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公开(公告)号：US4652753A
公开(公告)日：1987-03-24
申请号：US684602
申请日：1984-12-21
Applicant: Yoshiro Shiokawa
Inventor： Yoshiro Shiokawa
IPC: G01N23/225 , G01N27/62 , H01J37/252 , H01J49/14 , H01J49/28 , H01J49/42 , H01J49/44 , H01J49/48
CPC classification number: H01J49/48 , H01J49/004 , H01J49/142 , H01J49/4215
Abstract: In a mass spectrometer comprising an ion gun for radiating an ion beam onto a surface of an object to make the surface emit secondary ions, a detector for the secondary ions, and a directing member for directing the secondary ions to the detector, a specific energy bandwidth is defined in an energy distribution of the secondary ions in consideration of a peak of the energy distribution. An analyzable energy range is expanded to at least twice the specific energy bandwidth by the use of an expanding member coupled to the directing member. The expanding member may be used to expand a transmissible bandwidth of an energy filter included in the directing member by raising a resolution and a center transmission energy. The expanding member may be used to raise a maximum analyzable energy of a quadrupole mass filter included in the mass filter. Specifically, the expanding member may be implemented by changing a length of each electrode member of the mass filter and/or a frequency of an a.c. voltage supplied to each electrode member.
Abstract translation: 在包括用于将离子束辐射到物体表面以使表面发射二次离子的离子枪的质谱仪中，用于二次离子的检测器和用于将二次离子引导到检测器的引导构件，比能量 考虑到能量分布的峰值，在二次离子的能量分布中限定带宽。 通过使用耦合到引导构件的扩展构件将可分析的能量范围扩展到比能量带宽的至少两倍。 扩展构件可以用于通过提高分辨率和中心传输能量来扩展包括在引导构件中的能量过滤器的可传输带宽。 膨胀构件可以用于提高包括在质量过滤器中的四极质量过滤器的最大可分析能量。 具体而言，可以通过改变质量过滤器的每个电极构件的长度和/或a.c.的频率来实现扩展构件。 电压提供给每个电极部件。
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公开(公告)号：US4644161A
公开(公告)日：1987-02-17
申请号：US800640
申请日：1985-11-01
Applicant: Robert Evrard
Inventor： Robert Evrard
Abstract: A mass spectrograph combining one or more magnetic deflections with the action of electrostatic fields, characterized by the fact that the system is circularly symmetrical; by the fact that the ions are injected radially from a source constituted by a heated circular filament and a pair of small ring-shaped magnets which confine the ionizing electrons to the interior or exterior periphery of the analyzer system per se; by the fact that the first pair of deflection magnets of the analyzer system is ring shaped; and by the fact that the selective action of the other fields, in particular the electrostatic fields, is due to the prior dispersion obtained by the first magnetic induction.
Abstract translation: PCT No.PCT / FR85 / 00038 Sec。 371日期：1985年11月1日 102（e）1985年11月1日1985 PCT Filed March 1985年。一种将一个或多个磁性偏转与静电场作用相结合的质谱仪，其特征在于系统是圆形对称的; 通过离子从由加热的圆形细丝构成的源和一束将离子化电子限制在分析仪系统本身的内部或外部周围的小型环形磁体径向注入的事实; 由于分析仪系统的第一对偏转磁体是环形的， 以及其他领域，特别是静电场的选择性作用是由于通过第一磁感应获得的先前色散的事实。
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公开(公告)号：US4171482A
公开(公告)日：1979-10-16
申请号：US864702
申请日：1977-12-27
Applicant: Jean Vastel
Inventor： Jean Vastel
CPC classification number: H01J49/284
Abstract: The invention relates to a mass spectrometer for rapid scanning. A magnetic sector focuses a collimated beam containing the various ion species in a focal plane. The focused beams reach this focal plane at an angle of 45.degree.. The beams emerging from this focal plane are refocused in an electrostatic deflector having parallel plates. One of these plates is provided with a slit through which the beams are received. Scanning is brought about by varying the voltage applied to the electrostatic deflector.
