公开(公告)号：US09216574B2

公开(公告)日：2015-12-22

申请号：US14126081

申请日：2012-06-15

Applicant: Stephen George Tunnicliffe-Wilson ,  Adam Woolfe ,  Stephen Douglas ,  Nicholas John Campbell

Inventor： Stephen George Tunnicliffe-Wilson ,  Adam Woolfe ,  Stephen Douglas ,  Nicholas John Campbell

IPC: B41J29/393 ,  B41J2/125 ,  B41J19/20 ,  B41J25/308

CPC classification number: B41J2/125 ,  B41J19/202 ,  B41J25/308

Abstract: In an ink jet printer (2), where there is relative movement between a print carriage (4) and a print table (6) to print on to a substrate mounted on the table (6), the gradient of the print table at each position of the print carriage (4) is used to produce a compensated position of the print carriage (4), and printing data is sent to the print head according to the compensated position instead of the actual position. This delays or advances the release of ink, to compensate for the difference in the time taken for the ink to reach a substrate mounted on the print table (6) when the print gap between print heads and print table (6) is not constant.

Abstract translation: 在喷墨打印机（2）中，在打印托架（4）和打印台（6）之间存在相对运动以打印到安装在工作台（6）上的基板上的情况下，每个打印台 打印托架（4）的位置用于产生打印托架（4）的补偿位置，并且根据补偿位置而不是实际位置将打印数据发送到打印头。 这延迟或推进墨的释放，以补偿当打印头和打印台（6）之间的打印间隙不恒定时墨水到达安装在打印台（6）上的基片所花费的时间差。

公开(公告)号：US06288406B1

公开(公告)日：2001-09-11

申请号：US09262639

申请日：1999-03-04

Applicant: Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

Inventor： Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

IPC: H01J37302

CPC classification number: H01J37/3023 ,  H01J2237/30488 ,  H01J2237/3175

Abstract: The approach taken to provide variable writing speeds consists of the following: (1) Software in the Job Control subsystem that Identifies the minimum and maximum valid writing speeds, given the resist sensitivity, maximum beam current density, and requested write address size. if the variable writing speed option is enabled, Job Control selects the maximum valid speed. (2) Software in the Pattern Data Conversion subsystem that determines the number of stripes of pattern figure data to combine into each output bitmap for the selected writing speed. (3) Hardware in the Timing Logic Board to clock bitmap data to the serializer at the desired frequency. (4) Logic in the Blanking device to synchronize its blanking frequency with the clock rate used by the Timing Logic

Abstract translation: 提供可变写入速度的方法包括以下内容：（1）作业控制子系统中的软件，鉴于光刻胶敏感度，最大光束电流密度和所请求的写入地址大小，标识最小和最大有效写入速度。 如果启用了变量写入速度选项，则作业控制选择最大有效速度。 （2）模式数据转换子系统中的软件，用于根据所选择的写入速度确定要组合到每个输出位图中的图形数据数据的条带数。 （3）定时逻辑板中的硬件，以期望的频率将位图数据记录到串行器。 （4）消隐设备中的逻辑，用于将其消隐频率与定时逻辑使用的时钟速率同步

公开(公告)号：US06278124B1

公开(公告)日：2001-08-21

申请号：US09261594

申请日：1999-03-03

Applicant: Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

Inventor： Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

IPC: A61N500

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J2237/3175

Abstract: An electron beam blanking method and system for selectively interrupting the flow of electrons during an electron beam lithographic process minimizes electron beam movement during blanking as the electron beam reaches a target lithographic mask. A first deflection plate pair deflects electrons flowing in the electron beam in the direction of the target lithographic mask. The first deflection plate pair includes a first tapered gap that is formed so that electrons which enter the first tapered gap before the initialization of a blanking voltage experience progressively greater electric field as they pass through the plates for controlling the cumulative deflection as the electrons travel through the first deflection plate pair. A second deflection plate pair further deflects electrons flowing in the electron beam in the direction of the target lithographic mask and includes a second tapered gap for further variably controlling the commutative deflection of the electron beam traveling through the second tapered gap. One or more hybrid integrated circuits provide deflection voltages to the first and second deflection plate pairs for varying the respective degree of electron beam deflection.

