公开(公告)号：US20030160959A1

公开(公告)日：2003-08-28

申请号：US10395746

申请日：2003-03-24

Inventor： Allan Rosencwaig ,  Jon Opsal

IPC: G01J004/00

CPC classification number: G01B11/0641

Abstract: An optical measurement system is disclosed for evaluating samples with multi-layer thin film stacks. The optical measurement system includes a reference ellipsometer and one or more non-contact optical measurement devices. The reference ellipsometer is used to calibrate the other optical measurement devices. Once calibration is completed, the system can be used to analyze multi-layer thin film stacks. In particular, the reference ellipsometer provides a measurement which can be used to determine the total optical thickness of the stack. Using that information coupled with the measurements made by the other optical measurement devices, more accurate information about individual layers can be obtained.

公开(公告)号：US20030156287A1

公开(公告)日：2003-08-21

申请号：US10275119

申请日：2003-02-27

Inventor： Lun Kai Cheng

IPC: G01J003/28 ,  G01J003/02 ,  G01J004/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0264 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J9/00 ,  G01J2003/2866

Abstract: An optical wavelength analyser including: an entrance slit (4) for receiving a light beam (3) including signals with various wavelengths and passings the beam at least partly; a diffractor (6, 7, 9) for receiving the passed beam and diffracting the signals dependent on their wavelength; a detector (8) including adjacent detector elements (32, 33, 35, 36, 38, 39) for receiving the diffracted signals and generating their output signals; a processor (21) for determining the wavelengths from the output signals, in which the received light beam has a spatially uniform intensity; the diffractor diffracts each signal on a different detector element subset, consisting of at least a first element (32, 33, 35, 36, 38, 39) for receiving at least a first signal with a first signal level; the processor determines each signal's wavelength dependent on the first signal level and a calibration value.

Abstract translation: 一种光波长分析仪，包括：用于接收光束（3）的入射狭缝（4），其包括具有各种波长的信号并且至少部分地传递所述光束; 用于接收经过的光束并根据其波长衍射信号的衍射器（6,7,9）; 包括用于接收衍射信号并产生其输出信号的相邻检测器元件（32,33,35,36,38,39）的检测器（8）; 用于根据所述输出信号确定所述波长的处理器（21），其中所接收的光束具有空间上均匀的强度; 所述衍射器将不同的检测器元件子集上的每个信号衍射，所述检测器元件子集由至少第一元件（32,33,35,36,38,39）组成，用于至少接收具有第一信号电平的第一信号; 处理器根据第一信号电平和校准值确定每个信号的波长。

公开(公告)号：US20030147076A1

公开(公告)日：2003-08-07

申请号：US10144288

申请日：2002-05-13

Inventor： Barry R. Bowman

IPC: G01J004/00

CPC classification number: G01N21/211

Abstract: An ellipsometric apparatus provides a rotating focused probe beam directed to impinge a sample in any direction. A rotating stage rotates the wafer into a linear travel range defined by a single linear axis of a single linear stage. As a result, an entire wafer is accessed for measurement with the single linear stage having a travel range of only half the wafer diameter. The reduced single linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of a rotating probe beam permits measurement of periodic structures along a preferred direction while permitting the use of a single reduced motion stage.

Abstract translation: 椭偏仪提供了一个旋转的聚焦探针光束，该探针光束指向一个样品在任何方向上。 旋转台将晶片旋转成由单个线性平台的单个线性轴限定的线性行程范围。 结果，使用整个晶片进行测量，单个线性平台的行程范围仅为晶片直径的一半。 减小的单线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用旋转探针光束允许沿着优选方向测量周期性结构，同时允许使用单个减小运动级。

公开(公告)号：US20030133113A1

公开(公告)日：2003-07-17

申请号：US10331215

申请日：2002-12-30

Applicant: SYMYX TECHNOLOGIES, INC

Inventor： Damian Hajduk ,  Eric Carlson

IPC: G01J004/00

CPC classification number: G01N21/21 ,  B01J2219/00286 ,  B01J2219/00315 ,  B01J2219/00585 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/0072 ,  B01J2219/00745 ,  C40B40/18 ,  C40B60/14 ,  G01J4/04 ,  G01N2201/0813

Abstract: A method and apparatus for characterizing and screening an array of material samples is disclosed. The apparatus includes a sample block having a plurality of regions for containing the material samples, a polarized light source to illuminate the materials, an analyzer having a polarization direction different than the polarization direction of the polarized light source, and a detector for analyzing changes in the intensity of the light beams. The light source, together with a polarizer, may include a plurality of light beams to simultaneously illuminate the entire array of materials with linearly polarized light so that characterization and screening can be performed in parallel. In addition, the materials in the sample block maybe subjected to different environmental conditions or mechanical stresses, and the detector analyzes the array as a function of the different environmental conditions or mechanical stresses.

