HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM
    51.
    发明申请
    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM 有权
    高纯度合成二氧化硅及其制造的半导体夹具

    公开(公告)号:US20130115391A1

    公开(公告)日:2013-05-09

    申请号:US13809231

    申请日:2011-07-08

    Abstract: Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fibre reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.

    Abstract translation: 公开了外径大于400mm,内径大于300mm的透明合成玻璃石英玻璃的中空铸锭。 锭基本上没有直径大于100um的气泡或夹杂物,具有不超过100ppB的任何单独的金属杂质,并且氯浓度小于5ppM。 还公开了生产这种锭的方法,其中密度大于0.4g / cm 3的多孔烟灰体沉积在抗氧化心轴上。 在真空下或在还原气体存在下,烟灰体在包括石墨,碳纤维增强碳,碳化硅,硅浸渍的碳化硅,碳化硅涂覆的石墨或玻璃状二氧化硅的心轴上脱水,然后烧结成透明 无孔玻璃在真空或氦气氛中。

    Optical fiber preform fabricating method
    52.
    发明授权
    Optical fiber preform fabricating method 有权
    光纤预制棒制造方法

    公开(公告)号:US08381549B2

    公开(公告)日:2013-02-26

    申请号:US11921418

    申请日:2007-06-21

    Abstract: The present invention relates to an optical fiber preform fabricating method that makes it possible to implement a reduction in iron impurities at a low cost. The optical fiber preform fabricating method comprises a glass synthesis step for forming a glass region constituting at least a part of the core area of the optical fiber. The glass synthesis step includes a deposition step of depositing glass particles containing the Al-element inside the glass pipe by means of chemical vapor deposition, and a consolidation step of obtaining a transparent glass body from the glass soot body thus obtained. In other words, the deposition step synthesizes glass particles on the inside wall of a glass pipe by feeding raw material gas, in which the content ratio (O/Al) of the O-element and Al-element is 20 or less, into the glass pipe. Furthermore, the consolidation step obtains a transparent glass body from the glass soot body by heating the glass soot body. The transparent glass body that is formed in the consolidation step constitutes part of the core region.

    Abstract translation: 本发明涉及能够以低成本实现铁杂质的还原的光纤预制体的制造方法。 光纤预制体制造方法包括玻璃合成步骤,用于形成构成光纤的核心区域的至少一部分的玻璃区域。 玻璃合成步骤包括通过化学气相沉积在玻璃管内沉积含有Al元素的玻璃颗粒的沉积步骤,以及从由此获得的玻璃烟灰体获得透明玻璃体的固结步骤。 换句话说,沉积步骤通过将O元件和Al元素的含量比(O / Al)为20以下的原料气体进料到玻璃管的内壁上而合成玻璃粒子。 玻璃管。 此外,固结步骤通过加热玻璃烟灰体从玻璃烟灰体获得透明玻璃体。 在固结步骤中形成的透明玻璃体构成核心区域的一部分。

    INTERNAL VAPOUR DEPOSITION PROCESS
    53.
    发明申请
    INTERNAL VAPOUR DEPOSITION PROCESS 有权
    内部蒸汽沉积过程

    公开(公告)号:US20110247369A1

    公开(公告)日:2011-10-13

    申请号:US13082080

    申请日:2011-04-07

    Abstract: A method for manufacturing a primary preform for optical fibres using an internal vapour deposition process, including the steps of: i) providing a hollow glass substrate tube having a supply side and a discharge side, ii) surrounding at least part of the hollow glass substrate tube by a furnace, iii) supplying a gas flow, doped or undoped, of glass-forming gases to the interior of the hollow glass substrate tube via the supply side thereof, iv) creating a reaction zone in which conditions such that deposition of glass will take place on the interior of the hollow glass tube are created, and v) moving the reaction zone back and forth in longitudinal direction over the hollow glass substrate tube between a reversal point located near the supply side and a reversal point located near the discharge side of the hollow glass substrate tube.

