Driverless ellipsometer and ellipsometry
    71.
    发明授权
    Driverless ellipsometer and ellipsometry 失效
    无人机椭偏仪和椭偏仪

    公开(公告)号:US07411677B2

    公开(公告)日:2008-08-12

    申请号:US10572285

    申请日:2004-01-23

    CPC classification number: G01N21/211 G01J4/04

    Abstract: A small and high-speed polarization analysis device and ellipsometer having no driving section are provided by overlapping one polarizer array rendered by arranging a plurality of polarizer regions of mutually different optical axis directions in the form of stripes and one wavelength plate array rendered by arranging a plurality of wavelength plate regions of fixed retardation and mutually different optical axis directions in the form of stripes so that the respective stripes of the plurality of polarizer regions and of the plurality of wavelength plate regions intersect one another and by disposing a light-receiving element array so that the intensities of light that has passed through the matrix-like intersection parts can be individually measured. As a method of analyzing a two-dimensional intensity distribution pattern that is observed by the light-receiving element array of the polarization analysis device, either one of (or both of) the algorithms of a method that determines incident polarized waves by mathematically fitting pattern shapes or performing database matching or a method that performs a Fourier transform on pattern shapes and determines incident polarized waves from the frequency components is (are) used. Furthermore, if necessary, more accurate polarization analysis is also possible by adopting a signal processing method that removes signals from light-receiving element regions that receive unnecessary scattered light and diffracted light.

    Abstract translation: 通过重叠一个偏振器阵列来提供不具有驱动部分的小型和高速偏振分析装置和椭偏仪,通过布置条纹形式的多个彼此不同的光轴方向的偏振器区域和通过布置一个 多个具有固定延迟的波长板区域和条纹形式的相互不同的光轴方向,使得多个偏振器区域和多个波长板区域中的各个条纹彼此相交,并且通过设置光接收元件阵列 能够分别测定通过矩阵状交叉部的光的强度。 作为分析由偏振分析装置的受光元件阵列观察到的二维强度分布图案的方法,可以通过数学拟合图案来确定入射极化波的方法的一种(或两者) 使用形状或执行数据库匹配或者对图案形状进行傅立叶变换并且从频率分量确定入射偏振波的方法。 此外,如果需要,通过采用从接收不必要的散射光和衍射光的受光元件区域去除信号的信号处理方法,也可以进行更精确的偏振分析。

    Beam profile ellipsometer with rotating compensator
    72.
    发明授权
    Beam profile ellipsometer with rotating compensator 有权
    带旋转补偿器的光束椭偏仪

    公开(公告)号:US07400403B2

    公开(公告)日:2008-07-15

    申请号:US11715584

    申请日:2007-03-08

    Applicant: Jon Opsal

    Inventor: Jon Opsal

    CPC classification number: G01J4/04 G01N21/211

    Abstract: An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.

    Abstract translation: 光学检查装置包括用于产生探测光束的光源。 探测光束被聚焦到样品上以产生入射角的扩展。 从样品反射后,将光成像到二维阵列的光电探测器上。 在到达检测器阵列之前,光束通过旋转补偿器。 处理器用于通过分析沿着一个或多个方位角并且处于不同补偿器位置的光电探测器的输出来评估样本。

    Optical switching method and optical switch
    73.
    发明申请
    Optical switching method and optical switch 有权
    光开关方式和光开关

    公开(公告)号:US20080151244A1

    公开(公告)日:2008-06-26

    申请号:US12002762

    申请日:2007-12-19

    Abstract: In a method and an optical switch by which a signal light is accurately switched even if a polarization state of a signal light inputted has a fluctuation, power of an output light of a polarizer which receives a signal light extracted from an output light of a nonlinear optical medium is monitored and a polarization state of an input signal light to the nonlinear optical medium is controlled so that the power becomes minimum (or maximum). The polarization state of the input signal light is monitored, a calculation of performing a predetermined conversion is executed to the polarization state of the input signal light, and a calculated polarization state is recorded (or recorded without conversion). A polarization state of a control light with respect to the input signal light is monitored and the polarization state of the control light is controlled so as to coincide with the polarization state of the input signal light recorded.

