公开(公告)号：US06233370B1

公开(公告)日：2001-05-15

申请号：US09182504

申请日：1998-10-30

Applicant: Makoto Fujino ,  Nobuo Hori ,  Shigenori Nagano

Inventor： Makoto Fujino ,  Nobuo Hori ,  Shigenori Nagano

IPC: G02B600

CPC classification number: G01B9/0201 ,  G01B2290/70

Abstract: An simlified optical configuration is acheved and, a direction discrimination function and a high resolving detection function are performed by one light receiving section. A TE mode emitted from an optical waveguide section 3 transmits through a beam splitter 5 and is guided to a measurement optical path. A TM mode emitted from the optical waveguide is reflected by the beam splitter 5 and is guided to a reference optical path. First and second ¼ wave plates 10 and 11 are inserted in the respective optical paths, and the TE and TM modes are acted by a ½ wave plate while travelling forward and backward on the reference and measurement optical paths. A reference light (TM mode) is reflected by a reference reflection section 8 and transmits through the beam splitter section 5. A measurement light (TE mode) is reflected by a measurement reflection section 9 and is reflected by the beam splitter section 5. By a polarization member 12, only direction components of the polarization member 12 are extracted from the TM and TE modes, and both waves interfere, whereby a displacement is measured by a displacement measurement section 7.

Abstract translation: 通过一个光接收部分来实现一个简化的光学配置，方向鉴别功能和高分辨率检测功能。 从光波导部3发射的TE模式通过分束器5透射并被引导到测量光路。 从光波导发射的TM模式被分束器5反射并被引导到参考光路。 第一和第二¼波片10和11插入相应的光路中，并且在参考和测量光路上向前和向后行进时，TE和TM模式由1/2波片作用。 参考光（TM模式）被参考反射部分8反射并透射通过分束器部分5.测量光（TE模式）被测量反射部分9反射并被分束器部分5反射。通过 极化构件12仅从TM和TE模式中提取偏振构件12的方向分量，并且两个波都相互干涉，从而由位移测量部7测量位移。

公开(公告)号：US06195162B1

公开(公告)日：2001-02-27

申请号：US09169252

申请日：1998-10-09

Applicant: Malcolm Paul Varnham ,  Erhard Lothar Edgar Kluth ,  Phillip Sam Bull ,  John Luscombe

Inventor： Malcolm Paul Varnham ,  Erhard Lothar Edgar Kluth ,  Phillip Sam Bull ,  John Luscombe

IPC: G01B902

CPC classification number: G01H9/004 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02014 ,  G01B9/02023 ,  G01B9/02027 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/45

Abstract: An interferometric sensor includes a broadband optical source, a depolarizer for depolarizing optical radiation emitted by the broadband optical source, a matched interferometer, a sensing interferometer, and a detector. The matched interferometer contains a phase modulator. The sensor is configured so that the optical path length difference in the sensing interferometer is approximately equal to the optical path length difference in the matched interferometer.

Abstract translation: 干涉测量传感器包括宽带光源，用于使由宽带光源发射的光辐射去极化的去极化器，匹配干涉仪，感测干涉仪和检测器。 匹配干涉仪包含相位调制器。 传感器被配置为使得感测干涉仪中的光程长度差近似等于匹配干涉仪中的光程长度差。

公开(公告)号：US6128083A

公开(公告)日：2000-10-03

申请号：US287046

申请日：1999-04-06

Applicant: Asahiko Nogami

Inventor： Asahiko Nogami

IPC: G01B9/02 ,  G01B11/00

CPC classification number: G01B9/02069 ,  G01B9/0201 ,  G01B9/02083

Abstract: The displacement measuring apparatus of a laser interference technology includes a probe 3 which delivers at a photodetector 17 an RF signal of which a modulated component proportional to a displacement of an object 2 under measurement. The apparatus has also a phase-demodulation circuit 9 in which an interference signal produced by shifting the frequency of the RF signal to an intermediate frequency is phase-demodulated on the basis of the carrier signal for supply to a light modulator 16. Thus the apparatus can detect a displacement of the object with a high resolution.

