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    Thermomechanical in-plane microactuator
    72.
    发明授权
    Thermomechanical in-plane microactuator 有权
    热力学平面微致动器

    公开(公告)号：US06734597B1

    公开(公告)日：2004-05-11

    申请号：US10312172

    申请日：2002-12-18

    Applicant: Larry L. Howell ,  Scott Lyon

    Inventor： Larry L. Howell ,  Scott Lyon

    IPC: H02N1000

    CPC classification number: H01H1/0036 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  H01H61/00 ,  H01H2061/006 ,  H02N10/00

    Abstract: A microactuator providing an output force and displacement in response to an increase in thermal energy is displosed. The microactuator may have a substantially straight expansion member with a first and a second end. The first end may be coupled to a base member, and the second end may be coupled to a shuttle. The expansion member is capable of elongating in a elongation direction. Elongation of the expansion member may urge the shuttle to translate in an output direction substantially different than the elongation direction. In certain embodiments, multiple expansion members are arrayed along one side of the shuttle to drive the shuttle against a surface. Alternatively, expansion members may be disposed on both sides of the shuttle to provide balanced output force. If desired, multiple microactuators may be linked together to multiply the output displacement and/or output force.

    Abstract translation: 提供响应于热能增加的输出力和位移的微致动器被消除。 微致动器可以具有基本上直的膨胀构件，其具有第一和第二端。 第一端可以联接到基座构件，并且第二端可以联接到梭子。 膨胀构件能够在伸长方向上伸长。 膨胀构件的伸长可以促使梭在基本上不同于伸长方向的输出方向上平移。 在某些实施例中，多个膨胀构件沿梭子的一侧排列以驱动穿梭件抵靠表面。 或者，扩展构件可以设置在梭子的两侧以提供平衡的输出力。 如果需要，多个微致动器可以连接在一起以乘以输出位移和/或输出力。

    Combination horizontal and vertical thermal actuator
    77.
    发明授权
    Combination horizontal and vertical thermal actuator 失效
    组合水平和垂直热致动器

    公开(公告)号：US06483419B1

    公开(公告)日：2002-11-19

    申请号：US09659282

    申请日：2000-09-12

    Applicant: Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

    Inventor： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

    IPC: H01H3752

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  H01H1/0036 ,  H01H61/01 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008

    Abstract: A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.

    Abstract translation: 微米尺寸的单级，水平和垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 水平和垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂位于热臂上方并相对于表面横向偏移。 冷臂适于在其第一端附近提供受控的弯曲。 机构和电气耦合热臂和冷臂的自由端，使得致动器在至少对热臂施加电流时呈现水平和垂直位移。

    Methods of fabricating in-plane MEMS thermal actuators
    78.
    发明授权
    Methods of fabricating in-plane MEMS thermal actuators 有权
    制造面内MEMS热致动器的方法

    公开(公告)号：US06410361B2

    公开(公告)日：2002-06-25

    申请号：US09777749

    申请日：2001-02-06

    Applicant: Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    Inventor： Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    IPC: H01L2100

    CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

    Abstract: A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator of the present invention may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate. In one embodiment the composite beam comprises two or layers having materials that have correspondingly different thermal coefficients of expansion. As such, the layers will respond differently when thermal energy is supplied to the composite. An electrically conductive path may extend throughout the composite beam to effectuate thermal actuation. In one embodiment of the invention a two layer composite beam comprises a first layer of a semiconductor material and a second layer of a metallic material. The semiconductor material may be selectively doped during fabrication so as to create a self-contained heating mechanism within the composite beam. The invention also comprises a MEMS thermal actuator that includes two or more composite beams. The two or more composite beams may be disposed in an array or a ganged fashion, such that the multiple composite beams benefit from overall force multiplication and are therefore capable of greater and more linear displacement distances. The invention is also embodied in a method for fabricating the MEMS thermal actuators of the present invention.