    Abstract translation: 在即使输入的信号光的偏振状态具有波动的情况下信号光被精确地切换的方法和光开关中,也可以接收从非线性的输出光中提取的信号光的偏振器的输出光的功率 监视光学介质,并且控制对非线性光学介质的输入信号光的偏振状态,使得功率变为最小(或最大)。 监视输入信号光的偏振状态,对输入信号光的偏振状态执行预定转换的计算,计算出的偏振状态被记录(或不进行转换记录)。 监视控制光相对于输入信号光的偏振状态,并控制控制光的偏振状态,以便与记录的输入信号光的偏振态一致。

    Low cost polametric detector
    74.
    发明授权
    Low cost polametric detector 有权
    低成本的量子检测器

    公开(公告)号:US07372568B1

    公开(公告)日:2008-05-13

    申请号:US11474122

    申请日:2006-06-22

    Applicant: X Steve Yao

    Inventor: X Steve Yao

    CPC classification number: G01J4/04 G01J1/0477

    Abstract: Polarimeters based on transversal division of the input beam and use of different polarization elements in different polarization states to change polarizations of different portions of the input beam so that the power levels of the different portions of the input beam can be measured to determine the polarization state of the input beam. A wedged substrate can be used to direct the different portions of the input beam at different directions and a lens can be used to focus these different portions at different locations at a plane.

    Abstract translation: 基于输入光束的横向划分的偏振器和使用不同极化状态的不同偏振元件来改变输入光束的不同部分的偏振,使得可以测量输入光束的不同部分的功率电平以确定偏振状态 的输入光束。 可以使用楔形衬底来引导不同方向的输入光束的不同部分,并且可以使用透镜将这些不同部分聚焦在平面上的不同位置处。

    High-speed polarizing device and high-speed birefringence measuring apparatus and stereoscopic image display apparatus utilizing the polarizing device
    75.
    发明申请
    High-speed polarizing device and high-speed birefringence measuring apparatus and stereoscopic image display apparatus utilizing the polarizing device 有权
    高速偏振装置和利用该偏振装置的高速双折射测量装置和立体图像显示装置

    公开(公告)号:US20080002201A1

    公开(公告)日:2008-01-03

    申请号:US11822294

    申请日:2007-07-03

    Applicant: Masato Morita

    Inventor: Masato Morita

    Abstract: A polarizing device including a plurality of polarized light radiating units for radiating polarized light rays each of which is polarized in a particular direction, a rotary reflector for receiving light rays emitted by the plurality of polarized light radiating units while being rotated and for outputting reflected light in a certain direction, and an analyzer disposed midway an optical path of the reflected light from the rotary reflector to set a polarization direction of the reflected light in a certain direction, wherein each of the polarized light radiating units includes a light source, a polarizer for setting a polarization direction of light from the light source, and a first compensator for compensating for a change in a state of polarization attributable to the rotary reflector, and the plurality of polarized light radiating units are disposed in a radial arrangement that is centered at the rotary reflector.

    Abstract translation: 一种偏振装置,包括:多个偏振光发射单元,用于照射各向异性偏振的偏振光;旋转反射镜,用于接收由多个偏振光发射单元发射的光,同时旋转并输出反射光 以及分析器,其设置在来自旋转反射器的反射光的光路的中间,以将反射光的偏振方向设定在一定方向,其中每个偏振光辐射单元包括光源,偏振器 用于设置来自光源的光的偏振方向,以及第一补偿器,用于补偿归因于旋转反射器的偏振状态的变化,并且多个偏振光辐射单元以径向布置设置,其以 旋转反射器。

    System and method for imaging sub-surface polarization-sensitive material structures
    76.
    发明授权
    System and method for imaging sub-surface polarization-sensitive material structures 失效
    用于成像亚表面极化敏感材料结构的系统和方法

    公开(公告)号:US07289211B1

    公开(公告)日:2007-10-30

    申请号:US11103726

    申请日:2005-04-11

    Abstract: A method of visually quantifying a test material along with an imaging apparatus for practicing the method is disclosed. The method comprises: (a) illuminating the test material at a known angle of incidence with diffuse light of a known and adjustable polarization state; (b) receiving light from the test material with a polarization state modified by the test material; (c) measuring an intensity of the polarization components of the received light for each illuminated pixel substantially simultaneously; (d) calculating the Stokes Vector in two dimensions for each illuminated pixel; and (e) creating an image map for the known polarization state. The method may also include adjusting the known polarization or the incident angle of the diffuse light to create additional image maps. The method and apparatus are intended for use in medical imaging including minimally invasive surgery.

