Automated Photography and Inspection Station
    61.
    发明公开

    公开(公告)号:US20240319107A1

    公开(公告)日:2024-09-26

    申请号:US18124636

    申请日:2023-03-22

    Abstract: An automated station includes a plurality of panels forming an enclosure, a camera positioned within the enclosure, a light fixture positioned within the enclosure, a turntable positioned within the enclosure, an inspection device, and a computer controller functionally coupled to the camera, the light fixture, the turntable, and the inspection device. The computer controller controls the operation of the camera, the light fixture, the turntable, and the inspection device based on information received by the computer controller about an object to be photographed and inspected by the station.
    A method includes receiving an object into an automated station and a computer controller functionally coupled to the automated station performing the steps of: receiving information about the object, automatically adjusting one or more configuration options of the automated station based on the received information, and receiving input about whether the automated station will photograph the object, inspect the object, or both.

    LIFTER ASSEMBLY WITH BELLOWS FOR OPTICAL INSPECTION SYSTEM

    公开(公告)号:US20240183790A1

    公开(公告)日:2024-06-06

    申请号:US18120765

    申请日:2023-03-13

    CPC classification number: G01N21/8806 G01N21/9501 G01N2201/025

    Abstract: A lifter assembly for an optical system includes a chuck having a chuck base and a detachable top plate, wherein the detachable top plate is one of a plurality of interchangeable detachable top plates configured to support a substrate. The lifter assembly also includes a moveable plate supporting the chuck on an upper surface of the moveable plate, the moveable plate vertically adjustable between a lower, retracted position and an upper, extended position. The lifter assembly further includes a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract, wherein expansion of the bellows structure vertically adjusts the moveable plate to the upper, extended position and contraction of the bellows structure vertically adjusts the moveable plate to the lower, retracted position.

    INSPECTION APPARATUS AND INSPECTION METHOD
    64.
    发明公开

    公开(公告)号:US20240011915A1

    公开(公告)日:2024-01-11

    申请号:US18323698

    申请日:2023-05-25

    Inventor: Hark Ryong KIM

    Abstract: The present invention relates to an inspection apparatus and an inspection method which selectively adjust a numerical aperture of illuminating light in the form of collimated light when inspecting a target object, such as a wafer or the like, using a spectrum, thereby preventing a diffraction phenomenon caused by the illuminating light. The inspection apparatus may include: a camera unit disposed above a target object; an illumination unit configured to illuminate the target object with illuminating light; and a light detection unit configured to detect reflection light of the target object illuminated with the illuminating light, wherein the illumination unit comprises a numerical aperture adjustment device which has a first optical member having a first numerical aperture that is replaceable with a second optical member having a second numerical aperture different from the first numerical aperture so as to reduce a diffraction phenomenon caused by the illuminating light.

    SPECTROSCOPE AND ANALYSIS SYSTEM
    65.
    发明公开

    公开(公告)号:US20230304922A1

    公开(公告)日:2023-09-28

    申请号:US18122759

    申请日:2023-03-17

    Abstract: A spectroscope includes: a light incidence section that allows light from an outside to be incident; a diffraction grating that disperses wavelengths of the light incident on the diffraction grating by the light incidence section; a light reflector having a reflecting surface having an inclination variable around a rotation axis of the reflecting surface; and a light emitter that emits the light reflected by the light reflector to the outside. At least one of the light incidence section, the diffraction grating, and the light reflector, and the light emitter are changeable in a direction orthogonal to the rotation axis. The position of the light emitter is changeable in a direction along a center axis of the light emitted from the light emitter.

    Laser scanning microscope system and method of setting laser-light intensity value

    公开(公告)号:US09739715B2

    公开(公告)日:2017-08-22

    申请号:US15059203

    申请日:2016-03-02

    Abstract: A method of setting a laser-light intensity value includes: emitting laser light, the laser light being excitation light, a fluorescent-dyed biological sample being irradiated with the excitation light and emitting light; detecting fluorescence emitted by the biological sample, and outputting a signal corresponding to a brightness value; prestoring relation information, the relation information including the plurality of laser-light intensity values, and information on at least one possible correlation between a phototoxicity degree and the brightness value in relation to each of the laser-light intensity values, the phototoxicity to the biological sample resulting from the laser light; generating a fluorescence image having the brightness value based on the output signal; calculating a brightness value representative of a ROI area based on the generated fluorescence image; and referring to the relation information, and determining a laser-light intensity value satisfying tolerance of the phototoxicity based on the calculated representative brightness value.

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