    Abstract translation: 一种使用内部气相沉积工艺制造用于光纤的初级预制棒的方法,包括以下步骤:i)提供具有供给侧和排出侧的中空玻璃基板管,ii)至少部分中空玻璃基板 通过炉子管,iii)通过其供应侧向中空玻璃基底管的内部供应玻璃形成气体的掺杂或未掺杂的气流,iv)产生反应区,其中使玻璃沉积的条件 将产生在中空玻璃管​​的内部,并且v)使反应区域在纵向方向上前后移动到中空玻璃基板管之间,位于靠近供应侧的反转点和位于放电附近的反转点 一侧的中空玻璃基板管。

    CRUCIBLE HAVING A DOPED UPPER WALL PORTION AND METHOD FOR MAKING THE SAME
    56.
    发明申请
    CRUCIBLE HAVING A DOPED UPPER WALL PORTION AND METHOD FOR MAKING THE SAME 有权
    具有多孔上部墙壁的混凝土及其制造方法

    公开(公告)号:US20100186662A1

    公开(公告)日:2010-07-29

    申请号:US12752998

    申请日:2010-04-01

    Abstract: A fused glass crucible includes a collar of doped aluminum silica that defines uppermost and outermost surfaces of the crucible. The melt line that defines the surface of molten silicon in the crucible may be substantially at the lower end of the collar or slightly above it. Crystallization of the collar makes it hard and therefore supports the remaining uncrystallized portion of the crucible above the melt line. The melt line may also be below the lower end of the collar, especially if the melt is drawn down or poured early in the process. Because there is little or no overlap or because the overlap does not last long, the doped aluminum collar is not damaged by the heat of from the melt.

    Abstract translation: 熔融玻璃坩埚包括限定坩埚的最上表面和最外表面的掺杂铝二氧化硅的环。 限定坩埚中的熔融硅表面的熔体线可以基本上在套环的下端或略高于其上。 轴环的结晶使其变硬,因此支撑坩埚在熔融线之上的剩余未结晶部分。 熔体管线也可以在套环的下端下方,特别是如果熔体在该过程中被提拉或者早期浇注。 因为很少或没有重叠,或者由于重叠不会持续很长时间,所以掺杂的铝合金套环不会被熔体的热量损坏。

    Optical Fiber Preform Fabricating Method, Optical Fiber Fabricating Method and Optical Fiber
    57.
    发明申请
    Optical Fiber Preform Fabricating Method, Optical Fiber Fabricating Method and Optical Fiber 有权
    光纤预制件制造方法,光纤制造方法和光纤

    公开(公告)号:US20100071420A1

    公开(公告)日:2010-03-25

    申请号:US11921418

    申请日:2007-06-21

    Abstract: The present invention relates to an optical fiber preform fabricating method that makes it possible to implement a reduction in iron impurities at a low cost. The optical fiber preform fabricating method comprises a glass synthesis step for forming a glass region constituting at least a part of the core area of the optical fiber. The glass synthesis step includes a deposition step of depositing glass particles containing the Al-element inside the glass pipe by means of chemical vapor deposition, and a consolidation step of obtaining a transparent glass body from the glass soot body thus obtained. In other words, the deposition step synthesizes glass particles on the inside wall of a glass pipe by feeding raw material gas, in which the content ratio (O/Al) of the O-element and Al-element is 20 or less, into the glass pipe. Furthermore, the consolidation step obtains a transparent glass body from the glass soot body by heating the glass soot body. The transparent glass body that is formed in the consolidation step constitutes part of the core region.

    Abstract translation: 本发明涉及能够以低成本实现铁杂质的还原的光纤预制体的制造方法。 光纤预制体制造方法包括玻璃合成步骤,用于形成构成光纤的核心区域的至少一部分的玻璃区域。 玻璃合成步骤包括通过化学气相沉积在玻璃管内沉积含有Al元素的玻璃颗粒的沉积步骤,以及从由此获得的玻璃烟灰体获得透明玻璃体的固结步骤。 换句话说,沉积步骤通过将O元件和Al元素的含量比(O / Al)为20以下的原料气体进料到玻璃管的内壁上而合成玻璃粒子。 玻璃管。 此外,固结步骤通过加热玻璃烟灰体从玻璃烟灰体获得透明玻璃体。 在固结步骤中形成的透明玻璃体构成核心区域的一部分。

    Optical fiber
    58.
    发明授权
    Optical fiber 有权
    光纤

    公开(公告)号:US07536074B2

    公开(公告)日:2009-05-19

    申请号:US12197596

    申请日:2008-08-25

    Abstract: An optical fiber made of silica-based material includes a core and a cladding formed around the core. The core is doped with germanium dioxide, which increases refractive index and decreases acoustic-wave velocity, and aluminum oxide, which increases both refractive index and acoustic-wave velocity, satisfying—2.814+0.594×W1≦W2≦54.100+0.218×W1, W1+W2≦60, and W2≧56.63−2.04×W1, where W1 is doping amount of germanium dioxide in weight percentage, which is larger than 4.74, and W2 is doping amount of aluminum oxide in weight percentage. A nonlinear coefficient of the optical fiber is equal to or larger than 2.6×10−9W−1.

