Latent fingerprint detectors and fingerprint scanners therefrom
    52.
    发明授权
    Latent fingerprint detectors and fingerprint scanners therefrom 有权
    潜在的指纹检测器和指纹扫描仪

    公开(公告)号:US08437517B2

    公开(公告)日:2013-05-07

    申请号:US13049351

    申请日:2011-03-16

    Abstract: An automatic fingerprint system includes an optical sensor having a first light source that provides a collimated beam for interrogating a first sample surface, and a camera including a lens and a photodetector array having a camera field of view (FOVCAMERA) large enough to image the first sample surface. The camera is critical angle positioned relative to the first light source to receive specular reflection (glare) from the first sample surface to generate image data from the glare. The first light source and camera have substantially equal and opposite numerical apertures (NAs). A computer or processor that includes reference fingerprint templates receives a digitized form of the image data, and includes data processing software for (i) comparing the image data to reference fingerprint templates to determine whether the image data includes at least one fingerprint and (ii) for generating a fingerprint image if the fingerprint is determined to be present.

    Abstract translation: 自动指纹系统包括具有第一光源的光学传感器,该第一光源提供用于询问第一样品表面的准直光束,以及包括透镜的照相机和具有足够大的图像的摄像机视场(FOVCAMERA)的光电检测器阵列 样品表面。 相机是相对于第一光源定位的临界角,以从第一样品表面接收镜面反射(眩光),以从眩光产生图像数据。 第一光源和相机具有基本相等和相对的数值孔径(NAs)。 包括参考指纹模板的计算机或处理器接收图像数据的数字化形式,并且包括用于(i)将图像数据与参考指纹模板进行比较以确定图像数据是否包括至少一个指纹的数据处理软件,以及(ii) 如果确定指纹存在,则生成指纹图像。

    Motion Control Systems and Methods For Biosensor Scanning
    53.
    发明申请
    Motion Control Systems and Methods For Biosensor Scanning 有权
    运动控制系统和生物传感器扫描方法

    公开(公告)号:US20130063724A1

    公开(公告)日:2013-03-14

    申请号:US13613141

    申请日:2012-09-13

    Abstract: Motion control system and method for biosensor scanning that include inputting to a multi-axis motion controller move commands associated with the scan path as defined by multiple axes. The multiple axes including an x-baseline coordinate x0, a y-baseline coordinate y0, an x-direction oscillation amplitude x1, a y-direction oscillation amplitude y1, an oscillation frequency f and a phase φ. The multi-axis motion controller outputs digital commanded positions for each of the multiple axes. A post-processor receives the commanded positions and generates parameterized commanded positions x and y that each include a baseline motion component and an oscillating motion component. The parameterized commanded positions cause the scanning optical system to deflect the light beam to scan the beam spot over the scan path to scan the biosensor.

    Abstract translation: 用于生物传感器扫描的运动控制系统和方法包括向多轴运动控制器输入移动与由多个轴定义的扫描路径相关联的命令。 多个轴包括x基线坐标x0,y基线坐标y0,x方向振荡振幅x1,y方向振荡振幅y1,振荡频率f和相位&phgr。 多轴运动控制器为每个多轴输出数字指令位置。 后处理器接收命令位置并产生每个包括基线运动分量和振荡运动分量的参数化指令位置x和y。 参数化的命令位置使得扫描光学系统偏转光束以扫描扫描路径上的束斑以扫描生物传感器。

    Sensing apparatus having optical assembly that collimates emitted light for detection
    54.
    发明授权
    Sensing apparatus having optical assembly that collimates emitted light for detection 有权
    具有将发射光准直的光学组件的检测装置用于检测

    公开(公告)号:US07528374B2

    公开(公告)日:2009-05-05

    申请号:US11366540

    申请日:2006-03-03

    Abstract: An apparatus for optical sensing of samples includes an optical source, an optical assembly, a sample holder, an objective lens, and a detector. The objective lens collimates light emitted by the sample. Preferably, the optical assembly rotates about an axis, allowing the sensing apparatus to sense results from plural locations on a sample without moving the sample. Moving the sample in a linear direction while rotating the optical assembly allows sensing of an entire sample. Preferably, light from the optical source enters the optical assembly along the axis of rotation. Sensing methods consistent with the invention are also described.

