Optical module for surface inspection and surface inspection apparatus including the same
    51.
    发明授权
    Optical module for surface inspection and surface inspection apparatus including the same 有权
    用于表面检查的光学模块和包括其的表面检查装置

    公开(公告)号:US09429525B2

    公开(公告)日:2016-08-30

    申请号:US14791607

    申请日:2015-07-06

    Abstract: An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

    Abstract translation: 用于表面检查的光学模块包括:第一光源单元,其利用由第一光源产生的第一光和改变第一光的路径的第一分束器照射基板;第二光源单元,其用第二光源单元照亮基板; 在第一方向上偏振的光;偏振改变单元,其以与第一方向垂直的第二方向偏振的第三光照亮基板;以及检测单元,其检测作为从第一方向反射的第一光的乘积的第四光 基板,作为从基板散射的第二光的乘积的第五光和作为从基板散射的第三光的乘积的第六光。 通过改变从检查的基板反射的第二光的偏振方向来产生第三光。

    Method and apparatus for determining concentration using polarized light

    公开(公告)号:US09423337B2

    公开(公告)日:2016-08-23

    申请号:US14550182

    申请日:2014-11-21

    CPC classification number: G01N21/21 G01N2201/0683

    Abstract: An apparatus and method for determining the concentration of chiral molecules in a fluid includes a first polarizer configure to polarize light in substantially a first plane to provide initially polarized light. A second polarizer is capable of polarizing the initially polarized light in a plurality of planes, at least one of the plurality of planes being different from the first plane, to provide subsequently polarized light. One or more receivers are included for measuring an intensity of the subsequently polarized light in one or more of the plurality of planes.

    Selectably configurable multiple mode spectroscopic ellipsometry
    54.
    发明授权
    Selectably configurable multiple mode spectroscopic ellipsometry 有权
    可选择配置的多模光谱椭偏仪

    公开(公告)号:US09404872B1

    公开(公告)日:2016-08-02

    申请号:US13538552

    申请日:2012-06-29

    Abstract: The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.

    Abstract translation: 本发明可以包括被配置为照亮样品的表面的照明源,被配置为检测从样品的表面反射的光的至少一部分的检测器,可选择地配置的光学系统,包括:可旋转偏振元件,其设置在 光学系统的照明臂,设置在光学系统的收集臂中的分析元件和设置在光学系统的收集臂中的可旋转平移补偿元件,以及通信地配置为可选择地将光学系统配置在 旋转补偿器(RCSE)模式,旋转偏振器(RPSE)模式或旋转偏振器和补偿器(RPRC)模式。

    Patterned polarization converter
    55.
    发明授权
    Patterned polarization converter 有权
    图案偏振转换器

    公开(公告)号:US09383607B2

    公开(公告)日:2016-07-05

    申请号:US14553539

    申请日:2014-11-25

    Abstract: The present invention provides a patterned polarization converter having multiple domains that can be used to convert input linear polarized light to output light with spatially varying polarization states, including domains that produce linearly polarized light and domains that produce circular polarized light based on the patterning of the domains. A patterned polarization converter having multiple domains may be used in a polarization sensor application capable of detecting the polarization state of input light. The present invention further provides patterned radial and azimuthal polarization converters, which have utility in applications such as optical tweezers. Additionally, patterned polarization converters may be used to fabricate more patterned polarization converters having the same pattern using one-step photoalignment to copy the pattern of an existing patterned polarization converter to an unpatterned photoalignment layer.

    Abstract translation: 本发明提供一种具有多个畴的图案化偏振转换器,其可用于将输入线性偏振光转换成具有空间变化偏振状态的输出光,包括产生线性偏振光的畴和基于图案化的线性偏振光产生圆偏振光的畴 域名 具有多个畴的图案化偏振转换器可用于能够检测输入光的偏振状态的偏振传感器应用中。 本发明还提供了图案化的径向和方位偏振转换器,其在诸如光学镊子的应用中具有实用性。 此外,图案化的偏振转换器可以用于使用一步光对准来制造具有相同图案的更多图案化的偏振转换器,以将现有的图案化偏振转换器的图案复制到未图案化的光取向层。

    Absorption line optical filters and spectrometers
    56.
    发明授权
    Absorption line optical filters and spectrometers 有权
    吸收线滤光片和光谱仪

    公开(公告)号:US09366572B2

    公开(公告)日:2016-06-14

    申请号:US14531902

    申请日:2014-11-03

    Abstract: An apparatus is disclosed for filtering of probe light and measurement of probe light frequency. The apparatus includes an optical filter comprised of a medium of rapidly changing circular birefringence. The circular birefringent medium changes the polarization of probe light such that light within a certain frequency bandwidth is rotated between crossed polarizers so it will be transmitted through the second polarizer. The spectrometer rotates the polarization of probe light an amount that is dependent upon probe light frequency. Probe light frequency is deduced by analyzing probe light polarization after it propagates through the birefringent medium. The birefringent medium is constructed from a gaseous substance and a magnetic field, where the gaseous substance has one or more absorption lines near the probe light frequency. The magnetic field permeates the gaseous substance and shifts the frequency of the absorption line(s) by the Zeeman effect.

