公开(公告)号：US07489017B2

公开(公告)日：2009-02-10

申请号：US11542741

申请日：2006-10-02

Applicant: Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

Inventor： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

IPC: H01L29/00

CPC classification number: B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

Abstract: A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Abstract translation: 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US07438759B2

公开(公告)日：2008-10-21

申请号：US11264113

申请日：2005-11-01

Applicant: Fengyan Zhang ,  Robert A. Barrowcliff ,  Jong-Jan Lee ,  Sheng Teng Hsu

Inventor： Fengyan Zhang ,  Robert A. Barrowcliff ,  Jong-Jan Lee ,  Sheng Teng Hsu

IPC: C30B1/02

CPC classification number: B81C1/00182 ,  B81B2201/0214 ,  Y10S977/712 ,  Y10S977/762

Abstract: An ambient environment nanowire sensor and corresponding fabrication method have been provided. The method includes: forming a substrate such as Silicon (Si) or glass; growing nanowires; depositing an insulator layer overlying the nanowires; etching to expose tips of the nanowires; forming a patterned metal electrode, with edges, overlying the tips of the nanowires; and, etching to expose the nanowires underlying the electrode edges. The nanowires can be a material such as IrO2, TiO2, InO, ZnO, SnO2, Sb2O3, or In2O3, to mane just a few examples. The insulator layer can be a spin-on glass (SOG) or low-k dielectric. In one aspect, the resultant structure includes exposed nanowires grown from the doped substrate regions and an insulator core with embedded nanowires. In a different aspect, the method forms a growth promotion layer overlying the substrate. The resultant structure includes exposed nanowires grown from the selectively formed growth promotion layer.

公开(公告)号：US20080121611A1

公开(公告)日：2008-05-29

申请号：US11604645

申请日：2006-11-27

Applicant: Michael Miller ,  Brett P. Masters

Inventor： Michael Miller ,  Brett P. Masters

IPC: H01B13/00 ,  B32B1/08

CPC classification number: B81C1/00158 ,  B81B2201/0214 ,  G01N29/022 ,  G01N29/222 ,  G01N29/24 ,  G01N2291/014 ,  G01N2291/0427 ,  Y10T428/13

Abstract: The invention relates to micro-fabricated devices having a suspended membrane or plate structure and micro-fabrication techniques for making such devices. A substrate defines a cavity passing through the substrate, and the cavity defines a first opening. An intermediate portion is disposed over the substrate and defines a second opening. The second opening is larger in size than the first opening, and the dimensions of the second opening are controlled according to a parameter associated with performance of the device. A membrane is positioned adjacent the second opening.

Abstract translation: 本发明涉及具有悬浮膜或板结构的微制造装置和用于制造这种装置的微制造技术。 衬底限定穿过衬底的空腔，并且空腔限定第一开口。 中间部分设置在基板上并限定第二开口。 第二开口的尺寸比第一开口大，并且第二开口的尺寸根据与装置的性能相关联的参数来控制。 膜位于第二开口附近。

公开(公告)号：US20080116608A1

公开(公告)日：2008-05-22

申请号：US12001564

申请日：2007-12-12

Applicant: Enoch Kim ,  Younan Xia ,  Milan Mrksich ,  Rebecca Jackman ,  Xiao-Mei Zhao ,  Stephen Smith ,  Mara Prentiss ,  George Whitesides ,  Christian Marzolin

Inventor： Enoch Kim ,  Younan Xia ,  Milan Mrksich ,  Rebecca Jackman ,  Xiao-Mei Zhao ,  Stephen Smith ,  Mara Prentiss ,  George Whitesides ,  Christian Marzolin

