X-Ray Zoom Lens For Small Angle X-Ray Scatterometry

    公开(公告)号:US20180188192A1

    公开(公告)日:2018-07-05

    申请号:US15847375

    申请日:2017-12-19

    CPC classification number: G01N23/201 G01N2223/1016 G01N2223/6116

    Abstract: Methods and systems for controlling illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements of different sized metrology targets are described herein. An X-ray illumination optics subsystem includes one or more focusing optical elements with object and image planes at fixed locations and one or more illumination apertures or slits that independently control magnification and beam divergence. In a further aspect, the illumination source size and shape is controlled, along with magnification and beam divergence. In this manner, beam divergence and illumination spot size on a specimen are independently controlled, while maintaining constant illumination flux.

    X-ray analyzing system for x-ray scattering analysis

    公开(公告)号:US09958404B2

    公开(公告)日:2018-05-01

    申请号:US14198611

    申请日:2014-03-06

    Abstract: An X-ray analyzing system for x-ray scattering analysis having an x-ray source for generating a beam of x-rays propagating along a transmission axis (3), at least one hybrid slit (5b) with an aperture which defines the shape of the cross section of the beam, a sample on which the beam shaped by the hybrid slit (5b) is directed and an X-ray detector for detecting x-rays originating from the sample. The hybrid slit (5b) has at least three hybrid slit elements (7), each hybrid slit element (7) having a single crystal substrate (8) bonded to a base (9) with a taper angle α≠0. The single crystal substrates (8) of the hybrid slit elements (7) limit the aperture and the hybrid slit elements (7) are staggered with an offset along the transmission axis (3). The X-ray analyzing system has improved resolution and signal to noise ratio.

    Closed-loop control of X-ray knife edge
    64.
    发明申请

    公开(公告)号:US20180088062A1

    公开(公告)日:2018-03-29

    申请号:US15717961

    申请日:2017-09-28

    Abstract: Apparatus for X-ray scatterometry includes an X-ray source, which directs an X-ray beam to be incident at a grazing angle on an area of a surface of a sample, and an X-ray detector measures X-rays scattered from the area. A knife edge is arranged parallel to the surface of the sample in a location adjacent to the area so as to define a gap between the surface and the knife edge and to block a portion of the X-ray beam that does not pass through the gap. A motor moves the knife edge perpendicular to the surface so as to control a size of the gap. An optical rangefinder receives optical radiation reflected from the surface and outputs a signal indicative of a distance of the knife edge from the surface. Control circuitry drives the motor responsively to the signal in order to regulate the size of the gap.

    X-RAY DIFFRACTOMETER
    65.
    发明申请

    公开(公告)号:US20170363550A1

    公开(公告)日:2017-12-21

    申请号:US15622900

    申请日:2017-06-14

    Abstract: An X-ray diffractometer for obtaining X-ray diffraction angles of diffracted X-rays by detecting with an X-ray detector diffracted X-rays diffracted at a sample when X-rays are emitted at the sample at each angle of the angles about a center point of goniometer circles, the X-ray diffractometer having a pinhole member provided with a pinhole, the pinhole allowing X-rays diffracted from the sample to pass so that the diffracted X-rays pass through the center point of the goniometer circle, and other diffracted X-rays are shielded by the pinhole member.

    Nanoconfinement platform for nanostructure quantification via grazing-transmission X-ray scattering
    66.
    发明授权
    Nanoconfinement platform for nanostructure quantification via grazing-transmission X-ray scattering 有权
    通过放牧透射X射线散射的纳米结构定量纳米结构平台

    公开(公告)号:US09557283B2

    公开(公告)日:2017-01-31

    申请号:US14713081

    申请日:2015-05-15

    CPC classification number: G01N23/20025 G01N23/201 G01N2223/054 G01N2223/309

    Abstract: A nano-confinement platform that may allow improved quantification of the structural order of nanometer-scale systems. Sample-holder ‘chips’ are designed for the GTSAXS experimental geometry. The platform involves fabricated nanostructured sample holders on and in one or more corners of a substrate support where the sample material of interest is positioned at the corner of the substrate support. In an embodiment, the substrate material making up the substrate support beneath the sample-holding area is removed. A scattering x-ray sample platform includes a substrate support arranged in a parallelepiped form, having a substantially flat base and a substantially flat top surface, the top surface being substantially parallel with the base, the parallelepiped having a plurality of corners. At least one corner of the substrate support has a sample holding area formed in the top surface of the substrate support and within a predetermined distance from the corner. The sample holding area includes a regular array of nano-wells formed in the top surface of the substrate support.

