公开(公告)号：US20210389187A1

公开(公告)日：2021-12-16

申请号：US17122668

申请日：2020-12-15

Applicant: TOSHIBA TEC KABUSHIKI KAISHA

Inventor： Makoto ODANI

IPC: G01J5/04 ,  G02B5/00 ,  G02B3/00 ,  G01J5/00 ,  G01J5/34 ,  G01J5/08 ,  H04N1/00

Abstract: A sensor apparatus includes a photosensitive sensor, a cover, and a moving mechanism. The photosensitive sensor includes a first lens and a second lens which focus on a photosensitive element. The cover includes a first slit arranged on an optical axis of the first lens and a second slit arranged on an optical axis of the second lens. The moving mechanism is configured to move the photosensitive sensor and the cover relative to each other so that the second slit is arranged on the optical axis of the first lens.

公开(公告)号：US11199455B2

公开(公告)日：2021-12-14

申请号：US16642939

申请日：2018-08-31

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Aapo Varpula ,  Bin Guo

IPC: G01J5/20 ,  G01J5/02 ,  G01J5/04 ,  G01J5/08 ,  H01L25/18 ,  H01L27/144 ,  H01L27/16 ,  H01L31/02 ,  H01L31/0232 ,  H01L37/02

Abstract: A wafer-level integrated thermal detector comprises a first wafer and a second wafer (W1, W2) bonded together. The first wafer (W1) includes a dielectric or semiconducting substrate (100), a dielectric sacrificial layer (102) deposited on the substrate, a support layer (104) deposited on the sacrificial layer or the substrate, a suspended active element (108) provided within an opening (106) in the support layer, a first vacuum-sealed cavity (110) and a second vacuum-sealed cavity (106) on opposite sides of the suspended active element. The first vacuum-sealed cavity (110) extends into the sacrificial layer (102) at the location of the suspended active element (108). The second vacuum-sealed cavity (106) comprises the opening of the support layer (104) closed by the bonded second wafer. The thermal detector further comprises front optics (120) for entrance of radiation from outside into one of the first and second vacuum-sealed cavities, aback reflector (112) arranged to reflect radiation back into the other one of the first and second vacuum-sealed cavities, and electrical connections (114) for connecting the suspended active element to a readout circuit (118).

公开(公告)号：US11189508B2

公开(公告)日：2021-11-30

申请号：US16581029

申请日：2019-09-24

Applicant: Applied Materials, Inc.

Inventor： Ji-Dih Hu ,  Brian H. Burrows ,  Janardhan Devrajan ,  Schubert Chu

IPC: H01L21/67 ,  C23C16/44 ,  C30B25/08 ,  G01J5/00 ,  H05B3/00 ,  G01K11/12 ,  G01J5/02 ,  G01J5/08

Abstract: Embodiments described herein generally relate to an in-situ metrology system that can constantly provide an uninterrupted optical access to a substrate disposed within a process chamber. In one embodiment, a metrology system for a substrate processing chamber is provided. The metrology system includes a sensor view pipe coupling to a quartz dome of a substrate processing chamber, a flange extending radially from an outer surface of the sensor view pipe, and a viewport window disposed on the flange, the viewport window having spectral ranges chosen for an optical sensor that is disposed on or adjacent to the viewport window.

公开(公告)号：US20210356326A1

公开(公告)日：2021-11-18

申请号：US17184624

申请日：2021-02-25

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： YUAN-YAO LIN ,  CHAO-KUEI LEE ,  YI-JEN CHIU ,  CHUNG-CHUN HUANG ,  QIAN-MAO ZHOU ,  YA-HSUAN CHENG ,  MING-WEI LIU ,  KUO-KUANG JEN ,  CHIH-PENG CHEN

IPC: G01J5/08 ,  G01J5/10

Abstract: An insert coaxial thermal radiation image evaluating system includes a cage support, first lens, first cage movable frame, second cage movable frame, cage holder and light detector. The first cage movable frame is movably disposed at the cage support and connected to the first lens. The second cage movable frame is movably disposed at the cage support and connected to the light detector. The cage holder is connected to the cage support to fix the cage support to an optical substrate. The first cage movable frame is movably disposed in the cage holder. The first lens and a second lens of a metal additive manufacturing system together form a structure of conjugate foci, such that a thermal radiation generated from a high-power infrared laser irradiation zone forms according to a fixed ratio an image captured by the light detector.

公开(公告)号：US20210341341A1

公开(公告)日：2021-11-04

申请号：US17334871

申请日：2021-05-31

Applicant: TECNIMED S.r.l.

Inventor： Francesco BELLIFEMINE

IPC: G01K13/20 ,  G01J5/00 ,  G01J5/02 ,  G01K1/08 ,  G01J5/04 ,  G06K9/00 ,  G01J5/08

Abstract: The present invention relates to an infrared thermometer (1) able to project the detected temperature directly on the surface (6a) of the body (2) to be measured. The determination of the ideal distance of the thermometer from the body, necessary for the correct detection of the temperature thereof, being visually identifiable by means of the relative position of luminous shapes (8a, 8b) projected on the body to be measured (6).