    Abstract translation: 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，本发明的MEMS热致动器可以提供一种独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。 在一个实施例中，复合梁包括具有相应不同热膨胀系数的材料的两层或多层。 因此，当将热能提供给复合材料时，这些层将响应不同。 导电路径可延伸穿过复合梁，以实现热致动。 在本发明的一个实施例中，双层复合梁包括第一层半导体材料和第二层金属材料。 可以在制造期间选择性地掺杂半导体材料，以便在复合束内产生独立的加热机构。 本发明还包括包括两个或更多个复合梁的MEMS热致动器。 两个或多个复合梁可以以阵列或组合的方式设置，使得多个复合梁受益于总的力倍增，因此能够具有更大和更大的线性位移距离。 本发明还体现在本发明的MEMS热致动器的制造方法中。

    Thermally activated microelectromechanical systems actuator
    79.
    发明授权
    Thermally activated microelectromechanical systems actuator 有权
    热活化微机电系统执行器

    公开(公告)号：US06275325B1

    公开(公告)日：2001-08-14

    申请号：US09545558

    申请日：2000-04-07

    Applicant: Michael J. Sinclair

    Inventor： Michael J. Sinclair

    IPC: G02B2600

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  G02B26/0816 ,  H01H2061/008

    Abstract: A microelectrical mechanical system (MEMS) actuator having coupled members that undergo different amounts of thermal expansion is disclosed for moving micromechanical objects, such as a mirror, toward and away from a surface or a planar substrate. The actuator members are a first elongate member and a second elongate member that are coupled together at their respective distal ends. At their respective proximal ends, the members are mounted onto discrete electrical paths formed on the substrate. Thus, current applied to one electrical pathway is conducted along the first member to the second member, and to the other electrical path. The first member includes a metal conductor that provides a reduced resistivity for electrical current. Thus, when current is applied to the actuator, the second member generates more thermal energy due to its increased resistance and thereby thermally expands a greater amount than the first member. By thermally expanding the second member more than the first member, the distal ends of the first and second members are constrained to move away from the substrate. This movement is used to move a mirror out of the plane of the planar substrate. To accommodate the changing distance and angles between the actuator and the mirror, a sliding hinge is located between the actuator and the mirror.

    Abstract translation: 公开了一种微电机械系统（MEMS）致动器，其具有经历不同量的热膨胀的耦合构件，用于将诸如反射镜的微机械物体朝向和远离表面或平面基板移动。 致动器构件是在其各自的远端处联接在一起的第一细长构件和第二细长构件。 在其各自的近端处，构件被安装到形成在基板上的分立的电路径上。 因此，施加到一个电气路径的电流沿着第一构件传导到第二构件和另一个电路径。 第一构件包括提供电流降低的电阻率的金属导体。 因此，当电流施加到致动器时，第二部件由于其增加的电阻而产生更多的热能，因此比第一部件热膨胀更大的量。 通过使第二构件比第一构件多的热膨胀，第一构件和第二构件的远端被限制为远离衬底移动。 该运动用于将镜子移出平面基板的平面。 为了适应致动器和反射镜之间变化的距离和角度，滑动铰链位于致动器和反射镜之间。

    Microbellows actuator
    80.
    发明授权
    Microbellows actuator 失效
    微型致动器

    公开(公告)号：US6069392A

    公开(公告)日：2000-05-30

    申请号：US57381

    申请日：1998-04-08

    Applicant: Yu-Chong Tai ,  Xing Yang

    Inventor： Yu-Chong Tai ,  Xing Yang

    IPC: B81B3/00 ,  B82B3/00 ,  H01L21/00 ,  H01L29/82

    CPC classification number: B81B3/007 ,  B81B2201/031

    Abstract: A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed.

    Abstract translation: 与具有相似尺寸的单层平膜相比，微加工的多层微波导式致动器能够提供更大的偏转。 公开了提高微量膜的强度的锚结构。 使用表征装置来测量微波膜的性能。 还公开了具有电阻加热器芯片的热气动致动器。

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