Abstract translation: 本发明涉及一种用于快速扫描的质谱仪。 磁性扇区将包含各种离子种类的准直束聚焦在焦平面中。 聚焦光束以45度的角度到达该焦平面。 从该焦平面出射的光束被重新聚焦在具有平行板的静电偏转器中。 这些板中的一个设置有一个狭槽，梁被接收。 通过改变施加到静电偏转器的电压来实现扫描。
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公开(公告)号：US4054796A
公开(公告)日：1977-10-18
申请号：US698316
申请日：1976-06-22
Applicant: Motohiro Naito
Inventor： Motohiro Naito
CPC classification number: H01J49/32
Abstract: A mass spectrometer comprising superimposed electric and magnetic fields arranged substantially at right angles. The central orbit of the ion beam produced by an ion source is located on an equipotential surface in the electric field. The ion beam is accelerated by a means for producing a constant accelerating voltage. The electric field is swept by a sweep means. The change of the focal length of the superimposed field when the electric field is swept by said sweep means is compensated by a compensating means, thereby providing a mass spectrometer capable of measuring ions having a wide range of mass to charge ratios and capable of scanning at high speed and having a high accuracy mass marker.
Abstract translation: 质谱仪包括基本成直角排列的叠加的电场和磁场。 由离子源产生的离子束的中心轨道位于电场中的等势面上。 通过用于产生恒定加速电压的装置来加速离子束。 电场被扫掠装置扫过。 当通过所述扫描装置扫描电场时，叠加场的焦距的变化由补偿装置补偿，从而提供能够测量具有宽范围的质荷比并可以扫描的离子的质谱仪 高速度并具有高精度的质量标记。
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公开(公告)号：US3939354A
公开(公告)日：1976-02-17
申请号：US328954
申请日：1973-02-02
Applicant: George Sargent Janes
Inventor： George Sargent Janes
CPC classification number: H01J49/288 , B01D59/34 , B01D59/50 , H05H1/00
Abstract: In a system for isotope separation, method and apparatus empolying crossed-field MHD particle accelerating techniques for collecting ions of a desired isotope after selective ionization of that isotope. In the plasma of electrons and selectively ionized atoms which results from selective isotope ionization, the ions are collected by inducing a circulation of the plasma electrons to provide a JXB relationship for MHD acceleration of the ions. The electron circulation enhances penetration of the plasma by the accelerating electric field and avoids the generation of large Hall voltages within the system as well as reducing the required magnitude of electrode currents.
Abstract translation: 在用于同位素分离的系统中，方法和装置使得交叉场MHD粒子加速技术用于在该同位素选择性离子化之后收集所需同位素的离子。 在电子等离子体和选择性同位素电离产生的选择性离子化原子中，通过诱导等离子体电子的循环来收集离子，为离子的MHD加速提供JXB关系。 电子循环通过加速电场增强了等离子体的穿透，并避免了在系统内产生大的霍尔电压以及减少所需的电极电流量。
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Patent Agency Ranking
公开(公告)号：US3916188A
公开(公告)日：1975-10-28
申请号：US43469574
申请日：1974-01-18
Applicant: ANVAR
Inventor： DEVIENNE FERNAND MARCEL
CPC classification number: H01J49/286 , H01J49/14
Abstract: Electrostatic filtration of secondary ions of mass m in a given mass ratio with a primary ion of mass M which has formed the secondary ions by fission is carried out by a method which consists in forming a singly-charged primary ion of the substance having a molecular mass M and extracting the ion at a voltage V1 with respect to ground, in causing the primary ion to cross a potential barrier V2, in producing the dissociation of said ion into at least two fragments of secondary ions, in extracting the fragment ion of mass m at a voltage V2, in carrying out a filtration in an electrostatic analyzer through which only the ions of energy eV'''' are permitted to pass, in detecting the ions which have thus been filtered and the mass m of which is such that
D R A W I N GAbstract translation: 通过裂变形成二次离子的质量为M的质量m的质量m的二次离子的静电过滤通过一种方法进行，该方法包括形成具有分子的物质的单一带电的一次离子 质量M并且以相对于地面的电压V1提取离子，在使主离子穿过势垒V2时，在产生质量的碎片离子中产生离子到至少两个次级离子的片段中的解离 在电压V2下进行过滤，在静电分析仪中进行过滤，在静电分析仪中仅允许能量eV“的离子通过，以检测已经被过滤的离子，其质量m使得M V1 - V2 =。 m V“ - V2
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公开(公告)号：US3840743A
公开(公告)日：1974-10-08
申请号：US32768373
申请日：1973-01-29
Applicant: HITACHI LTD
IPC: G01N23/227 , G01N23/225 , G01Q60/00 , H01J37/252 , H01J37/256 , H01J49/28 , H01J37/26
CPC classification number: H01J37/256 , H01J49/286
Abstract: An ion microanalyzer wherein the intensity of a condenser lens for focusing an ion beam is periodically varied, to vary the spot diameter of the ion beam which is to impinge on a specimen, whereby the precision of analysis in the direction of the depth of the specimen can be enhanced.