公开(公告)号：US20030071995A1

公开(公告)日：2003-04-17

申请号：US10009937

申请日：2002-06-04

Inventor： Tetsuyuki Kurata ,  Takahiro Nishioka ,  Yoshihiro Togashi ,  Susumu Sato

IPC: G01J004/00

CPC classification number: G02F1/1309 ,  G01B11/26

Abstract: An apparatus for detecting a pretilt angle is comprised of a light source 1, a polarizer 2, a liquid-crystal cell 3, a quarter-wave plate 4, an analyzer 5, a photodetector 6, and a processing device. The processing device receives from the photodetector transmitted light intensities of light that is transmitted through the liquid-crystal cell 3 at a plurality of light incident angles. The processing device calculates Stokes parameters corresponding to the plurality of light incident angles based upon the transmitted light intensity corresponding to the plurality of light incident angles. Furthermore, an apparent retardation corresponding to the plurality of light incident angles is determined based upon the Stokes parameters corresponding to the plurality of light incident angles. The pretilt angle of the liquid-crystal cell 3 is determined based upon the determined apparent retardation corresponding to the plurality of light incident angles.

Abstract translation: 用于检测预倾角的装置包括光源1，偏振器2，液晶单元3，四分之一波片4，分析器5，光电检测器6和处理装置。 处理装置从光电检测器接收以多个光入射角透射通过液晶单元3的光的透射光强度。 处理装置基于与多个光入射角对应的透射光强度来计算与多个光入射角对应的斯托克斯参数。 此外，基于与多个光入射角对应的斯托克斯参数来确定与多个光入射角相对应的视在延迟。 基于与多个光入射角相对应的确定的视在延迟来确定液晶单元3的预倾角。

公开(公告)号：US20030066953A1

公开(公告)日：2003-04-10

申请号：US10215038

申请日：2002-08-09

Inventor： Seo-Won Kwon

IPC: G01J004/00

CPC classification number: H04B10/07955 ,  H04B10/077

Abstract: Disclosed is an apparatus for monitoring wavelength division multiplexed optical signal performance transmitted onto a main optical path. In particular, the apparatus includes: an amplified spontaneous light emitter for generating amplified spontaneous emission and transmitting the same to a reference optical path; at least one fiber bragg grating for sending out an amplified spontaneous emission having a reference wavelength by reflecting or absorbing only part of amplified spontaneous emission transmitted onto the reference optical path that consists with a reflection wavelength or an absorbance wavelength, in which a predetermined reflection wavelength or an absorbance wavelength are separately disposed on the reference optical path; an optical switch for outputting at least one of the wavelength division multiplexed optical signals branched from the main optical path or one of the amplified spontaneous emission including the reference wavelengths, in response to a switching control signal input; a tunable optical filter, of which filter characteristics vary corresponding to a filtering control signal with a designated form, for filtering off the optical signal outputted from the optical switch using the varied filter characteristics, and for outputting the filtered optical signal; and a control unit for analyzing a photo diode that converts an output of the tunable optical filter photoelectrically and an output of the photo diode in accordance with a predetermined algorithm, and for measuring an optical wavelength, an optical power and an optical signal to noise ratio of a wavelength division multiplexed optical signal based on the analyzed reference wavelength.

Abstract translation: 公开了一种用于监测传输到主光路上的波分复用光信号性能的装置。 特别地，该装置包括：放大的自发光发射器，用于产生放大的自发发射并将其发射到参考光路; 至少一个光纤布拉格光栅，用于通过反射或仅吸收传输到由反射波长或吸收波长组成的参考光路上的放大的自发辐射的一部分来发出具有参考波长的放大的自发发射，其中预定的反射波长 或吸收波长分别设置在基准光路上; 响应于切换控制信号输入，用于输出从主光路分支的波分复用光信号中的至少一个或包括参考波长的放大自发发射中的至少一个的光开关; 滤波器特性根据具有指定形式的滤波控制信号而变化的可调滤光器，用于滤波使用变化的滤波器特性从光开关输出的光信号，并输出滤波后的光信号; 以及控制单元，用于分析根据预定算法将可调光滤波器的光电输出和光电二极管的输出转换的光电二极管，并且用于测量光波长，光功率和光信噪比 基于所分析的参考波长的波分复用光信号。

公开(公告)号：US20030058443A1

公开(公告)日：2003-03-27

申请号：US10251246

申请日：2002-09-20

Inventor： Yiping Xu ,  Ibrahim Abdulhalim

IPC: G01J004/00

CPC classification number: G03F7/70625 ,  G01B11/0641 ,  G01N21/211 ,  G01N21/4788 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/213 ,  G01N2021/556 ,  G01N2021/95615 ,  G03F7/70491 ,  G03F7/70616 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.