IPC: B29C45/16

CPC classification number: B81C1/00206 ,  A61K47/6957 ,  B01J19/0046 ,  B01J2219/00382 ,  B01J2219/00416 ,  B01J2219/0043 ,  B01J2219/00466 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00619 ,  B01J2219/00626 ,  B01J2219/0063 ,  B01J2219/00637 ,  B01J2219/00648 ,  B01J2219/00659 ,  B01J2219/00713 ,  B29C31/04 ,  B29C33/42 ,  B29C37/0053 ,  B29C39/24 ,  B29C43/021 ,  B29C67/246 ,  B29D11/00346 ,  B29D11/00663 ,  B29K2105/0002 ,  B29L2011/0016 ,  B81B2201/0214 ,  B81C1/00031 ,  B81C99/0085 ,  B81C2201/034 ,  B82Y30/00 ,  C40B60/14 ,  G01N21/7703 ,  G01N2021/7776 ,  G02B6/138 ,  H05K3/0079 ,  H05K3/061

Abstract: Chemically or biochemically active agents or other species are patterned on a substrate surface by providing a micromold having a contoured surface and forming, on a substrate surface, a chemically or biochemically active agent or fluid precursor of a structure. A chemically or biochemically active agent or fluid precursor also can be transferred from indentations in an applicator to a substrate surface. The substrate surface can be planar or non-planar. Fluid precursors of polymeric structures, inorganic ceramics and salts, and the like can be used to form patterned polymeric articles, inorganic salts and ceramics, reactive ion etch masks, etc. at the surface. The articles can be formed in a pattern including a portion having a lateral dimension of less than about 1 millimeter or smaller. The indentation pattern of the applicator can be used to transfer separate, distinct chemically or biochemically active agents or fluid precursors to separate, isolated regions of a substrate surface. Waveguide arrays, combinatorial chemical or biochemical libraris, etc. can be made. Differences in refractive index of waveguide and cladding can be created by subjecting the waveguide and cladding, made of identical prepolymeric material, to different polymerization or cross-linking conditions. Interferometers are defined by coupling arrays of waveguides, where coupling can be controlled by altering the difference in refractive index between cladding and waveguide at any desired location of the array. Alteration and refractive index can be created photochemically, chemically, or the like. Sensors also are disclosed, including biochemical sensors.

Abstract translation: 化学或生物化学活性剂或其它物质通过提供具有轮廓表面的微胶体并在基底表面上形成结构的化学或生物化学活性剂或流体前体而在基底表面上图案化。 化学或生物化学活性剂或流体前体也可以从敷料器中的凹陷转移到基底表面。 衬底表面可以是平面的或非平面的。 聚合物结构，无机陶瓷和盐等的流体前体可用于在表面形成图案化聚合物制品，无机盐和陶瓷，反应离子蚀刻掩模等。 制品可以形成为包括横向尺寸小于约1毫米或更小的部分的图案。 涂抹器的压痕图案可以用于将单独的，不同的化学或生物化学活性剂或流体前体转移到基底表面的分离的，分离的区域。 可以制作波导阵列，组合化学或生化图谱等。 可以通过将由相同的预聚物材料制成的波导和包层进行不同的聚合或交联条件来产生波导和包层的折射率差异。 干涉仪通过耦合波导阵列来定义，其中可以通过改变阵列的任何所需位置处的包层和波导之间的折射率差来控制耦合。 改变和折射率可以通过光化学，化学等方式产生。 还公开了传感器，包括生化传感器。

公开(公告)号：US20080029169A1

公开(公告)日：2008-02-07

申请号：US11463241

申请日：2006-08-08

Applicant: Sebastian J. Maerkl ,  Todd A. Thorsen ,  Xiaoyan Bao ,  Stephen R. Quake ,  Vincent Studer

Inventor： Sebastian J. Maerkl ,  Todd A. Thorsen ,  Xiaoyan Bao ,  Stephen R. Quake ,  Vincent Studer

IPC: F16K11/20

CPC classification number: C12Q1/28 ,  B01L3/5025 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/0214 ,  B81B2201/054 ,  B81B2201/07 ,  B81C1/00119 ,  F15C5/00 ,  F16K11/20 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T137/0318 ,  Y10T137/0329 ,  Y10T137/2224 ,  Y10T137/85938 ,  Y10T137/87249

