公开(公告)号：US08569677B2

公开(公告)日：2013-10-29

申请号：US12843773

申请日：2010-07-26

Applicant: Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

Inventor： Oliver Gessner ,  Oleg A. Kornilov ,  Russell B. Wilcox

IPC: H01J3/14 ,  H01J5/02

CPC classification number: G01J1/4257 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0414 ,  G01J1/0448 ,  G01J1/429 ,  G01J1/58 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0245 ,  G01J3/2803

Abstract: The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Abstract translation: 本发明提供了一种包括一种装置的装置，该装置包括：（a）能够将光子束衍射成衍射光子输出的透射光栅，以及（b）能够检测衍射光子输出的图像检测器。 该装置可用于测量诸如真空紫外（VUV）光束的光子束的空间分布和衍射图案。

公开(公告)号：US08558329B2

公开(公告)日：2013-10-15

申请号：US12945077

申请日：2010-11-12

Applicant: Zhong L. Wang ,  Youfan Hu ,  Yan Zhang

Inventor： Zhong L. Wang ,  Youfan Hu ,  Yan Zhang

IPC: H01L29/84

CPC classification number: B82Y40/00 ,  G01J1/429 ,  G01J1/44 ,  G01L1/16 ,  G01L1/24 ,  H01L31/108

Abstract: A device includes a substrate having a first surface. A piezoelectric nanowire is disposed on the first surface of the substrate. The piezoelectric nanowire has a first end and an opposite second end. The piezoelectric nanowire is subjected to an amount of strain. A first Schottky contact is in electrical communication with the first end of the piezoelectric nanowire. A second Schottky contact is in electrical communication with the second end of the piezoelectric nanowire. A bias voltage source is configured to impart a bias voltage between the first Schottky contact and the second Schottky contact. A mechanism is configured to measure current flowing through the piezoelectric nanowire. The amount of strain is selected so that a predetermined current will flow through the piezoelectric nanowire when light of a selected intensity is applied to a first location on the piezoelectric nanowire.

Abstract translation: 一种器件包括具有第一表面的衬底。 压电纳米线设置在基板的第一表面上。 压电纳米线具有第一端和相对的第二端。 压电纳米线经受一定量的应变。 第一肖特基接触器与压电纳米线的第一端电连通。 第二肖特基接触与压电纳米线的第二端电连通。 偏置电压源被配置为在第一肖特基接触和第二肖特基接触之间施加偏置电压。 一种机构被配置为测量流过压电纳米线的电流。 选择应变量，使得当所选强度的光被施加到压电纳米线上的第一位置时，预​​定电流将流过压电纳米线。

公开(公告)号：US08554466B2

公开(公告)日：2013-10-08

申请号：US12710651

申请日：2010-02-23

Applicant: Shu Hao Hsu

Inventor： Shu Hao Hsu

IPC: G06F19/00

CPC classification number: G01C21/26 ,  G01J1/02 ,  G01J1/0242 ,  G01J1/429 ,  G01J2001/4266

Abstract: An ultraviolet detection system comprises a global positioning device for receiving signals transmitted from global positioning satellites, and generating global positioning satellite distribution data and current position data; and a processor, coupled to the global positioning device, for generating ultraviolet intensity information according to the current position data and the global positioning satellite distribution data. The processor generates ultraviolet intensity information more accurately according to a current time data, which is transmitted from the global positioning satellite or is automatically generated from the global positioning device.

Abstract translation: 紫外检测系统包括用于接收从全球定位卫星发射的信号的全球定位装置，并产生全球定位卫星分布数据和当前位置数据; 以及耦合到全球定位装置的处理器，用于根据当前位置数据和全球定位卫星分布数据产生紫外线强度信息。 该处理器根据从全球定位卫星发送的当前时间数据或从全局定位装置自动生成，更准确地产生紫外线强度信息。

公开(公告)号：US20130256548A1

公开(公告)日：2013-10-03

申请号：US13799633

申请日：2013-03-13

Applicant: AZBIL CORPORATION

Inventor： Raita MORI

IPC: F21V7/04 ,  G01J1/42

CPC classification number: F21V7/043 ,  F21V7/041 ,  G01J1/0422 ,  G01J1/429 ,  G02B19/0023 ,  G02B19/0076 ,  G02B19/0095

Abstract: A reflecting member made from a tube-shaped member has an inner peripheral surface that structures a reflecting surface on an axis of the tube-shaped member. A slope, relative to the axis, of a tangent line of the inner peripheral surface in a cross-sectional plane containing the axis changes monotonically along the axis. In relation to a target facing a smaller opening of the tube-shaped member, at a specific distance therefrom, and having a flat region perpendicular to the axis and axially symmetrical relative to the axis, of an electromagnetic radiation incident along the axis from a larger opening of the tube-shaped member, that radiation reflected at a specific location on the larger opening side is incident on one end side of the flat region, and that radiation reflected at a specific location on the smaller opening side is incident on the other end side of the flat region.