    Abstract translation: 纳米限制平台可以改进纳米尺度系统的结构顺序的量化。 样品架“芯片”是为GTSAXS实验几何设计的。 该平台涉及在衬底支撑件的一个或多个角部上和之上的制造的纳米结构样品架,其中感兴趣的样品材料位于衬底支架的拐角处。 在一个实施例中,去除在样品保持区域下方构成基底支撑物的基底材料。 散射X射线样品平台包括布置成平行六面体形式的基底支撑件,具有基本上平坦的基部和基本平坦的顶表面,该顶表面基本上平行于基部,该平行六面体具有多个拐角。 衬底支撑件的至少一个角部具有形成在衬底支撑件的顶表面中并且距离拐角预定距离内的样品保持区域。 样品保持区域包括在衬底支撑体的顶表面中形成的纳米孔的规则阵列。

    X-RAY TECHNIQUES USING STRUCTURED ILLUMINATION
    67.
    发明申请
    X-RAY TECHNIQUES USING STRUCTURED ILLUMINATION 审中-公开
    使用结构照明的X射线技术

    公开(公告)号:US20160320320A1

    公开(公告)日:2016-11-03

    申请号:US15173711

    申请日:2016-06-05

    Applicant: Sigray, Inc.

    Abstract: This invention discloses a method and apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shape, size, and pattern may be illuminated with an x-ray beam whose cross sectional beam profile corresponds to the shape, size and pattern of the ROIs, so that the x-rays of the beam primarily interact only with the ROIs. This allows a greater x-ray flux to be used, enhancing the signal from the ROI itself, while reducing unwanted signals from regions not in the ROI, improving signal-to-noise ratios and/or measurement throughputThis may be used with a number of x-ray measurement techniques, including x-ray fluorescence (XRF), x-ray diffraction (XRD), small angle x-ray scattering (SAXS), x-ray absorption fine-structure spectroscopy (XAFS), x-ray near edge absorption spectroscopy, and x-ray emission spectroscopy.

    Abstract translation: 这可以与许多x射线测量技术一起使用,包括x射线荧光(XRF),x射线衍射(XRD),小角度X射线散射(SAXS),x射线吸收精细结构光谱学 XAFS),x射线近边缘吸收光谱和X射线发射光谱。

    Compact X-Ray Source for CD-SAXS
    70.
    发明申请
    Compact X-Ray Source for CD-SAXS 审中-公开
    CD-SAXS的紧凑型X射线源

    公开(公告)号:US20150285749A1

    公开(公告)日:2015-10-08

    申请号:US14678567

    申请日:2015-04-03

    CPC classification number: G01N23/201 H05G2/00

    Abstract: The structure of materials can be characterized (e.g., via CD-SAXS) by generating a burst of electron bunches in a pulse train and accelerating the electron bunches to relativistic energies. Meanwhile, an optical cavity is filled with a laser pulse; and the electron bunches collide with the laser pulse in the optical cavity, permitting a single laser pulse to interact with the electron bunch train to generate x-rays via inverse Compton scattering. The generated x-rays are then directed to a sample, and the sample is imaged by measuring the scattering of the x-rays from the sample.

    Abstract translation: 材料的结构可以通过在脉冲串中产生电子束的脉冲串并将电子束加速到相对论能量来表征(例如通过CD-SAXS)。 同时,用激光脉冲填充光腔; 并且电子束与光学腔中的激光脉冲碰撞,允许单个激光脉冲与电子束串相互作用以通过反康普顿散射产生X射线。 然后将生成的X射线引导到样品,并且通过测量来自样品的X射线的散射来对样品成像。

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