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    Quartz glass having excellent resistance against plasma corrosion and method for producing the same
    53.
    发明申请
    Quartz glass having excellent resistance against plasma corrosion and method for producing the same 有权
    具有优异的等离子体腐蚀性的石英玻璃及其制造方法

    公开(公告)号：US20050272588A1

    公开(公告)日：2005-12-08

    申请号：US11076944

    申请日：2005-03-11

    Applicant: Tatsuhiro Sato ,  Nobumasa Yoshida ,  Mamoru Endo

    Inventor： Tatsuhiro Sato ,  Nobumasa Yoshida ,  Mamoru Endo

    IPC: C03B19/01 ,  C03B19/06 ,  C03B19/09 ,  C03B19/14 ,  C03C3/06

    CPC classification number: C03C3/06 ,  C03B19/01 ,  C03B19/06 ,  C03B19/066 ,  C03B19/09 ,  C03B19/1438 ,  C03B19/1453 ,  C03B20/00 ,  C03B2201/36 ,  C03C2201/36 ,  C03C2203/10 ,  C03C2203/22 ,  C03C2203/40

    Abstract: As a jig material to use under plasma reaction for producing semiconductors the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.

    Abstract translation: 作为用于制造半导体的等离子体反应的夹具材料，本发明提供了具有耐等离子体腐蚀性，特别是耐氟基等离子体气体的耐腐蚀性的石英玻璃，其可以在不引起硅晶片异常的情况下使用; 本发明还提供一种石英玻璃夹具及其制造方法。 含有0.1〜20重量％的两种以上金属元素的石英玻璃，所述金属元素包含选自元素周期表第3B族的至少一种金属元素作为第一金属元素和至少一种 金属元素选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf，镧系元素和锕系元素作为第二金属元素，条件是每个第二金属元素的最大浓度为1.0 wt％以下。

    Method of fabrication of rare earth doped preforms for optical fibers
    57.
    发明授权
    Method of fabrication of rare earth doped preforms for optical fibers 有权
    光纤稀土掺杂预制棒的制造方法

    公开(公告)号：US06578387B2

    公开(公告)日：2003-06-17

    申请号：US09492925

    申请日：2000-01-28

    Applicant: Kanishka Tankala

    Inventor： Kanishka Tankala

    IPC: C03B37018

    CPC classification number: C03B37/01838 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36

    Abstract: The present invention discloses a method of fabricating rare earth-doped preforms for optical fibers. A silica soot is deposited as a layer with high porosity on an inner surface of a silica-based tube by a modified chemical vapor deposition (MCVD) process at a temperature high enough to produce the silica soot but low enough to avoid sintering of the soot into the silica-based tube. The silica-based tube is then immersed in a solution including a rare earth element and a codopant element for impregnation. The excess solution is drained and the silica-based tube is dried in a stream of chlorine and inert gas at an elevated temperature. Then, the rare earth element and the codopant element are oxidized under an oxygen partial pressure at a temperature high enough to overcome kinetic limitations against oxidation. Finally, the soot layer is consolidated while flowing a mixture of chlorides of a second codopant element and oxygen at a sintering temperature at which the second codopant element reacts with oxygen to form codopant oxide which is delivered around the rare earth element oxide deposited in the soot layer. In the method of the current invention, one or more rare earth elements are codoped with preferred codopants including but not limited to Ge, Al, P and/or B to enhance the performance of the rare earth ions. Other dopants may also be used in conjunction with the preferred dopants for modifying the refractive index of the core.

    Abstract translation: 本发明公开了一种制造用于光纤的稀土掺杂预制棒的方法。 通过改进的化学气相沉积（MCVD）工艺在二氧化硅基管的内表面上沉积具有高孔隙率的二氧化硅烟灰，其温度足够高以产生二氧化硅烟灰，但足够低以避免烟灰的烧结 进入二氧化硅基管。 然后将二氧化硅基管浸入包括稀土元素和共掺杂元素的溶液中以进行浸渍。 排出过量的溶液，并将二氧化硅基管在升高的温度下在氯气和惰性气体流中干燥。 然后，稀土元素和共掺杂元素在足够高的温度下在氧分压下氧化，以克服对氧化的动力学限制。 最后，在第二共掺杂元素与氧反应的烧结温度下流过第二共掺杂元素和氧的氯化物的混合物而固化烟灰层，以形成在沉积在烟炱中的稀土元素氧化物周围输送的共氧化物氧化物 层。 在本发明的方法中，一种或多种稀土元素与优选的共掺混合物共混，包括但不限于Ge，Al，P和/或B以提高稀土离子的性能。 其它掺杂剂也可与优选的掺杂剂结合使用以改变芯的折射率。

    Method of fabrication of rare earth doped preforms for optical fibers
    59.
    发明申请
    Method of fabrication of rare earth doped preforms for optical fibers 有权

    公开(公告)号：US20030024275A1

    公开(公告)日：2003-02-06

    申请号：US09492925

    申请日：2000-01-28

    Inventor： Kanishka Tankala

    IPC: C03B037/018

    CPC classification number: C03B37/01838 ,  C03B2201/10 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36

    Abstract: The present invention discloses a method of fabricating rare earth-doped preforms for optical fibers. A silica soot is deposited as a layer with high porosity on an inner surface of a silica-based tube by a modified chemical vapor deposition (MCVD) process at a temperature high enough to produce the silica soot but low enough to avoid sintering of the soot into the silica-based tube. The silica-based tube is then immersed in a solution including a rare earth element and a codopant element for impregnation. The excess solution is drained and the silica-based tube is dried in a stream of chlorine and inert gas at an elevated temperature. Then, the rare earth element and the codopant element are oxidized under an oxygen partial pressure at a temperature high enough to overcome kinetic limitations against oxidation. Finally, the soot layer is consolidated while flowing a mixture of chlorides of a second codopant element and oxygen at a sintering temperature at which the second codopant element reacts with oxygen to form codopant oxide which is delivered around the rare earth element oxide deposited in the soot layer. In the method of the current invention, one or more rare earth elements are codoped with preferred codopants including but not limited to Ge, Al, P and/or B to enhance the performance of the rare earth ions. Other dopants may also be used in conjunction with the preferred dopants for modifying the refractive index of the core.

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