公开(公告)号：US5729074A

公开(公告)日：1998-03-17

申请号：US407155

申请日：1995-03-20

Applicant: Hiromu Shiomi ,  Yoshiki Nishibayashi ,  Shin-ichi Shikata

Inventor： Hiromu Shiomi ,  Yoshiki Nishibayashi ,  Shin-ichi Shikata

IPC: B81B3/00 ,  B81C1/00 ,  G01C19/56 ,  G01H3/08 ,  G01H11/00 ,  G01H11/06 ,  G01L9/00 ,  G01P15/08 ,  G01P15/125 ,  G01Q70/14 ,  G01Q80/00

CPC classification number: G01P15/0802 ,  B81B3/007 ,  B81C1/0015 ,  B81C1/00682 ,  G01H11/00 ,  G01H11/06 ,  G01H3/08 ,  G01P15/125 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/034 ,  B81B2201/035 ,  B81B2201/054 ,  B81B2203/0118 ,  B81B2203/04 ,  B81C2201/0109 ,  G01P2015/0828

Abstract: A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.