Abstract translation: 由管状构件制成的反射构件具有在管状构件的轴线上构成反射面的内周面。 包含该轴的横截面中的内周面的切线相对于轴线的斜率沿轴线单调变化。 相对于面向管状构件的较小开口的目标，距离其特定距离，并具有垂直于轴线的平坦区域并且相对于轴线轴向对称的沿着轴线从较大的入射的电磁辐射 在较大开口侧的特定位置处反射的放射线入射到平坦区域的一端侧，并且在较小开口侧的特定位置反射的辐射入射到另一端 一边平坦的区域。

公开(公告)号：US08435597B2

公开(公告)日：2013-05-07

申请号：US12866554

申请日：2009-02-09

Applicant: Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

Inventor： Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

IPC: B05D5/00

CPC classification number: G01J1/429 ,  C30B29/04 ,  C30B31/06 ,  H01L31/08 ,  H01L31/109

Abstract: A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.

Abstract translation: 一种使用金刚石单晶作为光接收部分的UV /可见光盲比率改进的金刚石UV传感器元件的制造方法，并且基于照射到光接收部分的光引起的电阻的变化来检测光， 提供的方法，包括（1）在基本上含有氢的气氛中氢化金刚石单晶的表面的步骤，和（2）通过将金刚石单晶的氢化表面暴露于其中形成光接收部分的步骤 含有臭氧或活性氧的气氛。

公开(公告)号：US08410422B2

公开(公告)日：2013-04-02

申请号：US13436923

申请日：2012-03-31

Applicant: Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

Inventor： Denis Bolshukhin ,  Alexander Christian Keller ,  Max Christian Schuermann ,  Guido Schriever ,  Imtiaz Ahmad ,  Juergen Kleinschmidt

IPC: G12B13/00 ,  G01D18/00

CPC classification number: G03F7/70133 ,  G01J1/4257 ,  G01J1/429 ,  G03F7/70141 ,  G03F7/70166 ,  G03F7/7085 ,  H05G2/001

Abstract: The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.

Abstract translation: 本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。 为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布 光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是 由不同扇区的强度值的比较确定，用于对准收集器光学器件。

公开(公告)号：US08376781B2

公开(公告)日：2013-02-19

申请号：US13246914

申请日：2011-09-28

Applicant: Takashi Watanabe ,  Motonori Futamura ,  Raita Mori

Inventor： Takashi Watanabe ,  Motonori Futamura ,  Raita Mori

IPC: H01R13/66

CPC classification number: H01R13/6456 ,  F23N2900/05004 ,  F23N2900/05005 ,  G01J1/0403 ,  G01J1/429 ,  G01J5/0018

Abstract: A recessed portion is provided into which an ultraviolet detecting device is inserted, and a case is provided for holding removably in the state wherein the ultraviolet detecting device is inserted into the recessed portion. A conducting portion is provided that is connected on one end to the electrode portion of the ultraviolet detecting device and wherein the other end is led out from the case. The recessed portion is provided with first through fourth protrusions which insert into grooves that are formed in the ultraviolet detecting device.

Abstract translation: 设置有紫外线检测装置插入的凹部，并且在紫外线检测装置插入到凹部的状态下设置有用于可拆卸地保持的壳体。 提供导电部分，其一端连接到紫外线检测装置的电极部分，并且另一端从壳体引出。 凹部设置有插入形成在紫外线检测装置中的槽中的第一至第四突起。

公开(公告)号：US20130038209A1

公开(公告)日：2013-02-14

申请号：US13570233

申请日：2012-08-08

Applicant: Shunsuke AKASAKA ,  Tetsuo Fujii ,  Koki Sakamoto

Inventor： Shunsuke AKASAKA ,  Tetsuo Fujii ,  Koki Sakamoto

IPC: H01L31/0232 ,  H05B37/02

CPC classification number: G01J1/4204 ,  G01J1/0488 ,  G01J1/429 ,  H01L31/0203 ,  H01L31/0224 ,  H01L31/09