Abstract translation: 激光干涉技术的位移测量装置包括探针3，其在光电检测器17处传送与被测量物体2的位移成比例的调制分量的RF信号。 该装置还具有相位解调电路9，其中通过将RF信号的频率偏移到中频产生的干扰信号基于用于提供给光调制器16的载波信号被相位解调。因此，装置 可以以高分辨率检测物体的位移。

公开(公告)号：US5608523A

公开(公告)日：1997-03-04

申请号：US622650

申请日：1996-03-26

Applicant: Lee Kalem ,  Robert L. Wilson

Inventor： Lee Kalem ,  Robert L. Wilson

IPC: G01B11/00 ,  G01B9/02 ,  G01B21/00 ,  H03K5/1536

CPC classification number: G01B9/02083 ,  G01B9/0201 ,  G01B2290/45

Abstract: A laser interferometer measurement system eliminates detection of "false" zero crossings in the measurement signal. The measurement signal is shifted in phase by an integrator or a differentiator. The positive portion of the shifted measurement signal is used to determine falling portions of the measurement signal while the negative portion of the shifted measurement signal is used to determine the rising portions of the measurement signal. Each portion is compared to the reference signal. A SR latch receives the result of each comparator. The output signal of the SR latch reflects the zero crossings of the measurement signal without the effects of noise.

Abstract translation: 激光干涉仪测量系统消除了测量信号中“假”过零点的检测。 测量信号由积分器或微分器相位移位。 移位测量信号的正部分用于确定测量信号的下降部分，而移位的测量信号的负部分用于确定测量信号的上升部分。 每个部分与参考信号进行比较。 SR锁存器接收每个比较器的结果。 SR锁存器的输出信号反映了测量信号的过零点，而没有噪声的影响。

公开(公告)号：US5530542A

公开(公告)日：1996-06-25

申请号：US423236

申请日：1995-04-19

Applicant: Lee Kalem ,  Robert L. Wilson

Inventor： Lee Kalem ,  Robert L. Wilson

IPC: G01B11/00 ,  G01B9/02 ,  G01B21/00 ,  H03K5/1536

CPC classification number: G01B9/02083 ,  G01B9/0201 ,  G01B2290/45

Abstract: A laser interferometer measurement system eliminates detection of "false" zero crossings in the measurement signal. The measurement signal is shifted in phase by an integrator or a differentiator. The positive portion of the shifted measurement signal is used to determine falling portions of the measurement signal while the negative portion of the shifted measurement signal is used to determine the rising portions of the measurement signal. Each portion is compared to the reference signal. A SR latch receives the result of each comparator. The output signal of the SR latch reflects the zero crossings of the measurement signal without the effects of noise.

Abstract translation: 激光干涉仪测量系统消除了测量信号中“假”过零点的检测。 测量信号由积分器或微分器相位移位。 移位测量信号的正部分用于确定测量信号的下降部分，而移位的测量信号的负部分用于确定测量信号的上升部分。 每个部分与参考信号进行比较。 SR锁存器接收每个比较器的结果。 SR锁存器的输出信号反映了测量信号的过零点，而没有噪声的影响。

公开(公告)号：US5459570A

公开(公告)日：1995-10-17

申请号：US33194

申请日：1993-03-16

Applicant: Eric A. Swanson ,  David Huang ,  James G. Fujimoto ,  Carmen A. Puliafito ,  Charles P. Lin ,  Joseph S. Schuman

Inventor： Eric A. Swanson ,  David Huang ,  James G. Fujimoto ,  Carmen A. Puliafito ,  Charles P. Lin ,  Joseph S. Schuman

IPC: A61B1/00 ,  A61B3/10 ,  A61B3/12 ,  A61B5/00 ,  A61B5/103 ,  A61B10/00 ,  G01B9/02 ,  G01B11/00 ,  G01B11/06 ,  G01B11/24 ,  G01J1/00 ,  G01N21/17 ,  G01N21/47 ,  G02B5/18 ,  G02B27/44 ,  G11B7/00 ,  H01S5/14 ,  G01D9/02