    Abstract translation: 公开了一种用于滤波探测光和探测光频率测量的装置。 该装置包括由快速变化的圆形双折射介质组成的滤光器。 圆形双折射介质改变探针光的偏振,使得在一定频率带宽内的光在正交偏振器之间旋转,使得其将被透射通过第二偏振器。 光谱仪将探针光的极化旋转取决于探针光频率。 通过分析探针光偏振在其穿过双折射介质传播之后推导出探针光频率。 双折射介质由气体物质和磁场构成,其中气体物质在探测光频率附近具有一个或多个吸收线。 磁场渗透气态物质,并通过塞曼效应移动吸收线的频率。

    Method and system for page detection using light attenuators
    57.
    发明授权
    Method and system for page detection using light attenuators 有权
    使用光衰减器进行页面检测的方法和系统

    公开(公告)号:US09361805B2

    公开(公告)日:2016-06-07

    申请号:US14341088

    申请日:2014-07-25

    CPC classification number: G09B5/00

    Abstract: A system for page detection using light attenuators is applied in a book to detect an opened page of the book. The book has N pages and each page has a page detection area in which at most M light attenuators are installed in each page detection area. A light source passes through the at most M light attenuators for attenuating intensity of the light source. M light sensing devices are installed in an area of the book that corresponds to the page detection area. The M light sensing devices are used to detect attenuated intensities of the light source. A controller is connected to the M light sensing devices for detecting the opened page based on a ratio of the intensities of the light source detected by the M light sensing devices on each page.

    Abstract translation: 一本使用光衰减器的页面检测系统被应用在一本书中,以检测该书的打开的页面。 本书有N页,每页有一个页面检测区域,其中每个页面检测区域中最多安装了M个光衰减器。 光源通过最多M个光衰减器来衰减光源的强度。 M个光感测装置安装在与页面检测区域对应的书本区域中。 M光检测装置用于检测光源的衰减强度。 控制器连接到M个光检测装置,用于根据由每个页面上的M个光检测装置检测的光源的强度的比率来检测打开的页面。

    Rotation angle measuring device
    59.
    发明授权
    Rotation angle measuring device 有权
    旋转角度测量装置

    公开(公告)号:US09335161B2

    公开(公告)日:2016-05-10

    申请号:US14468700

    申请日:2014-08-26

    CPC classification number: G01B11/26 G01B11/14 G01D5/345 G01J4/00

    Abstract: A rotation angle measuring device provided with a fixed unit and a movable unit relatively rotating with respect to the fixed unit, comprising a light source installed on either one of the fixed unit or the movable unit and for emitting a detection light and a reference position signal light, a polarizing plate for converting a detection light emitted from the light source to a polarized light, a polarized light rotating unit for rotating the polarized light around an optical axis of the light source as the center, a reference position signal light emitted at a reference rotating position of the polarized light, a stationary polarizing plate provided on either one of the fixed unit or the movable unit and to stand still with respect to a rotation of the polarized light, a photodetection sensor provided on the fixed unit or on the movable unit and for receiving the polarized light passing through the stationary polarizing plate and the reference position signal light, and an arithmetic unit for calculating a detection waveform of a change of light amount based on a signal from the photodetection sensor, for detecting the reference position signal light and for calculating a relative rotation angle between the fixed unit and the movable unit from a phase of the detection waveform and a predetermined detection reference phase when the reference position signal light is detected.

    Abstract translation: 一种具有固定单元和相对于固定单元相对旋转的可移动单元的旋转角度测量装置,包括安装在固定单元或可移动单元中的任一个上并用于发射检测光和基准位置信号的光源 光,用于将从光源发射的检测光转换为偏振光的偏振板,用于以围绕光源的光轴为中心旋转偏振光的偏振光旋转单元,在 偏振光的参考旋转位置,设置在固定单元或可移动单元中的任一个上并且相对于偏振光的旋转静止的静止偏振板,设置在固定单元上或可移动的光电检测传感器 并且用于接收通过静止偏振片的偏振光和参考位置信号光,以及算术 单元,用于根据来自光检测传感器的信号计算光量变化的检测波形,用于检测基准位置信号光,并根据检测波形的相位计算固定单元与可移动单元之间的相对旋转角度 以及当检测到基准位置信号光时的预定检测参考相位。

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