Abstract: To provide both a photodetecting element and a photodetecting device which can prevent generating of a plurality of current paths, and can detect with stability and high sensitivity regardless of a surface state instability of an optical absorption layer. The photodetecting element includes an optically transparent substrate, an optical absorption layer, an electrode, an electrode, an adhesive layer, an insulating film, and a package. The optical absorption layer is formed on the optically transparent substrate, and a part of each the electrodes is embedded in the optical absorption layer. The photodetecting unit is bonded junction down with the adhesive layer on the package. The optical absorption layer absorbs light of a specified wavelength selectively to be converted into an electric signal. The light to be measured is irradiated from a back side surface of the optically transparent substrate.

Abstract translation: 为了提供可以防止多个电流路径的产生的光检测元件和光电检测器件，并且不管光吸收层的表面状态不稳定，都能够以稳定性和高灵敏度进行检测。 光检测元件包括光学透明基板，光吸收层，电极，电极，粘合剂层，绝缘膜和封装。 光学吸收层形成在光学透明基板上，并且每个电极的一部分嵌入在光吸收层中。 光电检测单元与封装上的粘合剂层接合结合。 光吸收层选择性地吸收特定波长的光以转换成电信号。 从光学透明基板的背面侧照射被测光。

公开(公告)号：US20130026150A1

公开(公告)日：2013-01-31

申请号：US13645662

申请日：2012-10-05

Applicant: LINCOLN GLOBAL, INC.

Inventor： Bruce John Chantry ,  Mark David McDowell

IPC: B23K9/32

CPC classification number: G01K11/12 ,  A61F9/067 ,  B23K9/322 ,  C09D11/50 ,  F16P1/06 ,  G01J1/429 ,  G01J1/58

Abstract: A welding accessory and a system for detecting thermal and/or UV radiation exposure during welding operations are disclosed. The welding accessory may have a surface exposed to thermal and/or UV radiation generated by electric arc welding, a first image visible without exposure to the thermal and/or UV radiation, and a second image formed from either a UV activated dye that is visible only after exposure to UV radiation generated by the electric welding arc or a thermochromic dye that is visible only after exposure to a predetermined level of thermal radiation generated by the welding arc. A system may include either a thermal or UV exposure indicator with a first state and at least a second state, and include either a thermochromic or UV activated dye adapted to provide a reversible or persistent visual indication upon exposure to radiation. The visual indication may include any combination of symbols, logos, images, text, or other decorative or informational designs as desired.

Abstract translation: 公开了焊接附件和用于在焊接操作期间检测热和/或UV辐射暴露的系统。 焊接附件可能具有暴露于通过电弧焊接产生的热和/或UV辐射的表面，第一图像可见而不暴露于热和/或UV辐射，以及由可见的UV活化染料形成的第二图像 仅在暴露于由电焊弧产生的UV辐射或仅在暴露于由焊接电弧产生的预定水平的热辐射之后才可见的热变色染料。 系统可以包括具有第一状态和至少第二状态的热或UV曝光指示器，并且包括适于在暴露于辐射时提供可逆或持续视觉指示的热致变色或UV活化染料。 视觉指示可以包括符号，标志，图像，文本或其他装饰或信息设计的任何组合。

公开(公告)号：US20130020477A1

公开(公告)日：2013-01-24

申请号：US13552787

申请日：2012-07-19

Applicant: Julia Castellan ,  Philippe Boivin

Inventor： Julia Castellan ,  Philippe Boivin

IPC: G01J1/44 ,  G01D18/00

CPC classification number: G01J1/4228 ,  G01J1/429 ,  G01J1/44

Abstract: A method for measuring radiation of energy photons, such as ultraviolet radiation, on a surface, may include programming at least one transistor by at least transmitting an electric charge to it. The method may further include measuring an electrical quantity of the at least one transistor receiving radiation of energy photons and estimating, based on this electrical quantity, an amount of radiation received.

Abstract translation: 用于测量表面上的能量光子（例如紫外线辐射）的辐射的方法可以包括通过至少向其传输电荷来编程至少一个晶体管。 该方法还可以包括测量接收能量光子辐射的至少一个晶体管的电量，并且基于该电量估计接收到的辐射量。