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公开(公告)号：US3816748A
公开(公告)日：1974-06-11
申请号：US24841772
申请日：1972-04-28
Applicant: ALPHA IND INC
Inventor： HARRISON S
IPC: G21K1/08 , H01J37/317 , H01J49/28 , H05H5/04 , H01J39/34
CPC classification number: H05H5/04 , G21K1/08 , H01J37/3171 , H01J49/288
Abstract: In the ion accelerator disclosed herein, the desired ion species is selected by means of a filter or selector of the crossed-field type which is self-focusing on at least one axis and which permits ion energy to be easily varied while maintaining focus and desired species selection. In the selector, the electric field provided has a strength which, on the centerline of the beam, is proportional to the square-root of the ion energy and has a gradient, in the direction of the field, which is proportional to the ion energy.
Abstract translation: 在本文公开的离子加速剂中，期望的离子种类通过交叉场类型的过滤器或选择器来选择，该过滤器或选择器在至少一个轴上自聚焦，并且允许离子能量容易地变化，同时保持聚焦和期望的 物种选择。 在选择器中，所提供的电场具有在光束的中心线上与离子能量的平方根成比例的强度，并且在场的方向上具有与离子能量成比例的梯度 。
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公开(公告)号：US3786359A
公开(公告)日：1974-01-15
申请号：US3786359D
申请日：1969-03-28
Applicant: ALPHA IND INC
Inventor： KING W
IPC: G21K1/14 , H01J37/317 , H01J49/28 , H01J23/10 , H01J37/26
CPC classification number: H01J37/3171 , G21K1/14 , H01J49/284
Abstract: The apparatus disclosed herein provides high energy positive ions, suitable for semiconductor doping, by projecting positive ions through an electron stripping gas at relatively low energy thereby to obtain positive ions which are multiply ionized or charged. Those ions which are raised to a preselected ionization level or state are segregated, and then accelerated by a relatively high accelerating voltage to achieve an energy suitable for ion implantation in a semiconductor matrix. Since the ions subjected to the relatively high accelerating voltage are multiply ionized, the energy imparted thereto, measured in electron volts, is substantially equal to an integer multiple of the accelerating voltage.
Abstract translation: 本文公开的装置通过以相对低的能量将正离子投射通过电子剥离气体来提供适合于半导体掺杂的高能正离子，从而获得多重电离或带电的正离子。 升高到预选电离水平或状态的那些离子被分离，然后通过相对高的加速电压加速，以获得适合于半导体基质中的离子注入的能量。 由于经受相对高的加速电压的离子被多次电离，所以以电子伏特测量的赋予的能量基本上等于加速电压的整数倍。
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公开(公告)号：US3621241A
公开(公告)日：1971-11-16
申请号：US3621241D
申请日：1969-10-07
Applicant: PERKIN ELMER LTD
Inventor： TURNER DAVID W
CPC classification number: H01J49/282 , H01J49/48
Abstract: An electrostatic analyzer of the energy spectrum of charged particles is provided comprising spaced apart analyzer plates adapted for operation in a velocity-focusing mode of operation and auxiliary electrode means adjoining an inner face of an analyzer plate. Circuit means apply a potential to each analyzer plate and a potential of opposite polarity to an associated auxiliary electrode means for establishing an electrostatic field between the plates which in a zone of influence of the auxiliary electrode means is modified to direct peripheral particle trajectories towards a focus substantially common with that of paraxial trajectories.
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