Abstract translation: 电子束消隐方法和系统，用于在电子束光刻过程中选择性地中断电子流动，当电子束到达目标光刻掩模时，消隐期间的电子束运动最小化。 第一偏转板对在电子束中沿着目标光刻掩模的方向偏转电子。 第一偏转板对包括第一渐缩间隙，其形成为使得在消隐电压的初始化之前进入第一锥形间隙的电子在它们通过板时经历逐渐增大的电场，以在电子穿过时控制累积偏转 第一偏转板对。 第二偏转片对进一步偏转在目标光刻掩模的方向上流过电子束的电子，并且包括用于进一步可变地控制穿过第二锥形间隙的电子束的可变偏转的第二锥形间隙。 一个或多个混合集成电路向第一和第二偏转板对提供偏转电压，以改变各自的电子束偏转程度。

公开(公告)号：US20140184682A1

公开(公告)日：2014-07-03

申请号：US14126081

申请日：2012-06-15

Applicant: Stephen George Tunnicliffe-Wilson ,  Adam Woolfe ,  Stephen Douglas ,  Nicholas John Campbell

Inventor： Stephen George Tunnicliffe-Wilson ,  Adam Woolfe ,  Stephen Douglas ,  Nicholas John Campbell

IPC: B41J2/125

CPC classification number: B41J2/125 ,  B41J19/202 ,  B41J25/308

Abstract: In an ink jet printer (2), where there is relative movement between a print carriage (4) and a print table (6) to print on to a substrate mounted on the table (6), the gradient of the print table at each position of the print carriage (4) is used to produce a compensated position of the print carriage (4), and printing data is sent to the print head according to the compensated position instead of the actual position. This delays or advances the release of ink, to compensate for the difference in the time taken for the ink to reach a substrate mounted on the print table (6) when the print gap between print heads and print table (6) is not constant.

Abstract translation: 在喷墨打印机（2）中，在打印托架（4）和打印台（6）之间存在相对运动以打印到安装在工作台（6）上的基板上的情况下，每个打印台 打印托架（4）的位置用于产生打印托架（4）的补偿位置，并且根据补偿位置而不是实际位置将打印数据发送到打印头。 这延迟或推进墨的释放，以补偿当打印头和打印台（6）之间的打印间隙不恒定时墨水到达安装在打印台（6）上的基片所花费的时间差。

公开(公告)号：US20100289852A1

公开(公告)日：2010-11-18

申请号：US12596940

申请日：2008-04-23

Applicant: Adam Woolfe ,  Stephan George Tunnicliffe-Wilson ,  William Ronald Stuart Baxter

Inventor： Adam Woolfe ,  Stephan George Tunnicliffe-Wilson ,  William Ronald Stuart Baxter

IPC: B41J3/28

CPC classification number: B41J11/002 ,  B41J2/515 ,  B41J3/28 ,  B41J11/001 ,  B41J25/001 ,  B41J2202/19 ,  B41J2202/20 ,  B41J2202/21 ,  B41M3/008 ,  B41M7/0072

Abstract: A multipass large format flat bed inkjet printer (1) for printing an image on a substrate is described. In examples described, the printer (1) has a print carriage (8) for supporting an array of printheads (18) adjacent the substrate (6) during printing; a bed (4) for supporting the substrate (6) during printing; and a movement mechanism (5) for providing relative movement of the print carriage (8) and the substrate (6) in a print direction during a print pass. The print carriage (8) is such that the width of the array of printheads (18) transverse to the print direction is at least substantially the full width of the image. In examples described, the printheads (18) provide an array of nozzles (22) which is substantially continuous across the array of printheads (18).

Abstract translation: 描述了用于在基板上打印图像的多通道大幅面平板喷墨打印机（1）。 在所描述的例子中，打印机（1）具有用于在打印期间支撑邻近基板（6）的打印头阵列（18）的打印托架（8） 用于在打印期间支撑基底（6）的床（4） 以及用于在打印通过期间在打印方向上提供打印托架（8）和基板（6）的相对移动的移动机构（5）。 打印托架（8）使得打印头阵列（18）横向于打印方向的宽度至少基本上是图像的整个宽度。 在所描述的示例中，打印头（18）提供喷嘴阵列（22），喷嘴阵列（22）基本上连续穿过打印头阵列（18）。

公开(公告)号：US06941006B1

公开(公告)日：2005-09-06

申请号：US09262778

申请日：1999-03-04

Applicant: Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

Inventor： Michael J. Penberth ,  Graham S. Plows ,  Adam Woolfe

IPC: G06K9/00 ,  H01J37/317

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3174

Abstract: A method for calibrating the scan amplitude of an electron beam lithography instrument by determining the position of a feature within the scan. The method is effective at the operating frequency of the scan and using a limited bandwidth video signal including the steps of determining the reference feature to be an edge over which the video signal rises abruptly from a background level to a white level. The method turns the beam on only over a short region of the scan and represents the degree of overlap between the beam on portion of the scan and the white part of the feature as the total video signal accumulated in that scan.

Abstract translation: 一种通过确定扫描内的特征的位置来校准电子束光刻仪的扫描振幅的方法。 该方法在扫描的工作频率下有效，并且使用有限带宽视频信号，包括以下步骤：将参考特征确定为视频信号从背景水平突然上升到白色水平的边缘。 该方法仅在扫描的短区域内使光束通过，并且表示扫描部分上的光束与特征的白色部分之间的重叠程度，作为该扫描中累积的总视频信号。