Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it
    67.
    发明申请
    Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it 审中-公开
    全氟化合物,碳氢氟酸,全氯碳和碳酸氢盐气体化合物的分解催化剂及其生产方法

    公开(公告)号:US20080119351A1

    公开(公告)日:2008-05-22

    申请号:US11603066

    申请日:2006-11-22

    Applicant: Po-Chu Liu

    Inventor: Po-Chu Liu

    Abstract: A decomposing catalyst for decomposing perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds as well as a method of producing the catalyst, the catalyst contains at least high temperature durable carrier with large surface areas and effectively decomposed components; the effectively decomposed components further includes transitional metal compounds, precious metals and phosphate. The above materials are mixed, granulated, sintered, immersed in solution and dried to form the decomposing catalyst able to decompose gaseous perfluorinated compound and fluorochloro-compounds. The method particularly suits decomposing perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gases exhausted from the processes of dry etch and chemical vapor deposition (CVD) in producing semiconductors and liquid crystal panels.

    Abstract translation: 用于分解全氟化合物,碳氢氟酸,全氯碳和碳酸氢盐气体化合物的分解催化剂以及制备催化剂的方法,所述催化剂至少含有具有大表面积和有效分解组分的耐高温耐久载体; 有效分解的组分还包括过渡金属化合物,贵金属和磷酸盐。 将上述材料混合,造粒,烧结,浸入溶液中并干燥,形成能分解气态全氟化合物和氟氯化合物的分解催化剂。 该方法特别适用于从制备半导体和液晶面板的干法蚀刻和化学气相沉积(CVD)过程中排出的分解全氟化合物,碳氢氟酸,全氯碳和碳酸氢盐。

    PREPARATION OF EFFICIENT REPO AND LAPO CATALYSTS
    68.
    发明申请
    PREPARATION OF EFFICIENT REPO AND LAPO CATALYSTS 审中-公开
    有效报告和拉普拉斯催化剂的制备

    公开(公告)号:US20060247476A1

    公开(公告)日:2006-11-02

    申请号:US11458005

    申请日:2006-07-17

    Inventor: Charles EDWARDS

    CPC classification number: C07C41/03 B01J27/1804 B01J37/28 C08G65/266 C07C43/11

    Abstract: A method of ensuring the production of efficient lanthanum phosphate catalysts (LAPO's) and rare earth phosphate catalysts (REPO's), and methods of alkoxylation using said efficient catalysts.

    Abstract translation: 确保生产高效磷酸镧催化剂(LAPO)和稀土磷酸盐催化剂(REPO)的方法,以及使用所述有效催化剂的烷氧基化方法。

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