CPC classification number: G02B26/0875 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/00183 ,  A61B3/102 ,  A61B5/0064 ,  A61B5/0066 ,  A61B5/0068 ,  A61B5/0084 ,  A61B5/6852 ,  B82Y15/00 ,  G01B11/00 ,  G01B11/2441 ,  G01B9/02002 ,  G01B9/0201 ,  G01B9/02019 ,  G01B9/02027 ,  G01B9/02063 ,  G01B9/02087 ,  G01B9/0209 ,  G01J1/00 ,  G01N21/4795 ,  G02B26/103 ,  G02B5/1828 ,  A61B2562/0242 ,  A61B5/441 ,  G01B2290/45 ,  G01B2290/65 ,  G01B2290/70 ,  G11B2007/0013 ,  H01S5/141

Abstract: A method and apparatus for performing various optical measurements is provided utilizing an optical coherence domain refrectometer (OCDR). A short coherence optical radiation source applies optical radiation through like optical paths to a sample and an optical reflector. The optical reflector is movable in accordance with a predetermined velocity profile to permit interferometric scanning of the sample, the resulting output having a Doppler shift frequency modulation. This output may be demodulated and detected to obtain desired measurements and other information. Additional information may be obtained by applying radiation from two or more sources at different wavelengths to the sample and reflector and by separately demodulating the resulting outputs before processing. Birefringent information may be obtained by polarizing the optical radiation used, by suitably modifying the polarization in the sample and reference paths and by dividing the output into orthogonal polarization outputs which are separately demodulated before processing.

Abstract translation: 使用光学相干域反射计（OCDR）提供用于执行各种光学测量的方法和装置。 短相干光辐射源通过相同的光路将光辐射施加到样品和光反射器。 光学反射器可以根据预定的速度分布移动以允许样本的干涉扫描，所得到的输出具有多普勒频移调制。 该输出可以被解调和检测以获得期望的测量和其他信息。 可以通过将不同波长的两个或更多个源的辐射施加到样品和反射器并且在处理之前单独解调所得到的输出来获得附加信息。 双折射信息可以通过对所采用的光辐射进行极​​化，通过适当地修改样本和参考路径中的极化，并将输出划分为在处理之前被单独解调的正交偏振输出。

公开(公告)号：US5450195A

公开(公告)日：1995-09-12

申请号：US201645

申请日：1994-02-25

Applicant: Ehrhard Dammann ,  Juergen Bauer

Inventor： Ehrhard Dammann ,  Juergen Bauer

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02028 ,  G01B9/02051 ,  G01B2290/45

Abstract: A phase-modulated interferometer with novel control and signal processing utilizes superimposition signals capable of evaluation in a phase-modulated interferometer without complicated control of the phase modulator. A sinusoidal control signal with a modulation frequency (.omega..sub.0) having an amplitude (.psi..sub.0) is supplied to a known phase modulator. Multiplicative mixing of the superimposition signal produced in the interferometer from the measuring and reference arm with a sinusoidal signal of a determined mixing frequency (.omega..sub.M) which is rigidly coupled with respect to phase and frequency with the control signal is effected. When the amplitude (.psi..sub.0) of the control signal satisfies the condition for a suitable operating point of the phase modulator, a cosine signal conventionally used for evaluating the phase displacement is filtered out in an electronic bandpass filter at whose filter frequency (.omega..sub.F) the sum and difference frequencies of two harmonics of the modulation frequency (.omega..sub.0) and the mixing frequency (.omega..sub.M) assume the same value. The invention is applied in phase-modulated interferometers, in particular for precision distance measuring devices, preferably by the heterodyne evaluating method.

Abstract translation: 具有新颖的控制和信号处理的相位调制干涉仪利用相位调制干涉仪中能够进行评估的叠加信号，而不需要相位调制器的复杂控制。 具有幅度（psi 0）的调制频率（ω0）的正弦控制信号被提供给已知的相位调制器。 实现了在干涉仪中从测量和参考臂产生的叠加信号与确定的混合频率（ω-M）的正弦信号的相乘混合，其与控制信号相对于频率和频率刚性耦合。 当控制信号的振幅（psi 0）满足相位调制器的合适工作点的条件时，通常用于评估相位位移的余弦信号在其滤波频率（ω）为F的电子带通滤波器中滤除， 调制频率（ω-0）和混合频率（ω-M）的两个谐波的和和差频率假定相同的值。 本发明优选地通过外差评估方法应用于相位调制干涉仪，特别是用于精密距离测量装置。