Abstract: High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

Abstract translation: 高密度微流控芯片包含具有数千个微机械阀门和数百个单独可寻址腔室的管道网络。 这些流体装置类似于使用大规模集成（LSI）制造的电子集成电路。 这些网络的一个组件是流体多路复用器，它是二进制阀模式的组合阵列，通过允许使用最少数量的输入的复杂流体操纵来指数地增加网络的处理能力。 这些集成的微流体网络可用于构建各种高度复杂的微流体装置，例如比较器阵列的微流体模拟装置和类似于电子随机存取存储器的微流体存储器存储装置。

公开(公告)号：US07195872B2

公开(公告)日：2007-03-27

申请号：US10291467

申请日：2002-11-08

Applicant: Anoop Agrawal ,  John P. Cronin ,  Juan C. Tonazzi ,  A. G. Goodyear ,  Robert S. LeCompte ,  Michael E. Hogan ,  David W. Galbraith

Inventor： Anoop Agrawal ,  John P. Cronin ,  Juan C. Tonazzi ,  A. G. Goodyear ,  Robert S. LeCompte ,  Michael E. Hogan ,  David W. Galbraith

IPC: C12Q1/68

CPC classification number: B81C1/00206 ,  B01J19/0046 ,  B01J2219/00317 ,  B01J2219/00378 ,  B01J2219/00387 ,  B01J2219/00504 ,  B01J2219/00527 ,  B01J2219/00574 ,  B01J2219/00576 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00621 ,  B01J2219/00628 ,  B01J2219/00635 ,  B01J2219/00637 ,  B01J2219/00644 ,  B01J2219/00659 ,  B01J2219/00677 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01J2219/00734 ,  B01J2219/00743 ,  B01L3/5085 ,  B01L3/5088 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2300/16 ,  B01L2300/166 ,  B81B1/006 ,  B81B2201/0214

Abstract: The present invention is directed to a substrate having a plurality of microfeatures that provide a high surface area and are open to provide ready access to fluids and components therein. Methods of making the high surface area substrates are described and include generating microfeatures and/or microstructures on the surface of the substrate.

Abstract translation: 本发明涉及一种具有多个微特征的基底，该微特征提供高的表面积并且是开放的以提供对其中的流体和组分的准备进入。 描述了制造高表面积基板的方法，包括在基板的表面上产生微特征和/或微结构。

公开(公告)号：US20050253206A1

公开(公告)日：2005-11-17

申请号：US10524560

申请日：2003-08-25

Applicant: Christophe Bureau ,  Christophe Kergueris ,  Francois Perruchot

Inventor： Christophe Bureau ,  Christophe Kergueris ,  Francois Perruchot

IPC: A61B5/00 ,  B81B3/00 ,  G01L9/00 ,  H01L27/14

CPC classification number: G01L9/0042 ,  A61B5/00 ,  B29C2043/5825 ,  B81B3/0094 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/06 ,  B81B2203/0127 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2924/181 ,  Y10S977/733 ,  H01L2924/00012 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An electromechanical microstructure including a first mechanical part formed in a first electrically conductive material, and which includes a zone deformable in an elastic manner having a thickness value and an exposed surface, and a first organic film having a thickness, present on all of the exposed surface of the deformable zone. The thickness of the first film is such that the elastic response of the deformable zone equipped with the first film does not change by more than 5% compared to the response of the bare deformable zone, or the thickness of the first film is less than ten times the thickness of the deformable zone.

Abstract translation: 一种机电微结构，包括形成在第一导电材料中的第一机械部件，并且包括具有厚度值和暴露表面的弹性变形区域和具有厚度的第一有机膜，存在于所有暴露的 可变形区域的表面。 第一膜的厚度使得配备有第一膜的可变形区域的弹性响应与裸露可变形区域的响应相比不变化多于5％，或者第一膜的厚度小于十 倍的可变形区域的厚度。

公开(公告)号：US06857449B1

公开(公告)日：2005-02-22

申请号：US10675567

申请日：2003-09-30

Applicant: Calvin Y. H. Chow

Inventor： Calvin Y. H. Chow

IPC: B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  C40B60/14 ,  F15C1/06

CPC classification number: B01L3/5027 ,  B01J19/0093 ,  B01J2219/00317 ,  B01J2219/00351 ,  B01J2219/00587 ,  B01J2219/00702 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0415 ,  B01L2400/0487 ,  B81B1/004 ,  B81B2201/0214 ,  B81B2201/058 ,  C40B60/14 ,  Y10T137/2224 ,  Y10T137/8242 ,  Y10T137/8326