    Abstract translation: 用于光学感测样品的装置包括光源,光学组件,样品保持器,物镜和检测器。 物镜准直样品发出的光。 优选地,光学组件围绕轴旋转,允许感测装置感测样品上多个位置的结果,而不移动样品。 旋转光学组件时沿直线方向移动样品可以检测整个样品。 优选地,来自光源的光沿旋转轴进入光学组件。 还描述了与本发明一致的感测方法。

    Scanned-beam imager with phase offset photon emission imaging
    55.
    发明授权
    Scanned-beam imager with phase offset photon emission imaging 有权
    扫描光束成像仪具有相位偏移光子发射成像

    公开(公告)号:US07375311B2

    公开(公告)日:2008-05-20

    申请号:US11384207

    申请日:2006-03-17

    Abstract: Aspects of the subject matter described herein relate to attributing light emissions to spots a light was scanned over. In aspects, the scanned light includes light capable of increasing light emissions from at least one type of matter. A detector detects emitted light that comes from spots the light was previously scanned over. Circuitry attributes emitted light with spots within the area. Data representing light that reflects from each spot may be combined with data representing light that emits (if any) from each spot to create an image. The emitted light may be assigned a false color in the image to distinguish it from reflected light in the image. Emitted light may occur as a result of fluorescent activity. Other aspects are described in the specification.

    Abstract translation: 本文描述的主题的方面涉及将光发射归因于扫描光的点。 在这些方面,扫描的光包括能够增加至少一种类型的物质的光发射的光。 检测器检测来自光先前扫描的光斑的发射光。 电路属性在区域内发光。 表示从每个点反射的光的数据可以与表示从每个点发射(如果有的话)的光的数据组合以创建图像。 发出的光可能在图像中被指定为假颜色,以将其与图像中的反射光区分开。 由于荧光活性,可能发生发光。 其他方面在说明书中描述。

    High speed laser scanning inspection system
    56.
    发明授权
    High speed laser scanning inspection system 有权
    高速激光扫描检测系统

    公开(公告)号:US07365836B2

    公开(公告)日:2008-04-29

    申请号:US11317156

    申请日:2005-12-22

    Applicant: Daniel Some

    Inventor: Daniel Some

    Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

    Abstract translation: 光学检查系统通过打破时间或空间相干性,通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束,然后聚焦到衬底上的多个点上。 可以重叠高达约60-70%的相邻斑点在不同的时间或不同的频率被照亮,并且不产生相互干扰的相干效应。 在系统的不同实施例中,明场和暗场检测方案以各种组合使用。

    Method and apparatus for inspecting pattern defects
    57.
    发明授权
    Method and apparatus for inspecting pattern defects 有权
    检查图案缺陷的方法和装置

    公开(公告)号:US07218389B2

    公开(公告)日:2007-05-15

    申请号:US10223422

    申请日:2002-08-20

    Abstract: A pattern defect inspection apparatus is capable of detecting defects, without being affected by non-uniform thickness of a thin film formed on a sample, even when using monochromatic light, such as a laser. The apparatus comprises a laser to illuminate a sample, coherence suppression optics to reduce laser beam coherence, a condenser to condense the laser beam onto a pupil plane of an objective lens, and a detector to detect the light reflected from a circuit pattern formed on a sample. The condenser is designed so that the intensity of light illuminating the sample under test can be partially adjusted according to the type of laser beam illumination condensed on the pupil of the objective lens. Variations in reflected light intensity caused by non-uniform film thickness on the surface of the sample are therefore reduced, and shading is minimized in the detected image to allow detecting of fine defects.