公开(公告)号：US5048964A

公开(公告)日：1991-09-17

申请号：US469480

申请日：1990-04-11

Applicant: John R. Tyrer ,  Fernando Mendoza-Santoyo ,  David Kerr

Inventor： John R. Tyrer ,  Fernando Mendoza-Santoyo ,  David Kerr

IPC: G01B9/02 ,  G01B9/021 ,  G01J9/02

CPC classification number: G01B9/0201 ,  G01B9/02094

Abstract: An interferometric procedure, such as electronic speckle pattern interferometry, involves generating two signals representing the point-by-point variations in intensity of respective patterns of electromagnetic radiation resulting from the interference of first and second beams of such radiation derived from a coherent source, with at least the first beam from each pattern being scattered, before interference with its respective second beam, from a common object surface, and with a corresponding pair of the beams, one for each pattern, having a predetermined relative phase difference of other than a multiple of .pi.; and determining from the two signals values for a datum phase of the radiation at the object surface. Preferably, as a preliminary to this last determination. DC components are removed from the two signals. Conveniently, to simplify the determination, the phase difference is an odd multiple of .pi./4 or .pi./2.

Abstract translation: PCT No.PCT / GB89 / 01030 Sec。 371日期1990年04月11日 102（e）1990年4月11日PCT PCT 1989年9月4日PCT公布。 出版物WO90 / 02930 日期1990年3月22日。干涉测量程序，例如电子散斑图案干涉测量，涉及产生两个信号，表示由这种辐射的第一和第二波束的干涉导致的各种电磁辐射模式的逐点变化的信号 衍生自相干光源，至少来自每个图案的第一光束在与其相应的第二光束干涉之前，从公共物体表面散射，并且与对应的一对光束一一对应于每个图案，具有预定的相对 相位差不同于pi的倍数; 并根据两个信号确定物体表面上的辐射的基准相位值。 优选地，作为该最后确定的初步。 从两个信号中去除直流分量。 方便地，为了简化确定，相位差是pi / 4或pi / 2的奇数倍。

公开(公告)号：US4791584A

公开(公告)日：1988-12-13

申请号：US918951

申请日：1986-10-15

Applicant: John E. Greivenkamp, Jr.

Inventor： John E. Greivenkamp, Jr.

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01B11/303 ,  G01B9/0201 ,  G01B9/02038 ,  G01B9/02083 ,  G01J9/02 ,  G01M11/005

Abstract: A technique is described for extending the measurement range of interferometry past the Nyquist limit of the sampling frequency of the interferogram. The absolute phase values measured by an interferometer are reconstructed by applying constraints based upon a priori knowledge of the absolute phase values. The constraints include the knowledge that one or more derivatives of the spatial distribution of phase values is a continuous function, and the knowledge of step heights to within .lambda./2.

Abstract translation: 描述了一种技术，用于延长经过干涉图采样频率的奈奎斯特极限的干涉测量范围。 通过应用基于绝对相位值的先验知识的约束来重建由干涉仪测量的绝对相位值。 约束包括知道相位值的空间分布的一个或多个导数是连续函数，以及阶跃高度在λ/ 2内的知识。

公开(公告)号：US12000698B2

公开(公告)日：2024-06-04

申请号：US17572353

申请日：2022-01-10

Applicant: Massachusetts Institute of Technology

Inventor： Noah Gilbert ,  Joshua Brown

IPC: G01B9/02001 ,  G01B9/02 ,  G01B9/02055 ,  G01B11/24

CPC classification number: G01B9/0201 ,  G01B9/02051 ,  G01B9/02067 ,  G01B11/2441 ,  G01B2290/70

Abstract: A polarization-separated, phase-shifted interferometer can generate interferograms without moving parts. It uses a phase shifter, such as an electro-optic phase modulator, to modulate the relative phase between sample and reference beams. These beams are transformed into orthogonal polarization states (e.g., horizontally and vertically polarized states) and coupled via a common path (e.g., polarization-maintaining fiber) to a polarizing beam splitter (PBS), which sends them into separate sample and reference arms. Quarter-wave plates in the sample and reference arms rotate the polarization states of the sample and reference beams so they are coupled out of the PBS to a detector via a 45° linear polarizer. The polarizer projects the aligned polarization components of the sample and reference beams onto the detector, where they interfere with known relative phase to produce an output that can be used to map surface topography of the test object.