Abstract: The present invention provides multi-layer microfluidic systems, by providing additional substrate layers, e.g., third, fourth, fifth and more substrate layers, mated with the typically described first and second layers. Microfabricated elements, e.g., grooves, wells and the like, are manufactured into the surfaces between the various substrate layers. These microfabricated elements define the various microfluidic aspects or structures of the overall device, e.g., channels, chambers and the like. In preferred aspects, a separate microscale channel network is provided between each of the substrate layers.

Abstract translation: 本发明通过提供与通常描述的第一和第二层配合的附加衬底层，例如第三，第四，第五和更多衬底层来提供多层微流体系统。 诸如凹槽，井等的微细元件被制造成各种基底层之间的表面。 这些微制造元件限定了整个装置的各种微流体方面或结构，例如通道，室等。 在优选的方面，在每个基底层之间提供单独的微细通道网络。

公开(公告)号：US20050005676A1

公开(公告)日：2005-01-13

申请号：US10651338

申请日：2003-08-28

Applicant: Ed Crawley ,  Mark Lundstrom ,  Brett Masters ,  Alok Srivastava ,  Martin Schmidt ,  Michael Miller

Inventor： Ed Crawley ,  Mark Lundstrom ,  Brett Masters ,  Alok Srivastava ,  Martin Schmidt ,  Michael Miller

IPC: G01N5/02 ,  B81B3/00 ,  B81C1/00 ,  G01L1/10 ,  G01N27/00 ,  G01N29/02

CPC classification number: G01N29/036 ,  B81B3/0089 ,  B81B2201/0214 ,  B82Y30/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01L1/10 ,  G01N2291/0257 ,  G01N2291/0427

Abstract: The disclosed sensor chip includes a substrate and a moving member coupled to the substrate and disposed for movement relative to the substrate. The moving member moves relative to the substrate in a first direction and in a second direction in response to movement of the substrate. The first direction is different than the second direction. The moving member includes a plurality of receptors. The receptors are configured for selectively binding to a first measurand.

Abstract translation: 所公开的传感器芯片包括衬底和耦合到衬底并被设置为相对于衬底移动的移动构件。 移动构件响应于衬底的移动而在第一方向和第二方向上相对于衬底移动。 第一方向与第二方向不同。 移动构件包括多个受体。 受体被配置为选择性地结合第一被测量。

公开(公告)号：US06794196B2

公开(公告)日：2004-09-21

申请号：US09739940

申请日：2000-12-19

Applicant: Stephen J. Fonash ,  Sanghoon Bae ,  Daniel J. Hayes ,  Joseph Cuiffi

Inventor： Stephen J. Fonash ,  Sanghoon Bae ,  Daniel J. Hayes ,  Joseph Cuiffi

IPC: G01N100

CPC classification number: C23C16/511 ,  B81B2201/0214 ,  B81C1/0038 ,  B81C2201/0176 ,  C23C16/24 ,  G01N21/17 ,  G01N27/44717 ,  Y10T436/119163 ,  Y10T436/25 ,  Y10T436/2575

Abstract: The present invention is directed to the use of deposited thin films for chemical or biological analysis. The invention further relates to the use of these thin films in separation adherence and detection of chemical of biological samples. Applications of these thin films include desorption-ionization mass spectroscopy, electrical contacts for organic thin films and molecules, optical coupling of light energy for analysis, biological materials manipulation, chromatographic separation, head space adsorbance media, media for atomic molecular adsorbance or attachment, and substrates for cell attachment.

Abstract translation: 本发明涉及使用沉积的薄膜进行化学或生物分析。 本发明还涉及这些薄膜在分离粘附和生物样品化学检测中的应用。 这些薄膜的应用包括解吸电离质谱，有机薄膜和分子的电接触，用于分析的光能的光耦合，生物材料操作，色谱分离，顶空吸附介质，用于原子分子吸附或附着的介质，以及 细胞附着物。