor： Midori Kato ,  Masayoshi Ishibashi

IPC: H02N2/04 ,  H01L41/22

CPC classification number: F03G7/06 ,  B81B3/0021 ,  B81B2201/032 ,  Y10S310/80 ,  Y10T29/42

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same. An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract translation: 本发明的目的是提供一种薄且轻质的致动器模块结构，其包括多层结构，例如可以形成任意形状并在任意方向上变形的双压电晶片或单压电晶片结构，其高度 安全性和耐久性，并且可以容易地制造，以及其制造方法。 致动器具有这样的结构，使得在层压结构的弯曲型致动器的平面内引起条纹的内应力分布，从而允许致动器弯曲，以便构成中心轴线平行于其的圆柱形的一部分 条纹方向。

公开(公告)号：US20070241635A1

公开(公告)日：2007-10-18

申请号：US11279954

申请日：2006-04-17

Applicant: Scott Hunter ,  Gregory Simelgor

Inventor： Scott Hunter ,  Gregory Simelgor

IPC: H02N10/00

CPC classification number: H02N11/006 ,  B81B3/0024 ,  B81B2201/032

Abstract: A thermal bimorph that exhibits improved layer adhesion and an enhanced bending response is disclosed. The thermal bimorph incorporates corrugations that extend fully through the bimorph to its two major surfaces. In some embodiments, the thermal bimorph is asymmetrically corrugated.

Abstract translation: 公开了一种具有改进的层粘合性和增强的弯曲响应的热双压电晶片。 热双压电晶片包括完全穿过双压电晶片到其两个主要表面的波纹。 在一些实施例中，热双压电晶片是不对称的波纹状的。

公开(公告)号：US20070075387A1

公开(公告)日：2007-04-05

申请号：US11562331

申请日：2006-11-21

Applicant: Joseph McAlexander

Inventor： Joseph McAlexander

IPC: H01L29/84

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US20050082946A1

公开(公告)日：2005-04-21

申请号：US10896769

申请日：2004-07-22

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC: B81B3/00 ,  G02B26/08 ,  H01L41/04 ,  H01L41/09

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

Abstract: An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.

Abstract translation: 致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。

公开(公告)号：US20050011191A1

公开(公告)日：2005-01-20

申请号：US10885280

申请日：2004-07-06

Applicant: Michael Sinclair

Inventor： Michael Sinclair

IPC: B81B3/00 ,  F02G1/04 ,  F03G7/06 ,  F01B29/10

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051 ,  F02G1/04

Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movably parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. A floating cold beam connected between the shuttle and the substrate constrains and amplifies the motion of the shuttle in a predefined direction.

Abstract translation: 例如，在半导体材料的平面基板上形成单边平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及平行于基板可移动地定位的浮动梭。 对称的第一和第二组细长的热半束固定在浮动梭和相应的第一和第二锚固件之间。 第一和第二锚定装置以及第一和第二组热半束装置沿浮动梭的一侧定位。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 连接在梭子和基底之间的浮动冷束限制并放大梭子在预定方向上的运动。

公开(公告)号：US06840642B2

公开(公告)日：2005-01-11

申请号：US10464663

申请日：2003-06-19

Applicant: Hiroichi Ishikawa ,  Kanji Yokomizo

Inventor： Hiroichi Ishikawa ,  Kanji Yokomizo

IPC: G02F1/00 ,  B81B3/00 ,  G02B26/08 ,  G02B7/182

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/058

Abstract: A thermally actuated micro mirror includes a mirror surface, and a support structure section having a multilayer structure to support the mirror surface. The support structure section generates heat by the application of electricity thereto, and is deflected by a difference in coefficient of thermal expansion in the multilayer structure, thereby tilting the mirror surface at an arbitrary angle. The support structure section is disposed between the mirror surface and an electrode section for applying electricity. A longitudinal axis of the support structure section is perpendicular to the center axis of the mirror surface, and the longitudinal center of the support structure section is substantially placed on the center axis of the mirror surface. Therefore, the turning axis of the mirror surface is not displaced, and the light reflecting position does not move on the mirror surface.

Abstract translation: 热致动微反射镜包括镜面，以及支撑结构部分，其具有支撑镜面的多层结构。 支撑结构部分通过施加电力而产生热量，并且由于多层结构中的热膨胀系数的差异而偏转，从而以任意的角度倾斜镜面。 支撑结构部分设置在镜面和用于施加电力的电极部分之间。 支撑结构部分的纵向轴线垂直于镜面的中心轴线，并且支撑结构部分的纵向中心基本上位于镜面的中心轴线上。 因此，镜面的旋转轴线不会发生位移，反射镜位置不会在镜面上移动。

公开(公告)号：US06830944B1

公开(公告)日：2004-12-14

申请号：US10332559

申请日：2003-07-23

Applicant: Johannes G. Smits

Inventor： Johannes G. Smits

IPC: H01L2100

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0858

Abstract: A plurality of MEMS devices that can be easily configured to impart extended ranges of rotational and/or translational motion. The MEMS devices comprise a micro-electromechanical building block including a bendable member having a first end connectable to a support structure, and a straight rigid member having a first end connected to a second end of the bendable member. In the event the bendable member is in a straight condition, the rigid member extends from the second end of the bendable member toward the support structure. Further, the bendable member has a predetermined length, and the rigid member has a length at least within a range from one half to the full predetermined length of the bendable member to allow a free end of the rigid member to undergo extended rotational and/or translational motion in response to a displacement of the bendable member. The respective MEMS devices can be employed as actuators or sensors in a variety of micro-electromechanical and micro-opto-electromechanical applications.

Abstract translation: 多个MEMS器件可以容易地构造成赋予延伸的旋转和/或平移运动范围。 MEMS器件包括微机电构建块，其包括具有可连接到支撑结构的第一端的可弯曲构件，以及具有连接到可弯曲构件的第二端的第一端的直的刚性构件。 在可弯曲构件处于直线状态的情况下，刚性构件从可弯曲构件的第二端朝向支撑结构延伸。 此外，可弯曲构件具有预定长度，并且刚性构件的长度至少在可弯曲构件的一半到整个预定长度的范围内，以允许刚性构件的自由端经历延伸的旋转和/或 响应于可弯曲构件的位移的平移运动。 各种MEMS器件可以用作各种微机电和微光机电应用中的致动器或传感器。