    Abstract translation: 即使使用激光等单色光,图案缺陷检查装置也能够不受样品上形成的薄膜的不均匀的厚度的影响而检测缺陷。 该装置包括用于照亮样品的激光器,减少激光束相干性的相干抑制光学器件,将激光束冷凝到物镜的光瞳平面上的冷凝器,以及用于检测从形成在物镜上的电路图案反射的光的检测器 样品。 冷凝器被设计成使得照射待测试样品的光的强度可以根据在物镜的瞳孔上聚集的激光束照明的类型来部分地调节。 因此,在样品表面上由不均匀膜厚引起的反射光强度的变化因此减少,并且在检测图像中使阴影最小化以允许检测细小缺陷。

    Optical technique for detecting buried defects in opaque films
    59.
    发明申请
    Optical technique for detecting buried defects in opaque films 有权
    用于检测不透明膜中的埋藏缺陷的光学技术

    公开(公告)号:US20030206292A1

    公开(公告)日:2003-11-06

    申请号:US10423354

    申请日:2003-04-25

    Inventor: Daniel Some

    Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

    Abstract translation: 样品的局部区域被加热以产生瞬态物理变形。 通过光学监测结构的表面,同时通过用不同时间的一个或多个探测光束照射加热区域并检测返回光来将加热区域冷却至基线温度。 在一些实施例中,结构内的散热与随时间的光学反射率的变化相关。 在其他实施例中,结构的表面变形与来自表面的光散射的变化相关。 在施加泵浦脉冲和不超过3个探针脉冲之后,将时变返回光信号与来自参考的相应返回光信号进行比较。 样本中的异常由两个信号之间的偏差表示。 可以根据信号构造一阶指数衰减曲线,并比较其衰减常数。

    Imaging of objects based upon the polarization or depolarization of light
    60.
    发明授权
    Imaging of objects based upon the polarization or depolarization of light 失效
    基于光的偏振或去极化的物体成像

    公开(公告)号:US5929443A

    公开(公告)日:1999-07-27

    申请号:US734340

    申请日:1996-10-21

    CPC classification number: A61B5/0084 G01N21/4795 G01N2201/10

    Abstract: A method and apparatus for imaging objects based upon the polarization or depolarization of light. According to one embodiment, there is provided a method for imaging the surface of a turbid medium, the method comprising the steps of: (a) illuminating the surface of the turbid medium with light, whereby light is backscattered from the illuminated surface of the turbid medium; (b) detecting a pair of complementary polarization components of the backscattered light; and (c) forming an image of the illuminated surface using the pair of complementary polarization components. Preferably, the illuminating light is polarized (e.g., linearly polarized, circularly polarized, elliptically polarized). Where, for example, the illuminating light is linearly polarized, the pair of complementary polarization components are preferably the parallel and perpendicular components to the polarized illuminating light, and the image may be formed by subtracting the perpendicular component from the parallel component, by taking a ratio of the parallel and perpendicular components or by using some combination of a ratio and difference of the parallel and perpendicular components.

    Abstract translation: 一种用于基于光的偏振或去极化成像对象的方法和装置。 根据一个实施例,提供了一种用于对浑浊介质的表面进行成像的方法,所述方法包括以下步骤:(a)用光照射混浊介质的表面,由此光从混浊的照射表面反向散射 中; (b)检测背向散射光的一对互补极化分量; 和(c)使用该对互补极化分量形成被照射表面的图像。 优选地,照明光被极化(例如,线偏振,圆偏振,椭圆偏振)。 在例如照明光线性偏振的情况下,该对互补极化分量优选地是偏振照明光的平行和垂直分量,并且可以通过从平行分量中减去垂直分量来形成图像, 平行和垂直分量的比例或通过使用平行和垂直分量的比率和差的某些组合。

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