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公开(公告)号:US20240339283A1
公开(公告)日:2024-10-10
申请号:US18748076
申请日:2024-06-19
Applicant: VEC Imaging GmbH & Co. KG , Varex Imaging Corporation
Inventor: Houman Jafari , Bo Gao , Vance Scott Robinson
CPC classification number: H01J35/153 , H01J35/112 , H01J35/12 , H01J35/064 , H01J2235/068 , H01J2235/086 , H05G1/02
Abstract: Some embodiments include a system, comprising: at least one x-ray source, each x-ray source including: an electron source configured to generate an electron beam; and a target configured to receive the electron beam and convert the electron beam into an x-ray beam; and a collimator. A first edge of the collimator closest to the electron source is closer to the electron source than a central axis of the x-ray beam before entering the collimator; and a second edge of the collimator opposite to the first edge is at the central axis of the x-ray beam before entering the collimator or closer to the electron source than the central axis of the x-ray beam before entering the collimator.
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公开(公告)号:US12027341B2
公开(公告)日:2024-07-02
申请号:US18074705
申请日:2022-12-05
Applicant: EMPYREAN MEDICAL SYSTEMS, INC.
Inventor: Kalman Fishman , Brian P. Wilfley , Christopher W. Ellenor , Donald Olgado , Chwen-Yuan Ku , Tobias Funk , Petre Vatahov , Christopher R. Mitchell
CPC classification number: H01J35/153 , H01J35/16 , H01J35/30 , H01J35/32 , H01J2235/086 , H01J2235/166
Abstract: X-ray target element is comprised of a planar wafer. The planar wafer element includes a target layer and a substrate layer. The target layer is comprised of an element having a relatively high atomic number and the substrate layer is comprised of diamond. The substrate layer is configured to support the target layer and facilitate transfer of thermal energy away from the target layer.
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公开(公告)号:US20230178324A1
公开(公告)日:2023-06-08
申请号:US18074705
申请日:2022-12-05
Applicant: EMPYREAN MEDICAL SYSTEMS, INC.
Inventor: Kalman Fishman , Brian P. Wilfley , Christopher W. Ellenor , Donald Olgado , Chwen-Yuan Ku , Tobias Funk , Petre Vatahov , Christopher R. Mitchell
CPC classification number: H01J35/153 , H01J35/16 , H01J35/32 , H01J35/30 , H01J2235/086 , H01J2235/166
Abstract: X-ray target element is comprised of a planar wafer. The planar wafer element includes a target layer and a substrate layer. The target layer is comprised of an element having a relatively high atomic number and the substrate layer is comprised of diamond. The substrate layer is configured to support the target layer and facilitate transfer of thermal energy away from the target layer.
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公开(公告)号:US10008357B2
公开(公告)日:2018-06-26
申请号:US15717384
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger Hadland
IPC: H01J35/10 , H01J35/02 , H01J35/16 , F16J15/16 , H01J29/48 , F16C35/04 , F16C33/76 , H02M1/32 , H05G1/12 , H02M7/10 , H01J35/04
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/116 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
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公开(公告)号:US09967961B2
公开(公告)日:2018-05-08
申请号:US14383268
申请日:2013-03-19
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor: Heidrun Steinhauser , Michiel Wouter De Wildt
CPC classification number: H05G1/30 , A61B6/022 , A61B6/4028 , G01N23/046 , H01J35/14 , H01J35/30 , H01J2235/086
Abstract: A system for providing a simulated spatial live viewing of an object includes a cathode arrangement configured to generate an electron beam towards a target area of an anode, and a processor configured to control the electron beam to hit the anode at a moving focal spot that moves at least in a first moving direction transverse to a viewing direction. Thus, X-ray radiation is generated by the electron beam impinging on the moving focal spot. Further, the system includes a detector configured to detect X-ray radiation at least partially passing an object and to generate respective X-ray detection signals. The processor is further configured to generate monoscopic 2D images based on the detection signals, where the monoscopic 2D images relate to different view-points as defined by the moving focal spot. A display is configured to display the monoscopic 2D images are from the different view-points.
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公开(公告)号:US20180068821A1
公开(公告)日:2018-03-08
申请号:US15256692
申请日:2016-09-05
Applicant: Mark F. Eaton
Inventor: Mark F. Eaton
CPC classification number: H01J35/08 , G03F7/7005 , G21K1/067 , G21K2201/067 , H01J29/085 , H01J35/06 , H01J35/112 , H01J2235/062 , H01J2235/068 , H01J2235/086
Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.
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公开(公告)号:US20180033580A1
公开(公告)日:2018-02-01
申请号:US15717388
申请日:2017-09-27
Applicant: NIKON METROLOGY NV
Inventor: Roger HADLAND
IPC: H01J35/02 , H01J29/48 , F16C35/04 , F16C33/76 , F16J15/16 , H05G1/12 , H02M7/10 , H01J35/10 , H01J35/04 , H01J35/16 , H02M1/32
CPC classification number: H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
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公开(公告)号:US09870892B2
公开(公告)日:2018-01-16
申请号:US14360425
申请日:2012-10-24
Applicant: KONINKLIJKE PHILIPS N.V.
Inventor: Rolf Karl Otto Behling
CPC classification number: H01J35/10 , H01J2235/086
Abstract: In order to provide an increased, i.e. faster, periodic modulation of X-ray intensity, an anode disk (28) for a rotating anode in an X-ray tube includes a circumferential target area (34) with a target surface area (36), a focal track center line (38), and a beam-dump surface area (40). The target surface area when hit by an electron beam generates X-rays. The beam-dump surface area when hit by an electron beam generates no useful X-rays Target portions and beam-dump portions are arranged alternatingly along the focal track center line. A focal spot is centered on the focal track center line. Structures on both sides of the focal track center line are arranged such that same radiation intensities are provided by the both sides when being hit by a homogenous electron beam.
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公开(公告)号:US20170336334A1
公开(公告)日:2017-11-23
申请号:US15663831
申请日:2017-07-31
Applicant: Sigray, Inc.
Inventor: Wenbing Yun , Srivatsan Seshadri , Janos Kirz , Sylvia Jia Yun Lewis
IPC: G01N23/207 , G01N23/087
CPC classification number: G01N23/2076 , G01N23/087 , G01N23/223 , G01N2223/04 , G01N2223/045 , G01N2223/0568 , G21K1/06 , G21K1/067 , G21K2201/064 , H01J35/08 , H01J35/14 , H01J35/18 , H01J2235/081 , H01J2235/086
Abstract: An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.
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公开(公告)号:US09748070B1
公开(公告)日:2017-08-29
申请号:US14849647
申请日:2015-09-10
Applicant: Jordan Valley Semiconductors Ltd.
Inventor: John Leonard Wall
CPC classification number: H01J35/106 , H01J35/08 , H01J35/14 , H01J35/18 , H01J2235/086 , H01J2235/088 , H01J2235/1204 , H01J2235/1262 , H01J2235/186
Abstract: An X-ray tube includes a cathode and an anode. The cathode is configured to generate an electron beam. The anode has at least one hole that faces the electron beam, the hole having sidewalls and a floor. The electron beam impinges on one or more of the sidewalls of the at least one hole so as to emit a first X-ray beam at angles that are not orthogonal to a surface of the anode. The electron beam also impinges on the floor of the at least one hole so as to emit a second X-ray beam, at least some of which is emitted at an angle that is orthogonal to the surface of the anode.
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