公开(公告)号：US20210341337A1

公开(公告)日：2021-11-04

申请号：US17286059

申请日：2018-10-29

Applicant: Lyseonics BV

Inventor： Philippe Arthur Jean Ghislain CHEVALIER

IPC: G01J5/00 ,  G01J5/02 ,  G01J5/08

Abstract: The invention relates to a device and method for imaging electromagnetic radiation from an object. The device includes entrance optics for allowing the electromagnetic radiation to enter the device, including an image plane onto which an image of the object is to be imaged. The device includes an interferometer having a measurement arm, wherein the image plane is in the measurement arm. The device includes a transformation layer, at the image plane, for transforming the electromagnetic radiation into a spatiotemporal variation of the refractive index of the transformation layer for causing spatiotemporal optical phase differences in the measurement arm of the interferometer that are processed to result in a representative image of the object.

公开(公告)号：US11150137B2

公开(公告)日：2021-10-19

申请号：US16704862

申请日：2019-12-05

Applicant: Honeywell International Inc.

Inventor： Matthew Wade Puckett ,  Jianfeng Wu ,  Steven Tin ,  Neil A. Krueger

IPC: G01J5/08 ,  G02B6/42 ,  G01J3/12 ,  G01J5/00

Abstract: An integrated photonics chip for thermal imaging comprises a photonics substrate including a plurality of receiver elements. Each receiver element comprises a first grating coupler optically coupled to a first waveguide filter and configured to receive a first wavelength of light at a given angle, with the first waveguide filter configured to pass the first wavelength of light; and a second grating coupler optically coupled to a second waveguide filter and configured to receive a second wavelength of light at the given angle, with second waveguide filter configured to pass the second wavelength of light. Each receiver element receives the wavelengths of light from an object of interest that emits the light due to blackbody radiation, and receives the wavelengths of light at respectively different angles. Each grating coupler receives a unique wavelength of light with respect to the other wavelengths of light received by the other grating couplers.

公开(公告)号：US20210304398A1

公开(公告)日：2021-09-30

申请号：US16836596

申请日：2020-03-31

Applicant: The Boeing Company

Inventor： Morteza Safai ,  Gary Ernest Georgeson

IPC: G06T7/00 ,  G06K9/46 ,  G06K9/20 ,  G01N25/72 ,  G01J5/08 ,  G02B5/30

Abstract: A method of thermographic inspection is disclosed, including applying a thermal pulse to a surface and capturing an image of a thermal response of the surface. The image is captured with an infrared camera through a polarizer having a first orientation. The method further includes determining, by analysis of the image, whether the thermal response is indicative of a crack on the surface.

公开(公告)号：US20210302308A1

公开(公告)日：2021-09-30

申请号：US17120339

申请日：2020-12-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Jeronimo Segovia Fernandez ,  Bichoy Bahr ,  Hassan Omar Ali ,  Benjamin Stassen Cook

IPC: G01N21/3504 ,  G01N21/61 ,  G01N21/27 ,  G01J5/08 ,  B81B3/00

Abstract: A differential nondispersive infrared (NDIR) sensor incorporates an infrared (IR) chopper and multiple multi-bit digital registers to store and compare parameter ratio values, as may be digitally calibrated to corresponding temperature values, from chopper clock cycle portions in which a plasmonic MEMS detector is irradiated by the IR chopper with such values from chopper clock cycle portions in which the IR detector is not irradiated by the IR chopper. The plasmonic MEMS detector is referenced to a reference MEMS device via a parameter-ratio engine. The reference device can include a broadband IR reflector or can have a lower-absorption metasurface pattern giving it a lower quality factor than the plasmonic detector. The resultant enhancements to accuracy and precision of the NDIR sensor enable it to be used as a sub-parts-per-million gas concentration sensor or gas detector having laboratory, commercial, in-home, and battlefield applications.

公开(公告)号：US20210293625A1

公开(公告)日：2021-09-23

申请号：US17227363

申请日：2021-04-11

Applicant: Harbin Engineering University

Inventor： Shan Gao ,  Tong Wang ,  Liwei Chen ,  Ying Cui ,  Chunhui Zhao ,  Chao Wang ,  Jing Jiang

IPC: G01J5/00 ,  G01K7/02 ,  G01J5/08 ,  G06N3/08

Abstract: A multi-spectral temperature measuring device based on adaptive emissivity model and temperature measuring method thereof are provided, which is configured to measure the temperature of the surface of an object under a high temperature background. The present invention relates to the technical field of radiation temperature measurement. The present invention provides a multi-spectral temperature measurement device based on an adaptive emissivity model, includes a pyrometer, a radiation detector, a constant temperature furnace, a cooling cavity, a cold air inlet pipe, a cold air outlet tube, and a thermocouple and thermocouple acquisition card. In order to more accurately measure the surface temperature of the object in a high-temperature environment, a BP network is provided to adaptively find the emissivity model, and through pre-training the network, the network has a high degree of recognition, and then classifies the spectral curve to accurately output the corresponding emissivity model.