    Abstract translation: 由二氧化硅基材料制成的光纤包括在芯周围形成的芯和包层。 核心掺杂有二氧化锗,其增加折射率并降低声波速度,并且氧化铝增加折射率和声波速度,满足-2.814 + 0.594xW1 <= W2 <= 54.100 + 0.218xW1, W1 + W2 <= 60,W2> = 56.63〜0.04xW1,其中W1是二氧化锗的掺杂量,重量百分比大于4.74,W2是氧化铝的掺杂量。 光纤的非线性系数等于或大于2.6×10-9W-1。

    Multi-wavelength, multimode optical fibers
    59.
    发明授权
    Multi-wavelength, multimode optical fibers 有权
    多波长多模光纤

    公开(公告)号:US07421174B2

    公开(公告)日:2008-09-02

    申请号:US11511174

    申请日:2006-08-28

    Abstract: A silicate optical fiber comprises a graded index silicate core co-doped with aluminum oxide, phosphorus oxide, germanium oxide and fluorine in unique compositions that we have discovered allow multimode, multi-wavelength operation without significant intermodal dispersion. Illustratively, the core comprises a multiplicity of compositions whose refractive indices are graded from a maximum at or near the center of the core to a minimum at the interface with the cladding. Each core composition resides within a sub-volume of a 5 dimensional phase space in which an optimum core profile shape is essentially constant over the wavelength range of operation of the fiber. For operation in the wavelength range of about 0.78 μm to 1.55 μm, each composition preferably comprises no more than approximately 6 mole % Al2O3, 9 mole % P2O5, 6 mole % GeO2, 6 mole % F, and 90-100 mole % SiO2.

    Abstract translation: 硅酸盐光纤包括与氧化铝,氧化磷,氧化锗和氟共掺杂的分级指数硅酸盐芯,其独特的组成,我们发现允许多模多波长操作,而没有显着的联合分散。 说明性地,芯包括多个组合物,其折射率从芯的中心处或附近的最大值到与包层的界面处最小。 每个核心组合物位于5维相位空间的子体积中,其中最佳核心轮廓形状在光纤的操作的波长范围上基本上是恒定的。 为了在约0.78μm至1.55μm的波长范围内操作,每个组合物优选包含不超过约6摩尔%的Al 2 O 3 N 3,9摩尔%P

    Polishing method for extreme ultraviolet optical elements and elements produced using the method
    60.
    发明申请
    Polishing method for extreme ultraviolet optical elements and elements produced using the method 审中-公开
    使用该方法制备的极紫外光学元件和元件的抛光方法

    公开(公告)号:US20080132150A1

    公开(公告)日:2008-06-05

    申请号:US11699287

    申请日:2007-01-29

    Abstract: The invention is directed to polished glass substrates suitable for extreme ultraviolet lithography. The elements are silica-titania glass elements having a coefficient of thermal expansion of 0±30×10−9/° C. or less, and containing 5-10 wt. % titania. The polished elements have a mid-spatial frequency peak-to-valley roughness of 2.0 ml/cm2/min. Generally the flow rates are in the range of 2.0-10 ml/cm2/min. Glass substrates suitable for extreme ultraviolet lithography element have a coefficient of thermal expansion of 0±30×10−9/° C. or less. A particular glass suitable for EUVL use is silica-titania glass containing 5-10 wt. % titania.

    Abstract translation: 本发明涉及适用于极紫外光刻的抛光玻璃基板。 元素是具有0±30×10 -9 /℃或更低的热膨胀系数的二氧化硅 - 二氧化钛玻璃元素,并且含有5-10重量% 二氧化钛。 抛光元件具有<10nm的中空间频率峰谷粗糙度和<0.20nm平均粗糙度的高空间频率粗糙度。 本发明还涉及一种用于生产适用于极紫外光刻(“EUVL”)的光学元件的方法,该方法至少具有以下步骤:提供所需光学元件形状的玻璃基片,并使用 高磨料浆料流速> 2.0ml / cm 2 / min。 通常流速在2.0-10ml / cm 2 / min的范围内。 适用于极紫外光刻元件的玻璃基板的热膨胀系数为0±30×10 -9 /℃以下。 适用于EUVL的特定玻璃是含有5-10重量%的二氧化硅 - 二氧化钛玻璃。 二氧化钛。

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