公开(公告)号：US20030043375A1

公开(公告)日：2003-03-06

申请号：US10137606

申请日：2002-05-02

Inventor： Jon Opsal

IPC: G01J004/00

CPC classification number: G01B11/0641 ,  G01J4/04 ,  G01N21/211 ,  G01N2021/213

Abstract: An apparatus is disclosed for obtaining ellipsometric measurements from a sample. A probe beam is focused onto the sample to create a spread of angles of incidence. The beam is passed through a quarter waveplate retarder and a polarizer. The reflected beam is measured by a detector. In one preferred embodiment, the detector includes eight radially arranged segments, each segment generating an output which represents an integration of multiple angle of incidence. A processor manipulates the output from the various segments to derive ellipsometric information.

公开(公告)号：US20030034446A1

公开(公告)日：2003-02-20

申请号：US10217320

申请日：2002-08-12

Inventor： Satoshi Watanabe

IPC: G01J005/08 ,  G01J004/00

CPC classification number: G01J11/00

Abstract: Systems and methods of measuring optical pulses are described. In one aspect, an optical pulse measurement system includes an optical signal divider and an optical signal conversion system. The optical signal divider has an optical input for receiving an input optical signal, multiple optical outputs, and a set of multiple optical channels. The optical channels are coupled between the optical input and respective optical outputs and are operable to delay propagation of optical signals, which are divided from the input optical signal, from the optical input to respective optical outputs by different respective amounts of time. The optical signal conversion system is coupled to the optical signal divider optical outputs and is operable to convert temporal intensity distributions of light received from the optical signal divider optical outputs into respective spatial intensity distributions in parallel.

Abstract translation: 描述了测量光脉冲的系统和方法。 一方面，光脉冲测量系统包括光信号分配器和光信号转换系统。 光信号分配器具有用于接收输入光信号，多个光输出和一组多个光信道的光输入。 光信道耦合在光输入和相应的光输出之间，并且可操作以通过不同的相应时间量将从输入光信号分离的光信号的延迟从光输入延迟到相应的光输出。 光信号转换系统耦合到光信号分配器光输出，并且可操作以将从光信号分配器光输出接收的光的时间强度分布转换成相应的空间强度分布并行。

公开(公告)号：US20030025072A1

公开(公告)日：2003-02-06

申请号：US09923731

申请日：2001-08-06

Applicant: HRL Laboratories, LLC

Inventor： Jennifer J. Zinck

IPC: G01J004/00

CPC classification number: G01T5/08 ,  G01N21/7703

Abstract: A distributed fiberoptic radiation sensor is described which may employ one or more radiation sensor elements distributed in a single optical fiber. Such optical fibers may be placed on surfaces, or even within parts, to unobtrusively measure radiation in precise and even difficult to reach locations. Different sensor elements may respond to different radiation types and wavelength ranges, with each sensor element causing a different wavelength of light to be emitted or absorbed within the fiber. By employing an appropriate combination of detection methods at the ends of the fiber, the distributed sensor may provide type and calorimetric discrimination of radiation incident on one or more distinguishable locations. The radiation information thus detected may be integrated, if desired, to obtain corresponding real-time dose information. With such integration, the device becomes a distributed real-time dosimeter. In another embodiment, the particular radiation sensors distributively employed may undergo permanent change in absorption characteristics. Such a device infers a total radiation dose over a particular period by measuring a change in optical response between the beginning and the end of the particular period.

Abstract translation: 描述了可以使用分布在单个光纤中的一个或多个辐射传感器元件的分布式光纤辐射传感器。 这样的光纤可以被放置在表面上，甚至可以放置在部分内，从而在精确甚至难以达到的位置中不引人注目地测量辐射。 不同的传感器元件可以响应不同的辐射类型和波长范围，每个传感器元件引起不同波长的光在光纤内被发射或吸收。 通过在光纤的端部采用适当的检测方法组合，分布式传感器可以提供对一个或多个可区分位置入射的辐射的类型和量热鉴别。 如果需要，如此检测的辐射信息可以被积分，以获得相应的实时剂量信息。 通过这种集成，该设备成为分布式实时剂量计。 在另一个实施例中，分布式使用的特定辐射传感器可以经历吸收特性的永久变化。 这样的装置通过测量特定周期的开始和结束之间的光学响应的​​变化来推测在特定周期内的总辐射剂量。