    Abstract translation: 公开了一种视觉量化测试材料以及用于实施该方法的成像设备的方法。 该方法包括:(a)以已知和可调偏振状态的漫射光以已知的入射角照射测试材料; (b)以测试材料改性的极化状态接收来自测试材料的光; (c)基本上同时测量每个照明像素的接收光的偏振分量的强度; (d)为每个照明像素计算二维的斯托克斯矢量; 和(e)创建已知偏振状态的图像映射。 该方法还可以包括调整漫射光的已知偏振或入射角以产生附加的图像映射。 该方法和装置旨在用于包括微创手术在内的医学成像。

    Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus
    78.
    发明授权
    Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus 有权
    双折射测量装置,应变去除器,旋光仪和曝光装置

    公开(公告)号:US07251029B2

    公开(公告)日:2007-07-31

    申请号:US10610986

    申请日:2003-06-30

    Abstract: A birefringence measurement apparatus for calculating information of polarization of light emitted from an object to be measured includes a light source, a first polarization element for extracting a beam in a specific polarization direction from light emitted from the light source, a sample stage that holds an object to be measured, at least one beam splitting unit that splits the light emitted from the object into two beams having the same polarization as that of the light emitted from the object, at least two second polarization elements for extracting beams in a specific polarization direction of the light split by the beam splitting unit, at least two light-quantity detectors for detecting light quantity of beams that have transmitted through the second polarization element, and an operation part for operating a light quantity received by the light-quantity detectors.

    Abstract translation: 用于计算从待测物体发射的光的偏振信息的双折射测量装置包括光源,用于从光源发射的光中提取特定偏振方向的光束的第一偏振元件,保持 至少一个光束分离单元,其将从物体发射的光分解成具有与从物体发射的光的偏振相同的偏振光束的至少两个第二偏振元件,用于提取特定偏振方向的光束 通过分束单元分离的光,至少两个用于检测透射通过第二偏振元件的光束的光量的光量检测器和用于操作由光量检测器接收的光量的操作部分。

    INTERFEROMETRIC POLARIZATION CONTROL
    79.
    发明申请
    INTERFEROMETRIC POLARIZATION CONTROL 有权
    干涉极化控制

    公开(公告)号:US20070146723A1

    公开(公告)日:2007-06-28

    申请号:US11425352

    申请日:2006-06-20

    CPC classification number: G01J4/00 G01J4/04 G02B27/286

    Abstract: A signal conditioning module provides a polarimeter capability in a photometric system. The module may include multiple variable delay polarization modulators. Each modulator may include an input port, and a first arm formed to include a first reflector and first rooftop mirror arranged in opposed relationship. The first reflector may direct an input radiation signal to the first rooftop mirror. Each modulator also may include an output port and a second arm formed to include a second reflector and second rooftop mirror arranged in opposed relationship. The second reflector can guide a signal from the second rooftop mirror towards the output port to provide an output radiation signal. A beamsplitting grid may be placed between the first reflector and the first rooftop mirror, and also between the second reflector and the second rooftop mirror. A translation apparatus can provide adjustment relative to optical path length vis-a-vis the first arm, the second arm and the grid.

    Abstract translation: 信号调理模块在光度测量系统中提供偏振计功能。 该模块可以包括多个可变延迟偏振调制器。 每个调制器可以包括输入端口,第一臂被形成为包括以相对关系布置的第一反射器和第一屋顶反射镜。 第一反射器可以将输入辐射信号引导到第一屋顶反射镜。 每个调制器还可以包括输出端口和第二臂,其形成为包括以相对关系布置的第二反射器和第二屋顶反射镜。 第二反射器可以将来自第二屋顶反射镜的信号引导到输出端口以提供输出辐射信号。 分束栅格可以放置在第一反射器和第一屋顶反射镜之间以及第二反射器和第二屋顶反射镜之间。 翻译装置可相对于第一臂,第二臂和格栅提供相对于光路长度的调节。

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